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    Vented MEMS structures and methods
    1.
    发明授权
    Vented MEMS structures and methods 有权
    通风MEMS结构和方法

    公开(公告)号：US07131628B2

    公开(公告)日：2006-11-07

    申请号：US10901285

    申请日：2004-07-28

    申请人： Kathleen A. Feinberg ,  Peter M. Gulvin ,  Nancy Y. Jia ,  Peter J. Nystrom

    发明人： Kathleen A. Feinberg ,  Peter M. Gulvin ,  Nancy Y. Jia ,  Peter J. Nystrom

    IPC分类号： F16J3/00

    CPC分类号： B41J2/14 ,  B41J2002/14483

    摘要： A vent connects a chamber to the external atmosphere surrounding a device to equalize pressure within the chamber. The vent has a size and shape to allow pressure equalization to occur outside a normal operating cycle of the chamber and controls the pressure to prevent undesirable deflection of a membrane within the chamber and ensure proper operation of the device.

    摘要翻译： 排气口将室连接到围绕设备的外部气氛以均衡室内的压力。 排气口具有尺寸和形状，以允许在室的正常操作循环之外发生压力平衡，并且控制压力以防止膜在室内的不期望的偏转并且确保装置的正常操作。

    Waveguide shuttle MEMS variable optical attenuator
    2.
    发明授权
    Waveguide shuttle MEMS variable optical attenuator 失效
    波导梭MEMS可变光衰减器

    公开(公告)号：US07298954B2

    公开(公告)日：2007-11-20

    申请号：US11154019

    申请日：2005-06-16

    申请人： Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Yao Rong Wang ,  Jun Ma ,  Pinyen Lin ,  Joel A. Kubby ,  Kathleen A. Feinberg

    发明人： Xueyuan Liu ,  Peter M. Gulvin ,  Kristine A. German ,  Yao Rong Wang ,  Jun Ma ,  Pinyen Lin ,  Joel A. Kubby ,  Kathleen A. Feinberg

    IPC分类号： G02B6/26

    CPC分类号： G02B6/358 ,  G02B6/266 ,  G02B6/3508 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3596

    摘要： An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

    摘要翻译： 提供了可变光衰减器（VOA）的功能的改进的波导穿梭光开关设计。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。 开关功能和VOA功能的集成减少光损耗，否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时，光损失是不可避免的。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

    MEMS waveguide shuttle optical latching switch
    3.
    发明授权
    MEMS waveguide shuttle optical latching switch 失效
    MEMS波导穿梭光闭锁开关

    公开(公告)号：US06968100B2

    公开(公告)日：2005-11-22

    申请号：US10712200

    申请日：2003-11-12

    申请人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

    发明人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

    IPC分类号： G02B26/02 ,  B81B3/00 ,  G02B6/12 ,  G02B6/35 ,  G02B6/26 ,  G02B6/42

    CPC分类号： G02B6/3508 ,  G02B6/356 ,  G02B6/358 ,  G02B2006/12145

    摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a shuttle for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS switch utilizes a latching mechanism in association with a thermal drive actuator for aligning the waveguide shuttle. In use the optical MEMS switch may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

    摘要翻译： 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在梭子上的多个光波导，用于切换光学状态，其中光学开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS开关利用与用于对准波导穿梭机的热驱动致动器相关联的闭锁机构。 在使用中，光学MEMS开关可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。

    Actuator and latching systems and methods
    4.
    发明授权
    Actuator and latching systems and methods 失效
    执行器和锁定系统和方法

    公开(公告)号：US07224883B2

    公开(公告)日：2007-05-29

    申请号：US11094408

    申请日：2005-03-31

    申请人： Peter M. Gulvin ,  Yao Rong Wang ,  Jun Ma ,  Kathleen A. Feinberg ,  Pinyen Lin

    发明人： Peter M. Gulvin ,  Yao Rong Wang ,  Jun Ma ,  Kathleen A. Feinberg ,  Pinyen Lin

    IPC分类号： G02B6/00

    CPC分类号： G02B6/3508 ,  G02B6/357 ,  G02B6/358

    摘要： An optical switch for routing signals includes a latch receiver connected to a waveguide that routes the signals and an actuator that includes an upper plate, a lower plate and a latch connected to the lower plate, the lower plate of the actuator moving vertically when power is applied to the lower plate, causing the latch to move vertically and engage the latch receiver. A latching system includes a switch that includes a latch formed to include an extension on one end of the latch, the latch being driven by power, a latch receiver that is formed to receive the latch and a controller that controls the extension of the latch to engage the latch receiver when the power is applied to the latch, and controls the extension of the latch to lock in place against the latch receiver when the power is removed from the latch.

    摘要翻译： 用于路由信号的光学开关包括连接到路由信号的波导的闩锁接收器和包括连接到下板的上板，下板和闩锁的致动器，致动器的下板在功率为 施加到下板，使得闩锁垂直移动并接合闩锁接收器。 闭锁系统包括开关，其包括形成为在闩锁的一端包括延伸部的闩锁，闩锁由电力驱动，形成为接收闩锁的闩锁接收器和控制闩锁延伸到 当电源被施加到闩锁时，将闩锁接收器接合，并且当电源从闩锁移除时，控制闩锁的延伸以锁定到锁定接收器上。

    MEMS optical latching switch
    5.
    发明授权
    MEMS optical latching switch 失效
    MEMS光锁定开关

    公开(公告)号：US06947624B2

    公开(公告)日：2005-09-20

    申请号：US10712203

    申请日：2003-11-12

    申请人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

    发明人： Joel A. Kubby ,  Kathleen A. Feinberg ,  Kristine A. German ,  Peter M. Gulvin ,  Jun Ma ,  Pinyen Lin

    IPC分类号： G02B6/12 ,  G02B6/35 ,  G02B6/26 ,  G02B6/42

    CPC分类号： G02B6/358 ,  G02B6/3508 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594 ,  G02B2006/12145

    摘要： An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred embodiment the optical MEMS switch is used as an M×N optical signal switching system. The optical MEMS switch comprises a plurality of optical waveguides formed on a cantilever beam platform for switching optical states wherein the state of the optical switch is changed by a system of drive and latch actuators. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning the cantilever beam platform. In use the optical MEMS device may be integrated with other optical components to form planar light circuits (PLCs). When switches and PLCs are integrated together on a silicon chip, compact higher functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs), may be fabricated.

    摘要翻译： 公开了一种光学微机电系统（MEMS）开关。 在优选实施例中，光学MEMS开关用作MxN光信号交换系统。 光学MEMS开关包括形成在悬臂梁平台上的多个光波导，用于切换光学状态，其中光开关的状态由驱动和闩锁致动器的系统改变。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 在使用中，光学MEMS器件可以与其他光学部件集成以形成平面光电路（PLC）。 当开关和PLC集成在硅芯片上时，可以制造紧凑的更高功能的器件，例如可重配置光插座多路复用器（ROADM）。