公开(公告)号：US4091680A

公开(公告)日：1978-05-30

申请号：US586892

申请日：1975-06-16

Applicant: Barry Block

Inventor： Barry Block

IPC: G01L1/04 ,  G01L1/14 ,  G01L1/18 ,  G01P15/12 ,  G01P15/08

CPC classification number: G01L1/142 ,  G01L1/044 ,  G01L1/18 ,  G01P15/123

Abstract: The force transducer includes a composite spring structure having first and second folded cantilever leaf spring portions coupled to the region to receive the force to be measured. The first and second leaf spring portions extend outwardly from, and are angularly displaced with respect to each other, around an axis of sensitivity. Each folded cantilever leaf spring portion includes first and second generally parallel elongated leg portions extending outwardly from the axis of sensitivity with each of said leg portions being coupled together at the outer end by a coupling structure which is free to move both parallel to and perpendicular to the axis of sensitivity in response to displacement of the inner end of one of said leg portions relative to the other along the axis of sensitivity in response to application of the force to be measured to the inner ends of the leg portions. The leg portions are dimensioned to have a higher compliance along the axis of sensitivity than the compliance thereof perpendicular to the axis of sensitivity. Differential capacitance or piezoresistance strain gauges are the preferred method for deriving an output which is proportional to the component of applied force tending to displace one of the leg portions relative to the other along the axis of sensitivity. Squeeze film damping is the preferred method of damping the composite spring structure.

Abstract translation: 力传感器包括复合弹簧结构，其具有联接到该区域的第一和第二折叠的悬臂板弹簧部分以接收待测量的力。 第一和第二板簧部分围绕感光轴线向外延伸并相对于彼此成角度地移位。 每个折叠的悬臂板弹簧部分包括第一和第二大致平行的细长腿部分，其从灵敏轴向外延伸，每个所述腿部部分在外端由联接结构联接在一起，所述联接结构平行于和垂直于 响应于将待测量的力施加到腿部的内端，响应于所述腿部中的一个的内端相对于另一个的灵敏度的轴的灵敏度轴沿灵敏度轴的位移。 腿部的尺寸被确定为具有比垂直于感光轴的顺从性更高的灵敏度的柔顺性。 差分电容或压阻应变计是用于导出输出的优选方法，该输出与施加的力的分量成正比，倾向于使一个腿部相对于另一个沿着灵敏度轴移位。 挤压膜阻尼是阻尼复合弹簧结构的首选方法。

公开(公告)号：USRE31459E

公开(公告)日：1983-12-06

申请号：US115610

申请日：1980-01-28

Applicant: Barry Block

Inventor： Barry Block

IPC: H01L29/84 ,  G01P15/08 ,  G01P15/12 ,  H01L41/02 ,  H04R23/00

CPC classification number: H04R23/006 ,  G01P15/0802 ,  G01P15/123 ,  H01L29/84 ,  Y10T29/49002 ,  Y10T29/49103

Abstract: Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the and crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure. In one embodiment, the gaps between adjacent leg portions of the spring structure are sealed in a fluid tight manner by means of oxide membranes left intact upon etching of the spring structure. In an accelerometer embodiment, sensing masses of equal weight are affixed to opposite sides of the spring structure for dynamically balancing same. .Iadd.

公开(公告)号：US4019056A

公开(公告)日：1977-04-19

申请号：US572013

申请日：1975-04-28

Applicant: Barry Block ,  Harry E. Aine

Inventor： Barry Block ,  Harry E. Aine

IPC: G01N21/17 ,  G01J3/42

CPC classification number: G01N21/1702

Abstract: An infrared laser absorption spectrometer is disclosed wherein a pair of detector cells are disposed serially along the laser beam path. The laser beam is modulated to produce a modulation of the absorption by the sample materials in the two cells. Modulated absorption by the samples produces an acoustic wave in each cell which is detected by a suitable microphone and subtracted so as to produce a difference signal corresponding to the difference in infrared absorption between the two cells so that undesired background effects common to both cells are cancelled. A pressure controller, which is responsive to the pressure difference between the sample pressure in the two cells at a frequency substantially below the beam modulation frequency is employed for controlling the pressure differential. In one embodiment the pressure controller includes a compliant membrane partitioning the two cells so that the membrane may move so as to equalize the pressures. In a second embodiment, deflection of the diaphragm of a differential microphone coupled into both cells is employed to derive an output utilized to control either the flow through the cells and/or the volume of the respective cells to control the pressure difference between the cells.

Abstract translation: 公开了一种红外激光吸收光谱仪，其中一对检测器单元沿着激光束路径串联布置。 调制激光束以产生两个单元中的样品材料的吸收的调制。 样本的调制吸收在每个单元中产生声波，由合适的麦克风检测并减去，以产生对应于两个单元之间的红外吸收差的差信号，从而消除两个单元共同的不期望的背景效应 。 采用压力控制器，该压力控制器以基本上低于束调制频率的频率响应两个单元中的样品压力之间的压力差来控制压力差。 在一个实施例中，压力控制器包括分隔两个电池的顺应膜，使得膜可以移动以便均衡压力。 在第二实施例中，使用耦合到两个单元中的差分麦克风的隔膜的偏转来导出用于控制通过单元的流量和/或各个单元的体积以控制单元之间的压力差的输出。

公开(公告)号：US20070118070A1

公开(公告)日：2007-05-24

申请号：US11668157

申请日：2007-01-29

Applicant: Michel Cormier ,  Armand Neukermans ,  Barry Block ,  Felix Theeuwes ,  Alfred Amkraut

Inventor： Michel Cormier ,  Armand Neukermans ,  Barry Block ,  Felix Theeuwes ,  Alfred Amkraut

IPC: A61N1/30 ,  A61M31/00 ,  A61B5/00 ,  B65D81/00

CPC classification number: A61M37/0015 ,  A61B5/14514 ,  A61B5/150022 ,  A61B5/150099 ,  A61B5/150282 ,  A61B5/150427 ,  A61B5/150969 ,  A61B5/150984 ,  A61B5/15105 ,  A61B5/15113 ,  A61B5/15142 ,  A61B10/0045 ,  A61B17/205 ,  A61M2037/0007 ,  A61M2037/0023 ,  A61M2037/0038 ,  A61M2037/0046 ,  A61M2037/0053 ,  A61N1/30 ,  A61N1/303

Abstract: A percutaneous agent delivery or sampling device comprising a sheet having a plurality of microblades for piercing and anchoring to the skin for increasing transdermal flux of an agent and for improving the attachment of the device to the skin.

Abstract translation: 一种经皮药剂递送或取样装置，其包括具有多个微刀片的片材，用于刺穿并锚定到皮肤上以增加药剂的经皮通量并改善装置与皮肤的连接。

公开(公告)号：US6033766A

公开(公告)日：2000-03-07

申请号：US228910

申请日：1999-01-11

Applicant: Barry Block ,  Arnold O. Thornton ,  Jan Ingwersen ,  Walter Daschner

Inventor： Barry Block ,  Arnold O. Thornton ,  Jan Ingwersen ,  Walter Daschner

IPC: B81B1/00 ,  B81C1/00 ,  G03F1/00 ,  G03F1/54 ,  G03F7/00 ,  G03F7/004 ,  B32B3/00 ,  B32B15/00 ,  G03F9/00

CPC classification number: G03F1/54 ,  G03F1/50 ,  G03F7/0007 ,  G03F7/001 ,  G03F7/0043 ,  Y10T428/24926

Abstract: A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 .ANG.. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist layer on an inorganic substrate. The selenium germanium photoresist layer may then transfer the gray scale to the substrate.

Abstract translation: 描述了一种制造高分辨率扩展模拟灰度掩模的方法。 使用涂覆有薄银层的无机硫族化物玻璃（例如硒锗）可以通过精确控制像素的尺寸，均匀性和方差来生产灰度掩模。 硒锗玻璃由垂直于衬底排列的柱结构组成，给出了100 ANGSTROM的边缘精度。 柱结构还防止在蚀刻工艺期间的底切，从而允许像素靠近放置在一起。 因此，硒锗可以用作具有扩展的模拟灰度级的高分辨率灰度级掩模。 灰度掩模可用于将无机基底上的硒锗光致抗蚀剂层上的信息作为调制厚度印记。 然后，硒锗光致抗蚀剂层可以将灰度级转移到衬底。

公开(公告)号：US4733559A

公开(公告)日：1988-03-29

申请号：US892111

申请日：1986-08-04

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: G01F1/684 ,  G01F1/696 ,  G01F7/00 ,  G01F1/68

CPC classification number: G01F1/696 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/6847 ,  G01F7/00

Abstract: Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart. In one thermal flow sensor configuration, a flow heater is dispsoed inbetween first and second thermal flow sensors in heat exchanging relation therewith. A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor. In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow.

Abstract translation: 通过在薄片材料上形成热流体流量传感器并将片材粘合在管道结构阵列上并将各个传感器和管道结构分开切割，从而以分批形式制造翼型的微型热流体流量传感器。 在一个热流传感器配置中，流动加热器分布在与其交换热交换的第一和第二热流传感器之间。 第三热流传感器设置在与加热器的热交换关系之外的其他热流传感器的上游，以在高于由第三传感器感测的温度的一定温度下操作加热器。 在低流量状态下，通过第一和第二传感器的输出之间的差异测量流量，而在高流量状态下，维持加热器温度所需的功率用作流量的度量。

公开(公告)号：US4680243A

公开(公告)日：1987-07-14

申请号：US761993

申请日：1985-08-02

Applicant: Alexander R. Shimkunas ,  Barry Block

Inventor： Alexander R. Shimkunas ,  Barry Block

IPC: G03F1/22 ,  H01L21/027 ,  G21K5/00 ,  B44C1/22 ,  C23F1/02 ,  G03F9/00

CPC classification number: G03F1/22

Abstract: A method for manufacturing a mask (100) for use in x-ray photolithographic processes includes the step of coating a silicon wafer (10) with a layer of boron nitride (12). A masking substance (14) is used to coat one side of the boron nitride coated wafer, and the boron nitride is etched off of the other side of the wafer. The wafer (10) is then bonded to a pyrex ring (16) using a field assisted thermal bonding process. During the field assisted thermal bonding process, the silicon (11) is bonded directly to the pyrex (16). Then, a zirconium layer (24) is used to cover the mask and is selectively etched where it is desired to remove a circular portion of the silicon. Thereafter the silicon is subjected to a semianisotropic etch. The remaining structure includes a pyrex ring bonded to a silicon ring across which a layer of boron nitride is stretched. The layer of boron nitride is subjected to an annealing process and is then coated with an x-ray opaque material.

Abstract translation: 制造用于x射线光刻工艺的掩模（100）的方法包括用氮化硼层（12）涂覆硅晶片（10）的步骤。 掩模物质（14）用于涂覆氮化硼涂覆的晶片的一侧，氮化硼从晶片的另一侧蚀刻掉。 然后使用场辅助热粘合工艺将晶片（10）结合到焦耳环（16）。 在场辅助热粘合过程中，硅（11）直接键合到发烟（16）。 然后，使用锆层（24）覆盖掩模，并且在需要去除硅的圆形部分的情况下被选择性地蚀刻。 此后，将硅进行半等向各向异性蚀刻。 剩余的结构包括结合到硅环上的发烟环，氮化硼层被拉伸通过该硅环。 对氮化硼层进行退火处理，然后用X射线不透明材料涂覆。

公开(公告)号：US4585209A

公开(公告)日：1986-04-29

申请号：US545907

申请日：1983-10-27

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: F15C5/00 ,  F16K31/02 ,  F16K99/00 ,  G05D7/06

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K31/02 ,  F16K99/0007 ,  F16K99/0051 ,  F16K99/0057 ,  G05D7/0694 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K99/0034 ,  Y10T137/7891

Abstract: In a miniature valve, a valve seat is formed by aperturing a plate. A cantilever leaf spring is disposed overlying the apertured plate for controlling the flow of fluid therethrough. An electrostatic potential applied between the cantilever leaf spring and the valve plate pulls the leaf spring over the apertured plate for variably controlling flow through the valve in accordance with the magnitude of the applied potential. In a preferred embodiment, the cantilever leaf springs are made in batch form by etching a silicon wafer. A flow controller is provided by measuring the electrical capacitance of the valve, comparing it with a reference voltage and deriving a feedback voltage applied to the valve for controlling flow therethrough. In one embodiment, the width of the cantilever leaf spring valve member is narrowed toward its free end for finer control of flow.

Abstract translation: 在微型阀中，通过打开板形成阀座。 悬臂板簧设置在多孔板上，用于控制流体的流动。 施加在悬臂板弹簧和阀板之间的静电势将片簧拉动在孔板上，用于根据施加电位的大小可变地控制通过阀的流量。 在优选实施例中，悬臂板弹簧通过蚀刻硅晶片而成批制成。 通过测量阀的电容量来提供流量控制器，将其与参考电压进行比较，并得出施加到阀门的反馈电压，以控制流过其中的流量。 在一个实施例中，悬臂弹簧阀构件的宽度朝向其自由端变窄以更精细地控制流量。

公开(公告)号：US4197752A

公开(公告)日：1980-04-15

申请号：US963103

申请日：1978-11-22

Applicant: Barry Block

Inventor： Barry Block

IPC: G01L21/00 ,  G01L21/12

CPC classification number: G01L21/00

Abstract: In the thermal gas pressure gauge, a foil heater has a heater surface disposed in gas communication with the gas to be measured and the heater surface is thermally cycled at first and second reference frequencies to produce cyclical heating of the gaseous material adjacent the heating element. A directional microphone is disposed facing the heating element to derive signals of an amplitude determined by the amplitude of the cyclical heating effect of the gaseous material at the first and second reference frequencies. The detected signals are synchronously detected to produce a pair of dc outputs indicative of pressure in two respective pressure regimes. In an overlap pressure regime the two dc outputs are converted to digital signals which are correlated with pairs of values tabled in a read only memory for reading out a digital signal indicative of the pressure. In a low pressure regime from approximately 10.sup.-4 torr and below to the region of 1 to 10 torr, the measured pressure is independent of the molecular gas species and therefore is an absolute gauge, whereas in the higher pressure regime from 1 to 10 torr to the condensation pressure of the measured gas, the measured pressure is somewhat dependent on the molecular gas species. For measurement in the higher pressure regime, the heater and microphone are contained within a volume of the gas separated from the relatively large volume of a chamber being measured by means of an acoustic filter. The acoustic filter provides a high impedence to pressure waves at the second or higher reference frequency to avoid dissipation of the generated pressure wave to be measured within the large chamber volume. The tabled values in the read only memory permit a smooth transition of the gauge measurement from the first to the second regime.

Abstract translation: 在热气体压力计中，箔加热器具有与要测量的气体气体连通的加热器表面，并且加热器表面在第一和第二参考频率下热循环，以产生邻近加热元件的气态材料的周期性加热。 定向麦克风被布置成面向加热元件以导出由在第一和第二参考频率处的气态材料的循环加热效应的幅度确定的振幅的信号。 检测到的信号被同步地检测以产生指示两个相应压力方案中的压力的​​一对直流输出。 在重叠压力状态下，两个直流输出被转换成数字信号，这些数字信号与在只读存储器中提供的值对相关联，用于读出表示压力的数字信号。 在约10-4乇以下至1〜10乇区域的低压状态下，测得的压力与分子气体种类无关，因此是绝对规格，而在1〜10乇的较高压力下 到测量气体的冷凝压力，所测量的压力在某种程度上取决于分子气体种类。 为了在较高压力状态下进行测量，加热器和麦克风被包含在通过声学滤波器测量的与相当大体积的腔室分离的一定体积的气体中。 声学滤波器在第二或更高参考频率处提供对高压的高阻抗，以避免在大腔体积内产生的被测压力波的耗散。 只读存储器中的提示值允许量规测量从第一个状态到第二个状态的平滑过渡。

公开(公告)号：US6167016A

公开(公告)日：2000-12-26

申请号：US833608

申请日：1997-04-11

Applicant: Barry Block ,  Arnold Thorton

Inventor： Barry Block ,  Arnold Thorton

IPC: G11B7/12 ,  G11B7/135 ,  G11B11/105 ,  G11B7/125

CPC classification number: G11B7/1353 ,  G11B7/122 ,  G11B7/1372 ,  G11B11/10532 ,  G11B11/10554 ,  G11B11/1058

Abstract: A head slider for flying above a rotating magneto-optic or optical disk and an optical mechanical assembly with a fixed height above a rotating magneto-optic or optical disk contains magnetic coils and a lens plate with a diffractive optic structure for focusing laser light into a small spot on the disk. The diffractive optic structure may be a zone plate, a phase zone plate or a blazed phase zone plate or other diffractive focusing optical element. The diffractive optic structure does not require curved transparent material such as glass or a high index of refraction. The diffractive optic structure is easily manufactured using lithographic or other techniques.

Abstract translation: 用于在旋转的磁光或光盘上方飞行的磁头滑块和在旋转磁光盘或光盘上方具有固定高度的光学机械组件包含磁性线圈和具有衍射光学结构的透镜板，用于将激光聚焦到 磁盘上的小斑点。 衍射光学结构可以是区域板，相位板或闪耀相位带板或其它衍射聚焦光学元件。 衍射光学结构不需要弯曲的透明材料，例如玻璃或高折射率。 衍射光学结构易于使用光刻或其它技术制造。