Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Abstract:
A method of utilizing a light replication luminaire to match the spectral characteristics of light that is output from the luminaire to the spectral characteristics of a target light spectrum is provided. In one example, the method permits the user to assign a weight to one or more characteristics of the target light spectrum to be replicated. A best approximation of the target light spectrum is then determined, taking into account the weight assigned to each characteristic. In another example, the target light spectrum is provided to the luminaire by the user through the specification of various characteristics of the target light spectrum.
Abstract:
A lighting system includes multiple light sources, a sensing unit, and a control system. The light sources have different emission spectra, and the sensing unit is configured to measure a spectral content of light. The control system may be configured to use measurements from the sensing unit to select respective intensities for emissions from the light sources and then independently control the light sources to emit the respective intensities. In particular, the control system can select and render a spectral distribution selected based on the light reflected from objects that are being illuminated or render a spectral distribution to supplement light from other light sources and achieve a lighting objective.
Abstract:
We disclose a method for accurate three-dimensional position measurement in the field of nano-positioning using a single light beam and principles of interferometry to measure position.
Abstract:
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Abstract:
A method and apparatus for removing the sacrificial layers of microstructures in fabrications have been disclosed. The method comprises a plasma etching process followed by a non-energized spontaneous vapor phase etching process. The plasma and spontaneous etching processes utilize the same etchant that is capable of chemically reacting with the sacrificial material, wherein t chemical reaction is spontaneous.
Abstract:
The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.