摘要:
Methods of fabricating a semiconductor integrated circuit having thin film transistors using an SEG technique are provided. The methods include forming an inter-layer insulating layer on a single-crystalline semiconductor substrate. A single-crystalline semiconductor plug extends through the inter-layer insulating layer, and a single-crystalline epitaxial semiconductor pattern is in contact with the single-crystalline semiconductor plug on the inter-layer insulating layer. The single-crystalline epitaxial semiconductor pattern is at least partially planarized to form a semiconductor body layer on the inter-layer insulating layer, and the semiconductor body layer is patterned to form a semiconductor body. As a result, the semiconductor body includes at least a portion of the single-crystalline epitaxial semiconductor pattern. Thus, the semiconductor body has an excellent single-crystalline structure. Semiconductor integrated circuits fabricated using the methods are also provided.
摘要:
In one embodiment, an intrinsic single crystalline semiconductor plug is formed to pass through a lower insulating layer using a selective epitaxial growth process employing a node impurity region as a seed layer, and a single crystalline semiconductor body pattern is formed on the lower insulating layer using the intrinsic single crystalline semiconductor plug as a seed layer. When the recessed single crystalline semiconductor plug is doped with impurities having the same conductivity type as the node impurity region, a peripheral impurity region is prevented from being counter-doped. As a result, it is possible to implement a high performance semiconductor device that requires a single crystalline thin film transistor as well as a node contact structure with ohmic contact.
摘要:
Methods of fabricating semiconductor devices are provided. An interlayer insulating layer is provided on a single crystalline semiconductor substrate. A single crystalline semiconductor plug is provided that extends through the interlayer insulating layer and a molding layer pattern is provided on the semiconductor substrate and the single crystalline semiconductor plug. The molding layer pattern defines an opening therein that at least partially exposes a portion of the single crystalline semiconductor plug. A single crystalline semiconductor epitaxial pattern is provided on the exposed portion of single crystalline semiconductor plug using a selective epitaxial growth technique that uses the exposed portion of the single crystalline semiconductor plug as a seed layer. A single crystalline semiconductor region is provided in the opening. The single crystalline semiconductor region includes at least a portion of the single crystalline semiconductor epitaxial pattern.
摘要:
An oil supply apparatus for a hermetic compressor includes: a crankshaft coupled with a motor so as to revolve together and having an oil flow path inside, a sleeve connected to a lower part of the crankshaft so as to revolve together with the crankshaft in one body, a sucking member arranged to maintain a uniform interval with an inner circumference face of the sleeve so as to carry out a suction of an oil, and a support means for supporting the sucking member to slide, the support means connected between the sleeve and sucking member so as to maintain a stationary state. The sucking member is supported so as not to revolve at the revolving center of the sleeve, thereby maintaining a uniform gap between the inner circumference face of the sleeve and the sucking member regardless of the vibration from the actuating compressor so as to improve oil supply reliance.
摘要:
An oil supply apparatus for a hermetic compressor includes: a crankshaft coupled with a rotor of a motor so as to revolve together and having an oil flow path inside, a sleeve connected to a lower part of the crankshaft so as to revolve together with the crankshaft 107 in one body, a sucking member arranged to maintain a uniform interval with an inner circumference face of the sleeve so as to revolve in a direction opposite to that of the sleeve to carry out a suction of an oil, and a rotating force transferring means for supporting the sucking member so that the sucking member revolves together with the sleeve and receiving a rotating force of the sleeve so as to revolve the sucking member in a direction opposite to a revolving direction of the sleeve. The relative revolution speed between the sleeve and sucking member increases so as to increase the oil supply to the sliding and frictional parts, thereby enabling to improve a lubrication performance of the compressor. When the compressor generates vibration, the sucking member and sleeve vibrate with the same amplitude so as to maintain uniformly the gap between the sleeve and sucking member. Therefore, the present invention enables to improve a reliance of the oil supply.
摘要:
A display device having a touch panel which effectively intercepts noise generated from a display panel to prevent the touch panel from malfunctioning. The display device having the touch panel includes a display panel, a touch panel attached to the display panel through an adhesion layer, a noise interception layer over an entire rear surface of the touch panel to prevent electrical noise from the display panel from being introduced into the touch panel, a metal ring pattern on the noise interception layer to surround the edge of the noise interception layer and having lower electrical resistance than the noise interception layer, and a ground terminal electrically connected to the noise interception layer and the metal ring pattern.
摘要:
On embodiment of a contact structure may include a lower insulation layer on a lower substrate, an upper substrate on the lower insulation layer, a groove penetrating the upper substrate to extend into the lower insulation layer, the groove below an interface between the upper substrate and the lower insulation layer, an upper insulation layer in the groove, and a contact plug penetrating the upper insulation layer in the groove to extend into the lower insulation layer.
摘要:
Disclosed are a substrate level bonding method and a substrate level package formed thereby. The substrate level package includes a plurality of unit substrate sections, a base substrate, and a plurality of substrate adhesion sections. The unit substrate sections are separated from each other by holes. The base substrate is disposed to face the unit substrate sections. The substrate adhesion sections are interposed between the unit substrate sections and the base substrate to bond the unit substrate sections to the base substrate and which are formed of DFR material, whose at least one portion is uncured.
摘要:
A non-volatile memory device includes a semiconductor substrate including a cell array region and a peripheral circuit region. A first cell unit is on the semiconductor substrate in the cell array region, and a cell insulating layer is on the first cell unit. A first active body layer is in the cell insulating layer and over the first cell unit, and a second cell unit is on the first active body layer. The device further includes a peripheral transistor on the semiconductor substrate in the peripheral circuit region. The peripheral transistor has a gate pattern and source/drain regions, and a metal silicide layer is on the gate pattern and/or on the source/drain regions of the peripheral transistor. A peripheral insulating layer is on the metal silicide layer and the peripheral transistor, and an etching protection layer is between the cell insulating layer and the peripheral insulating layer and between the metal silicide layer and the peripheral insulating layer.
摘要:
Provided is a NAND-type nonvolatile memory device and method of forming the same. In the method, a plurality of cell layers are stacked on a semiconductor substrate. Seed contact holes for forming a semiconductor pattern included in a stacked cell are formed at regular distance. At this time, the seed contact holes are arranged such that a bit line plug or a source line pattern is disposed at a center between one pair of seed contact holes adjacent to each other.