公开(公告)号：US08329320B2

公开(公告)日：2012-12-11

申请号：US12291715

申请日：2008-11-13

申请人： Kunliang Zhang ,  Min Li ,  Min Zheng ,  Fenglin Liu ,  Xiaomin Liu

发明人： Kunliang Zhang ,  Min Li ,  Min Zheng ,  Fenglin Liu ,  Xiaomin Liu

IPC分类号： G11B5/31 ,  G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  Y10T428/11 ,  Y10T428/115 ,  Y10T428/1171

摘要： A laminated high moment film with a non-AFC configuration is disclosed that can serve as a seed layer for a main pole layer or as the main pole layer itself in a PMR writer. The laminated film includes a plurality of (B/M) stacks where B is an alignment layer and M is a high moment layer. Adjacent (B/M) stacks are separated by an amorphous layer that breaks the magnetic coupling between adjacent high moment layers and reduces remanence in a hard axis direction while maintaining a high magnetic moment and achieving low values for Hch, Hce, and Hk. The amorphous material layer may be made of an oxide, nitride, or oxynitride of one or more of Hf, Zr, Ta, Al, Mg, Zn, Ti, Cr, Nb, or Si, or may be Hf, Zr, Ta, Nb, CoFeB, CoB, FeB, or CoZrNb. Alignment layers are FCC soft ferromagnetic materials or non-magnetic FCC materials.

摘要翻译： 公开了一种具有非AFC配置的叠层高力矩薄膜，其可用作主磁极层的种子层或作为PMR写入器中的主极点本身。 层叠膜包括多个（B / M）堆叠，其中B是取向层，M是高力矩层。 相邻的（B / M）堆叠被非晶层隔开，其破坏相邻高力矩层之间的磁耦合，并且在保持高磁矩并且实现Hch，Hce和Hk的低值的同时降低硬轴方向的剩磁。 非晶材料层可以由Hf，Zr，Ta，Al，Mg，Zn，Ti，Cr，Nb或Si中的一种或多种的氧化物，氮化物或氮氧化物制成，或者可以是Hf，Zr，Ta， Nb，CoFeB，CoB，FeB或CoZrNb。 对准层是FCC软铁磁材料或非磁性FCC材料。

公开(公告)号：US20120127612A1

公开(公告)日：2012-05-24

申请号：US12954422

申请日：2010-11-24

申请人： Kyusik Shin ,  Qiping Zhong ,  Honglin Zhu ,  Yingjian Chen ,  Liubo Hong ,  Fenglin Liu

发明人： Kyusik Shin ,  Qiping Zhong ,  Honglin Zhu ,  Yingjian Chen ,  Liubo Hong ,  Fenglin Liu

IPC分类号： G11B5/10 ,  G01R1/16

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3163

摘要： Methods for fabrication of leading edge shields and tapered magnetic poles with a tapered leading edge are provided. The leading edge shield may be formed by utilizing a CMP stop layer. The CMP stop layer may aid in preventing over polishing of the magnetic material. For the tapered magnetic poles with a tapered leading edge, a magnetic material is deposited on a planarized surface, a patterned resist material is formed, and exposed magnetic material is etched to form at least one tapered surface of the magnetic material.

公开(公告)号：US20100119874A1

公开(公告)日：2010-05-13

申请号：US12291715

申请日：2008-11-13

申请人： Kunliang Zhang ,  Min Li ,  Min Zheng ,  Fenglin Liu ,  Xiaomin Liu

发明人： Kunliang Zhang ,  Min Li ,  Min Zheng ,  Fenglin Liu ,  Xiaomin Liu

IPC分类号： G11B5/33 ,  C23C14/34

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  Y10T428/11 ,  Y10T428/115 ,  Y10T428/1171

摘要： A laminated high moment film with a non-AFC configuration is disclosed that can serve as a seed layer for a main pole layer or as the main pole layer itself in a PMR writer. The laminated film includes a plurality of (B/M) stacks where B is an alignment layer and M is a high moment layer. Adjacent (B/M) stacks are separated by an amorphous layer that breaks the magnetic coupling between adjacent high moment layers and reduces remanence in a hard axis direction while maintaining a high magnetic moment and achieving low values for Hch, Hce, and Hk. The amorphous material layer may be made of an oxide, nitride, or oxynitride of one or more of Hf, Zr, Ta, Al, Mg, Zn, Ti, Cr, Nb, or Si, or may be Hf, Zr, Ta, Nb, CoFeB, CoB, FeB, or CoZrNb. Alignment layers are FCC soft ferromagnetic materials or non-magnetic FCC materials.

摘要翻译： 公开了一种具有非AFC配置的叠层高力矩薄膜，其可用作主磁极层的种子层或作为PMR写入器中的主极点本身。 层叠膜包括多个（B / M）堆叠，其中B是取向层，M是高力矩层。 相邻（B / M）堆叠被非晶层隔开，其破坏相邻高力矩层之间的磁耦合，并且在保持高磁矩并且实现Hch，Hce和Hk的低值的同时降低硬轴方向的剩磁。 非晶材料层可以由Hf，Zr，Ta，Al，Mg，Zn，Ti，Cr，Nb或Si中的一种或多种的氧化物，氮化物或氮氧化物制成，或者可以是Hf，Zr，Ta， Nb，CoFeB，CoB，FeB或CoZrNb。 对准层是FCC软铁磁材料或非磁性FCC材料。

公开(公告)号：US20080297945A1

公开(公告)日：2008-12-04

申请号：US11809346

申请日：2007-05-31

申请人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

发明人： Cherng-Chyi Han ,  Min Li ,  Fenglin Liu ,  Lijie Guan

IPC分类号： G11B5/127 ,  G11B5/147 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  Y10T29/49032 ,  Y10T29/49052

摘要： A perpendicular magnetic recording (PMR) head is fabricated with a pole tip shielded laterally by a separated pair of bottom side shields and shielded from above by an upper shield. The bottom side shields surround a lower portion of the pole tip while the upper portion of the pole tip is surrounded by non-magnetic layers. The bottom shields and the non-magnetic layer form wedge-shaped trench in which the pole tip is formed by a self-aligned plating process. The wedge shape is formed by a RIE process using specific gases applied through a masking layer formed of material that has a slower etch rate than the non-magnetic material or the shield material. A masking layer of Ta, Ru/Ta, TaN or Ti, formed on a non-magnetic layer of alumina that is formed on a shield layer of NiFe and using RIE gases of CH3OH, CO or NH3 or their combinations, produces the desired result. A write gap layer and an upper shield is then formed above the side shields and pole. The resulting structure substantially eliminates track overwrite while maintaining good track definition.

摘要翻译： 垂直磁记录（PMR）头被制造成具有通过分离的一对底侧屏蔽横向屏蔽的极尖，并由上屏蔽从上面屏蔽。 底侧屏蔽围绕极尖的下部，而极尖的上部被非磁性层包围。 底部屏蔽层和非磁性层形成楔形沟槽，其中极尖通过自对准电镀工艺形成。 楔形形状通过RIE工艺形成，其使用通过由比非磁性材料或屏蔽材料具有较慢蚀刻速率的材料形成的掩模层施加的特定气体。 形成在NiFe的屏蔽层上并使用CH 3 OH，CO或NH 3的RIE气体或其组合的形成在氧化铝的非磁性层上的Ta，Ru / Ta，TaN或Ti的掩蔽层产生期望的结果 。 然后在侧屏和极上方形成写间隙层和上屏蔽。 所得到的结构基本上消除了轨道重写，同时保持良好的轨道定义。

公开(公告)号：US07359150B2

公开(公告)日：2008-04-15

申请号：US11091160

申请日：2005-03-28

申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

IPC分类号： G11B5/39 ,  G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3163

摘要： A trimmed upper pole piece for a magnetic write head is presented, said pole piece having a uniform width above and below a write gap layer and said pole piece being formed on a pedestal of uniform width projecting from a planar surface of a magnetic shield layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the typical alumina write-gap filling material. The present pole piece uses NiCr, NiFeCr or Ru as write gap filling materials because they have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and allow a uniform trimming to occur.

摘要翻译： 提出了一种用于磁性写入头的修整的上极片，所述极片在写间隙层上方和下方具有均匀的宽度，并且所述极片形成在从磁屏蔽层的平坦表面突出的均匀宽度的基座上。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于典型的氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本极极片使用NiCr，NiFeCr或Ru作为写入间隙填充材料，因为它们的蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并允许发生均匀的修整。

公开(公告)号：US06960281B2

公开(公告)日：2005-11-01

申请号：US10394098

申请日：2003-03-21

申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Po Kang Wang ,  Fenglin Liu

IPC分类号： G11B5/31 ,  G11B5/39 ,  C23C14/34

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  G11B5/3967 ,  Y10T29/49032

摘要： A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a tapered profile that is widest at its trailing edge. Such a pole piece is capable of writing narrow tracks with sharply and well defined patterns and minimal overwriting of adjacent tracks. The present method produces the necessary taper by using NiCr, NiFeCr, Rh or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant. As a result, the write gap does not protrude to mask the effects of the ion-beam etch used to form the taper.

摘要翻译： 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片具有在其后缘处最宽的锥形轮廓。 这样的极片能够以清晰明确的图案和相邻轨迹的最小重写来写入窄轨道。 本方法通过使用NiCr，NiFeCr，Rh或Ru作为写入间隙填充材料产生必要的锥度，其具有基本上等于形成极片的其它层的蚀刻速率的蚀刻速率，并且具有高耐腐蚀性。 结果，写入间隙不突出以掩盖用于形成锥形的离子束蚀刻的效果。

公开(公告)号：US06887355B2

公开(公告)日：2005-05-03

申请号：US10284848

申请日：2002-10-31

申请人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

发明人： Cherng-Chyi Han ,  Mao-Min Chen ,  Fenglin Liu

IPC分类号： G11B5/31 ,  C23C14/34 ,  B05D1/40 ,  B05D3/00

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/23 ,  G11B5/3163

摘要： A method for forming a trimmed upper pole piece for a magnetic write head, said pole piece having a uniform width above and below a write gap layer. Prior art methods of trimming pole pieces to a final width using ion-beam etches produce pole pieces with thickness differentials due to the etch resistant nature of the alumina write-gap filling material. The present method uses NiCr, NiFeCr or Ru as write gap filling materials which have an etch rate which is substantially equal to the etch rate of the other layers forming the pole piece and are highly corrosion resistant.

摘要翻译： 一种用于形成用于磁性写入头的修整的上极片的方法，所述极片在写间隙层上方和下方具有均匀的宽度。 使用离子束蚀刻将极片修剪到最终宽度的现有技术方法由于氧化铝写入间隙填充材料的耐蚀刻性质而产生具有厚度差异的极片。 本方法使用NiCr，NiFeCr或Ru作为写入间隙填充材料，其蚀刻速率基本上等于形成极片的其它层的蚀刻速率，并且具有高度耐腐蚀性。

公开(公告)号：US20150170361A1

公开(公告)日：2015-06-18

申请号：US14573967

申请日：2014-12-17

申请人： Ge WANG ,  Fenglin LIU ,  Wenxiang CONG ,  Hengyong YU

发明人： Ge WANG ,  Fenglin LIU ,  Wenxiang CONG ,  Hengyong YU

IPC分类号： G06T7/00 ,  A61B6/00 ,  A61B6/03

CPC分类号： A61B6/4007 ,  A61B6/025 ,  A61B6/027 ,  A61B6/032 ,  A61B6/035 ,  A61B6/4014 ,  A61B6/4452 ,  A61B6/5205 ,  G06T11/006 ,  G06T2211/432 ,  G06T2211/436

摘要： Imaging methods and imaging systems are provided. Methods and systems of the subject invention can include linearly translating a source and a detector. The source and the detector can be moved in opposite or approximately opposite directions. Acquired data can be used to reconstruct a tomographic image by using, for example, a compressive sensing technique.

摘要翻译： 提供成像方法和成像系统。 本发明的方法和系统可以包括线性地平移源和检测器。 源和检测器可以在相反或大致相反的方向移动。 获取的数据可以用于通过使用例如压缩感测技术来重建断层图像。

公开(公告)号：US08628672B1

公开(公告)日：2014-01-14

申请号：US13535091

申请日：2012-06-27

申请人： Weimin Si ,  Ying Hong ,  Zhigang Bai ,  Yunhe Huang ,  Fenglin Liu ,  Hong Zhang ,  Jikou Zhou ,  Xiaoyu Yang ,  Yuan Yao ,  Iulica Zana ,  Feng Liu ,  Ling Wang

发明人： Weimin Si ,  Ying Hong ,  Zhigang Bai ,  Yunhe Huang ,  Fenglin Liu ,  Hong Zhang ,  Jikou Zhou ,  Xiaoyu Yang ,  Yuan Yao ,  Iulica Zana ,  Feng Liu ,  Ling Wang

IPC分类号： B44C1/22

CPC分类号： G11B5/315 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163

摘要： A method for fabricating a magnetic recording transducer having a magnetic writer pole with a short effective throat height is provided. In an embodiment, a writer structure comprising a magnetic writer pole having a trailing bevel and a nonmagnetic stack on the top surface of the writer pole is provided. A dielectric write gap layer comprising alumina is deposited over the trailing bevel section and the nonmagnetic stack; and at least one etch stop layer is deposited over the dielectric write gap layer. A layer of nonmagnetic fill material is deposited over the etch stop layer and to form a nonmagnetic bevel by performing a dry etch process. The etch stop layer(s) are removed from the short throat section; and a trailing shield is deposited over the short throat section, nonmagnetic bevel, and nonmagnetic stack top surface.

摘要翻译： 提供一种制造具有具有短的有效喉部高度的磁性写入极的磁记录换能器的方法。 在一个实施例中，提供了一种写入器结构，其包括在写入器极的顶表面上具有后斜面和非磁性堆叠的磁性写入极。 包含氧化铝的电介质写入间隙层沉积在后斜面部分和非磁性层上; 并且至少一个蚀刻停止层沉积在电介质写间隙层上。 一层非磁性填充材料沉积在蚀刻停止层上并通过执行干法蚀刻工艺形成非磁性斜面。 蚀刻停止层从短喉部分移除; 并且尾部屏蔽层沉积在短喉部分，非磁性斜面和非磁性堆叠顶表面上。

公开(公告)号：US20120154951A1

公开(公告)日：2012-06-21

申请号：US12975010

申请日：2010-12-21

申请人： Wen-Chien D. Hsiao ,  Fenglin Liu ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien D. Hsiao ,  Fenglin Liu ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/187 ,  G11B5/255 ,  G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/1278 ,  G11B5/3146 ,  G11B5/3163

摘要： A method for manufacturing a magnetic write head having a that has a write pole with a tapered trailing edge in a pole tip region, and a trailing shield that has a leading edge that tapers away from the write pole at an angle that is greater than that taper angle of the trailing edge of the write pole. The magnetic head has a step feature with a front edge that is recessed from the ABS. In one embodiment a magnetic wedge is formed over the tapered surface of the write pole. In another embodiment, a non-magnetic bump is formed over a first tapered portion of the write pole adjacent to the front edge of the step feature, and a non-magnetic wedge is formed over a second tapered portion of the write pole and extends from the non-magnetic bump to the air bearing surface.

摘要翻译： 一种用于制造具有在磁极尖端区域具有锥形后缘的写入极的磁性写入头的方法，以及具有与所述写入磁极成角度大于所述磁极尖端的角度的前缘从所述写入磁极分离的前缘的后挡板。 写极后缘的锥角。 磁头具有台阶特征，其前缘从ABS凹入。 在一个实施例中，磁楔形成在写极的锥形表面上。 在另一个实施例中，非磁性凸块形成在与步极特征的前边缘相邻的写磁极的第一锥形部分上方，并且非磁性楔形成在写极的第二锥形部分之上并且从 非磁性凸块到空气轴承表面。