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20 条记录 (耗时 0.014 秒)

    Chemical mechanical polishing apparatus having a measuring device for measuring a guide ring
    11.
    发明授权
    Chemical mechanical polishing apparatus having a measuring device for measuring a guide ring 有权
    化学机械抛光装置具有用于测量导向环的测量装置

    公开(公告)号：US06923709B2

    公开(公告)日：2005-08-02

    申请号：US10410558

    申请日：2003-04-07

    申请人： Chih-Kun Chen ,  Shan-Chang Wang ,  Ching-Huang Chen

    发明人： Chih-Kun Chen ,  Shan-Chang Wang ,  Ching-Huang Chen

    IPC分类号： B24B49/00

    CPC分类号： B24B37/32 ,  B24B49/00

    摘要： A CMP (chemical mechanical polishing) apparatus having a measuring device for measuring a guide ring. A polishing table is provided. A wafer loading/unloading device is located at a first side of the polishing table. A measuring device is located at a second side of the polishing table. A carrier having a first lateral and a second lateral opposite the first lateral, wherein the first lateral faces the polishing table, the wafer loading/unloading device or the measuring device. A guide ring is disposed on the first lateral of the carrier. A transfer device is disposed on the second lateral of the carrier and connected to the carrier, wherein the transfer device is used to move the carrier onto the polishing table, the wafer loading/unloading device or the measuring device. The measuring device is used to automatically and immediately measure the severity of scoring on the guide ring.

    摘要翻译： 一种具有用于测量导向环的测量装置的CMP（化学机械抛光）装置。 提供了抛光台。 晶片装载/卸载装置位于抛光台的第一侧。 测量装置位于抛光台的第二侧。 一种具有与第一侧面相反的第一横向和第二横向的载体，其中所述第一横向面向所述抛光台，所述晶片装载/卸载装置或所述测量装置。 引导环布置在载体的第一侧面上。 传送装置设置在载体的第二侧面上并连接到载体上，其中传送装置用于将载体移动到抛光台，晶片装载/卸载装置或测量装置上。 测量装置用于自动并立即测量导环上刻痕的严重程度。

    In-line oscillating device
    12.
    发明授权
    In-line oscillating device 有权
    在线振荡装置

    公开(公告)号：US06743081B2

    公开(公告)日：2004-06-01

    申请号：US10034328

    申请日：2001-12-28

    申请人： Chih-Kun Chen

    发明人： Chih-Kun Chen

    IPC分类号： B24B100

    CPC分类号： B24B37/04 ,  B24B1/04 ,  B24B57/02 ,  Y10S451/91

    摘要： An in-line oscillating device is essentially composed of an oscillating tank, an oscillating pipe, and an oscillating generator. The oscillating pipe is set in the oscillating tank and connects with a slurry pipe. The oscillating generator for generating ultrasonic waves is mounted on the oscillating tank. Furthermore, the oscillating tank is filled with a medium to transmit the ultrasonic waves generated by the oscillating generator to the oscillating pipe. The in-line oscillating device is suitable to be mounted on any location of the slurry pipe where oscillation is needed.

    摘要翻译： 在线振荡装置主要由振荡槽，振荡管和振荡发生器组成。 振荡管设置在振荡槽中，与浆管连接。 用于产生超声波的振荡发生器安装在振荡槽上。 此外，振荡槽填充有介质，以将由振荡发生器产生的超声波传输到振荡管。 在线振荡装置适合安装在需要振荡的浆料管道的任何位置。

    Guide ring removal device
    15.
    发明授权
    Guide ring removal device 有权
    导环拆除装置

    公开(公告)号：US06726554B1

    公开(公告)日：2004-04-27

    申请号：US10460446

    申请日：2003-06-12

    申请人： Chih-Kun Chen ,  Shan Chang Wang

    发明人： Chih-Kun Chen ,  Shan Chang Wang

    IPC分类号： B24B4702

    CPC分类号： H01L21/68728 ,  B24B37/32 ,  H01L21/68785 ,  Y10S451/914

    摘要： A guide ring removal device. The guide ring removal device includes a column press, a first disc, a second disc, and a plurality of fasteners. The first disc is disposed on the column press. The second disc is disposed on a point of the column press to exert force on a carrier. The plurality of fasteners is disposed on the first disc, the fasteners grasping the guide ring. As the second disc exerts the primary force on the carrier, the fasteners generate reciprocal force on the guide ring, thus separating the guide ring. Engagement of the column press alters the distance between the first disc and the second disc, and the primary force is exerted on the carrier.

    摘要翻译： 导环拆除装置。 引导环移除装置包括柱压机，第一盘，第二盘和多个紧固件。 将第一盘放置在柱压机上。 第二盘被设置在柱压机的点上以对载体施加力。 多个紧固件设置在第一盘上，紧固件抓住导向环。 当第二盘在载体上施加主力时，紧固件在引导环上产生相互的力，从而分离引导环。 柱压合器的接合改变第一盘和第二盘之间的距离，并且主力施加在载体上。

    Slurry homogenizer and supply system
    16.
    发明授权
    Slurry homogenizer and supply system 有权
    泥浆均质机和供料系统

    公开(公告)号：US06719617B2

    公开(公告)日：2004-04-13

    申请号：US10348696

    申请日：2003-01-22

    申请人： Tun-Yuan Lo ,  Chih-Pin Hsu ,  Chih-Kun Chen

    发明人： Tun-Yuan Lo ,  Chih-Pin Hsu ,  Chih-Kun Chen

    IPC分类号： B24B100

    CPC分类号： B24B37/04 ,  B01F7/00758 ,  B01F7/163 ,  B24B57/02

    摘要： A slurry homogenizer. A frame having an outlet is disposed on a driving means having a rotating shaft. A waterproof plate having a first opening is disposed in the frame and on the driving means. Part of the shaft penetrates the first opening. A filter is disposed in the frame and on the plate. A first grinding pad has a second opening and is fitted on the shaft through the second opening. The first grinding pad is disposed in the frame and above the plate. A knob is fitted on the top of the shaft. The knob fixes the first grinding pad on the shaft. A cover having a pipe is disposed on the frame. A second grinding pad having a third opening is fitted on the pipe and disposed in the frame. The second grinding pad and the first grinding pad are separated by a fixed distance.

    摘要翻译： 浆料均化器。 具有出口的框架设置在具有旋转轴的驱动装置上。 具有第一开口的防水板设置在框架中和驱动装置上。 轴的一部分穿过第一个开口。 过滤器设置在框架和板上。 第一研磨垫具有第二开口并通过第二开口装配在轴上。 第一研磨垫设置在框架中并在板上方。 在轴的顶部安装一个旋钮。 旋钮将第一个研磨垫固定在轴上。 具有管子的盖子设置在框架上。 具有第三开口的第二研磨垫安装在管上并且设置在框架中。 第二研磨垫和第一研磨垫分开一定距离。

    Portable liquid level detector
    17.
    发明授权
    Portable liquid level detector 有权

    公开(公告)号：US07091868B2

    公开(公告)日：2006-08-15

    申请号：US10634349

    申请日：2003-08-04

    申请人： Chin Chung Ku ,  Chih-Kun Chen ,  Chien-hui Lin

    发明人： Chin Chung Ku ,  Chih-Kun Chen ,  Chien-hui Lin

    IPC分类号： G08B21/00

    CPC分类号： G01F23/00 ,  G01F23/263

    摘要： A portable liquid level detector. The detector comprises a portable casing, a power supply unit disposed in the portable casing, a sensing device coupled to the power supply unit to sense a capacitance within a container and to output a enable signal when a difference in the capacitance is detected, a light emission device coupled to the sensing unit that illuminates after receiving the enable signal, and an alarm device coupled to the sensing unit that sounds after receiving the enable signal.

    Slurry tank autocleaner
    18.
    发明授权
    Slurry tank autocleaner 有权
    泥浆罐自动清洗机

    公开(公告)号：US06932094B2

    公开(公告)日：2005-08-23

    申请号：US10313176

    申请日：2002-12-06

    申请人： Chih-Kun Chen ,  Ming Fa Tsai

    发明人： Chih-Kun Chen ,  Ming Fa Tsai

    IPC分类号： B08B9/093 ,  B08B3/02

    CPC分类号： B08B9/093

    摘要： A slurry tank autocleaner for cleaning an empty slurry tank. A first pipe is inserted in the interior of the slurry tank, where the first pipe has an open end located inside the slurry tank. A first nozzle is disposed on the open end of the first pipe. A cover is used to cover the slurry tank, where the cover has a plurality of second nozzles targeting the slurry tank. A second pipe is connected to the second nozzles. A controller is used to control chemical, pure water or dry gas to spurt from the first nozzle and the second nozzles through the first pipe and the second pipe. Thus, the slurry tank can be automatically cleaned.

    摘要翻译： 用于清洁空浆箱的浆液罐自动清洗机。 第一管被插入浆料罐的内部，其中第一管具有位于浆料罐内部的开口端。 第一喷嘴设置在第一管的开口端。 覆盖物用于覆盖浆料罐，其中盖具有针对浆料罐的多个第二喷嘴。 第二管连接到第二喷嘴。 控制器用于控制通过第一管和第二管从第一喷嘴和第二喷嘴喷出的化学，纯净水或干燥气体。 因此，可以自动清洗浆料罐。

    Method and apparatus for real-time detection of wafer defects
    19.
    发明申请
    Method and apparatus for real-time detection of wafer defects 审中-公开
    用于实时检测晶圆缺陷的方法和装置

    公开(公告)号：US20050046831A1

    公开(公告)日：2005-03-03

    申请号：US10715680

    申请日：2003-11-18

    申请人： Chih-Kun Chen

    发明人： Chih-Kun Chen

    IPC分类号： G01N21/95 ,  G01N21/88

    CPC分类号： G01N21/9501

    摘要： A method and apparatus for real-time detection of wafer defects. A method for real-time detection of wafer defects comprises the steps of providing a desired wafer before or after a predetermined fabrication step and obtaining optical information thereof and comparing and analyzing the optical information of the desired wafer with corresponding reference information for instantaneously detecting possible wafer defects, wherein a predetermined action is performed upon detection of wafer defects.

    摘要翻译： 晶圆缺陷的实时检测方法和装置。 一种用于实时检测晶片缺陷的方法包括以下步骤：在预定的制造步骤之前或之后提供期望的晶片并获得其光学信息，并将期望的晶片的光学信息与相应的参考信息进行比较和分析，以便瞬时检测可能的晶片 缺陷，其中在检测到晶片缺陷时执行预定动作。

    Switching system for a reciprocating piston pump
    20.
    发明授权
    Switching system for a reciprocating piston pump 有权
    往复式活塞泵的切换系统

    公开(公告)号：US06790010B2

    公开(公告)日：2004-09-14

    申请号：US10316354

    申请日：2002-12-11

    申请人： Chih-Kun Chen ,  Shan Chang Wang

    发明人： Chih-Kun Chen ,  Shan Chang Wang

    IPC分类号： F04B4900

    CPC分类号： F04B9/125 ,  F04B2205/09

    摘要： A pumping system. The pumping system has a cylinder pump, a first group of switching devices, and a second group of switching devices. The first group of switching devices enable the cylinder pump to pump the liquid by feeding the gas provided by the gas source into the cylinder pump through a first ventilator according to a first enabling signal, and the second group of switching devices enable the cylinder to output the liquid by feeding the gas provided by the gas source into the cylinder pump through a second ventilator according to a second enable signal.

    摘要翻译： 抽水系统 泵送系统具有气缸泵，第一组开关装置和第二组开关装置。 第一组开关装置使得气缸泵能够通过根据第一启用信号通过第一通气机将由气体源提供的气体馈送到气缸泵中来泵送液体，并且第二组开关装置使气缸能够输出 通过根据第二使能信号将由气体源提供的气体通过第二通气机输送到气缸泵中的液体。