公开(公告)号：US20210109029A1

公开(公告)日：2021-04-15

申请号：US17129745

申请日：2020-12-21

Applicant: Applied Materials Israel Ltd.

Inventor： Saar Shabtay ,  Moshe Amzaleg ,  Zvi Goren

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95

Abstract: Inspection data that corresponds to potential defects of an object may be received. A first set of locations of first potential defects can be identified. The first set of locations of the first potential defects can be imaged with a review tool to obtain a first set of review images. The first potential defects can be classified based on the first set of review images to obtain first classification results of the first potential defects. An instruction can be determined for the review tool based on the first classification results, the instruction being associated with detecting potential defects. Using the instruction, a second set of locations of second potential defects of the plurality of potential defects to be imaged with the review tool can be identified.

公开(公告)号：US10545020B2

公开(公告)日：2020-01-28

申请号：US13831446

申请日：2013-03-14

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Nir Ben-David Dodzin

IPC: G01B21/02

Abstract: A computerized method for estimating a size of a nanometric part of an inspected article, the method including: (a) acquiring inspection results generated by processing an inspection image which was generated by collecting signals arriving from a portion of the article which includes the part by an inspection system; (b) fitting to the inspection results an approximation function from a group of functions which is related to a response pattern of the inspection system; and (c) determining an estimated size of the part, based on at least one parameter of the approximation function.

公开(公告)号：US20150332451A1

公开(公告)日：2015-11-19

申请号：US14279192

申请日：2014-05-15

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Nir Ben-David Dodzin

IPC: G06T7/00 ,  G06T7/40

CPC classification number: G06T7/001 ,  G01N2021/95615 ,  G06T7/0002 ,  G06T7/0004 ,  G06T7/0006 ,  G06T7/0008 ,  G06T2207/20076 ,  G06T2207/30148

Abstract: A system configured to detect defects in an inspection image generated by collecting signals arriving from an article, the system comprising a tangible processor which includes: (i) a distribution acquisition module, configured to acquire a distribution of comparison values, each of the comparison values being indicative of a relationship between a value associated with a pixel of the inspection image and a corresponding reference value; (ii) a fitting module, configured to fit to the distribution an approximation function out of a predefined group of functions; and (iii) a defect detection module, configured to: (a) set a defect detection criterion based on a result of the fitting; and to (b) determine a presence of a defect in the inspection image, based on the defect detection criterion.

Abstract translation: 一种被配置为检测通过收集从物品到达的信号产生的检查图像中的缺陷的系统，所述系统包括有形处理器，该有形处理器包括：（i）配置获取模块，被配置为获取比较值的分布，每个比较值 指示与检查图像的像素相关联的值与相应的参考值之间的关系; （ii）拟合模块，其被配置为适合于所述分布中的预定义功能组中的近似函数; 以及（iii）缺陷检测模块，被配置为：（a）基于所述拟合的结果来设置缺陷检测标准; 以及（b）基于缺陷检测标准确定检查图像中的缺陷的存在。

公开(公告)号：US09070180B2

公开(公告)日：2015-06-30

申请号：US13773549

申请日：2013-02-21

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzin ,  Efrat Rozenman

IPC: G06K9/00 ,  G06T7/00 ,  H01L21/67

CPC classification number: G06T7/001 ,  G06T7/0002 ,  G06T2207/30148 ,  H01L21/67288

Abstract: A defect detection system for computerized detection of defects in an inspected object based on processing of an inspection image generated by collecting signals arriving from the inspected object, the system including: an interface for obtaining an inspected noise-indicative value and multiple reference noise-indicative values, the inspected noise-indicative value representative of an analyzed pixel and each of the reference noise-indicative values representative of a reference pixel among a plurality of reference pixels; and a processor, including: a noise analysis module, configured to compute a representative noise-indicative value based on a plurality of noise-indicative values which includes the inspected noise-indicative value and the multiple reference noise-indicative values; and a defect analysis module, configured to calculate a defect-indicative value based on an inspected value representative of the analyzed pixel, and to determine a presence of a defect in the analyzed pixel based on the representative noise-indicative value and the defect-indicative value.

Abstract translation: 一种用于基于通过收集从被检查对象到达的信号产生的检查图像的处理来对被检查对象中的缺陷进行计算机化检测的缺陷检测系统，所述系统包括：用于获得被检查的噪声指示值和多个参考噪声指示值的接口 值，表示分析像素的被检查噪声指示值和表示多个参考像素中的参考像素的每个参考噪声指示值; 以及处理器，包括：噪声分析模块，被配置为基于包括所检查的噪声指示值和所述多个参考噪声指示值的多个噪声指示值来计算代表性噪声指示值; 以及缺陷分析模块，被配置为基于代表所分析的像素的检查值来计算缺陷指示值，并且基于代表性的噪声指示值和缺陷指示值来确定所分析的像素中的缺陷的存在 值。

公开(公告)号：US11592400B2

公开(公告)日：2023-02-28

申请号：US17129745

申请日：2020-12-21

Applicant: Applied Materials Israel Ltd.

Inventor： Saar Shabtay ,  Moshe Amzaleg ,  Zvi Goren

IPC: G01N21/88 ,  G06T7/00 ,  G01N21/95 ,  G01N21/84

Abstract: Inspection data that corresponds to potential defects of an object may be received. A first set of locations of first potential defects can be identified. The first set of locations of the first potential defects can be imaged with a review tool to obtain a first set of review images. The first potential defects can be classified based on the first set of review images to obtain first classification results of the first potential defects. An instruction can be determined for the review tool based on the first classification results, the instruction being associated with detecting potential defects. Using the instruction, a second set of locations of second potential defects of the plurality of potential defects to be imaged with the review tool can be identified.

公开(公告)号：US10957567B2

公开(公告)日：2021-03-23

申请号：US16683145

申请日：2019-11-13

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Ofer Adan

IPC: H01L21/67 ,  G05B19/406 ,  G06T7/00 ,  G06T7/60 ,  H01L21/033 ,  H01L21/311 ,  H01L21/66 ,  G01N21/95 ,  G01B15/08

Abstract: A system, computer program product and a method for detecting manufacturing process defects, the method may include: obtaining multiple edge measurements of one or more structural elements after a completion of each one of multiple manufacturing phases; generating spatial spectrums, based on the multiple edge measurements, for each one of the multiple manufacturing phases; determining relationships between bands of the spatial spectrums; and identifying at least one of the manufacturing process defects based on the relationships between the bands of the spatial spectrums.

公开(公告)号：US09767356B2

公开(公告)日：2017-09-19

申请号：US14738354

申请日：2015-06-12

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Yehuda Cohen ,  Nir Ben-David Dodzen ,  Efrat Rozenman

IPC: G06K9/00 ,  G06T7/00

CPC classification number: G06K9/00536 ,  G06T7/001 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: A system including an interface for receiving inspection image data of an inspection image of an inspection object. The inspection image data includes information of an analyzed pixel of the inspected image and of reference pixels of the inspected image. The system further includes a memory and a processor device operatively coupled to the interface and the memory to obtain an inspected value representative of the analyzed pixel of the inspected image, and a reference value for each of the reference pixels of the inspected image. For each reference pixel, the processor devices calculates a difference between the reference value of a respective reference pixel and the inspected value of the analyzed pixel, computes a representative difference value based on the differences and determines a presence of a defect in the analyzed pixel based on the representative difference value.