公开(公告)号：US20050089645A1

公开(公告)日：2005-04-28

申请号：US10971729

申请日：2004-10-22

Applicant: Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

Inventor： Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

IPC: B23K15/00 ,  C25D5/18 ,  C25D5/22 ,  C25D7/12 ,  C25D17/00 ,  C25D21/10 ,  C25D21/12 ,  H01L21/00 ,  B05D1/18

CPC classification number: C25D17/001 ,  C25D5/003 ,  C25D7/123 ,  C25D17/005 ,  C25D17/06 ,  C25D21/10 ,  C25D21/12 ,  H01L21/67023 ,  H01L21/67126

Abstract: A method and apparatus for retaining a workpiece against a workpiece holder are described. A flexible member can be used to provide a substantially uniform force to securely retain the workpiece, which can allow the workpiece to be consistently positioned in a process module. In one detailed embodiment, a barrier to fluid entry is formed between the workpiece and a ring for retaining the workpiece against a workpiece holder. This provides a reliable seal during fluid processing to prevent fluid from reaching the underside of a workpiece. In various embodiments, the workpiece holder can be used to align a workpiece in a process module or to hold one or more workpieces in a configuration that allows for higher throughput.

Abstract translation: 描述了将工件保持在工件保持器上的方法和装置。 可以使用柔性构件来提供基本上均匀的力以牢固地保持工件，这可以使工件一致地定位在工艺模块中。 在一个详细的实施例中，在工件和用于将工件保持在工件保持器上的环之间形成流体进入的障碍物。 这在流体处理期间提供了可靠的密封，以防止流体到达工件的下侧。 在各种实施例中，工件保持器可用于对准工件在工艺模块中或将一个或多个工件保持在允许更高生产量的构造中。

公开(公告)号：US08277624B2

公开(公告)日：2012-10-02

申请号：US13275158

申请日：2011-10-17

Applicant: Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

Inventor： Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

IPC: C25B9/02

CPC classification number: C25D17/001 ,  C25D5/003 ,  C25D7/123 ,  C25D17/005 ,  C25D17/06 ,  C25D21/10 ,  C25D21/12 ,  H01L21/67023 ,  H01L21/67126

Abstract: A workpiece holder for fluid processing a workpiece including a transportable frame, a flexible member connected to the frame and defining at least one retaining feature, and a ring comprising at least one engagement feature engageable with the at least one retaining feature of the flexible member, wherein the flexible member is flexed to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

Abstract translation: 一种用于流体处理工件的工件保持器，包括可运输框架，连接到框架并限定至少一个保持特征的柔性构件，以及包括可与柔性构件的至少一个保持结构接合的至少一个接合特征的环， 其中所述柔性构件弯曲以向所述至少一个接合特征提供力，以使所述环形成与所述工件的流体入口的阻挡。

公开(公告)号：US07822586B2

公开(公告)日：2010-10-26

申请号：US10915853

申请日：2004-08-11

Applicant: Qunwei Wu ,  Joseph E. Smith

Inventor： Qunwei Wu ,  Joseph E. Smith

IPC: G06G7/48 ,  G05D9/00

CPC classification number: G06F17/5009 ,  G05B13/021 ,  G05B17/02 ,  G06F2217/80

Abstract: Embodiments of the present invention include a computer program product including computer instructions that are executable to receive a set of process parameters, including fluid parameters and heat exchanger parameters, and determine a time for a dispense fluid to reach a target temperature. Additionally, the instructions can be executable to determine a set of process parameters that result in a time to reach the target temperature of below a predefined limit. According to another embodiment of the present invention, a set of computer instructions can calculate the time it takes for a dispense fluid to reach a target temperature for predictive flow control of a heating/cooling fluid.

Abstract translation: 本发明的实施例包括计算机程序产品，其包括可执行以接收包括流体参数和热交换器参数的一组过程参数并且确定分配流体达到目标温度的时间的计算机指令。 另外，指令可以被执行以确定导致达到目标温度低于预定极限的时间的一组过程参数。 根据本发明的另一个实施例，一组计算机指令可以计算分配流体达到目标温度所需的时间，以便对加热/冷却流体进行预测性流量控制。

公开(公告)号：US07387661B2

公开(公告)日：2008-06-17

申请号：US10554897

申请日：2004-04-22

Applicant: Qunwei Wu ,  Craig L. Brodeur ,  Jieh-Hwa Shyu ,  Eric McNamara

Inventor： Qunwei Wu ,  Craig L. Brodeur ,  Jieh-Hwa Shyu ,  Eric McNamara

IPC: B03C3/74

CPC classification number: B01D53/22 ,  B01D19/0031 ,  B01D61/00 ,  B01D63/067 ,  B01D63/14 ,  B01D2313/08 ,  B01D2313/086 ,  B01D2313/44 ,  C02F1/20 ,  C02F1/78 ,  C02F2201/782 ,  C02F2201/784

Abstract: A contactor for effecting passage through a membrane from a first fluid a second fluid is provided. A cylindrical pleated membrane cartridge is positioned within a housing having a first inlet and a first outlet from a first fluid and at lest a second outlet for a second fluid. At least one baffle is positioned within a first flow path for the first fluid.

Abstract translation: 提供了一种用于从第一流体通过膜通过第二流体的接触器。 圆柱形折叠膜盒位于壳体内，该壳体具有来自第一流体的第一入口和第一出口，并且至少为第二流体的第二出口。 至少一个挡板位于用于第一流体的第一流动路径内。

公开(公告)号：US07311808B2

公开(公告)日：2007-12-25

申请号：US10513265

申请日：2003-05-02

Applicant: Qunwei Wu ,  Craig L. Brodeur ,  John E. Pillion ,  Jieh Hwa Shyu

Inventor： Qunwei Wu ,  Craig L. Brodeur ,  John E. Pillion ,  Jieh Hwa Shyu

IPC: C25D17/10

CPC classification number: H01M8/04201 ,  B01D61/00 ,  B01J4/04 ,  B01J19/2475 ,  C01B3/503 ,  C01B2203/0405 ,  C01B2203/041 ,  C25B15/08 ,  C25D5/08 ,  C25D17/008 ,  C25D17/10 ,  C25F7/00 ,  F28F13/003 ,  F28F13/02 ,  H01M2/1673 ,  H01M8/04197 ,  H01M8/1004

Abstract: A device and method for increasing the mass transport rate of a chemical or electrochemical process at the solid and fluid interface in a fluid cell. The device includes a membrane in close contact with surface of the work piece, to separate the process cell into two chambers, so that fluid velocity at the work piece is controlled separately from the main cell flow. Thus the diffusion boundary layer is controlled and minimized by the rate that fluid is withdrawn from the work piece chamber.

Abstract translation: 一种用于增加流体池中的固体和流体界面处的化学或电化学过程的质量传输速率的装置和方法。 该装置包括与工件的表面紧密接触的膜，以将处理室分离成两个室，使得工件上的流体速度与主池流动分离地被控制。 因此，扩散边界层通过流体从工件腔室中取出的速度被控制和最小化。

公开(公告)号：US20070017366A1

公开(公告)日：2007-01-25

申请号：US10554897

申请日：2004-04-22

Applicant: Qunwei Wu ,  Craig Brodeur ,  Jieh-Hwa Shyu ,  Eric McNamara

Inventor： Qunwei Wu ,  Craig Brodeur ,  Jieh-Hwa Shyu ,  Eric McNamara

IPC: B01D53/22

CPC classification number: B01D53/22 ,  B01D19/0031 ,  B01D61/00 ,  B01D63/067 ,  B01D63/14 ,  B01D2313/08 ,  B01D2313/086 ,  B01D2313/44 ,  C02F1/20 ,  C02F1/78 ,  C02F2201/782 ,  C02F2201/784

Abstract: A contactor for effecting passage through a membrane from a first fluid a second fluid is provided. A cylindrical pleated membrane cartridge is positioned within a housing having a first inlet and a first outlet from a first fluid and at lest a second outlet for a second fluid. At least one baffle is positioned within a first flow path for the first fluid.

Abstract translation: 提供了一种用于从第一流体通过膜通过第二流体的接触器。 圆柱形折叠膜盒位于壳体内，该壳体具有来自第一流体的第一入口和第一出口，并且至少为第二流体的第二出口。 至少一个挡板位于用于第一流体的第一流动路径内。

公开(公告)号：US20060036417A1

公开(公告)日：2006-02-16

申请号：US10915853

申请日：2004-08-11

Applicant: Qunwei Wu ,  Joseph Smith

Inventor： Qunwei Wu ,  Joseph Smith

IPC: G06G7/48

CPC classification number: G06F17/5009 ,  G05B13/021 ,  G05B17/02 ,  G06F2217/80

Abstract: Embodiments of the present invention provide a system and method for optimizing a thermal management system. One embodiment of the present invention can include a computer program product including computer instructions that are executable to receive a set of process parameters, including fluid parameters and heat exchanger parameters, and determine a time for a dispense fluid to reach a target temperature. Additionally, the instructions can be executable to determine a set of process parameters that result in a time to reach the target temperature of below a predefined limit. According to another embodiment of the present invention, a set of computer instructions can calculate the time it takes for a dispense fluid to reach a target temperature for predictive flow control of a heating/cooling fluid

Abstract translation: 本发明的实施例提供了一种用于优化热管理系统的系统和方法。 本发明的一个实施例可以包括计算机程序产品，其包括可执行以接收包括流体参数和热交换器参数的一组过程参数的计算机指令，并且确定分配流体达到目标温度的时间。 另外，指令可以被执行以确定导致达到目标温度低于预定极限的时间的一组过程参数。 根据本发明的另一个实施例，一组计算机指令可以计算出分配流体达到目标温度所需的时间，以用于加热/冷却流体的预测流量控制

公开(公告)号：US08512543B2

公开(公告)日：2013-08-20

申请号：US12963991

申请日：2010-12-09

Applicant: Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

Inventor： Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

IPC: C25D5/08 ,  C25D7/12 ,  H01L21/00

CPC classification number: C25D17/001 ,  C25D5/003 ,  C25D7/123 ,  C25D17/005 ,  C25D17/06 ,  C25D21/10 ,  C25D21/12 ,  H01L21/67023 ,  H01L21/67126

Abstract: A method of fluid processing a semiconductor workpiece, including disposing a workpiece holder with a housing capable of containing a fluid, the workpiece holder retaining the workpiece, providing an agitation system connected to the housing and comprising a member disposed within the housing adjacent the workpiece holder, and agitating the fluid by moving the member substantially parallel to a surface of the workpiece with a non-uniform oscillatory motion, the non-uniform oscillatory motion being a series of substantially continuous geometrically asymmetric oscillations wherein each consecutive oscillation of the series is geometrically asymmetric having at least two substantially continuous opposing strokes wherein reversal positions of each substantially continuous stroke of the substantially continuous asymmetric oscillation are disposed asymmetrically with respect to a center point of each immediately preceding substantially continuous stroke of the oscillation.

Abstract translation: 一种流体处理半导体工件的方法，包括将具有能够容纳流体的壳体布置在工件夹持器上，保持工件的工件保持器，提供连接到壳体的搅拌系统，并且包括设置在壳体内的邻近工件保持器的构件 并且通过以非均匀的振荡运动基本上平行于工件的表面移动构件来搅动流体，该非均匀振荡运动是一系列基本上连续的几何非对称振荡，其中该系列的每个连续振荡是几何不对称的 具有至少两个基本上连续的相对冲程，其中基本上连续的不对称振荡的每个基本上连续行程的反转位置相对于振荡的每个紧接在前的基本上连续的行程的中心点非对称地设置。

公开(公告)号：US20100301564A1

公开(公告)日：2010-12-02

申请号：US12790264

申请日：2010-05-28

Applicant: Arthur Keigler ,  Qunwei Wu ,  Zhenqiu Liu ,  John Harrell

Inventor： Arthur Keigler ,  Qunwei Wu ,  Zhenqiu Liu ,  John Harrell

IPC: F16J15/02

CPC classification number: H01L21/67126 ,  C25D5/003 ,  C25D7/123 ,  C25D17/001 ,  C25D21/12 ,  H01L21/67023

Abstract: A method of fluid sealing a workpiece is provided. The method includes providing a force to cause a ring to form a barrier to fluid entry with the workpiece and preventing fluid from crossing the barrier to fluid entry by forming a pressure differential across the barrier.

Abstract translation: 提供了流体密封工件的方法。 该方法包括提供一个力，以使环形成与流体进入工件的阻挡层，并且通过在该屏障上形成一个压差来防止流体穿过该屏障穿过该流体入口。

公开(公告)号：US20100295225A1

公开(公告)日：2010-11-25

申请号：US12786219

申请日：2010-05-24

Applicant: Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

Inventor： Arthur Keigler ,  John Harrell ,  Zhenqiu Liu ,  Qunwei Wu

IPC: B23Q3/00 ,  F16J15/06

CPC classification number: C25D17/001 ,  C25D5/003 ,  C25D7/123 ,  C25D17/005 ,  C25D17/06 ,  C25D21/10 ,  C25D21/12 ,  H01L21/67023 ,  H01L21/67126

Abstract: A method of fluid sealing a workpiece is provided. The method includes placing a workpiece on a ring, engaging at least one engagement feature of the ring with at least one retaining feature defined by the member and flexing the member to provide a force to the at least one engagement feature to cause the ring to form a barrier to fluid entry with the workpiece.

Abstract translation: 提供了流体密封工件的方法。 该方法包括将工件放置在环上，将环的至少一个接合特征与由构件限定的至少一个保持特征接合并使构件弯曲以向至少一个接合特征施加力以使环形成 流体进入工件的障碍。