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    Micro valve actuator
    13.
    发明授权
    Micro valve actuator 失效
    微型阀门执行器

    公开(公告)号：US06527003B1

    公开(公告)日：2003-03-04

    申请号：US09717016

    申请日：2000-11-22

    Applicant: James Russell Webster

    Inventor： James Russell Webster

    IPC: F16K3102

    CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K31/02 ,  F16K99/0015 ,  F16K99/0036 ,  F16K2099/008 ,  G01N2035/00247 ,  Y10T137/0491

    Abstract: A simple micro valve actuator is disclosed. The micro valve actuator of this invention comprises a sealed vacuum chamber. The micro valve is actuated by providing a current to a thin film heater, which in turn weakens and, under the atmospheric pressure differential, breaks a diaphragm sealing said vacuum chamber whereby the vacuum inside the chamber is released. By applying the micro valve actuator of this invention to a microfluidic channel with a micro valve, the resulting pressure differential deforms the section of the microchannel at the micro valve area and adjacent to the vacuum chamber so to change the flow inside the microchannel. In the preferred embodiments of this invention, the chamber may be prepared in a silicon, glass, or plastic substrate and a diaphragm is vacuum bonded to seal the chamber. The diaphragm may comprise a metallic gas-impermeable film. A releasing member comprising a thin-film metallic heater is then microfabricated on the diaphragm. The assembly so prepared may be bonded to a glass or plastic substrate that contains a microchannel in which a micro valve is prepared. The invented micro valve actuator is suited for a microfluidic platform in changing the flow in a microchannel.

    Abstract translation: 公开了一种简单的微阀致动器。 本发明的微型阀致动器包括一个密封的真空室。 通过向薄膜加热器提供电流来致动微型阀，薄膜加热器又被弱化，并且在大气压差下破坏了密封所述真空室的隔膜，由此腔室内的真空被释放。 通过将本发明的微阀致动器应用于具有微阀的微流体通道，所产生的压力差使微通道的微通道区域与真空室相邻地变形，从而改变微通道内的流动。 在本发明的优选实施例中，室可以制备在硅，玻璃或塑料基板中，并且隔膜被真空接合以密封室。 隔膜可以包括金属气体不可渗透膜。 然后将包含薄膜金属加热器的释放构件在隔膜上微制成。 如此制备的组件可以结合到包含其中制备微型阀的微通道的玻璃或塑料基板。 本发明的微阀致动器适用于微流体平台，以改变微通道中的流动。

    Microfluidic actuator
    14.
    发明授权
    Microfluidic actuator 失效
    微流控制器

    公开(公告)号：US06521188B1

    公开(公告)日：2003-02-18

    申请号：US09717015

    申请日：2000-11-22

    Applicant: James Russell Webster

    Inventor： James Russell Webster

    IPC: B01L300

    CPC classification number: B01L3/50273 ,  B01L2300/0816 ,  B01L2400/049 ,  B01L2400/0677 ,  B01L2400/0683 ,  F04B19/006 ,  F04F3/00 ,  Y10T137/0396 ,  Y10T137/2224

    Abstract: A simple microfluidic actuator includes a sealed vacuum chamber actuated by providing a current to a thin film heater, which in turn weakens and, under the atmospheric pressure differential, breaks a diaphragm sealing said vacuum chamber whereby the vacuum inside said chamber is released. By applying the microfluidic actuator to a microfluidic network the resulting pressure differential can be used to generate a pumping force with the microfluidic network. The chamber may be prepared in a silicon, glass, or plastic substrate. The diaphragm may be a metallic gas-impermeable film. A releasing member comprising a thin-film metallic heater is then microfabricated on the diaphragm. The assembly so prepared may be bonded to a glass or plastic substrate that contains a network of microchannels. The microfluidic actuator is suited for a microfluidic platform in generating driving powers for operations including pumping, metering, mixing and valving of liquid samples.

    Abstract translation: 简单的微流体致动器包括通过向薄膜加热器提供电流而致动的密封真空室，薄膜加热器进一步削弱，并且在大气压力差下，破坏密封所述真空室的膜片，由此释放所述室内的真空。 通过将微流体致动器应用于微流体网络，所得到的压力差可用于产生具有微流控网络的泵送力。 室可以制备在硅，玻璃或塑料衬底中。 隔膜可以是金属气体不可渗透膜。 然后将包含薄膜金属加热器的释放构件在隔膜上微制成。 如此制备的组件可以结合到包含微通道网络的玻璃或塑料基板上。 微流体致动器适用于微流体平台，用于产生用于液体样品的泵送，计量，混合和阀门操作的驱动功率。

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