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    Pendulous accelerometer with balanced gas damping
    11.
    发明授权
    Pendulous accelerometer with balanced gas damping 有权
    Pendulous加速度计具有均衡的气体阻尼

    公开(公告)号：US08079262B2

    公开(公告)日：2011-12-20

    申请号：US11978090

    申请日：2007-10-26

    Applicant: Shuwen Guo

    Inventor： Shuwen Guo

    IPC: G01P15/125

    CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P15/131 ,  G01P2015/0831

    Abstract: A pendulous capacitive accelerometer including a substrate having a substantially planar upper surface with an electrode section, and a sensing plate having a central anchor portion supported on the upper surface of the substrate to define a hinge axis. The sensing plate includes a solid proof mass on a first side of the central anchor portion and a substantially hollow proof mass on a second side of the central anchor portion, providing for reduced overall chip size and balanced gas damping. The solid proof mass has a first lower surface with a first electrode element thereon, and the substantially hollow proof mass has a second lower surface with a second electrode element thereon. Both the solid proof mass and the hollow proof mass have the same capacitive sensing area. The sensing plate rotates about the hinge axis relative to the upper surface of the substrate in response to an acceleration.

    Abstract translation: 一种下摆电容式加速度计，包括具有基本平坦的上表面的基板，具有电极部分，以及感测板，其具有支撑在基板的上表面上以限定铰链轴线的中心锚固部分。 感测板包括在中心锚固部分的第一侧上的固体质量块和在中心锚固部分的第二侧上的基本上中空的质量块，从而提供减小的整体芯片尺寸和平衡的气体阻尼。 固体质量体具有在其上具有第一电极元件的第一下表面，并且基本上中空的质量块具有在其上的第二电极元件的第二下表面。 固体质量块和中空质量块均具有相同的电容感应区域。 感测板响应于加速度相对于基板的上表面围绕铰链轴线旋转。

    Full-Automatic Water-Bath Rotary Recuperated Autoclave with High Temperature & High Pressure
    12.
    发明申请
    Full-Automatic Water-Bath Rotary Recuperated Autoclave with High Temperature & High Pressure 审中-公开
    全自动水浴高温高压旋转高压灭菌器

    公开(公告)号：US20100124521A1

    公开(公告)日：2010-05-20

    申请号：US12271870

    申请日：2008-11-15

    Applicant: SHUWEN GUO

    Inventor： SHUWEN GUO

    IPC: A61L2/04

    CPC classification number: A61L2/07 ,  A23L3/10 ,  A61L2/24

    Abstract: A full-automatic water-bath rotary recuperated autoclave with high temperature & high pressure comprising a hot water tank, a process tank and its transmission system, characterized in that: Through bolt connection, said hot water tank is fixed on said process tank at the end of which a straight round end cover is provided; a holder for transmission system is mounted on the side of said straight round end cover; there is a bearing seat on the said holder; the main shaft is connected with the said bearing seat via the said bearing; the gears are fixed on the said main shaft and connected with the motor output wheels; the said motor is mounted on the said holder. Through above configuration, the present invention uses simple structural connection to solve effectively conveniently disadvantages of transmission system and improve operating life of the whole autoclave at the same time.

    Abstract translation: 一种具有高温高压的全自动水浴回转式高压釜，包括热水箱，处理罐及其传输系统，其特征在于：通过螺栓连接，将所述热水箱固定在所述处理罐上 其端部设置有直的圆形端盖; 用于传动系统的支架安装在所述直的圆形端盖的侧面上; 所述支架上有一个轴承座; 主轴通过所述轴承与所述轴承座连接; 齿轮固定在所述主轴上并与马达输出轮连接; 所述电动机安装在所述保持器上。 通过上述结构，本发明使用简单的结构连接来有效解决传输系统的缺点，同时提高整个高压釜的使用寿命。

    High temperature capacitive static/dynamic pressure sensors
    14.
    发明申请
    High temperature capacitive static/dynamic pressure sensors 有权
    高温静电/动态压力传感器

    公开(公告)号：US20100000326A1

    公开(公告)日：2010-01-07

    申请号：US12215735

    申请日：2008-06-30

    Applicant: Shuwen Guo

    Inventor： Shuwen Guo

    IPC: G01L9/12

    CPC classification number: G01L9/0072 ,  G01L9/12 ,  G01L19/04 ,  G01L23/125

    Abstract: Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode.

    Abstract translation: 公开了用于高温应用的电容式压力探测器，例如用于燃气涡轮发动机中。 本发明的电容式探头或压力传感器尤其包括传感器外壳，该传感器外壳限定内部检测腔室，其具有邻近传感电极定位的压力端口和内部参考室。 参考室通过由Haynes 230合金制成的可偏转隔膜与感测室分离，其中响应于感测室中施加的压力的隔膜的偏转对应于由感测电极检测的电容值的变化。

    Method for making a pressure sensor
    16.
    发明申请
    Method for making a pressure sensor 有权
    制造压力传感器的方法

    公开(公告)号：US20060076855A1

    公开(公告)日：2006-04-13

    申请号：US11139207

    申请日：2005-05-27

    Applicant: Odd Eriksen ,  Shuwen Guo

    Inventor： Odd Eriksen ,  Shuwen Guo

    IPC: H01L41/04

    CPC classification number: G01L9/008 ,  G01L9/0042 ,  G01L9/0055 ,  H01L41/1132 ,  Y10S439/936 ,  Y10T29/42 ,  Y10T29/49 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

    Abstract: A pressure sensor including a movable component that is configured to move when the pressure sensor is exposed to differential pressure thereacross, and a pressure sensing component located on the movable component. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the movable component. The pressure sensor is configured such that leads can be coupled to the pressure sensing component and the pressure sensing component can output a signal via the leads, the signal being related to a pressure to which the pressure sensor is exposed.

    Abstract translation: 一种压力传感器，包括被构造成当压力传感器暴露于其间的差压时移动的可移动部件以及位于可移动部件上的压力感测部件。 压力感测部件包括导电电子气体，其在可移动部件移动时改变其电阻。 压力传感器被配置为使得引线可以耦合到压力感测部件，并且压力感测部件可以经由引线输出信号，该信号与压力传感器暴露于的压力相关。

    Micro mirror arrays and microstructures with solderable connection sites
    17.
    发明申请
    Micro mirror arrays and microstructures with solderable connection sites 失效
    具有可焊接连接点的微镜阵列和微结构

    公开(公告)号：US20050013533A1

    公开(公告)日：2005-01-20

    申请号：US10620119

    申请日：2003-07-15

    Applicant: Thomas Wiegele ,  Christopher Apanius ,  Kenneth Goldman ,  Shuwen Guo ,  Loren St. Clair ,  Timothy O'Meara ,  James Pohl

    Inventor： Thomas Wiegele ,  Christopher Apanius ,  Kenneth Goldman ,  Shuwen Guo ,  Loren St. Clair ,  Timothy O'Meara ,  James Pohl

    IPC: B81B3/00 ,  B81B7/04 ,  B81C1/00 ,  G02B26/08 ,  G02B6/26

    CPC classification number: B81C1/0023 ,  B81B2201/042 ,  G02B26/0841

    Abstract: A micro mirror array including an upper wafer portion having a plurality of movable reflective surfaces located thereon, the upper wafer portion defining a coverage area in top view. The array further includes a lower wafer portion located generally below and coupled to the upper wafer portion. The lower wafer portion includes at least one connection site located thereon, the at least one connection site being electrically or operatively coupled to at least one component which can control the movement of at least one of the reflective surfaces. The at least one connection site is not generally located within the coverage area of the upper wafer portion.

    Abstract translation: 一种微镜阵列，包括具有位于其上的多个可移动反射表面的上晶片部分，上晶片部分在顶视图中限定覆盖区域。 该阵列还包括下部晶片部分，该下部晶片部分大致位于上部晶片部分下方并耦合到该上部晶片部分。 下晶片部分包括位于其上的至少一个连接部位，所述至少一个连接部位电连接或可操作地耦合到至少一个可控制至少一个反射表面的部件的部件。 至少一个连接位置通常不位于上晶片部分的覆盖区域内。

    High temperature capacitive static/dynamic pressure sensors and methods of making the same
    18.
    发明申请
    High temperature capacitive static/dynamic pressure sensors and methods of making the same 有权

    公开(公告)号：US20120024073A1

    公开(公告)日：2012-02-02

    申请号：US12804874

    申请日：2010-07-30

    Applicant: Shuwen Guo

    Inventor： Shuwen Guo

    IPC: G01L9/12 ,  H05K13/00

    CPC classification number: G01L9/0075 ,  G01L19/04 ,  Y10T29/49002

    Abstract: Disclosed are capacitive pressure probes or sensors for high temperature applications. The capacitive pressure sensors of the present invention include, inter alia, a sapphire diaphragm which is disposed within an interior sensing chamber of the probe housing and has a first electrode formed on a central portion thereof. The central portion of the diaphragm and the first electrode are adapted and configured to deflect in response to pressure variations encountered within an interior sensing chamber and by the pressure sensor. A sapphire substrate which has a second electrode formed thereon is fused to the sapphire diaphragm about its periphery to form a sapphire stack and to define a reference chamber therebetween. Prior to fusing the sapphire diaphragm to the sapphire substrate, all contact surfaces are chemically treated and prepared using plasma activation, so as to create a bonding layer and to reduce the temperature required for the fusion.

    High temperature resistant solid state pressure sensor
    20.
    发明授权
    High temperature resistant solid state pressure sensor 有权
    耐高温固态压力传感器

    公开(公告)号：US07952154B2

    公开(公告)日：2011-05-31

    申请号：US12579123

    申请日：2009-10-14

    Applicant: Shuwen Guo ,  Odd Harald Steen Eriksen ,  David P. Potasek ,  Kimiko J. Childress

    Inventor： Shuwen Guo ,  Odd Harald Steen Eriksen ,  David P. Potasek ,  Kimiko J. Childress

    IPC: H01L29/84

    CPC classification number: G01L9/0042 ,  C23C14/021 ,  C23C14/022 ,  C23C14/025 ,  C23C14/0682 ,  C23C14/5806 ,  C23C14/5846 ,  C23C14/5873 ,  G01L9/0054 ,  G01L9/008 ,  G01L19/0061 ,  G01L19/0069 ,  G01L19/0076 ,  G01L19/0084 ,  G01L19/0609 ,  G01L19/141 ,  G01L19/147 ,  G01L19/148 ,  H01L2224/05553 ,  H01L2224/45169 ,  H01L2224/48472 ,  H01L2224/81805 ,  H01L2224/83805 ,  H01L2924/01322 ,  H01L2924/10253 ,  H01L2924/1461 ,  H01L2924/3025 ,  H01L2924/00

    Abstract: A harsh environment transducer including a substrate having a first surface and a second surface, wherein the second surface is in communication with the environment. The transducer includes a device layer sensor means located on the substrate for measuring a parameter associated with the environment. The sensor means including a single crystal semiconductor material having a thickness of less than about 0.5 microns. The transducer further includes an output contact located on the substrate and in electrical communication with the sensor means. The transducer includes a package having an internal package space and a port for communication with the environment. The package receives the substrate in the internal package space such that the first surface of the substrate is substantially isolated from the environment and the second surface of the substrate is substantially exposed to the environment through the port. The transducer further includes a connecting component coupled to the package and a wire electrically connecting the connecting component and the output contact such that an output of the sensor means can be communicated. An external surface of the wire is substantially platinum, and an external surface of at least one of the output contact and the connecting component is substantially platinum.

    Abstract translation: 一种恶劣环境换能器，包括具有第一表面和第二表面的基底，其中第二表面与环境连通。 换能器包括位于基板上的用于测量与环境有关的参数的装置层传感器装置。 传感器装置包括厚度小于约0.5微米的单晶半导体材料。 换能器还包括位于基板上并与传感器装置电连通的输出触点。 换能器包括具有内部封装空间和用于与环境通信的端口的封装。 该封装在内部封装空间中接收衬底，使得衬底的第一表面基本上与环境隔离，并且衬底的第二表面基本上通过端口暴露于环境。 传感器还包括耦合到封装件的连接部件和将连接部件和输出触头电连接的导线，使得传感器装置的输出可以被传送。 导线的外表面基本上是铂，并且输出触点和连接部件中的至少一个的外表面基本上是铂。

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