公开(公告)号：US4597003A

公开(公告)日：1986-06-24

申请号：US556832

申请日：1983-12-01

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: H01L21/306 ,  H01L21/308 ,  G01L1/22

CPC classification number: H01L21/3086 ,  H01L21/30608 ,  H01L21/3081 ,  Y10T29/49103

Abstract: Three dimensional single crystalline structures, such as folded cantilever beams supported from a frame and supporting a central structure free to move relative to the frame, are fabricated by anisotropically etching through openings in etch stop layers on opposite sides of the substrate wafer. The openings are patterned and aligned so that the etch stop layers are undercut to define etch stop portions interconnected by unetched substrate material.

Abstract translation: 通过各向异性蚀刻穿过衬底晶片的相对侧上的蚀刻停止层中的开口，制造三维单晶结构，例如从框架支撑并支撑相对于框架自由移动的中心结构的折叠悬臂梁。 开口被图案化和对准，使得蚀刻停止层被底切以限定通过未蚀刻的衬底材料互连的蚀刻停止部分。

公开(公告)号：US4019056A

公开(公告)日：1977-04-19

申请号：US572013

申请日：1975-04-28

Applicant: Barry Block ,  Harry E. Aine

Inventor： Barry Block ,  Harry E. Aine

IPC: G01N21/17 ,  G01J3/42

CPC classification number: G01N21/1702

Abstract: An infrared laser absorption spectrometer is disclosed wherein a pair of detector cells are disposed serially along the laser beam path. The laser beam is modulated to produce a modulation of the absorption by the sample materials in the two cells. Modulated absorption by the samples produces an acoustic wave in each cell which is detected by a suitable microphone and subtracted so as to produce a difference signal corresponding to the difference in infrared absorption between the two cells so that undesired background effects common to both cells are cancelled. A pressure controller, which is responsive to the pressure difference between the sample pressure in the two cells at a frequency substantially below the beam modulation frequency is employed for controlling the pressure differential. In one embodiment the pressure controller includes a compliant membrane partitioning the two cells so that the membrane may move so as to equalize the pressures. In a second embodiment, deflection of the diaphragm of a differential microphone coupled into both cells is employed to derive an output utilized to control either the flow through the cells and/or the volume of the respective cells to control the pressure difference between the cells.

Abstract translation: 公开了一种红外激光吸收光谱仪，其中一对检测器单元沿着激光束路径串联布置。 调制激光束以产生两个单元中的样品材料的吸收的调制。 样本的调制吸收在每个单元中产生声波，由合适的麦克风检测并减去，以产生对应于两个单元之间的红外吸收差的差信号，从而消除两个单元共同的不期望的背景效应 。 采用压力控制器，该压力控制器以基本上低于束调制频率的频率响应两个单元中的样品压力之间的压力差来控制压力差。 在一个实施例中，压力控制器包括分隔两个电池的顺应膜，使得膜可以移动以便均衡压力。 在第二实施例中，使用耦合到两个单元中的差分麦克风的隔膜的偏转来导出用于控制通过单元的流量和/或各个单元的体积以控制单元之间的压力差的输出。

公开(公告)号：US4783237A

公开(公告)日：1988-11-08

申请号：US873854

申请日：1986-06-11

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: G01P15/08 ,  H01L21/02

CPC classification number: G01P15/0802 ,  G01P2015/0828 ,  Y10S438/97

Abstract: Folded cantilever structures and solid state force transducers using same are made by chemical etching of a semiconductive wafer. In the chemical etching process, an etch stop layer is provided on a wafer of semiconductive material. The etch stop layer is opened in a certain pre-determined pattern and etchant is introduced through the opening in the etch stop layer to produce substantial undercut etching of portions of the etch stop layer. The opening is patterned to define a support structure (frame) for the folded cantilever portion which is undercut. The etch is terminated such that one end of the undercut folded cantilever structure is supported from the frame and the other end terminates on a structure such as a mass that is supported from the frame by means of the folded cantilever structure.

Abstract translation: 通过化学蚀刻半导体晶片制造折叠的悬臂结构和使用它们的固态力传感器。 在化学蚀刻工艺中，在半导体材料的晶片上提供蚀刻停止层。 蚀刻停止层以特定的预定图案打开，并且蚀刻剂通过蚀刻停止层中的开口引入，以对蚀刻停止层的部分产生大量的底切蚀刻。 将开口图案化以限定用于底切的折叠悬臂部分的支撑结构（框架）。 蚀刻被终止，使得底切折叠的悬臂结构的一端从框架支撑，另一端终止于诸如通过折叠的悬臂结构从框架支撑的质量的结构上。

公开(公告)号：US4600934A

公开(公告)日：1986-07-15

申请号：US573693

申请日：1984-01-25

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: B81C1/00 ,  H01L21/306 ,  H01L21/308 ,  H01L29/84 ,  G01L1/22

CPC classification number: B81C1/0015 ,  H01L21/30608 ,  H01L21/30617 ,  H01L21/3083 ,  B81B2201/0235 ,  G01P15/00 ,  Y10T29/49103

Abstract: An etch stopped layer portion overlying a (100) or (110) major face of a diamond cubic semiconductor material is undercut anisotropically etched by orienting a side edge of the etch stopped layer portion which is to be undercut, at an angle to the most nearly parallel {111} trace on the (100) or (110) face. The etch time is further reduced by slotting through the etch stopped layer with slots oriented at an angle to the {111} traces on the underlying (100) or (110) face. Undercut bridge structures are formed by undercutting quadrilateral etch stopped layer portions from opposite sides of the quadrilateral or from the sides plus slots forming diagonals of {111} trace quadrilaterals having combined areas coextensive with the area to be undercut.

Abstract translation: 覆盖金刚石立方体半导体材料的（100）或（110）主面上的蚀刻停止层部分通过将要被切削的蚀刻停止层部分的侧边缘定向成最接近 （100）或（110）面平行{111}迹线。 蚀刻时间进一步减小，通过切槽穿过蚀刻停止层，其中槽以与底层（100）或（110）面上的{111}迹线成一定角度。 底切桥结构通过从四边形或从侧面的相对侧或从侧面加上形成具有与要切削的区域共同延伸的组合区域的{111}跟踪四边形的对角线的槽形成四边形蚀刻停止层部分而形成。

公开(公告)号：US4733559A

公开(公告)日：1988-03-29

申请号：US892111

申请日：1986-08-04

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: G01F1/684 ,  G01F1/696 ,  G01F7/00 ,  G01F1/68

CPC classification number: G01F1/696 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/6847 ,  G01F7/00

Abstract: Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart. In one thermal flow sensor configuration, a flow heater is dispsoed inbetween first and second thermal flow sensors in heat exchanging relation therewith. A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor. In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow.

Abstract translation: 通过在薄片材料上形成热流体流量传感器并将片材粘合在管道结构阵列上并将各个传感器和管道结构分开切割，从而以分批形式制造翼型的微型热流体流量传感器。 在一个热流传感器配置中，流动加热器分布在与其交换热交换的第一和第二热流传感器之间。 第三热流传感器设置在与加热器的热交换关系之外的其他热流传感器的上游，以在高于由第三传感器感测的温度的一定温度下操作加热器。 在低流量状态下，通过第一和第二传感器的输出之间的差异测量流量，而在高流量状态下，维持加热器温度所需的功率用作流量的度量。

公开(公告)号：US4585209A

公开(公告)日：1986-04-29

申请号：US545907

申请日：1983-10-27

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: F15C5/00 ,  F16K31/02 ,  F16K99/00 ,  G05D7/06

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K31/02 ,  F16K99/0007 ,  F16K99/0051 ,  F16K99/0057 ,  G05D7/0694 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K99/0034 ,  Y10T137/7891

Abstract: In a miniature valve, a valve seat is formed by aperturing a plate. A cantilever leaf spring is disposed overlying the apertured plate for controlling the flow of fluid therethrough. An electrostatic potential applied between the cantilever leaf spring and the valve plate pulls the leaf spring over the apertured plate for variably controlling flow through the valve in accordance with the magnitude of the applied potential. In a preferred embodiment, the cantilever leaf springs are made in batch form by etching a silicon wafer. A flow controller is provided by measuring the electrical capacitance of the valve, comparing it with a reference voltage and deriving a feedback voltage applied to the valve for controlling flow therethrough. In one embodiment, the width of the cantilever leaf spring valve member is narrowed toward its free end for finer control of flow.

Abstract translation: 在微型阀中，通过打开板形成阀座。 悬臂板簧设置在多孔板上，用于控制流体的流动。 施加在悬臂板弹簧和阀板之间的静电势将片簧拉动在孔板上，用于根据施加电位的大小可变地控制通过阀的流量。 在优选实施例中，悬臂板弹簧通过蚀刻硅晶片而成批制成。 通过测量阀的电容量来提供流量控制器，将其与参考电压进行比较，并得出施加到阀门的反馈电压，以控制流过其中的流量。 在一个实施例中，悬臂弹簧阀构件的宽度朝向其自由端变窄以更精细地控制流量。

公开(公告)号：US4633578A

公开(公告)日：1987-01-06

申请号：US556800

申请日：1983-12-01

Applicant: Harry E. Aine ,  Barry Block

Inventor： Harry E. Aine ,  Barry Block

IPC: G01F1/684 ,  G01F1/696 ,  G01F7/00 ,  H01C17/06 ,  G01F1/68

CPC classification number: G01F1/684 ,  G01F1/6845 ,  G01F1/6847 ,  G01F1/696 ,  G01F7/00 ,  Y10T29/49085 ,  Y10T29/49099

Abstract: Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart. In another embodiment, thin carrier sheet portions of a wafer bearing the thermal fluid flow sensors of the airfoil or grid type are supported by surrounding frame portions of the wafer. The wafer is diced to separate the individual sensing chips. The respective chips are mounted across respective fluid flow ducts. For the airfoil type sensor, portions of the frame are broken away for undisturbed flow over the thin carrier and sensor. In one thermal flow sensor configuration, a flow heater is disposed in between first and second thermal flow sensors in heat exchanging relation therewith. A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor. In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow.

Abstract translation: 通过在薄片材料上形成热流体流量传感器并将片材粘合在管道结构阵列上并将各个传感器和管道结构分开切割，从而以分批形式制造翼型的微型热流体流量传感器。 在另一个实施例中，承载翼型或格栅型热流体流量传感器的晶片的薄载体片部分由晶片的周围框架部分支撑。 切割晶片以分离各个感测芯片。 相应的芯片安装在相应的流体流动管道上。 对于翼型传感器，框架的部分被分离，以便在薄的载体和传感器上不受干扰地流动。 在一个热流传感器构造中，流动加热器设置在与其热交换关系的第一和第二热流传感器之间。 第三热流传感器设置在与加热器的热交换关系之外的其他热流传感器的上游，以在高于由第三传感器感测的温度的一定温度下操作加热器。 在低流量状态下，通过第一和第二传感器的输出之间的差异测量流量，而在高流量状态下，维持加热器温度所需的功率用作流量的度量。

公开(公告)号：USRE31459E

公开(公告)日：1983-12-06

申请号：US115610

申请日：1980-01-28

Applicant: Barry Block

Inventor： Barry Block

IPC: H01L29/84 ,  G01P15/08 ,  G01P15/12 ,  H01L41/02 ,  H04R23/00

CPC classification number: H04R23/006 ,  G01P15/0802 ,  G01P15/123 ,  H01L29/84 ,  Y10T29/49002 ,  Y10T29/49103

Abstract: Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the and crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure. In one embodiment, the gaps between adjacent leg portions of the spring structure are sealed in a fluid tight manner by means of oxide membranes left intact upon etching of the spring structure. In an accelerometer embodiment, sensing masses of equal weight are affixed to opposite sides of the spring structure for dynamically balancing same. .Iadd.

公开(公告)号：US07184826B2

公开(公告)日：2007-02-27

申请号：US08877155

申请日：1997-06-17

Applicant: Michel J. N. Cormier ,  Armand P. Neukermans ,  Barry Block ,  Felix T. Theeuwes ,  Alfred A. Amkraut

Inventor： Michel J. N. Cormier ,  Armand P. Neukermans ,  Barry Block ,  Felix T. Theeuwes ,  Alfred A. Amkraut

IPC: A61M1/30 ,  A61M31/00 ,  A61B5/00

CPC classification number: A61M37/0015 ,  A61B5/14514 ,  A61B5/150022 ,  A61B5/150099 ,  A61B5/150282 ,  A61B5/150427 ,  A61B5/150969 ,  A61B5/150984 ,  A61B5/15105 ,  A61B5/15113 ,  A61B5/15142 ,  A61B10/0045 ,  A61B17/205 ,  A61M2037/0007 ,  A61M2037/0023 ,  A61M2037/0038 ,  A61M2037/0046 ,  A61M2037/0053 ,  A61N1/30 ,  A61N1/303

Abstract: A percutaneous agent delivery or sampling device comprising a sheet having a plurality of microblades for piercing and anchoring to the skin for increasing transdermal flux of an agent and for improving the attachment of the device to the skin.

Abstract translation: 一种经皮药剂递送或取样装置，其包括具有多个微刀片的片材，用于刺穿并锚定到皮肤上以增加药剂的经皮通量并改善装置与皮肤的连接。

公开(公告)号：US06330118B1

公开(公告)日：2001-12-11

申请号：US09288269

申请日：1999-04-08

Applicant: Walter Daschner ,  Barry Block ,  Arnold Thornton ,  Bernard Kress

Inventor： Walter Daschner ,  Barry Block ,  Arnold Thornton ,  Bernard Kress

IPC: G02B310

CPC classification number: G11B7/1365 ,  G02B5/1876 ,  G02B5/188 ,  G11B7/0908 ,  G11B7/1353 ,  G11B7/1374 ,  G11B7/13922 ,  G11B2007/0006

Abstract: A magneto optic or optical disk drive comprises a laser source for providing laser beam, and a lens or compound lens for focussing the laser onto a currently inserted recording disk with specific overcoat thickness. In one embodiment, the lens is a compound lens that can focus aberration-free spots on different types of disk media having recording layers located under overcoats of different thicknesses. When a specific disk is inserted, only one spot in focussed onto the current recording layer. Furthermore, if the disk spins rapidly, it can wobble. The lens or compound lens comprises different regions where the focal length may vary slightly and continuously or discretely. Because of this, as the disk wobbles, the lens can nonetheless continue to focus laser light onto a small spot on the recording media, providing increased depth of focus in the vicinity of the currently inserted recording media. Furthermore, the increased depth of focus will also remedy problems related to the change in focal length of the lens with changes in wavelength of the laser source. Because some of these changes in wavelength occur abruptly, this is also a case in which the limited performance of the auto-focus tracking system would be overly burdened.

Abstract translation: 磁光盘或光盘驱动器包括用于提供激光束的激光源和用于将激光聚焦到具有特定外涂层厚度的当前插入的记录盘上的透镜或复合透镜。 在一个实施例中，透镜是可以将像差自由点聚焦在具有位于不同厚度的外涂层下的记录层的不同类型的盘介质上的复合透镜。 当插入特定盘时，只有一个点集中在当前记录层上。 此外，如果磁盘快速旋转，则可能会摆动。 透镜或复合透镜包括不同的区域，其中焦距可以稍微和连续地或离散地变化。 正因为如此，随着磁盘的摆动，透镜可以继续将激光聚焦到记录介质上的一个小点上，从而在当前插入的记录介质附近提供增加的焦点深度。 此外，增加的焦深也将补救与激光源的波长变化相关的透镜焦距变化的问题。 因为这些波长的一些变化突然发生，所以这也是自动对焦跟踪系统的有限性能过度负担的情况。