Methods of fabricating semiconductor integrated circuits using selective epitaxial growth and partial planarization techniques
    11.
    发明授权
    Methods of fabricating semiconductor integrated circuits using selective epitaxial growth and partial planarization techniques 失效
    使用选择性外延生长和部分平面化技术制造半导体集成电路的方法

    公开(公告)号:US07247528B2

    公开(公告)日:2007-07-24

    申请号:US11065750

    申请日:2005-02-24

    IPC分类号: H01L21/00

    CPC分类号: H01L27/1108 H01L27/11

    摘要: Methods of fabricating a semiconductor integrated circuit having thin film transistors using an SEG technique are provided. The methods include forming an inter-layer insulating layer on a single-crystalline semiconductor substrate. A single-crystalline semiconductor plug extends through the inter-layer insulating layer, and a single-crystalline epitaxial semiconductor pattern is in contact with the single-crystalline semiconductor plug on the inter-layer insulating layer. The single-crystalline epitaxial semiconductor pattern is at least partially planarized to form a semiconductor body layer on the inter-layer insulating layer, and the semiconductor body layer is patterned to form a semiconductor body. As a result, the semiconductor body includes at least a portion of the single-crystalline epitaxial semiconductor pattern. Thus, the semiconductor body has an excellent single-crystalline structure. Semiconductor integrated circuits fabricated using the methods are also provided.

    摘要翻译: 提供了使用SEG技术制造具有薄膜晶体管的半导体集成电路的方法。 所述方法包括在单晶半导体衬底上形成层间绝缘层。 单晶半导体插件延伸穿过层间绝缘层,并且单晶外延半导体图案与层间绝缘层上的单晶半导体插头接触。 单晶外延半导体图案至少部分地平坦化以在层间绝缘层上形成半导体本体层,并且对半导体本体层进行图案化以形成半导体本体。 结果,半导体本体包括单晶外延半导体图案的至少一部分。 因此,半导体本体具有优异的单晶结构。 还提供了使用这些方法制造的半导体集成电路。

    Methods of fabricating a semiconductor device having a node contact structure of a CMOS inverter
    12.
    发明申请
    Methods of fabricating a semiconductor device having a node contact structure of a CMOS inverter 有权
    制造具有CMOS反相器的节点接触结构的半导体器件的方法

    公开(公告)号:US20060115944A1

    公开(公告)日:2006-06-01

    申请号:US11281346

    申请日:2005-11-16

    IPC分类号: H01L21/8238

    摘要: In one embodiment, an intrinsic single crystalline semiconductor plug is formed to pass through a lower insulating layer using a selective epitaxial growth process employing a node impurity region as a seed layer, and a single crystalline semiconductor body pattern is formed on the lower insulating layer using the intrinsic single crystalline semiconductor plug as a seed layer. When the recessed single crystalline semiconductor plug is doped with impurities having the same conductivity type as the node impurity region, a peripheral impurity region is prevented from being counter-doped. As a result, it is possible to implement a high performance semiconductor device that requires a single crystalline thin film transistor as well as a node contact structure with ohmic contact.

    摘要翻译: 在一个实施例中,使用使用节点杂质区域作为种子层的选择性外延生长工艺,形成本征单晶半导体插塞以穿过下绝缘层,并且在下绝缘层上形成单晶体半导体本体图案,使用 本征单晶半导体插头作为种子层。 当嵌入的单晶半导体插件掺杂有与节点杂质区相同的导电类型的杂质时,防止外围杂质区域被反掺杂。 结果,可以实现需要单晶薄膜晶体管的高性能半导体器件以及具有欧姆接触的节点接触结构。

    Methods of fabricating semiconductor devices having thin film transistors
    13.
    发明申请
    Methods of fabricating semiconductor devices having thin film transistors 有权
    制造具有薄膜晶体管的半导体器件的方法

    公开(公告)号:US20050221544A1

    公开(公告)日:2005-10-06

    申请号:US11098648

    申请日:2005-04-04

    摘要: Methods of fabricating semiconductor devices are provided. An interlayer insulating layer is provided on a single crystalline semiconductor substrate. A single crystalline semiconductor plug is provided that extends through the interlayer insulating layer and a molding layer pattern is provided on the semiconductor substrate and the single crystalline semiconductor plug. The molding layer pattern defines an opening therein that at least partially exposes a portion of the single crystalline semiconductor plug. A single crystalline semiconductor epitaxial pattern is provided on the exposed portion of single crystalline semiconductor plug using a selective epitaxial growth technique that uses the exposed portion of the single crystalline semiconductor plug as a seed layer. A single crystalline semiconductor region is provided in the opening. The single crystalline semiconductor region includes at least a portion of the single crystalline semiconductor epitaxial pattern.

    摘要翻译: 提供制造半导体器件的方法。 层间绝缘层设置在单晶半导体衬底上。 提供延伸穿过层间绝缘层的单晶半导体插头,并且在半导体衬底和单晶半导体插头上设置成型层图案。 模制层图案限定其中的开口,其至少部分地暴露单晶半导体插塞的一部分。 使用选择性外延生长技术在单晶半导体插塞的暴露部分上提供单晶半导体外延图案,其使用单晶半导体插塞的暴露部分作为籽晶层。 在开口中设置单晶半导体区域。 单晶半导体区域包括单晶半导体外延图案的至少一部分。

    Oil supply apparatus for hermetic compressor
    14.
    发明授权
    Oil supply apparatus for hermetic compressor 有权
    封闭式压缩机供油装置

    公开(公告)号:US06866123B2

    公开(公告)日:2005-03-15

    申请号:US10144789

    申请日:2002-05-15

    申请人: Jong-Hyuk Kim

    发明人: Jong-Hyuk Kim

    摘要: An oil supply apparatus for a hermetic compressor includes: a crankshaft coupled with a motor so as to revolve together and having an oil flow path inside, a sleeve connected to a lower part of the crankshaft so as to revolve together with the crankshaft in one body, a sucking member arranged to maintain a uniform interval with an inner circumference face of the sleeve so as to carry out a suction of an oil, and a support means for supporting the sucking member to slide, the support means connected between the sleeve and sucking member so as to maintain a stationary state. The sucking member is supported so as not to revolve at the revolving center of the sleeve, thereby maintaining a uniform gap between the inner circumference face of the sleeve and the sucking member regardless of the vibration from the actuating compressor so as to improve oil supply reliance.

    摘要翻译: 一种用于封闭式压缩机的供油装置,包括:曲轴,其与电动机结合,以一体旋转并具有内部的油流路;套筒与曲轴的下部连接,并与曲轴一起旋转; 吸引构件,其设置成与所述套筒的内周面保持均匀的间隔,以便执行油的抽吸;以及支撑装置,用于支撑所述吸附构件滑动,所述支撑装置连接在所述套筒和抽吸之间 成员以保持静止状态。 吸引构件被支撑成不在套筒的旋转中心旋转,从而在套筒的内周面与吸入构件之间保持均匀的间隙,而与来自致动压缩机的振动无关,从而提高供油依赖性 。

    Oil supply apparatus for hermetic compressor

    公开(公告)号:US06666301B2

    公开(公告)日:2003-12-23

    申请号:US10144790

    申请日:2002-05-15

    申请人: Jong-Hyuk Kim

    发明人: Jong-Hyuk Kim

    IPC分类号: F01M100

    摘要: An oil supply apparatus for a hermetic compressor includes: a crankshaft coupled with a rotor of a motor so as to revolve together and having an oil flow path inside, a sleeve connected to a lower part of the crankshaft so as to revolve together with the crankshaft 107 in one body, a sucking member arranged to maintain a uniform interval with an inner circumference face of the sleeve so as to revolve in a direction opposite to that of the sleeve to carry out a suction of an oil, and a rotating force transferring means for supporting the sucking member so that the sucking member revolves together with the sleeve and receiving a rotating force of the sleeve so as to revolve the sucking member in a direction opposite to a revolving direction of the sleeve. The relative revolution speed between the sleeve and sucking member increases so as to increase the oil supply to the sliding and frictional parts, thereby enabling to improve a lubrication performance of the compressor. When the compressor generates vibration, the sucking member and sleeve vibrate with the same amplitude so as to maintain uniformly the gap between the sleeve and sucking member. Therefore, the present invention enables to improve a reliance of the oil supply.

    DISPLAY DEVICE HAVING TOUCH PANEL
    16.
    发明申请
    DISPLAY DEVICE HAVING TOUCH PANEL 有权
    具有触控面板的显示设备

    公开(公告)号:US20120044662A1

    公开(公告)日:2012-02-23

    申请号:US13209169

    申请日:2011-08-12

    IPC分类号: H05K9/00

    摘要: A display device having a touch panel which effectively intercepts noise generated from a display panel to prevent the touch panel from malfunctioning. The display device having the touch panel includes a display panel, a touch panel attached to the display panel through an adhesion layer, a noise interception layer over an entire rear surface of the touch panel to prevent electrical noise from the display panel from being introduced into the touch panel, a metal ring pattern on the noise interception layer to surround the edge of the noise interception layer and having lower electrical resistance than the noise interception layer, and a ground terminal electrically connected to the noise interception layer and the metal ring pattern.

    摘要翻译: 一种具有触摸面板的显示装置,其有效地拦截从显示面板产生的噪声,以防止触摸面板发生故障。 具有触摸面板的显示装置包括显示面板,通过粘合层附着到显示面板的触摸面板,在触摸面板的整个后表面上的噪声截取层,以防止来自显示面板的电噪声被引入 所述触摸面板,所述噪声截取层上的围绕所述噪声截取层的边缘并且具有比所述噪声截取层更低的电阻的金属环图案,以及电连接到所述噪声截取层和所述金属环图案的接地端子。

    Non-volatile memory devices including etching protection layers and methods of forming the same
    19.
    发明授权
    Non-volatile memory devices including etching protection layers and methods of forming the same 有权
    包括蚀刻保护层的非易失性存储器件及其形成方法

    公开(公告)号:US07589375B2

    公开(公告)日:2009-09-15

    申请号:US11642297

    申请日:2006-12-20

    IPC分类号: H01L27/115

    摘要: A non-volatile memory device includes a semiconductor substrate including a cell array region and a peripheral circuit region. A first cell unit is on the semiconductor substrate in the cell array region, and a cell insulating layer is on the first cell unit. A first active body layer is in the cell insulating layer and over the first cell unit, and a second cell unit is on the first active body layer. The device further includes a peripheral transistor on the semiconductor substrate in the peripheral circuit region. The peripheral transistor has a gate pattern and source/drain regions, and a metal silicide layer is on the gate pattern and/or on the source/drain regions of the peripheral transistor. A peripheral insulating layer is on the metal silicide layer and the peripheral transistor, and an etching protection layer is between the cell insulating layer and the peripheral insulating layer and between the metal silicide layer and the peripheral insulating layer.

    摘要翻译: 非易失性存储器件包括包括单元阵列区域和外围电路区域的半导体衬底。 第一单元单元位于单元阵列区域中的半导体基板上,单元绝缘层位于第一单元单元上。 第一有源体层位于单元绝缘层中并在第一单元单元上,第二单元单元位于第一活性体层上。 该器件还包括在外围电路区域中的半导体衬底上的外围晶体管。 外围晶体管具有栅极图案和源极/漏极区域,并且金属硅化物层位于外围晶体管的栅极图案和/或源极/漏极区域上。 外围绝缘层位于金属硅化物层和外围晶体管上,蚀刻保护层位于电池绝缘层和外围绝缘层之间以及金属硅化物层和外围绝缘层之间。