Electrostatic chuck
    11.
    发明授权
    Electrostatic chuck 有权
    静电吸盘

    公开(公告)号:US07102872B2

    公开(公告)日:2006-09-05

    申请号:US10823550

    申请日:2004-04-14

    IPC分类号: H01H1/00

    CPC分类号: H01L21/6833 Y10S156/915

    摘要: An ESC (Electrostatic Chuck) to chuck an object by electrostatic force, having an ESC main body supporting the object; a guide ring supported by the ESC main body and encircling the object; a dielectric material layer interposed between the guide ring and the ESC main body; a media gas supplier to supply a media gas to the guide ring; and a power supplier to supply power to the ESC main body. With this configuration, the ESC provides an apparatus to chuck a guide ring to an ESC main body, while maintaining the guide ring and an object, such as a wafer, at the same or similar temperature, thereby enhancing uniformity of the object during a semiconductor manufacturing process such as etching, deposition, or the like.

    摘要翻译: 通过静电力夹住物体的ESC(静电卡盘),具有支撑物体的ESC主体; 由ESC主体支撑并环绕物体的导向环; 介于导向环和ESC主体之间的电介质材料层; 介质气体供应器,用于向引导环供应介质气体; 以及向ESC主体供电的电源。 利用这种结构,ESC提供了一种将ESC导向环夹持到ESC主体的装置,同时保持引导环和诸如晶片的物体处于相同或相似的温度,从而在半导体中提高物体的均匀性 制造工艺如蚀刻,沉积等。

    Input/output valve switching apparatus of semiconductor manufacturing system
    12.
    发明授权
    Input/output valve switching apparatus of semiconductor manufacturing system 失效
    半导体制造系统的输入/输出阀开关装置

    公开(公告)号:US06824617B2

    公开(公告)日:2004-11-30

    申请号:US10131239

    申请日:2002-04-25

    IPC分类号: C23C1600

    摘要: An input/output valve switching apparatus of a semiconductor manufacturing system minimizes a vibration set up while operating an input/output valve for opening and closing a wafer-transfer passage that connects chambers of the system. The switching apparatus includes a valve actuator having a close port and an open port, a first fluid line connected to the close port, a second fluid line connected to the open port, first flow regulators installed in the first and second fluid lines, respectively, to regulate the flow rate of fluid, and second fluid flow regulators installed in the first and second fluid lines to regulate the flow rate of the fluid that has passed. The second fluid flow regulators can prevent a rapid introduction of the fluid into the actuator.

    摘要翻译: 半导体制造系统的输入/输出阀开关装置在操作用于打开和关闭连接系统的腔室的晶片传送通道的输入/输出阀时最小化振动。 开关装置包括具有关闭端口和开放端口的阀致动器,连接到关闭端口的第一流体管线,连接到开放端口的第二流体管线,分别安装在第一和第二流体管线中的第一流量调节器, 以调节流体的流量,以及第二流体流量调节器,其安装在第一和第二流体管线中,以调节流过的流体的流量。 第二流体流量调节器可以防止流体快速引入致动器。

    Process for the preparation of 3-isothiazolone mixture and composition comprising the mixture
    14.
    发明授权
    Process for the preparation of 3-isothiazolone mixture and composition comprising the mixture 有权
    制备含有该混合物的3-异噻唑酮混合物和组合物的方法

    公开(公告)号:US06376680B1

    公开(公告)日:2002-04-23

    申请号:US09866009

    申请日:2001-05-24

    IPC分类号: C07D27503

    摘要: An impurity-free biologically active mixture of 2-methyl-4-isothiazolin-3-one and 5-chloro-2-methyl-4-isothiazolin-3-one, which is useful as a biocide in various products, can be prepared by reacting N-methyl-3-mercaptopropionamide or N,N′-dimethyl-3,3′-dithiodipropionamide or a mixture thereof dissolved in a first organic solvent with sulfuryl chloride dissolved in a second organic solvent, which is different from the first organic solvent, at a temperature ranging from 5 to 20° C. and, optionally, centrifuging the resulting product mixture to obtain the desired mixture substantially free of 4,5-dichloro-2-methyl-4-isothiazolin-3-one impurity.

    摘要翻译: 可用作各种产品中的杀生物剂的2-甲基-4-异噻唑啉-3-酮和5-氯-2-甲基-4-异噻唑啉-3-酮的无杂质生物活性混合物可以通过 使N-甲基-3-巯基丙酰胺或N,N'-二甲基-3,3'-二硫代二丙酰胺或其溶解在第一有机溶剂中的混合物与溶于第二有机溶剂中的磺酰氯反应,该第二有机溶剂与第一有机溶剂 ,在5至20℃的温度下,并且任选地将所得产物混合物离心以获得基本上不含4,5-二氯-2-甲基-4-异噻唑啉-3-酮杂质的所需混合物。

    Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield
    15.
    发明授权
    Inductive-coupled plasma apparatus employing shield and method for manufacturing the shield 失效
    使用屏蔽的感应耦合等离子体装置和用于制造屏蔽的方法

    公开(公告)号:US06251241B1

    公开(公告)日:2001-06-26

    申请号:US09546557

    申请日:2000-04-10

    IPC分类号: C23C1434

    CPC分类号: H01J37/321

    摘要: An inductive-coupled plasma apparatus employs a shield to reduce sputter contamination. A method for manufacturing the shield is included. An apparatus for generating a high-density plasma includes a process chamber having a dielectric window located along a plane, a coil located outside the process chamber proximate to the dielectric window and substantially parallel to the plane, and a shield located between the coil and the dielectric window. The shield has multiple openings, wherein the multiple openings of the shield are disposed at locations corresponding to areas between the turns of the coil.

    摘要翻译: 电感耦合等离子体装置采用屏蔽来减少溅射污染。 包括制造屏蔽的方法。 一种用于产生高密度等离子体的设备包括具有沿着平面定位的介电窗口的处理室,位于处理室外部的线圈,靠近电介质窗口并基本上平行于该平面,以及位于线圈和 电介质窗。 屏蔽件具有多个开口,其中屏蔽件的多个开口设置在对应于线圈匝之间的区域的位置处。

    Composition for enhancing TRAIL sensitivity comprising inhibitors for expression or activity of TIP41 as a target gene of TRAIL sensitizer
    17.
    发明授权
    Composition for enhancing TRAIL sensitivity comprising inhibitors for expression or activity of TIP41 as a target gene of TRAIL sensitizer 有权
    用于增强TRAIL灵敏度的组合物,其包含作为TRAIL增敏剂靶标基因的TIP41的表达或活性的抑制剂

    公开(公告)号:US08703732B2

    公开(公告)日:2014-04-22

    申请号:US13579256

    申请日:2011-04-01

    CPC分类号: A61K38/16 A61K31/7105

    摘要: The present invention relates to a pharmaceutical composition, including inhibitors for expression or activity of TIP41 protein, for prevention and treatment of cancer. When the liver cancer cell lines, showing resistance to TRAIL, are treated with TIP41 siRNA and TRAIL, apoptosis is induced in cancer cell. The same effect is found in cases of lung cancer and colon cancer with resistance against TRAIL. Moreover, this induction of apoptosis by TIP41 siRNA and TRAIL was confirmed in tumor xenograft, which was injected with Huh7 liver cancer cells and then was subjected to TIP41 siRNA transfection and TRAIL treatment. In addition, it was confirmed through animal experiments in which the tumor size has reduced and apoptosis was induced by treatment with TIP41 siRNA and TRAIL. Of note, MKK7/JNK pathway was confirmed to mediate the apoptosis induced by the application of TIP41 siRNA and TRAIL. The apoptosis were verified to be caused by the activation of MKK7/JNK signaling pathway. Taken together, the present invention provide the strong evidence that the pharmaceutical composition, including inhibitors for TIP41 expression or activity can be used for cancer prevention and treatment as well as an anti-cancer adjuvant. Taken together, the pharmaceutical composition comprising inhibitors for expression or activity of TIP41 protein may be used for prevention and treatment of cancer or as an anti-cancer adjuvant.

    摘要翻译: 本发明涉及包含用于预防和治疗癌症的TIP41蛋白表达或活性抑制剂的药物组合物。 当显示对TRAIL的抗性的肝癌细胞系用TIP41 siRNA和TRAIL处理时,在癌细胞中诱导细胞凋亡。 在具有抗TRAIL的肺癌和结肠癌的情况下也发现了相同的效果。 此外,在注射Huh7肝癌细胞的肿瘤异种移植物中证实了TIP41 siRNA和TRAIL的这种诱导凋亡,然后进行TIP41 siRNA转染和TRAIL处理。 此外,通过用TIP41 siRNA和TRAIL处理诱导肿瘤大小减少并诱导细胞凋亡的动物实验证实。 值得注意的是,MKK7 / JNK途径被证实可以介导应用TIP41 siRNA和TRAIL诱导的细胞凋亡。 验证细胞凋亡是由MKK7 / JNK信号通路的激活引起的。 综合起来,本发明提供了强有力的证据,包括用于TIP41表达或活性的抑制剂的药物组合物可用于癌症预防和治疗以及抗癌辅助剂。 总之,包含TIP41蛋白表达或活性抑制剂的药物组合物可用于预防和治疗癌症或作为抗癌辅助剂。

    APPARATUS AND METHOD FOR MEASURING QUALITY OF IMAGE RECEIVED VIA COMMUNICATION NETWORK
    20.
    发明申请
    APPARATUS AND METHOD FOR MEASURING QUALITY OF IMAGE RECEIVED VIA COMMUNICATION NETWORK 有权
    用于测量通过通信网络接收的图像质量的装置和方法

    公开(公告)号:US20080137968A1

    公开(公告)日:2008-06-12

    申请号:US11944538

    申请日:2007-11-23

    IPC分类号: G06K9/68

    CPC分类号: H04N17/004

    摘要: Disclosed herein are an apparatus and method for measuring quality of an image received via a communication network. The apparatus includes an interface unit, a codec unit, a test image detection unit, and a Mean Opinion Score (MOS) measurement unit. The interface unit receives an image, including a start synchronization image and a test image via a communication network. The codec unit decodes the received image into a color signal. The test image detection unit detects any one value of brightness, saturation and hue information of the color signal input from the codec unit, calculates an average value for each frame, and detects the test image from the received image based on the calculated average value. The MOS measurement unit synchronizes the test image with a corresponding reference image, compares the quality of the test image with the quality of the reference image, calculates an MOS value based on the results of the comparison, and outputs the MOS value.

    摘要翻译: 这里公开了一种用于测量经由通信网络接收的图像的质量的装置和方法。 该装置包括接口单元,编解码器单元,测试图像检测单元和平均意见得分(MOS)测量单元。 接口单元通过通信网络接收包括起始同步图像和测试图像的图像。 编解码器单元将接收到的图像解码为颜色信号。 测试图像检测单元检测从编解码器单元输入的颜色信号的亮度,饱和度和色调信息中的任何一个值,计算每帧的平均值,并且基于所计算的平均值从接收到的图像检测测试图像。 MOS测量单元将测试图像与相应的参考图像同步,将测试图像的质量与参考图像的质量进行比较,基于比较结果计算MOS值,并输出MOS值。