公开(公告)号：US10073113B2

公开(公告)日：2018-09-11

申请号：US14695421

申请日：2015-04-24

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael Judy

IPC: G01P15/08 ,  B81C1/00 ,  H01L21/48 ,  G01C19/5769

CPC classification number: G01P15/0802 ,  B81B3/0059 ,  B81B3/0078 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00261 ,  B81C2203/0109 ,  G01C19/5769

Abstract: In one aspect, the disclosure is directed to a MEMS device. The MEMS device includes a silicon-based movable MEMS sensor element. The MEMS device also includes a plurality of wells formed into at least one surface of the movable MEMS sensor element. Each well is filled with at least one metal so as to increase the effective mass of the movable MEMS sensor element. The metal may be tungsten or tantalum, or an alloy with tungsten or tantalum.

公开(公告)号：US10759659B2

公开(公告)日：2020-09-01

申请号：US16160965

申请日：2018-10-15

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael Judy ,  George M. Molnar ,  Christopher Needham ,  Kemiao Jia

IPC: B81B7/00

Abstract: A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

公开(公告)号：US20200249020A1

公开(公告)日：2020-08-06

申请号：US16716386

申请日：2019-12-16

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  Michael Judy

IPC: G01C19/24 ,  B81B3/00 ,  G01C19/5684

Abstract: An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.

公开(公告)号：US20190047846A1

公开(公告)日：2019-02-14

申请号：US16160965

申请日：2018-10-15

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Michael Judy ,  George M. Molnar ,  Christopher Needham ,  Kemiao Jia

IPC: B81B7/00

CPC classification number: B81B7/0048 ,  H01L2224/48091 ,  H01L2224/48247 ,  H01L2924/00014

Abstract: A MEMS product includes a stress-isolated MEMS platform surrounded by a stress-relief gap and suspended from a substrate. The stress-relief gap provides a barrier against the transmission of mechanical stress from the substrate to the platform.

公开(公告)号：US11656077B2

公开(公告)日：2023-05-23

申请号：US16716386

申请日：2019-12-16

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  Michael Judy

IPC: G01C19/24 ,  G01C19/5684 ,  B81B3/00 ,  G01C19/567 ,  G01C19/5677

CPC classification number: G01C19/24 ,  B81B3/0027 ,  G01C19/567 ,  G01C19/5677 ,  G01C19/5684 ,  B81B2201/0242

Abstract: An extensional mode electrostatic microelectromechanical systems (MEMS) gyroscope is described. The MEMS gyroscope operates in an extensional mode. The MEMS gyroscope comprises a vibrating ring structure that is electrostatically excited in the extensional mode.

公开(公告)号：US11415595B2

公开(公告)日：2022-08-16

申请号：US16457849

申请日：2019-06-28

Applicant: Analog Devices, Inc.

Inventor： Gaurav Vohra ,  Xin Zhang ,  Michael Judy

IPC: G01P15/08 ,  G01P15/125

Abstract: Single-axis teeter-totter accelerometers having a plurality of anchors are disclosed. The plurality of anchors may be arranged about a rotation axis of the teeter-totter proof mass. Each of the plurality of anchors may be coupled to the proof mass by two torsional springs each extending along the rotation axis. The plurality of anchors allows an increased number of torsional springs to be coupled to the proof mass and thus greater torsional stiffness for the proof mass may be achieved. Due to the higher torsional stiffness, the disclosed single-axis teeter-totter accelerometers may be deployed in high-frequency environments where such increased torsional stiffness is required, for example, around 20 kHz and above.

公开(公告)号：US20220196699A1

公开(公告)日：2022-06-23

申请号：US17555002

申请日：2021-12-17

Applicant: Analog Devices, Inc.

Inventor： Kemiao Jia ,  Xin Zhang ,  Michael Judy

IPC: G01P15/125 ,  G01P1/00

Abstract: A microelectromechanical systems (MEMS) accelerometer is provided, comprising a substrate disposed in a plane defined by a first axis and a second axis perpendicular to the first axis; a first proof mass and a second proof mass coupled to the substrate and configured to translate in opposite directions of each other along a third axis perpendicular to the first and second axes; and at least one lever coupling the first proof mass to the second proof mass, wherein, the MEMS accelerometer is configured to detect acceleration along the third axis via detection of translation of the first and second proof masses along the third axis; and the MEMS accelerometer exhibits symmetry about the first and second axes.

公开(公告)号：US20200081029A1

公开(公告)日：2020-03-12

申请号：US16129755

申请日：2018-09-12

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  Gaurav Vohra ,  Michael Judy

IPC: G01P15/125

Abstract: Z-axis teeter-totter accelerometers with embedded movable structures are disclosed. The teeter-totter accelerometer may include an embedded mass which pivots or translates out-of-plane from the teeter-totter beam. The pivoting or translating embedded mass may be positioned to increase the sensitivity of the z-axis accelerometer by providing greater z-axis displacement than the teeter-totter beam itself exhibits.

公开(公告)号：US20180038887A1

公开(公告)日：2018-02-08

申请号：US15228229

申请日：2016-08-04

Applicant: Analog Devices, Inc.

Inventor： Xin Zhang ,  William A. Clark ,  Michael Judy

IPC: G01P15/125

CPC classification number: G01P15/125 ,  B81B2201/0235 ,  B81B2203/0127 ,  G01P15/18 ,  G01P2015/084

Abstract: A microelectromechanical systems (MEMS) accelerometer is described. The MEMS accelerometer may comprise a proof mass configured to sense accelerations in a direction parallel the plane of the proof mass, and a plurality of compensation structures. The proof mass may be connected to one or more anchors through springs. The compensation structures may be coupled to the substrate of the MEMS accelerometer through a rigid connection to respective anchors. A compensation structure may comprise at least one compensation electrode forming one or more lateral compensation capacitors. The compensation capacitor(s) may be configured to sense displacement of the anchor to which the compensation structures is connected.