Vented MEMS structures and methods
    1.
    发明授权
    Vented MEMS structures and methods 有权
    通风MEMS结构和方法

    公开(公告)号:US07131628B2

    公开(公告)日:2006-11-07

    申请号:US10901285

    申请日:2004-07-28

    IPC分类号: F16J3/00

    CPC分类号: B41J2/14 B41J2002/14483

    摘要: A vent connects a chamber to the external atmosphere surrounding a device to equalize pressure within the chamber. The vent has a size and shape to allow pressure equalization to occur outside a normal operating cycle of the chamber and controls the pressure to prevent undesirable deflection of a membrane within the chamber and ensure proper operation of the device.

    摘要翻译: 排气口将室连接到围绕设备的外部气氛以均衡室内的压力。 排气口具有尺寸和形状,以允许在室的正常操作循环之外发生压力平衡,并且控制压力以防止膜在室内的不期望的偏转并且确保装置的正常操作。

    Electrostatic actuator device having multiple gap heights
    5.
    发明授权
    Electrostatic actuator device having multiple gap heights 有权
    具有多个间隙高度的静电致动器装置

    公开(公告)号:US08450902B2

    公开(公告)日:2013-05-28

    申请号:US11467660

    申请日:2006-08-28

    IPC分类号: H02N1/00 H01H59/00 B41J2/45

    CPC分类号: H01H59/0009 H01G5/18

    摘要: The present application is directed to novel electrostatic actuators and methods of making the electrostatic actuators. In one embodiment, the electrostatic actuator comprises a substrate, an electrode formed on the substrate and a deflectable member positioned in proximity to the electrode so as to provide a gap between the electrode and the deflectable member. The deflectable member is anchored on the substrate via one or more anchors. The gap comprises at least one first region having a first gap height positioned near the one or more anchors and at least one second region having a second gap height positioned farther from the anchors than the first region. The first gap height is smaller than the second gap height.

    摘要翻译: 本申请涉及新型静电致动器和制造静电致动器的方法。 在一个实施例中,静电致动器包括衬底,形成在衬底上的电极和位于电极附近的可偏转构件,以便在电极和可偏转构件之间提供间隙。 可偏转构件经由一个或多个锚固件锚定在基底上。 所述间隙包括至少一个第一区域,其具有位于所述一个或多个锚固件附近的第一间隙高度和至少一个第二区域,所述第二区域具有比所述第一区域更远离所述锚定件的第二间隙高度。 第一间隙高度小于第二间隙高度。

    Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads
    8.
    发明授权
    Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads 有权
    高度集成的晶片粘合MEMS器件,具有无释放膜制造用于高密度打印头

    公开(公告)号:US08455271B2

    公开(公告)日:2013-06-04

    申请号:US11693209

    申请日:2007-03-29

    IPC分类号: H01L21/00 B41J2/135

    摘要: A method of fabricating a MEMS inkjet type print head and the resulting device is disclosed. The method includes providing a driver component and separately providing an actuatable membrane component, the actuatable membrane component being formed in the absence of an acid etch removing a sacrificial layer. The separately provided actuatable membrane component is bonded to the driver component and a nozzle plate is attached to the actuatable membrane component subsequent to the bonding. Separately fabricating the components removes the need for hydrofluoric acid etch removal of a sacrificial layer previously required for forming the actuatable membrane with respect to the driver component.

    摘要翻译: 公开了制造MEMS喷墨型打印头的方法和所得到的装置。 该方法包括提供驱动器部件并且单独地提供可致动的膜部件,可致动的膜部件在不存在去除牺牲层的酸蚀刻的情况下形成。 单独提供的致动膜部件被结合到驱动器部件,并且在接合之后将喷嘴板附接到可致动膜部件。 单独制造组件不需要先前为相对于驱动器部件形成可致动膜所需的牺牲层的氢氟酸蚀刻去除。

    INDEPENDENT ADJUSTMENT OF DROP MASS AND VELOCITY USING STEPPED NOZZLES
    10.
    发明申请
    INDEPENDENT ADJUSTMENT OF DROP MASS AND VELOCITY USING STEPPED NOZZLES 有权
    使用STEPPED喷嘴独立调整液压质量和速度

    公开(公告)号:US20110242218A1

    公开(公告)日:2011-10-06

    申请号:US12751077

    申请日:2010-03-31

    IPC分类号: B41J2/14 B41J2/16

    摘要: Methods and systems of ejecting ink drops from an inkjet printer are disclosed. The methods and systems can include a printhead with one or more stepped nozzles each with an associated entrance diameter and exit diameter. Ink can be received into the printhead and formed into ink drops in the stepped nozzles. The ink drops can each have an associated drop mass and drop speed. The stepped nozzles can be provided such that the exit diameter can independently dictate the drop mass and the entrance diameter can independently dictate the drop speed. As such, the complexity of jet design optimization is reduced.

    摘要翻译: 公开了从喷墨打印机喷出墨滴的方法和系统。 方法和系统可以包括具有一个或多个阶梯式喷嘴的打印头,每个具有相关联的入口直径和出口直径。 油墨可以被接收到打印头中并且形成为阶梯式喷嘴中的墨滴。 墨滴可以各自具有相关联的液滴质量和液滴速度。 可以设置阶梯喷嘴,使得出口直径可以独立地决定液滴质量,并且入口直径可以独立地决定液滴速度。 因此,喷射设计优化的复杂性降低。