公开(公告)号：US08493130B2

公开(公告)日：2013-07-23

申请号：US13553595

申请日：2012-07-19

申请人： Mitsuya Fukazawa ,  Kenji Furusawa ,  Masao Ito ,  Naoko Uchida

发明人： Mitsuya Fukazawa ,  Kenji Furusawa ,  Masao Ito ,  Naoko Uchida

IPC分类号： H01L35/00 ,  H01L37/00 ,  H03K3/42 ,  H03K17/78

CPC分类号： G05F1/567

摘要： A reference voltage generating circuit that accurately corrects temperature characteristics of a BGR (bandgap reference) circuit and a regulator. A voltage dividing circuit outputs first and second voltages obtained by dividing a BGR voltage. The regulator includes a differential amplifier, first and second resisters coupled in series between the output terminal of the differential amplifier and the ground. The positive input terminal of the differential amplifier receives the BGR voltage, and the negative input terminal is coupled to a coupled node between third and fourth resistors. The BGR circuit outputs a third voltage varying with a temperature determined by a predetermined amount of current flowing in the BGR circuit and a predetermined resistor. A temperature-characteristics correcting circuit controls a correcting current flowing through the coupled node so that its magnitude varies with the difference between the first and third voltages, and the difference between the second and third voltages.

摘要翻译： 一种精确校正BGR（带隙基准）电路和调节器的温度特性的参考电压发生电路。 分压电路输出通过划分BGR电压而获得的第一和第二电压。 调节器包括差分放大器，第一和第二电阻串联耦合在差分放大器的输出端和地之间。 差分放大器的正输入端接收BGR电压，负输入端耦合到第三和第四电阻之间的耦合节点。 BGR电路输出由在BGR电路中流动的预定电流量和预定电阻器确定的温度变化的第三电压。 温度特性校正电路控制流过耦合节点的校正电流，使得其幅度随着第一和第三电压之间的差异以及第二和第三电压之间的差异而变化。

公开(公告)号：US20130033305A1

公开(公告)日：2013-02-07

申请号：US13553595

申请日：2012-07-19

申请人： Mitsuya FUKAZAWA ,  Kenji FURUSAWA ,  Masao ITO ,  Naoko UCHIDA

发明人： Mitsuya FUKAZAWA ,  Kenji FURUSAWA ,  Masao ITO ,  Naoko UCHIDA

IPC分类号： G05F1/10

CPC分类号： G05F1/567

摘要： A reference voltage generating circuit that accurately corrects temperature characteristics of a BGR (bandgap reference) circuit and a regulator. A voltage dividing circuit outputs first and second voltages obtained by dividing a BGR voltage. The regulator includes a differential amplifier, first and second resisters coupled in series between the output terminal of the differential amplifier and the ground. The positive input terminal of the differential amplifier receives the BGR voltage, and the negative input terminal is coupled to a coupled node between third and fourth resistors. The BGR circuit outputs a third voltage varying with a temperature determined by a predetermined amount of current flowing in the BGR circuit and a predetermined resistor. A temperature-characteristics correcting circuit controls a correcting current flowing through the coupled node so that its magnitude varies with the difference between the first and third voltages, and the difference between the second and third voltages.

摘要翻译： 一种精确校正BGR（带隙基准）电路和调节器的温度特性的参考电压发生电路。 分压电路输出通过划分BGR电压而获得的第一和第二电压。 调节器包括差分放大器，第一和第二电阻串联耦合在差分放大器的输出端和地之间。 差分放大器的正输入端接收BGR电压，负输入端耦合到第三和第四电阻之间的耦合节点。 BGR电路输出由在BGR电路中流动的预定电流量和预定电阻器确定的温度变化的第三电压。 温度特性校正电路控制流过耦合节点的校正电流，使得其幅度随着第一和第三电压之间的差异以及第二和第三电压之间的差异而变化。

公开(公告)号：US20080047577A1

公开(公告)日：2008-02-28

申请号：US11849857

申请日：2007-09-04

申请人： Hideto Goto ,  Kenji Furusawa ,  Satoshi Joya ,  Ryuji Sotoaka ,  Keiichi Tanaka ,  Yoshiya Kimura ,  Tomoyuki Azuma

发明人： Hideto Goto ,  Kenji Furusawa ,  Satoshi Joya ,  Ryuji Sotoaka ,  Keiichi Tanaka ,  Yoshiya Kimura ,  Tomoyuki Azuma

IPC分类号： B08B3/12

CPC分类号： B08B7/0035 ,  B08B3/10 ,  H01L21/02052 ,  H01L21/67051 ,  H01L21/67115

摘要： A substrate cleaning device includes a rotating table that rotatably holds a silicon substrate. A light irradiation device is capable of irradiating at least a portion of a surface of the held silicon substrate with light. A nozzle is capable of selectively supplying at least N2O water and a hydrofluoric acid solution onto the substrate. A control unit controls the supply of the light irradiation device and the nozzle and enables light irradiation by the light irradiation device when the N2O water is supplied onto the silicon substrate.

摘要翻译： 一种基板清洁装置，包括可旋转地保持硅基板的旋转台。 光照射装置能够用光照射被保持的硅衬底的表面的至少一部分。 喷嘴能够选择性地将至少N 2 O 2 O水和氢氟酸溶液供应到基底上。 控制单元控制光照射装置和喷嘴的供给，并且当N 2 O 2水被供应到硅基板上时，能够通过光照射装置进行光照射。

公开(公告)号：US07157162B2

公开(公告)日：2007-01-02

申请号：US11036064

申请日：2005-01-18

申请人： Kazusuke Yamanaka ,  Tomoo Yamamoto ,  Yuzuru Hosoe ,  Nobuyuki Inaba ,  Yasutaro Uesaka ,  Masaaki Futamoto ,  Yoshibumi Matsuda ,  Kenji Furusawa ,  Shinji Narishige

发明人： Kazusuke Yamanaka ,  Tomoo Yamamoto ,  Yuzuru Hosoe ,  Nobuyuki Inaba ,  Yasutaro Uesaka ,  Masaaki Futamoto ,  Yoshibumi Matsuda ,  Kenji Furusawa ,  Shinji Narishige

IPC分类号： G11B5/65

CPC分类号： G11B5/64 ,  Y10T428/12465 ,  Y10T428/12986 ,  Y10T428/265 ,  Y10T428/31

摘要： A magnetic recording medium having a substrate, an under-layer formed on the substrate, a magnetic layer formed on the substrate and a protective layer formed on the magnetic layer. The magnetic layer comprises Co, Cr and Pt with a thickness being from 10 nm to 22 nm. Further, a coercivity of the magnetic layer is not less than 2000 Oe, and a fluctuation field of magnetic viscosity at a field strength equal to remanence coercivity or coercivity is not less than 30 Oe.

摘要翻译： 具有基板的磁记录介质，在基板上形成的下层，形成在基板上的磁性层和形成在磁性层上的保护层。 磁性层包括厚度为10nm至22nm的Co，Cr和Pt。 此外，磁性层的矫顽力不小于2000Oe，磁场强度等于剩磁矫顽力或矫顽磁力的磁场粘度的波动范围不小于30Oe。

公开(公告)号：US06638403B1

公开(公告)日：2003-10-28

申请号：US09644072

申请日：2000-08-23

申请人： Hiroshi Inaba ,  Shinji Sasaki ,  Shinya Hirano ,  Kenji Furusawa ,  Minoru Yamasaka ,  Atsushi Amatatsu ,  Shi Xu

发明人： Hiroshi Inaba ,  Shinji Sasaki ,  Shinya Hirano ,  Kenji Furusawa ,  Minoru Yamasaka ,  Atsushi Amatatsu ,  Shi Xu

IPC分类号： C23C1400

CPC分类号： H01J37/32055 ,  C23C14/325 ,  H01J37/3266

摘要： In the plasma processing device which utilizes a low pressure arc discharge, a method for efficiently capturing and removing electrically charged particles and neutral particles having no charge which are at most 5 &mgr;m in particle diameter is demanded. The electrically charged particles can be captured efficiently by installing an electric field filter in a transportation course of plasma. The electric field filter has a cylindrical structure which is uneven in inner wall shape. A voltage in the range of 10 to 90 V is applied to the electric field filter. The neutral filters can be captured efficiently by installing a neutral filter having an opening sectional area which is at most 40% of a sectional area of the transportation course.

摘要翻译： 在使用低压电弧放电的等离子体处理装置中，要求有效地捕获和去除带电粒子的方法和粒径不超过5μm的无电荷的中性粒子。 通过在等离子体的输送过程中安装电场滤波器可以有效地捕获带电粒子。 电场滤波器具有内壁形状不均匀的圆筒状结构。 对电场滤波器施加10〜90V范围的电压。 可以通过安装具有开口截面积至多为运输路线横截面面积的40％的中性过滤器来有效地捕获中性过滤器。

公开(公告)号：US20050028929A1

公开(公告)日：2005-02-10

申请号：US10909977

申请日：2004-08-03

申请人： Kenji Furusawa ,  Hideto Gotoh

发明人： Kenji Furusawa ,  Hideto Gotoh

IPC分类号： C03C23/00 ,  C23F1/00 ,  H01L21/00

CPC分类号： H01L21/67126 ,  C03C23/0005 ,  C03C23/0075 ,  H01L21/67057 ,  H01L21/67086 ,  H01L21/67115

摘要： A substrate processing apparatus 10 for processing a glass substrate 50 comprises a slider 20 on which the glass substrate 50 is placed, a process chamber 30 that can be mounted on the slider 20, and light irradiation units 110, 120. The process chamber 30 comprises a supply inlet 33 for supplying process fluid, a drain outlet 34 for draining out the process fluid, and a processing space 32, wherein one plane of the processing space that corresponds to the region to be processed is opened. When the process chamber 30 is mounted on the placing member 20, the processing space 32 forms a processing space which is sealed with the glass substrate 50.

摘要翻译： 用于处理玻璃基板50的基板处理装置10包括其上放置有玻璃基板50的滑块20，可以安装在滑块20上的处理室30和光照射单元110,120。处理室30包括 用于供给处理流体的供给入口33，用于排出处理流体的排出口34，以及处理空间32，处理空间与待处理区域对应的一个平面被打开。 当处理室30安装在放置构件20上时，处理空间32形成用玻璃基板50密封的处理空间。

公开(公告)号：US06846577B2

公开(公告)日：2005-01-25

申请号：US10386456

申请日：2003-03-13

申请人： Kazusuke Yamanaka ,  Tomoo Yamamoto ,  Yuzuru Hosoe ,  Nobuyuki Inaba ,  Yasutaro Uesaka ,  Masaaki Futamoto ,  Yoshibumi Matsuda ,  Kenji Furusawa ,  Shinji Narishige

发明人： Kazusuke Yamanaka ,  Tomoo Yamamoto ,  Yuzuru Hosoe ,  Nobuyuki Inaba ,  Yasutaro Uesaka ,  Masaaki Futamoto ,  Yoshibumi Matsuda ,  Kenji Furusawa ,  Shinji Narishige

IPC分类号： G11B5/66 ,  G11B5/02 ,  G11B5/64 ,  G11B5/65 ,  G11B5/73

CPC分类号： G11B5/64 ,  Y10T428/12465 ,  Y10T428/12986 ,  Y10T428/265 ,  Y10T428/31

摘要： An ferromagnetic thin film is used to provide a magnetic recording medium whose noise is low and whose S/N value is high. The ferromagnetic thin film as the magnetic film of the magnetic recording medium is such that the fluctuation field of magnetic viscosity at 25° C. at the field strength equal to remanence coercivity or coercivity is not less than 15 oersteds and the coercivity is not less than 2000 oersteds.

摘要翻译： 铁磁性薄膜用于提供噪声低且S / N值高的磁记录介质。 作为磁记录介质的磁性膜的铁磁性薄膜使得在等于剩磁矫顽力或矫顽力的场强下，25℃下磁力粘度的波动范围不小于15奥斯特，矫顽力不小于 2000奥斯特。

公开(公告)号：US06831277B1

公开(公告)日：2004-12-14

申请号：US09437265

申请日：1999-11-10

申请人： Toshihiko Nakata ,  Hideaki Sasazawa ,  Kenji Furusawa ,  Minako Morisato ,  Hideo Yamakura ,  Toshio Tamura

发明人： Toshihiko Nakata ,  Hideaki Sasazawa ,  Kenji Furusawa ,  Minako Morisato ,  Hideo Yamakura ,  Toshio Tamura

IPC分类号： G01B1100

CPC分类号： G11B5/3173 ,  G11B5/3103 ,  G11B5/3166 ,  G11B5/3169 ,  G11B5/3189 ,  G11B5/3903 ,  G11B5/3967 ,  Y10T29/49036

摘要： A method of measuring variation in dimensions and alignment error of thin film magnetic heads formed on a raw bar cut-off from a substrate is provided. Such method comprises illuminating a MR element and a resistance detector element which is formed for monitoring a lapping process, both of which are formed on the raw bar, with illuminating light whose wavelength is 300 nm or less; forming an image by imaging light reflected from the elements; and converting the image to an image signal through photoelectric conversion so as to detect variation in dimensions of the MR element and the resistance detector element formed on the raw bar, and alignment error between the MR element and the resistance detector element with a high degree of accuracy.

摘要翻译： 提供了一种测量从基板上切割的生条上形成的薄膜磁头的尺寸变化和对准误差的方法。 这种方法包括：照射MR元件和电阻检测器元件，该元件形成用于监测两者都是在原料条上形成的研磨过程，其中波长为300nm或更小的照明光; 通过对从元件反射的光进行成像来形成图像; 并且通过光电转换将图像转换成图像信号，以便检测形成在原始条上的MR元件和电阻检测器元件的尺寸变化，以及MR元件和电阻检测器元件之间的对准误差 准确性。

公开(公告)号：US5958542A

公开(公告)日：1999-09-28

申请号：US656911

申请日：1996-06-03

申请人： Mitsuyoshi Ootake ,  Yuichi Kokaku ,  Yoshinori Honda ,  Akira Kato ,  Hiroaki Hagimae ,  Heigo Ishihara ,  Kenji Furusawa

发明人： Mitsuyoshi Ootake ,  Yuichi Kokaku ,  Yoshinori Honda ,  Akira Kato ,  Hiroaki Hagimae ,  Heigo Ishihara ,  Kenji Furusawa

IPC分类号： G11B5/72 ,  G11B5/82 ,  G11B5/84 ,  G11B5/66

CPC分类号： G11B5/82 ,  B82Y10/00 ,  G11B5/72 ,  G11B5/743 ,  G11B5/8408 ,  Y10S428/90 ,  Y10T428/24355 ,  Y10T428/265

摘要： A thin film magnetic disc in which dot-like scattered bumps, made of a material different from that of the protective layer, are formed on the protective layer, and a lubricant layer is formed on the surfaces of the protective layer and the scattered bumps. A protective layer excellent in strength and disk durability is obtained by using a material different from that of the bumps. The functions of the protective layer and scattered bumps are separated from each other and make full use of the different materials. Such a protective layer is effective to reduce spacing between a head and the disc.

摘要翻译： 在保护层上形成有由不同于保护层的材料制成的点状散射凸块的薄膜磁盘，并且在保护层和散射凸块的表面上形成润滑剂层。 通过使用与凸点不同的材料，可获得强度和耐久性优异的保护层。 保护层和散射凸起的功能彼此分离，充分利用不同的材料。 这样的保护层对于减小头部和盘之间的间隔是有效的。

公开(公告)号：US5825591A

公开(公告)日：1998-10-20

申请号：US768958

申请日：1996-12-18

申请人： Takao Nakamura ,  Nobuya Sekiyama ,  Keiko Nakano ,  Kenji Furusawa ,  Hiroyuki Kataoka ,  Takaaki Shirakura ,  Shinya Matsuoka

发明人： Takao Nakamura ,  Nobuya Sekiyama ,  Keiko Nakano ,  Kenji Furusawa ,  Hiroyuki Kataoka ,  Takaaki Shirakura ,  Shinya Matsuoka

IPC分类号： G11B5/02 ,  G11B5/187 ,  G11B5/60 ,  G11B5/71 ,  G11B5/725 ,  G11B21/21 ,  G11B5/48 ,  G11B21/16

CPC分类号： G11B5/6005

摘要： The present invention relates to a magnetic disk unit of a high memory capacity wherein a magnetic head and a magnetic disk with a lubricant layer formed on the surface thereof are allowed to perform a relative motion in a mutually contacted state to write and read out information of a high recording density, and the invention is also concerned with the shape and material of the magnetic head suitable for a continual sliding motion of the head on the magnetic disk surface, as well as the lubricant layer formed on the disk surface. According to the present invention, the magnetic head, which has a slider surface of a predetermined curvature, is supported by an arm through a spring and is pushed onto the magnetic disk surface with the lubricant layer formed thereon, then with rotation of the magnetic disk, the lubricant layer liquefies and information is recorded or read out in a contacted state of the head and the disk. The distance between the magnetic head and the disk surface can be shortened to a great extent and the recording density of the magnetic disk can be increased remarkably, thereby permitting a larger capacity of the magnetic disk unit.

摘要翻译： 本发明涉及具有高存储容量的磁盘单元，其中磁头和在其表面上形成有润滑层的磁盘被允许在相互接触的状态下执行相对运动以写入和读出信息 高记录密度，并且本发明还涉及适用于磁头在磁盘表面上的连续滑动运动的磁头的形状和材料以及形成在磁盘表面上的润滑剂层。 根据本发明，具有预定曲率的滑块表面的磁头通过弹簧由臂支撑，并且在其上形成润滑剂层的同时被推到磁盘表面上，然后随着磁盘的旋转 润滑剂层液化并且在头部和盘的接触状态下记录或读出信息。 磁头和盘表面之间的距离可以被很大程度地缩短，从而可以显着地提高磁盘的记录密度，从而允许磁盘单元的容量更大。