公开(公告)号：US07298954B2

公开(公告)日：2007-11-20

申请号：US11154019

申请日：2005-06-16

申请人： Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Yao Rong Wang ,  Jun Ma ,  Pinyen Lin ,  Joel A. Kubby ,  Kathleen A. Feinberg

发明人： Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Yao Rong Wang ,  Jun Ma ,  Pinyen Lin ,  Joel A. Kubby ,  Kathleen A. Feinberg

IPC分类号： G02B6/26

CPC分类号： G02B6/358 ,  G02B6/266 ,  G02B6/3508 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3596

摘要： An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

摘要翻译： 提供了可变光衰减器（VOA）的功能的改进的波导穿梭光开关设计。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。 开关功能和VOA功能的集成减少光损耗，否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时，光损失是不可避免的。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

公开(公告)号：US07221817B2

公开(公告)日：2007-05-22

申请号：US10918093

申请日：2004-08-13

申请人： Kristine A. German ,  Peter M. Gulvin ,  Joel A. Kubby

发明人： Kristine A. German ,  Peter M. Gulvin ,  Joel A. Kubby

IPC分类号： G02B6/42 ,  H01L29/82 ,  H01H37/52

CPC分类号： H01H1/0036 ,  G02B6/3566 ,  G02B6/3574 ,  G02B6/3576 ,  G02B6/358 ,  G02B6/3584 ,  H01H50/005 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2037/008 ,  H01H2061/006

摘要： A substantially straight beam in an unbuckled state is compressed to cause the beam to buckle using an adjustable compressor. The adjustable compressor applies force to one or both ends of the beam and limits compression on the beam to allow the beam to move between a first buckled state and a second buckled state. The first buckled state and the second buckled state comprise substantially equal magnitude and opposite direction buckling movements from the unbuckled state.

摘要翻译： 在无松开状态下的基本上直的梁被压缩以使得可以使用可调节的压缩机来使梁弯曲。 可调压缩机对梁的一端或两端施加力，并限制梁上的压缩，以允许梁在第一弯曲状态和第二弯曲状态之间移动。 第一弯曲状态和第二弯曲状态包括基本上相等的幅度和相对的方向从非卷曲状态的弯曲运动。

公开(公告)号：US07183216B2

公开(公告)日：2007-02-27

申请号：US11132000

申请日：2005-05-18

申请人： Cathie J. Burke ,  Peter M. Gulvin

发明人： Cathie J. Burke ,  Peter M. Gulvin

IPC分类号： H01L21/311

CPC分类号： H01L21/76224

摘要： A thermal oxidation process is used to fill trenches with an oxide; however, the oxidation process consumes some of the silicon. The embodiments herein advantageously apply this tendency for the oxidation process to consume silicon so as to convert all the silicon substrate material between the multiple trenches into an oxide. Therefore, because all of the silicon between the multiple trenches is consumed by the oxidation process, the multiple smaller trenches are combined into a single larger trench filled with the oxide.

摘要翻译： 使用热氧化工艺用氧化物填充沟槽; 然而，氧化工艺消耗了一些硅。 本文的实施例有利地应用这种氧化过程消耗硅的趋势，以将多个沟槽之间的所有硅衬底材料转化为氧化物。 因此，由于多个沟槽之间的全部硅被氧化处理所消耗，所以将多个较小的沟槽组合成填充有氧化物的单个更大的沟槽。

公开(公告)号：US07131628B2

公开(公告)日：2006-11-07

申请号：US10901285

申请日：2004-07-28

申请人： Kathleen A. Feinberg ,  Peter M. Gulvin ,  Nancy Y. Jia ,  Peter J. Nystrom

发明人： Kathleen A. Feinberg ,  Peter M. Gulvin ,  Nancy Y. Jia ,  Peter J. Nystrom

IPC分类号： F16J3/00

CPC分类号： B41J2/14 ,  B41J2002/14483

摘要： A vent connects a chamber to the external atmosphere surrounding a device to equalize pressure within the chamber. The vent has a size and shape to allow pressure equalization to occur outside a normal operating cycle of the chamber and controls the pressure to prevent undesirable deflection of a membrane within the chamber and ensure proper operation of the device.

摘要翻译： 排气口将室连接到围绕设备的外部气氛以均衡室内的压力。 排气口具有尺寸和形状，以允许在室的正常操作循环之外发生压力平衡，并且控制压力以防止膜在室内的不期望的偏转并且确保装置的正常操作。

公开(公告)号：US06968100B2

公开(公告)日：2005-11-22

申请号：US10712200

申请日：2003-11-12

申请人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

发明人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

IPC分类号： G02B26/02 ,  B81B3/00 ,  G02B6/12 ,  G02B6/35 ,  G02B6/26 ,  G02B6/42

CPC分类号： G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

摘要翻译： 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。 在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

公开(公告)号：US06572218B2

公开(公告)日：2003-06-03

申请号：US09768676

申请日：2001-01-24

申请人： Peter M. Gulvin ,  Elliott A. Eklund

发明人： Peter M. Gulvin ,  Elliott A. Eklund

IPC分类号： B41J204

CPC分类号： H02N1/006 ,  B41J2/14314 ,  F04B43/043

摘要： A micro-electromechanical fluid ejector including a substrate having an insulating layer thereon; a conductor formed on said insulating layer; a membrane adjacent to said conductor, said membrane having a corrugated, multi-layer structure for added rigidity; and an actuator chamber formed between said membrane and said conductor, said membrane flexing toward said conductor when a voltage bias is applied thereto.

公开(公告)号：US08646875B2

公开(公告)日：2014-02-11

申请号：US12751077

申请日：2010-03-31

申请人： Peter M. Gulvin ,  John R. Andrews ,  Gerald A. Domoto ,  Nicholas P. Kladias ,  Peter J. Nystrom

发明人： Peter M. Gulvin ,  John R. Andrews ,  Gerald A. Domoto ,  Nicholas P. Kladias ,  Peter J. Nystrom

IPC分类号： B41J2/14 ,  B41J2/16

CPC分类号： B41J2/14314 ,  B41J2/1433 ,  B41J2002/14475

摘要： Methods and systems of ejecting ink drops from an inkjet printer are disclosed. The methods and systems can include a printhead with one or more stepped nozzles each with an associated entrance diameter and exit diameter. Ink can be received into the printhead and formed into ink drops in the stepped nozzles. The ink drops can each have an associated drop mass and drop speed. The stepped nozzles can be provided such that the exit diameter can independently dictate the drop mass and the entrance diameter can independently dictate the drop speed. As such, the complexity of jet design optimization is reduced.

摘要翻译： 公开了从喷墨打印机喷出墨滴的方法和系统。 方法和系统可以包括具有一个或多个阶梯式喷嘴的打印头，每个具有相关联的入口直径和出口直径。 油墨可以被接收到打印头中并且形成为阶梯式喷嘴中的墨滴。 墨滴可以各自具有相关联的液滴质量和液滴速度。 可以设置阶梯喷嘴，使得出口直径可以独立地决定液滴质量，并且入口直径可以独立地决定液滴速度。 因此，喷射设计优化的复杂性降低。

公开(公告)号：US08567913B2

公开(公告)日：2013-10-29

申请号：US12792062

申请日：2010-06-02

申请人： James M. Casella ,  Andrew W. Hays ,  Peter M. Gulvin ,  Jun Ma

发明人： James M. Casella ,  Andrew W. Hays ,  Peter M. Gulvin ,  Jun Ma

IPC分类号： B41J2/14 ,  B41J2/16

CPC分类号： B41J2/14314

摘要： An ink jet print head includes an ink chamber defined by an electrostatically actuated membrane and a nozzle plate opposing the membrane. The nozzle plate includes a nozzle hole and a group of priming holes, the priming holes configured to maintain a substantially ink free surface on the nozzle plate during a freeze thaw cycle of ink in the ink chamber. A method for accommodating expansion and contraction of ink during a freeze thaw cycle of ink in an ink chamber is also provided. The method includes providing a group of priming holes in a nozzle plate of the ink chamber, the group of priming holes maintaining a substantially ink free surface on the nozzle plate during the freeze thaw cycle.

摘要翻译： 喷墨打印头包括由静电驱动的膜和与膜相对的喷嘴板限定的墨室。 所述喷嘴板包括喷嘴孔和一组起动孔，所述启动孔构造成在所述墨室中的墨水的冻融循环期间在所述喷嘴板上保持基本上无油墨的表面。 还提供了一种用于在油墨室中的油墨的冻融循环期间适应油墨的膨胀和收缩的方法。 该方法包括在墨水室的喷嘴板中设置一组起动孔，该组启动孔在冷冻解冻循环期间在喷嘴板上保持基本上无墨水的表面。

公开(公告)号：US08454115B2

公开(公告)日：2013-06-04

申请号：US13278356

申请日：2011-10-21

申请人： Peter M. Gulvin ,  Andrew W. Hays

发明人： Peter M. Gulvin ,  Andrew W. Hays

IPC分类号： B41J29/38 ,  B41J2/06

CPC分类号： B41J2/14314 ,  B41J2/04528 ,  B41J2/04563 ,  B41J2/04578 ,  B41J2202/08

摘要： A chip used for dispensing a fluid such as ink provides ink-dispensing ejectors having an ink cavity over a supporting substrate, and further provides a heater for heating the ink in the cavity. The heater can be interposed between the substrate and the ink cavity to provide direct heating of ink as it is being dispensed. Various embodiments further comprise the use of the heater structure as a temperature probe to measure the temperature of the ink in the ink cavity. Other embodiments provide a chip having both a temperature probe and a heater as separate structures interposed between the ink cavity and the substrate. Further described is a temperature probe and/or heater which traverses a majority of a width of a substrate, and surrounds each drop ejector on at least two sides.

摘要翻译： 用于分配诸如油墨的流体的芯片提供在支撑基底上具有油墨腔的油墨分配喷射器，并且还提供用于加热空腔中的油墨的加热器。 加热器可以介于基板和油墨腔之间，以便在油墨被分配时直接加热油墨。 各种实施例还包括使用加热器结构作为温度探针来测量墨腔中的墨的温度。 其他实施例提供具有温度探针和加热器两者的芯片，其作为插入墨腔和基底之间的分离结构。 进一步描述的是温度探测器和/或加热器，其遍及衬底的宽度的大部分，并且在至少两侧围绕每个液滴喷射器。

公开(公告)号：US07980671B2

公开(公告)日：2011-07-19

申请号：US11447275

申请日：2006-06-06

申请人： Peter J. Nystrom ,  Donald J. Drake ,  Peter M. Gulvin ,  Joseph A. DeGroot ,  Jun Ma ,  Nancy Y. Jia ,  Andrew W. Hays

发明人： Peter J. Nystrom ,  Donald J. Drake ,  Peter M. Gulvin ,  Joseph A. DeGroot ,  Jun Ma ,  Nancy Y. Jia ,  Andrew W. Hays

IPC分类号： B41J2/06

CPC分类号： B41J2/16 ,  B41J2/14 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2002/043 ,  B81B3/001 ,  B81B2201/052 ,  B81B2203/053 ,  H02N1/006

摘要： The present application is directed to electrostatic actuators, and methods of making electrostatic actuators. In one embodiment, an electrostatic actuator of the present application comprises a first electrode and a second electrode. The second electrode is positioned in proximity to the first electrode so as to provide a gap between the first electrode and the second electrode. The first electrode is capable of being deflected toward the second electrode. A dielectric structure comprising a dielectric landing post is positioned in the gap between the first electrode and the second electrode, the dielectric structure extending over a greater surface of the gap than the landing post. The landing post protrudes out into the gap so as to limit the minimum contact spacing between the first electrode and the second electrode.

摘要翻译： 本申请涉及静电致动器以及制造静电致动器的方法。 在一个实施例中，本申请的静电致动器包括第一电极和第二电极。 第二电极位于第一电极附近，以便在第一电极和第二电极之间提供间隙。 第一电极能够朝向第二电极偏转。 包括电介质着陆柱的电介质结构位于第一电极和第二电极之间的间隙中，电介质结构在间隙的更大表面上延伸超过着陆柱。 着陆柱突出到间隙中，以限制第一电极和第二电极之间的最小接触间距。