公开(公告)号：US09443749B2

公开(公告)日：2016-09-13

申请号：US13980474

申请日：2012-01-18

申请人： Shinji Wakabayashi ,  Sensho Kobayashi

发明人： Shinji Wakabayashi ,  Sensho Kobayashi

IPC分类号： H01L21/677 ,  H01L21/67

CPC分类号： H01L21/67703 ,  H01L21/67196 ,  H01L21/67742

摘要： In this vacuum processing apparatus, four process modules and four load-rock modules are arranged in clusters around a two-stage conveyance vacuum chamber. In the apparatus, the entirety of the second stage of the vacuum conveyance chamber is a third vacuum conveyance area and the third vacuum conveyance area extends from the second stage to the first stage through an aperture to enter between first and second vacuum conveyance areas. A third vacuum conveyance robot has: left and right-side conveyance units, which can move straight in the depth direction in the second stage of the third vacuum conveyance area; and left and right-side conveyance units, which can move straight in the vertical direction, i.e. can move up and down, in the aperture of the vacuum conveyance area.

摘要翻译： 在该真空处理装置中，四个处理模块和四个负载 - 岩石模块围绕两级输送真空室排列成簇。 在该装置中，真空输送室的第二阶段的整体是第三真空输送区域，第三真空输送区域从第二阶段延伸到第一阶段通过孔径进入第一和第二真空输送区域之间。 第三真空输送机器人具有：在第三真空输送区域的第二阶段中能够在深度方向上直线移动的左右输送单元; 以及可以在真空输送区域的孔中在垂直方向上直线移动即可上下移动的左右侧输送单元。

公开(公告)号：US08214150B2

公开(公告)日：2012-07-03

申请号：US12100198

申请日：2008-04-09

申请人： Shigeru Kohno ,  Shinji Wakabayashi

发明人： Shigeru Kohno ,  Shinji Wakabayashi

IPC分类号： G01C21/34

CPC分类号： G01C21/3688

摘要： When an operation mode (a latest cooperation mode) immediately before removal of a portable navigation device and an operation mode (a latest independence mode) immediately before re-mounting of the portable navigation device are the same, an MPU performs processing using processing data in the latest independence mode and takes over a route-guidance operation or a content-playback operation that was independently performed by the portable navigation device. On the other hand, when the latest cooperation mode and the latest independence mode are different from each other, the MPU performs processing using processing data in the latest cooperation mode and takes over a route-guidance operation or a content-playback operation that was performed by an in-vehicle apparatus and the portable navigation device in cooperation with each other.

摘要翻译： 当即将拆卸便携式导航装置之前的操作模式（最新的协同模式）和在重新安装便携式导航装置之前的操作模式（最新独立模式）相同时，MPU使用处理数据 最新的独立模式并且接管由便携式导航装置独立执行的路线引导操作或内容再现操作。 另一方面，当最新协作模式和最新独立模式彼此不同时，MPU使用最新协作模式中的处理数据执行处理，并且接管所执行的路由引导操作或内容重放操作 通过车载设备和便携式导航设备彼此协作。

公开(公告)号：US08123456B2

公开(公告)日：2012-02-28

申请号：US12190139

申请日：2008-08-12

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： B65G47/90

CPC分类号： H01L21/67766 ,  H01L21/67733 ,  H01L21/67769 ,  H01L21/67775 ,  Y10S414/14

摘要： A container changing system able to prevent deterioration in the working rate of substrate processing apparatuses and deterioration in the amount of production of semiconductor devices. A second mounting portion is arranged between a carrier of a container conveying unit and a first mounting portion of a substrate processing apparatus with respect to a lifting direction of a container. The second mounting portion is configured to freely advance and withdraw to/from a lifting path of the container. A container lifting unit is arranged between the carrier and the second mounting portion with respect to the lifting direction. In the container lifting unit, a base portion is configured to freely advance and withdraw to/from the lifting path, a second holder is provided below the base portion and can hold the container, and a second lifter is arranged between the base portion and the second holder and configured to lift up/down the second holder between the base portion and the first mounting portion when the second holder is located opposed to the first mounting portion.

摘要翻译： 一种容器改变系统，能够防止基板处理装置的加工速度的劣化和半导体装置的生产量的劣化。 第二安装部分相对于容器的提升方向布置在容器输送单元的托架和基板处理设备的第一安装部分之间。 第二安装部构造成能够自由地前进和离开容器的提升路径。 容器提升单元相对于提升方向布置在托架和第二安装部分之间。 在容器提升单元中，基部被配置为自由地前进和离开提升路径，第二保持器设置在基部下方并且可以容纳容器，并且第二提升器布置在基部和 第二保持器，并且构造成当第二保持器位于与第一安装部相对的位置时，在第二保持器的基部与第一安装部之间升降。

公开(公告)号：US07487266B2

公开(公告)日：2009-02-03

申请号：US11546398

申请日：2006-10-12

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： G06F3/00 ,  H03K7/08 ,  H04B1/56

CPC分类号： F02D41/266 ,  B60G2600/71 ,  B60G2800/97 ,  B60W10/06 ,  B60W50/06 ,  B60W2050/0006 ,  B60W2050/065 ,  F02D41/22 ,  F02D41/28

摘要： A communication system performs bidirectional communication through a same communication path every communication cycle period between a master station and a slave station. From the start of the communication cycle period until an interval period shorter than the communication cycle period elapses, the master station transmits master data represented at a first ratio of first pulse width to the communication cycle period to the slave station. In a remaining period after the interval period in the communication cycle period, the slave station transmits slave data represented at a second ratio of second pulse width to the interval period to the master station.

摘要翻译： 通信系统在主站和从站之间的每个通信周期中通过相同的通信路径执行双向通信。 从通信周期的开始直到比通信周期短的间隔期间过去，主站将以第一脉冲宽度的第一比率表示的主数据与通信周期周期发送到从站。 在通信周期的间隔周期后的剩余时间段中，从站发送以第二脉冲宽度的第二比率表示的从属数据到间隔周期到主站。

公开(公告)号：US20080253737A1

公开(公告)日：2008-10-16

申请号：US12047041

申请日：2008-03-12

申请人： Masaru Kimura ,  Shinji Wakabayashi

发明人： Masaru Kimura ,  Shinji Wakabayashi

IPC分类号： H04N5/91

CPC分类号： H04N5/84 ,  G11B27/005 ,  G11B27/105 ,  G11B27/34 ,  H04N5/775 ,  H04N5/907 ,  H04N7/17318 ,  H04N21/42201 ,  H04N21/4325 ,  H04N21/4402 ,  H04N21/4722 ,  H04N21/812 ,  H04N21/8586

摘要： A video player and a video-playback control method which are capable of easily performing a selection operation on a display object in a moving image are disclosed. The video player predicts the occurrence of the selection operation of the display object, which is an area for which an action is defined in the moving image, by the start of a move operation of the cursor 51 or the proximity of a hand to a touch panel, and changes the playback state of the title to pause or slow playback. Description information defined for the display object may be automatically displayed. Also, the areas of the display objects may be visualized by displaying figures.

摘要翻译： 公开了一种能够容易地对运动图像中的显示对象进行选择操作的视频播放器和视频重放控制方法。 视频播放器通过光标51的移动操作的开始或者手的触摸到触摸来预测在运动图像中定义动作的显示对象的选择操作的发生 面板，并将标题的播放状态更改为暂停或慢速播放。 可以自动显示为显示对象定义的描述信息。 此外，可以通过显示图形来可视化显示对象的区域。

公开(公告)号：US09096395B2

公开(公告)日：2015-08-04

申请号：US14122774

申请日：2012-06-18

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： B65G45/10 ,  B65G49/07 ,  H01L21/677 ,  B65G54/02

CPC分类号： B65G54/02 ,  B65G45/10 ,  B65G49/07 ,  H01L21/67742 ,  Y10T74/18712

摘要： Provided is an electric actuator capable of preventing the release of particles from the body thereof. The electric actuator includes a body made of an elongated enclosure; a slider configured to move in a reciprocating manner along a lengthwise direction of the body; an opening formed in a side surface of the body to correspond to a moving path of the slider; a dust seal band provided to cover the opening; and a pair of electrodes protruding from the body at opposite sides of the opening toward the outside of the body and extending in the lengthwise direction of the body with the opening being interposed between the pair of electrodes. Positive potential is generated in the upper electrode of the pair of electrodes and negative potential is generated in the lower electrode of the pair of electrodes.

摘要翻译： 提供一种能够防止颗粒从其本体释放的电致动器。 电致动器包括由细长壳体制成的主体; 滑块，其构造成沿着所述主体的长度方向以往复方式移动; 形成在所述主体的侧表面中以对应于所述滑块的移动路径的开口; 设置用于覆盖开口的防尘密封带; 以及一对电极，其从所述主体的相对侧朝向所述主体的外部突出并且在所述主体的长度方向上延伸，并且所述开口插入在所述一对电极之间。 在一对电极的上部电极中产生正电位，在一对电极的下部电极中产生负电位。

公开(公告)号：US20090116938A1

公开(公告)日：2009-05-07

申请号：US12264393

申请日：2008-11-04

申请人： Shinji WAKABAYASHI

发明人： Shinji WAKABAYASHI

IPC分类号： F16K15/02 ,  H01L21/677

CPC分类号： F16K15/03 ,  F16K35/00 ,  H01L21/67126 ,  H01L21/67772 ,  Y10T137/7903

摘要： A check valve is installed in a line having a fluid path for preventing generation of a back flow in the fluid path. The check valve includes a cylindrical member in which a part of the fluid path is formed; a valve body installed in the cylindrical member and rotatable between a blocking position for blocking the fluid path and an opening position for opening the fluid path; a rotary shaft which is installed horizontally to divide the valve body into a large area and a small area and allows the valve body to rotate thereabout; and a locking member for locking the valve body in the blocking position. The small area has a larger mass than that of the large area.

摘要翻译： 止回阀安装在具有用于防止在流体路径中产生回流的流体路径的管线中。 止回阀包括其中形成有流体路径的一部分的圆柱形构件; 阀体，安装在所述圆筒形构件中，并且可在用于阻塞所述流体路径的阻挡位置和用于打开所述流体路径的打开位置之间旋转; 水平安装的旋转轴将阀体分成较大的区域和小的区域，并允许阀体在其周围旋转; 以及用于将阀体锁定在阻挡位置的锁定构件。 小区域的质量大于大面积。

公开(公告)号：US20090060692A1

公开(公告)日：2009-03-05

申请号：US12200054

申请日：2008-08-28

申请人： Shinji WAKABAYASHI

发明人： Shinji WAKABAYASHI

IPC分类号： H01L21/67

CPC分类号： H01L21/67265 ,  H01L21/67766

摘要： A substrate positional misalignment detection system capable of detecting positional misalignment of a substrate without moving a detector in the case of using a bottom opening pod having a main body, a lid and a cassette holding wafers. A recursive reflection type sensor adapted to emit and receive light in an upward/downward direction is provided in a supporting unit adapted to support the lid and move up and down the lid together with the cassette. A recursive reflection plate adapted to reflect the emitted light is provided on the ceiling portion of the main body. A light transmitting window is provided in the lid. The recursive reflection type sensor, the light transmitting window, and the recursive reflection plate are aligned linearly in the upward/downward direction. The light emitted by the recursive reflection type sensor is not blocked by the substrate held in a predetermined storage position by the cassette.

摘要翻译： 在使用具有主体，盖和盒保持晶片的底部开口盒的情况下，能够检测基板的位置偏移而不移动检测器的基板位置偏移检测系统。 适于在向上/向下方向发射和接收光的递归反射型传感器设置在适于支撑盖并与盒一起上下移动盖的支撑单元中。 适于反射发射光的递归反射板设置在主体的天花板部分上。 在盖中设置透光窗。 循环反射型传感器，透光窗和递归反射板在向上/向下方向线性对齐。 由递归反射型传感器发射的光不被由盒子保持在预定存储位置的基板阻挡。

公开(公告)号：US20090053023A1

公开(公告)日：2009-02-26

申请号：US11892677

申请日：2007-08-24

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： H01L21/677

CPC分类号： H01L21/67748 ,  H01L21/681 ,  Y10S414/136

摘要： One sensor constituted of a light emission element and a light-receiving element is provided in a path through which a wafer is transferred. The sensor is positioned so that the wafer passes through an area between the light emission element and the light-receiving element. Coordinates of the center of the wafer are calculated based on encoder values obtained when the wafer starts passing through the sensor and when the wafer completes passing through the sensor, position data of wafer transfer means corresponding to the encoder value, and the diameter of the wafer; and thereby the amount of positional deviation of the center of the wafer from a reference position is calculated.

摘要翻译： 在发送晶片的路径中设置由发光元件和受光元件构成的一个传感器。 传感器被定位成使得晶片通过发光元件和光接收元件之间的区域。 基于晶片开始通过传感器时获得的编码器值，当晶片完成通过传感器时，根据编码器值对应的晶片传送装置的位置数据和晶片的直径来计算晶片中心的坐标 ; 从而计算晶片的中心与基准位置的位置偏差量。

公开(公告)号：US20080050924A1

公开(公告)日：2008-02-28

申请号：US11892430

申请日：2007-08-22

申请人： Shinji Wakabayashi

发明人： Shinji Wakabayashi

IPC分类号： H01L21/306 ,  H01L21/302

CPC分类号： H01L21/67017 ,  H01L21/67778 ,  H01L21/68

摘要： Object A substrate processing apparatus is provided, which comprises a processing vessel adapted to provide a process to a substrate, an ambient atmospheric carrying chamber, and a functional module located on a carrying route of the substrate to be carried by a carrying means in the ambient atmospheric carrying chamber, wherein bad effect on the functional module due to particles and/or corrosive gases to be generated due to contact of the ambient air with the substrate after having been processed can be avoided. solution The substrate processing apparatus, adapted to provide a process, such as etching, to a wafer, comprises the processing vessel, the ambient atmospheric carrying chamber, and the functional module, such as an orienter 4. With the process to be provided, matters having potential to generate corrosive gases or the like due to contact with the ambient air are attached to the wafer. In the ambient atmospheric carrying chamber, a first air stream creating means 15a, 15b, 15c is provided. In the functional module, a second air stream creating means (FFU 60) is installed to create a stream of cleaned air directed toward the ambient atmospheric carrying chamber 14 from the functional module 4, by taking in the ambient air from a clean room.

摘要翻译： 对象提供了一种基板处理装置，其包括处理容器，该处理容器适于向基板，环境大气输送室和位于基板的运送路径上的功能模块提供处理，所述功能模块将由环境中的承载装置承载 可以避免由于环境空气与处理后的基板接触而产生的颗粒和/或腐蚀性气体对功能模块的不良影响。 解决方案适用于向晶片提供诸如蚀刻的处理的衬底处理装置包括处理容器，环境大气承载室和诸如定向器4的功能模块。随着要提供的过程，事项 由于与环境空气的接触而产生腐蚀性气体等的潜力附着在晶片上。 在环境大气承载室中，设置有第一气流产生装置15a，15b，15c。 在功能模块中，安装第二气流产生装置（FFU60），以从功能模块4通过吸入来自洁净室的环境空气来产生朝向周围大气承载室14的清洁空气流。