公开(公告)号：US08773748B2

公开(公告)日：2014-07-08

申请号：US13810107

申请日：2011-01-26

Applicant: Jianhong Mao ,  Deming Tang ,  Fengqin Han

Inventor： Jianhong Mao ,  Deming Tang ,  Fengqin Han

IPC: G02B26/00 ,  G02B26/08 ,  G02B26/02

CPC classification number: G02B26/001 ,  G02B26/02 ,  G02B26/0808 ,  Y10T29/49117

Abstract: A light modulator pixel unit and a method for manufacturing the same are provided. The light modulator pixel unit includes top, movable and bottom electrodes. Under control of a control circuit, the movable electrode may shift to first, second and third positions corresponding to modulations of first, second and third monochromatic lights, respectively. When the movable electrode is at a certain position, the incident light corresponding to the position may be divided into two parts, one is reflected by the top electrode, and the other one may bypass the top electrode and be reflected by the movable electrode. The two parts may interfere destructively. The light modulator pixel unit of the present invention can control monochromatic lights of three special wavelengths by time division, and enable color control and gray control. The unit is applicable in the field of projection display and panel system.

Abstract translation: 提供了一种光调制器像素单元及其制造方法。 光调制器像素单元包括顶部，可移动和底部电极。 在控制电路的控制下，可移动电极可分别转换到对应于第一，第二和第三单色光的调制的第一，第二和第三位置。 当可动电极处于一定位置时，对应于该位置的入射光可分为两部分，一部分被顶部电极反射，另一部分可能旁路顶部电极并被可动电极反射。 这两个部分可能会破坏性地干扰。 本发明的光调制器像素单元可以通过时分控制三种特殊波长的单色光，并且能够进行颜色控制和灰度控制。 该单元适用于投影显示和面板系统领域。

公开(公告)号：US20130119822A1

公开(公告)日：2013-05-16

申请号：US13703529

申请日：2010-12-13

Applicant: Jianhong Mao ,  Fengqin Han ,  Deming Tang

Inventor： Jianhong Mao ,  Fengqin Han ,  Deming Tang

IPC: H02N1/00

CPC classification number: H02N1/006 ,  B81B2201/0235 ,  B81C1/00333 ,  B81C2203/0136 ,  B81C2203/0714

Abstract: A Micro-Electro-Mechanical System (MEMS) device and its manufacturing method are provided. Said device comprises a MEMS component and said component comprises a main body (10) and a movable electrode (20). Said main body (10) contains a fixed electrode (110) and a cavity (30) and is covered by a first dielectric layer (400) which seals said cavity (30) into an enclosure. Said movable electrode (20) is connected with said main body (10) flexibly by a fixing piece and overhangs in said enclosure. Vias (405) are formed in said first dielectric layer (400) and filled with a second dielectric layer (500). The patent enables effective packaging for a MEMS device.

Abstract translation: 提供了微机电系统（MEMS）装置及其制造方法。 所述装置包括MEMS部件，所述部件包括主体（10）和可动电极（20）。 所述主体（10）包含固定电极（110）和空腔（30），并被第一介电层（400）覆盖，所述第一电介质层将所述空腔（30）密封成外壳。 所述可动电极（20）通过固定件柔性地与所述主体（10）连接并且悬挂在所述外壳中。 通孔（405）形成在所述第一电介质层（400）中并填充有第二电介质层（500）。 该专利使得MEMS器件能够有效的封装。

公开(公告)号：US20130076995A1

公开(公告)日：2013-03-28

申请号：US13703198

申请日：2010-12-15

Applicant: Cheng Huang ,  Lei Zhang ,  Deming Tang

Inventor： Cheng Huang ,  Lei Zhang ,  Deming Tang

IPC: G03B21/20 ,  G02B27/26 ,  G02F1/13

CPC classification number: G03B21/2073 ,  G02B27/26 ,  G02B27/283 ,  G02F1/1313 ,  G03B21/14 ,  H04N9/3167 ,  H04N9/3197 ,  H04N13/337 ,  H04N13/346 ,  H04N13/363

Abstract: A projection display device includes a first display panel (23a), a second display panel (23b), a PBS (Polarization Beam Splitter) (22) with a first surface (22a) and a second surface (22b) opposite each other, a light recycling device (25a, 25b and 23b), and a projection lens (24). The PBS (22) transmits a first type parallel polarized light and reflects a second type parallel polarized light. The light recycling device (25a, 25b and 23b) transforms the first type parallel polarized light transmitted by the PBS (22) into the second type parallel polarized light which carries a second image information, then reversely transmits the second type parallel polarized light to the second surface (22b) of the PBS (22).The projection display device improves the light utilization efficiency and can be used for 3D display.

Abstract translation: 投影显示装置包括第一显示面板（23a），第二显示面板（23b），具有第一表面（22a）的PBS（极化分束器）（22）和彼此相对的第二表面（22b） 光回收装置（25a，25b和23b）和投影透镜（24）。 PBS（22）透射第一类型的平行偏振光并反射第二类型的平行偏振光。 光回收装置（25a，25b和23b）将由PBS（22）透射的第一类型的平行偏振光变换为携带第二图像信息的第二类型的平行偏振光，然后将第二类型的平行偏振光反向传输到 PBS（22）的第二表面（22b）。投影显示装置提高了光利用效率，可用于3D显示。

公开(公告)号：US20090311615A1

公开(公告)日：2009-12-17

申请号：US12483973

申请日：2009-06-12

Applicant: Deming TANG

Inventor： Deming TANG

IPC: G03F7/20

CPC classification number: G03F1/76

Abstract: A method of photolithographic patterning mainly includes: converting a first photolithographic pattern by a digital transformation in a first magnification to a second photolithographic pattern; producing a first optical reticle corresponding to the second photolithographic pattern by an initial lithography in a 1-to-1 image transfer; fabricating a second optical reticle on a transparent substrate by a first photolithography in a first demagnification corresponding to the first optical reticle; and fabricating a microscopic pattern of same dimension as the first photolithographic pattern on a wafer substrate by a second demagnification using the second optical reticle. The multiplication of the first magnification by the first demagnification by the second demagnification equals one. The present invention implements fine patterning on a wafer substrate so as to improve efficiency of photolithographic application.

Abstract translation: 光刻图案的方法主要包括：通过第一倍率的数字变换将第一光刻图案转换为第二光刻图案; 通过1对1图像转印中的初始光刻产生对应于第二光刻图案的第一光学掩模版; 在对应于第一光学掩模版的第一刻痕中通过第一光刻在透明基板上制造第二光学掩模版; 以及通过使用第二光学掩模版的第二次缩小来制造与晶片衬底上的第一光刻图案相同尺寸的微观图案。 通过第二次缩小的第一次缩小乘以第一倍率等于1。 本发明在晶片基板上实现精细图案化，以提高光刻应用的效率。

公开(公告)号：US5225679A

公开(公告)日：1993-07-06

申请号：US825062

申请日：1992-01-24

Applicant: Richard H. Clarke ,  Deming Tang

Inventor： Richard H. Clarke ,  Deming Tang

IPC: G01N21/31 ,  G01N21/35 ,  G01N33/28

CPC classification number: G01N33/2829 ,  G01N21/3577 ,  G01N2021/3177

Abstract: Method and apparatus for monitoring hydrocarbon-based fuel properties by measuring the presence and amount of fuel component molecules in the fuel solution. Detection is made of absorption related to signature vibrational modes associated with the fuel component molecules when excited in the mid-IR. In one embodiment, a mid-IR light source illuminates the fuel in-situ and a narrow bandwidth detector associated with a vibrational mode signature detects absorbance as an indication of the presence and quantity of the fuel component in solution. From the determined fuel component quantity and known characteristics, the fuel solution properties are predicted. In one embodiment, octane rating and vapor pressure for a fuel solution is determined in-situ and in real time.

Abstract translation: 通过测量燃料溶液中燃料成分分子的存在和量来监测基于烃的燃料性质的方法和装置。 当在中红外激发时，检测与燃料成分分子相关的特征振动模式的吸收。 在一个实施例中，中红外光源原位照射燃料，并且与振动模式签名相关联的窄带宽检测器检测吸光度作为溶液中燃料成分的存在和数量的指示。 根据确定的燃料成分量和已知特性，预测燃料溶液性质。 在一个实施方案中，用于燃料溶液的辛烷值和蒸汽压力是在现场和实时地确定的。

公开(公告)号：US09019587B2

公开(公告)日：2015-04-28

申请号：US14112211

申请日：2011-12-28

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: G02B26/00 ,  G02B26/02 ,  G02B26/08 ,  G09G3/34 ,  B81C1/00 ,  B81B3/00

CPC classification number: G02B26/02 ,  B81B3/0021 ,  B81C1/00246 ,  G02B26/0841 ,  G09G3/3466 ,  G09G2300/0426

Abstract: A display device provided with an MEMS light valve, comprising: a substrate, a fixed grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed grating; a guide is disposed on the substrate. The MEMS light valve comprises: a movable grating, a movable electrode and fixed electrodes; the moveable grating is located in the guide and is electrically connected to the guide when contacting the guide; one end of the movable electrode is fixedly connected with the movable grating, and the other end is suspended; and the fixed electrodes and the movable electrode form a capacitor. When a potential difference forms between the fixed electrodes and the movable electrode, the movable electrode drives the movable grating to move in the guide, thereby opening and closing the fixed grating. Therefore, the MEMS light valve sensitivity can be enhanced and reliability is improved.

Abstract translation: 一种设置有MEMS光阀的显示装置，包括：基板，位于基板上的固定光栅，用于控制固定光栅的打开和关闭的MEMS光阀; 引导件设置在基板上。 MEMS光阀包括：可移动光栅，可动电极和固定电极; 可移动光栅位于引导件中，并在与引导件接触时电连接到引导件; 可动电极的一端与可动光栅固定连接，另一端悬挂; 并且固定电极和可动电极形成电容器。 当在固定电极和可动电极之间形成电位差时，可动电极驱动可动光栅在引导件中移动，从而打开和关闭固定光栅。 因此，可以提高MEMS光阀的灵敏度，提高可靠性。

公开(公告)号：US08982289B2

公开(公告)日：2015-03-17

申请号：US13703198

申请日：2010-12-15

Applicant: Cheng Huang ,  Lei Zhang ,  Deming Tang

Inventor： Cheng Huang ,  Lei Zhang ,  Deming Tang

IPC: G02F1/1335 ,  G03B21/20 ,  G02B27/26 ,  G02B27/28 ,  G03B21/14 ,  H04N9/31 ,  H04N13/04 ,  G02F1/13

CPC classification number: G03B21/2073 ,  G02B27/26 ,  G02B27/283 ,  G02F1/1313 ,  G03B21/14 ,  H04N9/3167 ,  H04N9/3197 ,  H04N13/337 ,  H04N13/346 ,  H04N13/363

Abstract: A projection display device includes a first display panel (23a), a second display panel (23b), a PBS (Polarization Beam Splitter) (22) with a first surface (22a) and a second surface (22b) opposite each other, a light recycling device (25a, 25b and 23b), and a projection lens (24). The PBS (22) transmits a first type parallel polarized light and reflects a second type parallel polarized light. The light recycling device (25a, 25b and 23b) transforms the first type parallel polarized light transmitted by the PBS (22) into the second type parallel polarized light which carries a second image information, then reversely transmits the second type parallel polarized light to the second surface (22b) of the PBS (22). The projection display device improves the light utilization efficiency and can be used for 3D display.

Abstract translation: 投影显示装置包括第一显示面板（23a），第二显示面板（23b），具有第一表面（22a）的PBS（极化分束器）（22）和彼此相对的第二表面（22b） 光回收装置（25a，25b和23b）和投影透镜（24）。 PBS（22）透射第一类型的平行偏振光并反射第二类型的平行偏振光。 光回收装置（25a，25b和23b）将由PBS（22）透射的第一类型的平行偏振光变换为携带第二图像信息的第二类型的平行偏振光，然后将第二类型的平行偏振光反向传输到 PBS（22）的第二表面（22b）。 投影显示装置提高光的利用效率，可以用于3D显示。

公开(公告)号：US20130129118A1

公开(公告)日：2013-05-23

申请号：US13810698

申请日：2011-01-26

Applicant: Jianhong Mao ,  Deming Tang

Inventor： Jianhong Mao ,  Deming Tang

IPC: H04R9/08 ,  H04R31/00

CPC classification number: H04R9/08 ,  H04R19/005 ,  H04R19/04 ,  H04R31/00 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

Abstract: A micro-electro-mechanical microphone and manufacturing method thereof are provided in the invention. The micro-electro-mechanical microphone comprises: a diaphragm, which is formed on a surface of one side of a semiconductor substrate, exposed to the outside surroundings, and can vibrate freely by sensing the pressure generated by sound waves; an electrode plate with air holes, which is under the diaphragm; an isolation structure for fixing the diaphragm and the electrode plate; an air gap cavity between the diaphragm and the electrode plate, and a back cavity under the electrode plate and in the semiconductor substrate; a second cavity formed on the surface of the same side of the semiconductor substrate and in an open manner; the air gap cavity is connected with the back cavity through the air holes of the electrode plate; the back cavity is connected with the second cavity through an air groove formed in the semiconductor substrate. The micro-electro-mechanical microphone in the invention is formed on the surface of one side of the semiconductor substrate, and the manufacturing method thereof is compatible with CMOS technics, therefore the device is easy to be miniaturized and integrated into a semiconductor chip.

Abstract translation: 本发明提供一种微机电麦克风及其制造方法。 微机电麦克风包括：隔膜，其形成在半导体衬底的一侧的表面上，暴露于外部环境，并且可以通过感测由声波产生的压力而自由地振动; 在隔膜下方具有气孔的电极板; 用于固定隔膜和电极板的隔离结构; 隔膜和电极板之间的气隙腔，以及电极板下方和半导体衬底中的后腔; 第二腔，形成在半导体衬底的同一侧的表面上并以开放的方式形成; 气隙腔通过电极板的气孔与后腔相连; 后腔通过形成在半导体衬底中的空气槽与第二腔连接。 本发明的微机电麦克风形成在半导体基板的一侧的表面上，其制造方法与CMOS技术相兼容，因此该器件易于小型化并集成到半导体芯片中。

公开(公告)号：US20130118280A1

公开(公告)日：2013-05-16

申请号：US13703506

申请日：2011-01-26

Applicant: Jianhong Mao ,  Fengqin Han ,  Deming Tang

Inventor： Jianhong Mao ,  Fengqin Han ,  Deming Tang

IPC: G01C19/04

CPC classification number: G01C19/04 ,  G01C19/5712 ,  Y10T74/1282 ,  Y10T74/1296

Abstract: A gyroscope and a manufacturing method are provided. The gyroscope comprises: a substrate with a bottom driving electrode and a bottom measuring electrode, and a dielectric layer with a sealed cavity comprising: a central axis on the substrate; a support ring on the substrate rotatable around the central axis; a mass ring surrounding and having common central axis with the support ring; cantilevers connected with the support ring and the mass ring and suspend the mass ring in the cavity; elastic components among the support ring, the mass ring and two adjacent cantilevers; a top driving electrode overlaying the support ring, the mass ring, the cantilevers and the elastic components; a conductive plug connected with top driving electrode and bottom driving electrode on the elastic components. The mass ring comprises an insulation layer and a weight layer. Stability and performance of the gyroscope may be improved.

Abstract translation: 提供了陀螺仪和制造方法。 陀螺仪包括：具有底部驱动电极和底部测量电极的基底，以及具有密封腔的电介质层，包括：基底上的中心轴线; 所述基板上的支撑环可绕所述中心轴线旋转; 围绕并具有与支承环共同的中心轴的质量环; 悬臂与支撑环和质量环连接并将质量环悬挂在腔中; 支撑环之间的弹性组件，质量环和两个相邻的悬臂; 覆盖支撑环的顶部驱动电极，质量环，悬臂和弹性部件; 与弹性部件上的顶部驱动电极和底部驱动电极连接的导电插头。 质量环包括绝缘层和重量层。 可以提高陀螺仪的稳定性和性能。

公开(公告)号：US08220930B2

公开(公告)日：2012-07-17

申请号：US12411308

申请日：2009-03-25

Applicant: Deming Tang

Inventor： Deming Tang

IPC: G03B21/14 ,  H01J40/14 ,  G02F1/01 ,  H01L31/00

CPC classification number: G01J1/32 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/42 ,  G02F1/136277 ,  G03B21/14 ,  G03B21/2066 ,  G03B21/2073

Abstract: An integrated opto-electronic device, a portable reflective projection system and a method for in situ monitoring and adjusting light illumination are provided. The device includes a reflective polarizing composite film (150) configured to receive a source light (210) at a desired non-normal incident angle (221), polarizes and reflects a first portion (211) of said source light (210) as polarized illumination light (16) at a reciprocal angle (222) to said desired non-normal incident angle (221); and a photovoltaic cell (180), adhered to an opposite side of said reflective polarizing composite film (150) to said source light (210), configured to receive a second portion (212) of said source light (210) that passes through said reflective polarizing composite film (150) and transform said second portion (212) to photogenerated charge. Unused illumination can be collected in order to re-store and reuse recovered energy.

Abstract translation: 提供集成光电装置，便携式反射投影系统和用于原位监测和调节光照的方法。 该装置包括被配置为以期望的非正常入射角（221）接收源光（210）的反射偏振复合膜（150），偏振并将所述源光（210）的第一部分（211）反射为偏振 照明光（16）以相对的角度（222）延伸到所述期望的非正常入射角（221）; 以及光电池（180），其粘附到所述反射型偏振复合膜（150）与所述源光（210）的相对侧，被配置为接收穿过所述源光（210）的所述源光（210）的第二部分（212） 反射偏振光复合膜（150），并将所述第二部分（212）转换成光生电荷。 可以收集未使用的照明，以便重新储存和重新利用回收的能量。