公开(公告)号：US10957567B2

公开(公告)日：2021-03-23

申请号：US16683145

申请日：2019-11-13

Applicant: Applied Materials Israel Ltd.

Inventor： Moshe Amzaleg ,  Ofer Adan

IPC: H01L21/67 ,  G05B19/406 ,  G06T7/00 ,  G06T7/60 ,  H01L21/033 ,  H01L21/311 ,  H01L21/66 ,  G01N21/95 ,  G01B15/08

Abstract: A system, computer program product and a method for detecting manufacturing process defects, the method may include: obtaining multiple edge measurements of one or more structural elements after a completion of each one of multiple manufacturing phases; generating spatial spectrums, based on the multiple edge measurements, for each one of the multiple manufacturing phases; determining relationships between bands of the spatial spectrums; and identifying at least one of the manufacturing process defects based on the relationships between the bands of the spatial spectrums.

公开(公告)号：US20140098211A1

公开(公告)日：2014-04-10

申请号：US13787645

申请日：2013-03-06

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yuval Yahav ,  Ofer Adan

IPC: G01B15/00 ,  H01J37/22

CPC classification number: G01B15/00 ,  G03F7/70616 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/24578

Abstract: A non-transitory computer readable medium, a system and a method. The method may include obtaining, by an image obtaining module, an image of a measurement site, the measurement site comprise the feature, the image of the measurement site comprises an image of the feature; processing, by an image processor, the image of the measurement site to provide an artificial image, the artificial image comprise a artificial image of an artificial feature, the artificial feature differs from the feature; measuring a parameter of the artificial feature to provide a measurement result, wherein the measuring comprises applying a measurement algorithm that is inadequate for measuring the parameter of the feature; and determining a value of the parameter of the feature in response to the measurement result.

Abstract translation: 非暂时性计算机可读介质，系统和方法。 该方法可以包括通过图像获取模块获得测量位置的图像，测量位置包括特征，测量位置的图像包括特征的图像; 通过图像处理器处理测量位置的图像以提供人造图像，人造图像包括人造特征的人造图像，人造特征与特征不同; 测量人造特征的参数以提供测量结果，其中所述测量包括应用不足以测量所述特征的参数的测量算法; 以及响应于所述测量结果确定所述特征的参数的值。

公开(公告)号：US12250503B2

公开(公告)日：2025-03-11

申请号：US17134025

申请日：2020-12-24

Applicant: Applied Materials Israel Ltd.

Inventor： Ofer Adan

IPC: H04Q9/00 ,  G01R31/26 ,  H01L21/66

Abstract: There is provided a method and a system configured to obtain metrology data Dmetrology informative of a plurality of structural parameters of a semiconductor specimen, obtain a model informative of a relationship between at least some of said structural parameters and one or more electrical properties of the specimen, use the model and Dmetrology to determine, for at least one given electrical property of the specimen, one or more given structural parameters among the plurality of structural parameters, which affect the given electrical property according to an impact criterion, and generate a recipe for an examination tool, wherein the recipe enables a ratio between a first acquisition rate of data informative of the one or more given structural parameters, and a second acquisition rate of data informative of other structural parameters of the plurality of structural parameters, to meet a criterion.

公开(公告)号：US09835563B2

公开(公告)日：2017-12-05

申请号：US14946693

申请日：2015-11-19

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Yoram Uziel ,  Ron Naftali ,  Ofer Adan ,  Haim Feldman ,  Ofer Shneyour ,  Ron Bar-Or ,  Doron Korngut

IPC: G01N21/00 ,  G01N21/88 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q60/06 ,  G01Q70/06 ,  G01Q60/24

CPC classification number: G01N21/88 ,  G01Q10/065 ,  G01Q20/02 ,  G01Q60/06 ,  G01Q60/24 ,  G01Q70/06

Abstract: There may be provided an evaluation system that may include spatial sensors that include atomic force microscopes (AFMs) and a solid immersion lens. The AFMs are arranged to generate spatial relationship information that is indicative of a spatial relationship between the solid immersion lens and a substrate. The controller is arranged to receive the spatial relationship information and to send correction signals to the at least one location correction element for introducing a desired spatial relationship between the solid immersion lens and the substrate.

公开(公告)号：US10354376B2

公开(公告)日：2019-07-16

申请号：US15918570

申请日：2018-03-12

Applicant: Applied Materials Israel Ltd.

Inventor： Yakov Weinberg ,  Ishai Schwarzband ,  Roman Kris ,  Itay Zauer ,  Ran Goldman ,  Olga Novak ,  Dhananjay Singh Rathore ,  Ofer Adan ,  Shimon Levi

IPC: G06K9/00 ,  G06T7/00 ,  G06T7/194 ,  G06T7/10 ,  G06T7/30 ,  G06T7/11 ,  G06T7/12 ,  G06T7/143 ,  G06T7/33 ,  G06K9/52

Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.

公开(公告)号：US10049904B1

公开(公告)日：2018-08-14

申请号：US15668517

申请日：2017-08-03

Applicant: APPLIED MATERIALS ISRAEL LTD. ,  APPLIED MATERIALS, INC.

Inventor： Ofer Adan ,  Israel Avneri ,  Yoram Uziel ,  Igor Krivts (Krayvitz) ,  Niranjan Ramchandra Khasgiwale

IPC: H01L21/677 ,  H01L21/687 ,  H01L21/68 ,  H01L21/67 ,  H01L21/66

Abstract: A method and a system for moving a substrate, the system includes a chamber, a chuck, a movement system that is positioned outside the chamber, a controller, an intermediate element, at least one sealing element that is configured to form a dynamic seal between the intermediate element and the chamber housing. The movement system is configured to repeat, for each region of the substrate out of a plurality of regions of the substrate, the steps of: rotating the chuck to position a given portion of the region of the substrate within a field of view that is related to an opening of the chamber housing; and moving the chuck relation to the opening to position additional portions of the region of the substrate within the field of view that is related to the opening.

公开(公告)号：US09916652B2

公开(公告)日：2018-03-13

申请号：US15390663

申请日：2016-12-26

Applicant: Applied Materials Israel Ltd.

Inventor： Yakov Weinberg ,  Ishai Schwarzband ,  Roman Kris ,  Itay Zauer ,  Ran Goldman ,  Olga Novak ,  Dhananjay Singh Rathore ,  Ofer Adan ,  Shimon Levi

IPC: G06K9/00 ,  G06T7/00 ,  G06T7/12 ,  G06T7/143 ,  G06T7/33 ,  G06K9/52

CPC classification number: G06T7/0006 ,  G06K9/525 ,  G06T7/001 ,  G06T7/10 ,  G06T7/11 ,  G06T7/12 ,  G06T7/143 ,  G06T7/194 ,  G06T7/30 ,  G06T7/337 ,  G06T2207/10061 ,  G06T2207/20116 ,  G06T2207/30148

Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.

公开(公告)号：US09297692B2

公开(公告)日：2016-03-29

申请号：US13772287

申请日：2013-02-20

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yoram Uziel ,  Alon Litman ,  Ofer Adan ,  Ron Naftali ,  Juergen Frosien

IPC: G01J1/02 ,  G01J1/04 ,  G01N21/88 ,  G02B21/00 ,  G02B21/24 ,  G01N21/95 ,  G01N21/956 ,  G02B13/00

CPC classification number: G01J1/0266 ,  G01J1/0422 ,  G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02B13/001 ,  G02B21/0016 ,  G02B21/24

Abstract: An evaluation system that includes a miniature module that comprises a miniature objective lens and a miniature supporting module; wherein the miniature supporting module is arranged, when placed on a sample, to position the miniature objective lens at working distance from the sample; wherein the miniature objective lens is arranged to gather radiation from an area of the sample when positioned at the working distance from the sample; a sensor arranged to detect radiation that is gathered by the miniature objective lens to provide detection signals indicative of the area of the sample.

Abstract translation: 一种包括微型模块的评估系统，包括微型物镜和微型支撑模块; 其中所述微型支撑模块布置在放置在样本上以使所述微型物镜定位在距离所述样品的工作距离处; 其中所述微型物镜被布置成在距所述样品的工作距离处定位时收集来自所述样品的区域的辐射; 传感器，被布置成检测由微型物镜聚集的辐射，以提供指示样品面积的检测信号。

公开(公告)号：US09530199B1

公开(公告)日：2016-12-27

申请号：US14798283

申请日：2015-07-13

Applicant: Applied Materials Israel Ltd.

Inventor： Yakov Weinberg ,  Ishai Schwarzband ,  Roman Kris ,  Itay Zauer ,  Ran Goldman ,  Olga Novak ,  Dhananjay Singh Rathore ,  Ofer Adan ,  Shimon Levi

IPC: G06K9/00 ,  G06T7/00

CPC classification number: G06T7/0006 ,  G06K9/525 ,  G06T7/001 ,  G06T7/10 ,  G06T7/11 ,  G06T7/12 ,  G06T7/143 ,  G06T7/194 ,  G06T7/30 ,  G06T7/337 ,  G06T2207/10061 ,  G06T2207/20116 ,  G06T2207/30148

Abstract: A method for determining overlay between layers of a multilayer structure may include obtaining a given image representing the multilayer structure, obtaining expected images for layers of the multilayer structure, providing a combined expected image of the multilayer structure as a combination of the expected images of said layers, performing registration of the given image against the combined expected image, and providing segmentation of the given image, thereby producing a segmented image, and maps of the layers of said multilayered structure. The method may further include determining overlay between any two selected layers of the multilayer structure by processing the maps of the two selected layers together with the expected images of said two selected layers.

Abstract translation: 用于确定多层结构的层之间的重叠的方法可以包括获得表示多层结构的给定图像，获得多层结构层的预期图像，提供多层结构的组合预期图像作为所述多层结构的预期图像的组合 执行给定图像对组合预期图像的注册，以及提供给定图像的分割，从而产生分割图像，以及所述多层结构层的映射。 该方法还可以包括通过将所选择的两个层的图与所述两个所选择的层的预期图像一起处理来确定多层结构的任何两个所选择的层之间的覆盖。

公开(公告)号：US09383196B2

公开(公告)日：2016-07-05

申请号：US13787645

申请日：2013-03-06

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Yuval Yahav ,  Ofer Adan

IPC: G06T7/00 ,  G01B15/00 ,  H01J37/22 ,  G06T7/60 ,  G03F7/20

CPC classification number: G01B15/00 ,  G03F7/70616 ,  G06T7/62 ,  G06T2207/10061 ,  G06T2207/30148 ,  H01J37/222 ,  H01J2237/24578

Abstract: A non-transitory computer readable medium, a system and a method. The method may include obtaining, by an image obtaining module, an image of a measurement site, the measurement site comprise the feature, the image of the measurement site comprises an image of the feature; processing, by an image processor, the image of the measurement site to provide an artificial image, the artificial image comprise a artificial image of an artificial feature, the artificial feature differs from the feature; measuring a parameter of the artificial feature to provide a measurement result, wherein the measuring comprises applying a measurement algorithm that is inadequate for measuring the parameter of the feature; and determining a value of the parameter of the feature in response to the measurement result.

Abstract translation: 非暂时性计算机可读介质，系统和方法。 该方法可以包括通过图像获取模块获得测量位置的图像，测量位置包括特征，测量位置的图像包括特征的图像; 通过图像处理器处理测量位置的图像以提供人造图像，人造图像包括人造特征的人造图像，人造特征与特征不同; 测量人造特征的参数以提供测量结果，其中所述测量包括应用不足以测量所述特征的参数的测量算法; 以及响应于所述测量结果确定所述特征的参数的值。