公开(公告)号：US06774535B2

公开(公告)日：2004-08-10

申请号：US10697348

申请日：2003-10-30

Applicant: Samuel Lee Miller ,  Murray Steven Rodgers ,  Stephen Matthew Barnes ,  Jeffry Joseph Sniegowski ,  Paul Jackson McWhorter

Inventor： Samuel Lee Miller ,  Murray Steven Rodgers ,  Stephen Matthew Barnes ,  Jeffry Joseph Sniegowski ,  Paul Jackson McWhorter

IPC: G02B2608

CPC classification number: B81B3/0062 ,  B33Y80/00 ,  H02N1/006 ,  H02N1/008

Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).

Abstract translation: 本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高， 。 在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。 从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。 平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。 每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于 通过相等或不相等的角度量到基板（12）。 在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。 由于平台（14）从基板（12）的表面上升，所以可以相对于基板（12）以大的角度倾斜。

公开(公告)号：US06759787B2

公开(公告)日：2004-07-06

申请号：US10191917

申请日：2002-07-09

Applicant: Samuel Lee Miller ,  Paul Jackson McWhorter ,  Murray Steven Rodgers ,  Jeffry J. Sniegowski ,  Stephen M. Barnes

Inventor： Samuel Lee Miller ,  Paul Jackson McWhorter ,  Murray Steven Rodgers ,  Jeffry J. Sniegowski ,  Stephen M. Barnes

IPC: H02N108

CPC classification number: B81B3/004 ,  B81B3/0062 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0307 ,  B81B2203/053 ,  B81B2203/058 ,  G02B6/122 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3584 ,  G02B26/0841 ,  G02B2006/12104 ,  G11B7/0927 ,  H02N1/006 ,  H02N1/008

Abstract: A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with-the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.

Abstract translation: 公开了一种微机电（MEM）装置，其具有能够在基板上升高并以任意角度倾斜的平台，该平台使用支撑平台并控制其运动的多个柔性构件。 每个柔性构件由一个或多个用于弯曲柔性构件的MEM致动器进一步控制。 MEM致动器可以是静电梳状致动器或垂直拉链致动器，或其组合。 MEM装置可以包括镜面涂层以形成用于重定向或切换用于投影显示器的一个或多个光束的可编程镜子。 具有镜面涂层的MEM装置还具有用于在用于局域光纤网络的光纤之间切换光束或用于光纤电信或数据通信系统的应用。

公开(公告)号：US06731513B2

公开(公告)日：2004-05-04

申请号：US10099724

申请日：2002-03-15

Applicant: Murray Steven Rodgers ,  Stephen Matthew Barnes

Inventor： Murray Steven Rodgers ,  Stephen Matthew Barnes

IPC: H05K702

CPC classification number: B81B7/0006 ,  G02B26/0841 ,  H01L23/147 ,  H01L23/49872 ,  H01L23/552 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources or the like and a method of fabricating a shielded multi-conductor interconnect bus are disclosed. In one embodiment, a shielded interconnect bus formed on a substrate (20) includes a plurality of electrically conductive lines (42) arranged in sets of one, two or more conductive lines between electrically conductive shield walls (46, 66). The electrically conductive lines (42) are surrounded by layers of dielectric material (30, 50). An electrically conductive shield (78) overlies the electrically conductive lines (42) and electrically conductive shield walls (46, 66).

Abstract translation: 公开了一种用于将MEM器件与控制信号源等互连的屏蔽多导体互连总线以及制造屏蔽多导体互连总线的方法。 在一个实施例中，形成在衬底（20）上的屏蔽互连总线包括在导电屏蔽壁（46,66）之间布置成一组，两根或多根导电线的多个导电线（42）。 导电线（42）被介电材料层（30,50）包围。 导电屏蔽（78）覆盖在导电线（42）和导电屏蔽壁（46,66）之间。

公开(公告)号：US06707176B1

公开(公告)日：2004-03-16

申请号：US10099892

申请日：2002-03-14

Applicant: Murray Steven Rodgers

Inventor： Murray Steven Rodgers

IPC: H02N100

CPC classification number: H02N1/008 ,  B81B3/0008

Abstract: The present invention is generally directed to a method and assembly for supporting an actuation apparatus (e.g. a movable electrostatic comb) of a microelectromechanical (MEM) system. A suspension assembly of the present invention generally resists actuation forces inherent to electrostatically controlled MEM systems by utilizing an opposingly-directed non-linear tensile force. This can be accomplished by utilizing a suspension assembly of the invention including a longitudinal center beam and a plurality of first and second lateral beams extending out from lateral sides of the center beam. When the center beam of the suspension assembly is drawn in a first direction due to the actuation force(s), either or both of the plurality of first lateral beams and the plurality of second lateral beams are stretched to exert a non-linear tensile force having a force vector component generally oriented in a second direction generally opposite the first direction.

Abstract translation: 本发明一般涉及用于支撑微机电（MEM）系统的致动装置（例如，可动静电梳）的方法和组件。 本发明的悬架组件通常利用相对定向的非线性拉力来抵抗静电控制的MEM系统固有的致动力。 这可以通过利用本发明的悬架组件来实现，该悬架组件包括纵向中心梁和从中心梁的横向侧面延伸出的多个第一和第二横梁。 当由于致动力使悬架组件的中心梁沿第一方向拉动时，多个第一横梁和多个第二横梁中的任一个或两个被拉伸以发挥非线性拉力 具有通常沿与第一方向相反的第二方向定向的力矢量分量。

公开(公告)号：US06989582B2

公开(公告)日：2006-01-24

申请号：US10456319

申请日：2003-06-06

Applicant: Jeffry Joseph Sniegowski ,  Murray Steven Rodgers

Inventor： Jeffry Joseph Sniegowski ,  Murray Steven Rodgers

IPC: H01L23/544

CPC classification number: H01L23/544 ,  B81B2201/045 ,  B81C1/00873

Abstract: The present invention generally relates to a die perimeter region of a die having a microelectromechanical assembly fabricated thereon. This die perimeter region may be configured to facilitate electrically interconnecting adjacent die on a wafer. Moreover, this die perimeter region may be configured to facilitate separating the die from a wafer.

公开(公告)号：US06937131B2

公开(公告)日：2005-08-30

申请号：US10987679

申请日：2004-11-12

Applicant: Murray Steven Rodgers ,  Samuel Lee Miller

Inventor： Murray Steven Rodgers ,  Samuel Lee Miller

IPC: B81B7/00 ,  G02B6/35 ,  H01H71/20 ,  G02B26/08

CPC classification number: G02B6/357 ,  B81B7/0006 ,  B81B2201/042 ,  B81C1/00833 ,  G02B6/3518

Abstract: Self-shadowed microelectromechanical structures such as self-shadowed bond pads, fuses and compliant members and a method of fabricating self-shadowing microelectromechanical structures that anticipate and accommodate blanket metalization process steps are disclosed. In one embodiment, a self-shadowed bond pad (10) configured for shadowing an exposed end (44A) of a shielded interconnect line (44) connected to the bond pad (10) from undesired metalization during a metalization fabrication process step includes electrically connected overlaying first, second and third bond pad areas (42, 72, 92) patterned from respective first, second and third layers (40, 70, 90) of material deposited on a substrate (20). The exposed end (44A) of the interconnect line (44) abuts an edge of the first bond pad area (42). The third bond pad area (92) includes at least one tab portion (94) extending laterally from an edge of the third bond pad area (92) to shadow an area on the substrate (20) including the exposed end (44A) of the interconnect line (44) abutting the edge of the first bond pad area (42).

Abstract translation: 公开了自遮蔽微电子机械结构，例如自遮盖接合焊盘，熔断器和柔性元件，以及制造预期并适应覆盖金属化工艺步骤的自阴影微机电结构的方法。 在一个实施例中，被配置用于遮蔽在金属化制造工艺步骤期间连接到接合焊盘（10）的屏蔽互连线（44）的暴露端（44A）与不期望的金属化的自阴影接合焊盘（10）包括电 连接的重叠的第一，第二和第三接合焊盘区域（42,72,92），其由沉积在衬底（20）上的材料的相应的第一，第二和第三层（40,70,90）构图。 互连线（44）的暴露端（44A）邻接第一接合焊盘区域（42）的边缘。 第三接合焊盘区域（92）包括从第三接合焊盘区域（92）的边缘横向延伸的至少一个突片部分（94），以遮蔽基板（20）上的包括露出端（44A）的区域 所述互连线（44）邻接所述第一接合焊盘区域（42）的边缘。

公开(公告)号：US06844657B2

公开(公告)日：2005-01-18

申请号：US10099465

申请日：2002-03-14

Applicant: Samuel Lee Miller ,  Stephen Matthew Barnes ,  Murray Steven Rodgers

Inventor： Samuel Lee Miller ,  Stephen Matthew Barnes ,  Murray Steven Rodgers

IPC: B81B3/00 ,  G02B26/08 ,  H02N1/00 ,  H02N2/00

CPC classification number: B81B3/0062 ,  G02B26/0841 ,  H02N1/008

Abstract: A microelectromechanical system is disclosed that provides amplified movement without requiring the use of a displacement multiplier. Generally, a lever or the like is interconnected with a substrate on which the system is fabricated at a first location, while a free end of the lever is able to move relative to the substrate, typically at least generally about the first location. One or more actuators are movably interconnected with the substrate, and in turn are interconnected with the lever at a location that is somewhere between the free end and the first location. The lever may be configured to move at least generally away from the substrate upon movement of the actuator in one direction, at least generally toward the substrate upon movement of the actuator in another direction, or in any direction and in any manner. The movement of the “free” end of the lever may be used to perform any function, including lifting/pivoting a mirror away from/relative to the substrate.

Abstract translation: 公开了一种微机电系统，其提供放大的运动而不需要使用位移乘法器。 通常，杆或类似物与其上制造系统的基板在第一位置互连，而杠杆的自由端能够相对于基板移动，通常至少大体上围绕第一位置。 一个或多个致动器可移动地与衬底互连，并且在与位于自由端和第一位置之间的位置处与杠杆互连。 杠杆可构造成在致动器沿一个方向运动时至少大体上远离基板移动，至少在致动器沿另一个方向或任何方向和任何方向移动时至少大致朝向基板。 杠杆的“自由”端的移动可以用于执行任何功能，包括使镜子远离/相对于基板提升/枢转。

公开(公告)号：US06841464B2

公开(公告)日：2005-01-11

申请号：US10426433

申请日：2003-04-30

Applicant: Stephen Matthew Barnes ,  Samuel Lee Miller ,  Murray Steven Rodgers

Inventor： Stephen Matthew Barnes ,  Samuel Lee Miller ,  Murray Steven Rodgers

IPC: H01L23/522 ,  H01L21/4763

CPC classification number: H01L23/5225 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A multi-level shielded multi-conductor interconnect bus for use in interconnecting MEM devices with control signal sources and a method of fabricating a multi-level shielded multi-conductor interconnect bus are disclosed. In one embodiment, a multi-level shielded interconnect bus (410A) formed on a substrate (20) includes first and second level electrically conductive lines (42, 92) arranged in sets of one, two or more conductive lines between first and second level electrically conductive shield walls (46, 66, 96). The first and second level electrically conductive lines (42, 92) are surrounded by various layers of dielectric material (30, 50, 80, 100). A first level electrically conductive shield (78) overlies the first level electrically conductive lines (42) and shield walls (46, 66). A second level electrically conductive shield (112) overlies the second level electrically conductive lines (92) and shield walls (96).

Abstract translation: 公开了一种用于将MEM器件与控制信号源互连的多电平屏蔽多导体互连总线和制造多电平屏蔽多导体互连总线的方法。 在一个实施例中，形成在衬底（20）上的多级屏蔽互连总线（410A）包括第一和第二级导电线（42,92），其布置成在第一和第二级之间的一条，两条或更多条导线 导电屏蔽壁（46,66,96）。 第一和第二级导电线（42,92）被各种介电材料层（30,50,80,100）包围。 第一级导电屏蔽（78）覆盖在第一级导电线（42）和屏蔽壁（46,66）之间。 第二级导电屏蔽（112）覆盖在第二级导电线（92）和屏蔽壁（96）上。

公开(公告)号：US06831391B2

公开(公告)日：2004-12-14

申请号：US10697386

申请日：2003-10-30

Applicant: Samuel Lee Miller ,  Murray Steven Rodgers ,  Stephen Matthew Barnes ,  Jeffry Joseph Sniegowski ,  Paul Jackson McWhorter

Inventor： Samuel Lee Miller ,  Murray Steven Rodgers ,  Stephen Matthew Barnes ,  Jeffry Joseph Sniegowski ,  Paul Jackson McWhorter

IPC: H02N100

CPC classification number: B81B3/0062 ,  B33Y80/00 ,  H02N1/006 ,  H02N1/008

Abstract: The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).

Abstract translation: 本发明提供了一种具有平台（14）的MEM系统（10），该平台可从其上制造并可相对于基板（12）的一个或多个自由度倾斜的基板（12）升高， 。 在一个实施例中，MEM系统（10）包括平台（14），一对A框架结构（40）和形成在基板（12）上的两对致动器（30）。 从A框架结构（40）的顶点（40A）延伸的刚性构件（46）的端部（46A）通过柔性构件（48A，48B）附接到平台（14）。 平台（14）也通过顺应构件（48C）附接到基板（12）。 A框架结构（40）可以围绕其基部（40B）分开枢转。 每对致动器（30）通过轭（32）和位移乘法器（34）耦合到A框架结构（40）中的一个，并且可单独地操作以实现A框架结构（40）相对于 通过相等或不相等的角度量到基板（12）。 在枢转时，A框架结构（40）用作杠杆臂，以提升平台（14）并且以至少一个自由度相对于基板（12）倾斜平台（14）。 由于平台（14）从衬底（12）的表面上升，所以可以相对于衬底（12）以大的角度倾斜。

公开(公告)号：US06808275B2

公开(公告)日：2004-10-26

申请号：US10682679

申请日：2003-10-09

Applicant: Murray Steven Rodgers

Inventor： Murray Steven Rodgers

IPC: G02B508

CPC classification number: G02B7/182 ,  B81B3/004 ,  B81B7/0003 ,  B81B2201/045 ,  G02B5/08

Abstract: The present invention is generally directed to a method and assembly for elevating and supporting a microstructure of a MEM system generally by engaging a positioning system of the MEM system with a first elevator lifter. The MEM system generally includes a first microstructure (such as a mirror) disposed in vertically spaced relation to a substrate. The positioning system generally includes an actuator assembly movably interconnected with the substrate, an elevator pivotally interconnected with the substrate and further interconnected with the microstructure, and a tether interconnecting the actuator assembly and the elevator. The first elevator lifter is provided to engage the elevator to lift/elevate the microstructure away from the substrate generally after fabrication of the MEM system and prior to utilizing the microstructure in operation of the MEM system.

Abstract translation: 本发明一般涉及用于通过将MEM系统的定位系统与第一电梯升降机接合来提升和支撑MEM系统的微结构的方法和组件。 MEM系统通常包括与衬底垂直间隔设置的第一微结构（例如反射镜）。 定位系统通常包括可移动地与衬底互连的致动器组件，与衬底枢转地互连并与微结构相互连接的电梯以及将致动器组件和电梯互连的系绳。 第一电梯升降器被设置成接合电梯，以在MEM系统的制造之后以及在MEM系统的操作中利用微结构之前，一般地将微结构提升/升高。