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    Method of inspecting a specimen and system thereof
    12.
    发明授权
    Method of inspecting a specimen and system thereof 有权

    公开(公告)号：US10012689B2

    公开(公告)日：2018-07-03

    申请号：US14668749

    申请日：2015-03-25

    Applicant: Applied Materials Israel Ltd.

    Inventor： Zvi Goren ,  Adi Boehm ,  Amit Batikoff

    IPC: G06F17/50 ,  G01R31/26

    CPC classification number: G01R31/2601 ,  G01R31/2831 ,  G01R31/303 ,  H01L22/12

    Abstract: There is provided an inspection system for inspecting a specimen, an inspection unit capable to operate in conjunction with an inspection machine unit, a die layout clipping unit, methods of inspecting a specimen, and a method of providing a die layout clip. The method of inspecting a specimen comprises: obtaining location information indicative of coordinates of a potential defect of interest revealed in the specimen and of one or more inspected layers corresponding to the potential defect of interest; sending to a die layout clipping unit a first data indicative of the location information and dimensions of an inspection area containing the potential defect of interest; receiving a die layout clip generated in accordance with the first data; specifying at least one inspection algorithm of the inspection area using information comprised in the die layout clip; and enabling inspection of the inspection area using the specified inspection algorithm.

    Method of inspecting a specimen and system thereof
    13.
    发明授权
    Method of inspecting a specimen and system thereof 有权

    公开(公告)号：US10444274B2

    公开(公告)日：2019-10-15

    申请号：US16025869

    申请日：2018-07-02

    Applicant: Applied Materials Israel Ltd.

    Inventor： Zvi Goren ,  Adi Boehm ,  Amit Batikoff

    IPC: G06F17/50 ,  G01R31/26 ,  G01R31/28 ,  H01L21/66 ,  G01R31/303

    Abstract: There is provided an inspection system for inspecting a specimen, an inspection unit capable to operate in conjunction with an inspection machine unit, a die layout clipping unit, methods of inspecting a specimen, and a method of providing a die layout clip. The method of inspecting a specimen comprises: obtaining location information indicative of coordinates of a potential defect of interest revealed in the specimen and of one or more inspected layers corresponding to the potential defect of interest; sending to a die layout clipping unit a first data indicative of the location information and dimensions of an inspection area containing the potential defect of interest; receiving a die layout clip generated in accordance with the first data; specifying at least one inspection algorithm of the inspection area using information comprised in the die layout clip; and enabling inspection of the inspection area using the specified inspection algorithm.

    Method of performing metrology operations and system thereof
    14.
    发明授权
    Method of performing metrology operations and system thereof 有权

    公开(公告)号：US10296702B2

    公开(公告)日：2019-05-21

    申请号：US15698585

    申请日：2017-09-07

    Applicant: Applied Materials Israel Ltd.

    Inventor： Ron Katzir ,  Imry Kissos ,  Lavi Jacov Shachar ,  Amit Batikoff ,  Shaul Cohen ,  Noam Zac

    IPC: G06F17/50 ,  G06T7/00 ,  G06T7/33 ,  G06T3/00 ,  G06T7/73

    Abstract: There are provided system and method of performing metrology operations related to a specimen. The method comprises: generating an examination recipe in accordance with a metrology application, the examination recipe specifying one or more metrology objects and one or more metrology operations related to the metrology application; obtaining an image-based representation of the specimen and a design-based representation of the specimen; mapping between the design-based representation of at least first metrology object and the image-based representation of at least first metrology object; and performing at least first metrology operation of the one or more metrology operations according to the examination recipe using the mapping, the at least first metrology operation specified as related to the at least first metrology object and to be performed on at least the image-based representation of the specimen.

    SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CLASSIFICATION WITHIN INSPECTION IMAGES
    15.
    发明申请
    SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR CLASSIFICATION WITHIN INSPECTION IMAGES 审中-公开
    用于检查图像分类的系统，方法和计算机程序产品

    公开(公告)号：US20150310600A1

    公开(公告)日：2015-10-29

    申请号：US14792238

    申请日：2015-07-06

    Applicant: Applied Materials Israel Ltd.

    Inventor： Michele Dalla-Torre ,  Gil Shabat ,  Adi Dafni ,  Amit Batikoff

    IPC: G06T7/00 ,  G01N21/95

    CPC classification number: G06T7/001 ,  G01N21/9501 ,  G01N21/9515 ,  G06T2207/10061 ,  G06T2207/30148

    Abstract: An analysis system capable of classifying possible defects identified within an inspection image of an inspected object includes a storage device and a processor. The processor matches a template and a portion of the inspection image, thus giving rise to a matching portion of the inspection image. The inspection image is captured by an inspection tool. The processor associates, using a mask corresponding to the template and defining one or more segments within the matching portion of the inspection image, a potential defect with a segment defined by the mask and corresponding to a location of the potential defect, and classifies the potential defect in accordance with the segment defined by the mask within the matching portion of the inspection image and associated with the potential defect.

    Abstract translation: 能够分类被检查对象的检查图像内识别出的可能缺陷的分析系统包括存储装置和处理器。 处理器匹配模板和检查图像的一部分，从而产生检查图像的匹配部分。 检查图像由检查工具捕获。 处理器使用与模板相对应的掩模并且在检查图像的匹配部分内定义一个或多个段，具有由掩模限定并对应于潜在缺陷的位置的区段的潜在缺陷，并将潜在的潜在分类 根据由检查图像的匹配部分中的掩模限定的区段并与潜在缺陷相关联的缺陷。

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