公开(公告)号：US20130004736A1

公开(公告)日：2013-01-03

申请号：US13173564

申请日：2011-06-30

Applicant: Zhaohui Fan ,  Yuan Xu ,  Justin Jia-Jen Hwu ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Zhaohui Fan ,  Yuan Xu ,  Justin Jia-Jen Hwu ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: B32B3/00 ,  C23C16/56 ,  C23C16/00

CPC classification number: G11B5/8408 ,  C23C16/45525 ,  C23C16/513 ,  G11B5/855 ,  H01F41/32 ,  Y10T428/24802

Abstract: The embodiments disclose a method of protecting patterned magnetic materials of a stack, including depositing a thin continuous film of an inert material that is inert to the magnetic materials of a patterned stack upon which the thin continuous film is being deposited and forming a thin interim interface layer from the thin continuous film to protect top and sidewall areas of non-etched higher relief magnetic islands and magnetic film etched surfaces of the patterned stack from air exposure damage and damage from contact with backfilled materials.

Abstract translation: 这些实施方案公开了一种保护叠层的图案化磁性材料的方法，包括沉积惰性材料的薄连续薄膜，惰性材料对图案化叠层的磁性材料是惰性的，薄膜连续薄膜将沉积在其上并形成薄的临时界面 层，以保护未蚀刻的更高的浮雕磁岛的顶部和侧壁区域以及图案化叠层的磁性膜蚀刻表面从空气暴露损坏和与回填材料接触的损坏。

公开(公告)号：US08308964B2

公开(公告)日：2012-11-13

申请号：US12895630

申请日：2010-09-30

Applicant: Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: B44C1/22

CPC classification number: G11B5/743 ,  B44D3/18

Abstract: A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.

Abstract translation: 平坦化处理可以平坦化在伺服特征之间具有数据特征和较大伺服沟槽之间的数据沟槽的介质盘。 填充材料层沉积在介质盘上并提供沟槽的台阶覆盖。 填充材料在伺服沟槽上的数据沟槽和伺服凹槽上具有必须被移除以产生平面介质表面的数据凹槽。 使用第一平面化处理来去除数据凹槽，并且使用第二平面化处理来去除伺服凹部。

公开(公告)号：US20100300874A1

公开(公告)日：2010-12-02

申请号：US12473510

申请日：2009-05-28

Applicant: David Shiao-Min Kuo ,  Dieter Weller ,  Jan-Ulrich Thiele ,  Justin Hwu ,  Paritosh Rajora

Inventor： David Shiao-Min Kuo ,  Dieter Weller ,  Jan-Ulrich Thiele ,  Justin Hwu ,  Paritosh Rajora

IPC: C23C14/46

CPC classification number: G11B5/82 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/855

Abstract: A patterned magnetic layer is formed by bombardment of a masked high Mrt magnetic layer with a combination of both heavy ion species and light ion species. The method can be implemented as sequential process steps or in a single process step with the proper heavy/light ion species mixture. Advantageously, the combined heavy/light ion species bombardment method results in a patterned magnetic layer having high topographical uniformity across its surface.

Abstract translation: 通过用重离子物质和轻离子物质的组合轰击掩蔽的高Mrt磁性层形成图案化的磁性层。 该方法可以作为顺序的工艺步骤或在具有适当的重/轻离子物质混合物的单一工艺步骤中实施。 有利地，组合的重/轻离子物质轰击方法导致在其表面上具有高形貌均匀性的图案化磁性层。

公开(公告)号：US06853514B2

公开(公告)日：2005-02-08

申请号：US10167561

申请日：2002-06-11

Applicant: Xinwei Li ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Xinwei Li ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: G11B5/596

CPC classification number: G11B5/59633 ,  G11B5/59611

Abstract: A method for measuring servo pattern irregularity and other servo information of pre-patterned servo media mounted on a spindle with the center of the pre-pattern tracks off center from the axis rotation of the spindle. An actuator is stepped radially while measuring the PES signals from the servo sectors of at least one highly eccentric track to form a cross track profile of the PES signals for each sector. A mathematical algorithm removes step measurement error from the data. A second mathematical algorithm removes non-repeatable random noise from the data. The amount of phase-in that radially aligns the respective cross track profiles is computed. Servo pattern written-in repeatable runout is determined by unwrapping the phase-in values to form a periodic curve.

Abstract translation: 一种用于测量安装在主轴上的预先图案化伺服介质的伺服模式不规则性和其他伺服信息的方法，其中预模式轨迹的中心偏离主轴的轴线旋转的中心。 在测量来自至少一个高偏心轨道的伺服扇区的PES信号的同时，致动器是径向的，以形成每个扇区的PES信号的交叉轨道轮廓。 数学算法从数据中删除步长测量误差。 第二个数学算法从数据中去除不可重复的随机噪声。 计算径向对准各自的横向轨道轮廓的相位的量。 通过展开相位值以形成周期性曲线来确定写入可重复跳动的伺服模式。

公开(公告)号：US06301797B1

公开(公告)日：2001-10-16

申请号：US09325887

申请日：1999-06-04

Applicant: Ramesh Sundaram ,  Wei Yao ,  Li-Ping Wang ,  David Shiao-Min Kuo

Inventor： Ramesh Sundaram ,  Wei Yao ,  Li-Ping Wang ,  David Shiao-Min Kuo

IPC: B65G4722

CPC classification number: G11B5/012 ,  G11B5/5582 ,  G11B17/038 ,  G11B19/04 ,  G11B33/08 ,  G11B33/10 ,  Y10S414/135

Abstract: A method and apparatus for data disks adapted to compensate for effects of shock loads imparted to a disk drive which are of sufficient magnitude to cause disk shifts. A series of topographical features are formed on the disk surface or edge to cause signal fluctuation in a sensor during read-back mode operation. An initial signal profile is stored as a map indicative of track or disk alignment with respect to the actuator assembly. Selectively, such as after a known shock event, the topographical features are re-profiled. A comparison of the profiles provides a measure of any track distortion which must be compensated for in future read-write operations by adjustments to data track servo follower algorithms.

Abstract translation: 一种用于数据盘的方法和装置，适用于补偿赋予磁盘驱动器的冲击载荷的影响，磁盘驱动器具有足够大的幅度以引起磁盘移位。 在磁盘表面或边缘上形成一系列地形特征，以在回读模式操作期间引起传感器中的信号波动。 初始信号轮廓被存储为指示相对于致动器组件的轨道或盘对准的映射。 选择性地，例如在已知的冲击事件之后，地形特征被重新分类。 配置文件的比较可以提供任何跟踪失真的量度，通过调整数据轨道伺服跟随器算法，必须在将来的读写操作中对其进行补偿。

公开(公告)号：US06753130B1

公开(公告)日：2004-06-22

申请号：US10047105

申请日：2002-01-17

Applicant: Jianwei Liu ,  David Shiao-Min Kuo ,  Li-Ping Wang

Inventor： Jianwei Liu ,  David Shiao-Min Kuo ,  Li-Ping Wang

IPC: G03F700

CPC classification number: B82Y10/00 ,  G03F7/427 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/8404

Abstract: A method for patterning a carbon-containing substrate utilizing a patterned layer of a resist material as a mask and then safely removing the mask from the substrate without adversely affecting the substrate, comprising sequential steps of: (a) providing a substrate including a surface comprising carbon; (b) forming a thin metal layer on the substrate surface; (c) forming a layer of a resist material on the thin metal layer; (d) patterning the layer of resist material; (e) patterning the substrate utilizing the patterned layer of resist material as a pattern-defining mask; and (f) removing the mask utilizing the thin metal layer as a wet strippable layer or a plasma etch/ash stop layer.

Abstract translation: 一种利用抗蚀剂材料的图案化层作为掩模来图案化含碳衬底的方法，然后从衬底安全地除去掩模而不会不利地影响衬底，包括以下顺序的步骤：（a）提供包括表面的衬底，包括： 碳;（b）在所述基板表面上形成薄金属层;（c）在所述薄金属层上形成抗蚀剂材料层;（d）图案化所述抗蚀剂材料层;（e） 抗蚀剂材料层作为图案定义掩模; 和（f）使用薄金属层作为湿剥离层或等离子体蚀刻/灰停止层去除掩模。

公开(公告)号：US06665077B1

公开(公告)日：2003-12-16

申请号：US09884929

申请日：2001-06-21

Applicant: Michael Joseph Stirniman ,  David Shiao-Min Kuo ,  Thomas Roy Pitchford

Inventor： Michael Joseph Stirniman ,  David Shiao-Min Kuo ,  Thomas Roy Pitchford

IPC: G01B1102

CPC classification number: G11B5/6005 ,  G01B11/026 ,  G11B5/00 ,  G11B2005/001

Abstract: A method and apparatus for performing interferometric measurement/testing of flying heights of read-write head sliders utilizing an improved rotating disk, the disk having a central opening for use with a spindle for rotation about a central axis, the disk comprising: a substrate comprised of a light transmissive material and including a pair of opposed, smooth, major surfaces; and a wear-resistant, protective overcoat layer on one of the major surfaces for improving the tribological properties thereof; wherein the optical properties of the one surface of the disk are optimized for enhancing the sensitivity of the interferometric measurement/testing by increasing the intensity of reflected light received by a detector of the apparatus.

Abstract translation: 一种用于利用改进的旋转盘对读写头滑块的飞行高度进行干涉测量/测试的方法和装置，所述盘具有用于与中心轴线一起旋转的心轴的中心开口，所述盘包括：衬底， 的透光材料并且包括一对相对的，平滑的主表面; 在其中一个主表面上具有耐磨保护外涂层，用于改善其摩擦学性能;其中盘的一个表面的光学性质被优化，以通过增加反射的强度来提高干涉测量/测试的灵敏度 由装置的检测器接收的光。

公开(公告)号：US06338811B2

公开(公告)日：2002-01-15

申请号：US09874544

申请日：2001-06-04

Applicant: David Shiao-Min Kuo ,  Samuel John Falcone

Inventor： David Shiao-Min Kuo ,  Samuel John Falcone

IPC: B29C5900

CPC classification number: G11B5/8404

Abstract: A method for producing a substantially smooth surface on a computer disk media comprises providing a substantially smooth master surface. A curable polymer dielectric composition is applied to the master surface as well as the surface of the disk to be smoothed. The master surface is then pressed onto the disk surface and the polymer is cured. The master surface is then removed and the cured polymer forms a smooth surface on the disk.

Abstract translation: 用于在计算机磁盘介质上产生基本平滑表面的方法包括提供基本平滑的主表面。 将可固化聚合物电介质组合物施加到主表面以及待平滑的盘的表面。 然后将主表面压在盘表面上，聚合物固化。 然后去除主表面，并且固化的聚合物在盘上形成光滑的表面。

公开(公告)号：US20130070370A1

公开(公告)日：2013-03-21

申请号：US13618691

申请日：2012-09-14

Applicant: Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Yuan Xu ,  Wei Hu ,  Justin Jia-Jen Hwu ,  Gene Gauzner ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: G11B5/74

CPC classification number: G11B5/743 ,  B44D3/18

Abstract: A planarization process may planarize a media disk that has data trenches between data features and larger servo trenches between servo features. A filler material layer is deposited on the media disk and provides step coverage of the trenches. The filler material has data recesses over the data trenches and servo recesses over the servo trenches that must be removed to produce a planar media surface. A first planarization process is used to remove the data recesses and a second planarization process is used to remove the servo recesses.

Abstract translation: 平坦化处理可以平坦化在伺服特征之间具有数据特征和较大伺服沟槽之间的数据沟槽的介质盘。 填充材料层沉积在介质盘上并提供沟槽的台阶覆盖。 填充材料在伺服沟槽上的数据沟槽和伺服凹槽上具有必须被移除以产生平面介质表面的数据凹槽。 使用第一平面化处理来去除数据凹槽，并且使用第二平面化处理来去除伺服凹部。

公开(公告)号：US20120196094A1

公开(公告)日：2012-08-02

申请号：US13018416

申请日：2011-01-31

Applicant: Yuan Xu ,  Kim Lee ,  Wei Hu ,  Koichi Wago ,  David Shiao-Min Kuo

Inventor： Yuan Xu ,  Kim Lee ,  Wei Hu ,  Koichi Wago ,  David Shiao-Min Kuo

IPC: B32B3/00 ,  B05D1/36 ,  B05D3/06 ,  B05D3/12 ,  B05D3/00 ,  B05D3/10

CPC classification number: G11B5/84 ,  G11B5/746 ,  G11B5/855 ,  Y10T428/24479 ,  Y10T428/24802

Abstract: A method for nano-patterning includes imprinting features in a resist with an imprint mold to form one or more topographic surface patterns on the imprinted resist. A a block copolymer (“BCP”) material is deposited on the imprinted resist, wherein a molecular dimension L0 of the BCP material correlates by an integer multiple to a spacing dimension of the one or more topographic surface patterns on the imprinted resist. The deposited BCP is annealed and at least a portion of the annealed BCP is removed, forming a template having discrete domains.

Abstract translation: 纳米图案的方法包括在抗蚀剂中用压印模具压印特征以在印刷抗蚀剂上形成一个或多个形貌表面图案。 在压印抗蚀剂上沉积嵌段共聚物（“BCP”）材料，其中BCP材料的分子尺寸L0与印迹抗蚀剂上的一个或多个形貌表面图案的间隔尺寸相乘一整数倍。 将沉积的BCP退火，并且去除退火的BCP的至少一部分，形成具有离散区域的模板。