Defect inspection method and apparatus therefor
    11.
    发明授权
    Defect inspection method and apparatus therefor 有权
    缺陷检查方法及其设备

    公开(公告)号:US06169282A

    公开(公告)日:2001-01-02

    申请号:US09181851

    申请日:1998-10-29

    IPC分类号: H01J3728

    摘要: A defect inspection method and apparatus therefor for a pattern to be inspected having a plurality of chips formed so as to be identical detect an image signal of a pattern to be inspected and when the image signal is to be compared with a detected image signal of an adjacent or separated pattern to be inspected on the substrate, convert the gray level so that the brightness of each of two image signals for comparing one or both of the detected image signals is almost identical in the local region by linear conversion having a gain and offset, and when a pattern is inspected using it, highly sensitive defect inspection for a pattern to be inspected for detecting a defect of a semiconductor wafer can be realized.

    摘要翻译: 对于要检查的图案的缺陷检查方法及其装置,其具有形成为相同的多个芯片,以检测待检查图案的图像信号,并且当图像信号要与检测到的图像信号进行比较时 要在基板上检查的相邻或分离的图案,转换灰度级,使得用于比较检测到的图像信号中的一个或两个的两个图像信号中的每一个的亮度在局部区域中通过具有增益和偏移的线性转换几乎相同 ,并且当使用它来检查图案时,可以实现用于检测半导体晶片的缺陷的待检查图案的高灵敏度缺陷检查。

    Method and apparatus for picking up 2D image of an object to be sensed
    12.
    发明授权
    Method and apparatus for picking up 2D image of an object to be sensed 失效
    拾取被感测物体的2D图像的方法和装置

    公开(公告)号:US06507417B1

    公开(公告)日:2003-01-14

    申请号:US09105222

    申请日:1998-06-26

    IPC分类号: H04N104

    CPC分类号: G06T7/0004 G06T2207/30148

    摘要: An image pickup device for sensing a two-dimensional (2D) image while causing a projected image of an object to be sensed being projected onto a linear image sensor to relatively move with respect to the linear image sensor in a direction (V scanning) perpendicular to the internal scan (H scan) direction of the linear image sensor. This device includes a position detector circuit that detects the position of the object to be sensed, and a pixel size modifier circuit for changing or modifying the setup configuration of a pixel size in the V scan direction of the linear image sensor on the basis of a position detection signal indicative of the position of the to-be-sensed object as detected by the position detector circuit. The pixel size modifier circuit is operable based on the object position detection signal to periodically change the interval of H-scanning start pulses of the linear image sensor.

    摘要翻译: 用于感测二维(2D)图像同时使待检测对象的投影图像投影到线性图像传感器上的图像拾取装置相对于线性图像传感器在垂直方向(V扫描)上相对移动 到线性图像传感器的内部扫描(H扫描)方向。 该装置包括检测待感测物体的位置的位置检测器电路和用于基于线性图像传感器的V扫描方向改变或修改像素尺寸的设置配置的像素尺寸修正器电路 位置检测信号,其指示由位置检测器电路检测到的待感测对象的位置。 像素尺寸修正器电路可以基于物体位置检测信号进行操作,以周期性地改变线性图像传感器的H扫描开始脉冲的间隔。

    Pattern checking method and checking apparatus
    13.
    发明授权
    Pattern checking method and checking apparatus 失效
    模式检查方法和检查装置

    公开(公告)号:US5649022A

    公开(公告)日:1997-07-15

    申请号:US888494

    申请日:1992-05-27

    IPC分类号: G06T7/00 G06K9/00

    摘要: A pattern checking method wherein an image of a certain position of one pattern is detected; the detected image is positioned with respect to an image of a position corresponding to the certain position, in a reference pattern image; and the positioned images are compared with each other, whereby a discrepant place among these positioned images is judged as a defect the positioning operations of the images of the detected patterns are controlled based upon either pattern information such as density of the images of the detected patterns, or information obtained from the positioning operations for images of other positions in the patterns. An image sensor unit for detecting images of patterns is constructed which has such a structure that a plurality of one-dimensional image sensors functioning as a pattern detector are arranged in a two-dimensional form, and an output of a certain one-dimensional image sensor for imaging a certain position of one pattern is delayed for a predetermined time period, and also both of an output of an one-dimensional image sensor adjoining the first-mentioned one-dimensional image sensor, which images the same position of the same pattern, and the delayed output of the certain one-dimensional image sensor are sequentially added to derive a summation output. The image sensor unit is inclined at a predetermined angle with respect to a plane perpendicular to the reflection light from the patterns, and the reflection light from the patterns is focused via a confocal focusing optical system onto this image sensor unit.

    摘要翻译: 一种图案检查方法,其中检测到一个图案的某个位置的图像; 检测图像相对于与特定位置对应的位置的图像在参考图案图像中定位; 并且定位的图像彼此进行比较,由此将这些定位的图像中的不一致的位置判断为检测图案的图像的定位操作的缺陷,基于诸如检测图案的图像的密度的图案信息 或者从图案中的其他位置的图像的定位操作获得的信息。 用于检测图案的图像的图像传感器单元被构造成具有以二维形式配置作为图案检测器的多个一维图像传感器的结构,以及某一个一维图像传感器的输出 对于一个图案的某个位置的成像被延迟预定的时间段,并且与相同图案的相同位置成像的第一个提到的一维图像传感器邻接的一维图像传感器的输出, 并且依次添加特定一维图像传感器的延迟输出以导出求和输出。 图像传感器单元相对于与图案的反射光垂直的平面以预定角度倾斜,并且来自图案的反射光经由共聚焦聚焦光学系统聚焦到该图像传感器单元上​​。

    Method and apparatus for detecting patterns
    15.
    发明授权
    Method and apparatus for detecting patterns 失效
    用于检测图案的方法和装置

    公开(公告)号:US5153444A

    公开(公告)日:1992-10-06

    申请号:US641001

    申请日:1991-01-14

    IPC分类号: G01N21/956 G06T7/00

    摘要: A method and apparatus for detecting a defect in a circuit pattern by detecting a gray image signal from each of a plurality of circuit patterns as objects of inspection, which circuit patterns have been fabricated so as to be identical with one another, and detecting a defect as a difference of edge position between two circuit patterns by comparing the detected gray image signal of one circuit pattern with the detected gray image signal of another circuit pattern.

    摘要翻译: 通过检测作为检查对象的多个电路图案中的每一个的灰度图像信号来检测电路图案中的缺陷的方法和装置,其中已经制造出彼此相同的电路图案,并且检测缺陷 作为两个电路图案之间的边缘位置的差异,通过将检测到的一个电路图案的灰度图像信号与另一个电路图案的检测到的灰度图像信号进行比较。

    Automatic focusing method and apparatus utilizing contrasts of projected
pattern
    16.
    发明授权
    Automatic focusing method and apparatus utilizing contrasts of projected pattern 失效
    自动聚焦方法和利用投影图案对比的装置

    公开(公告)号:US4725722A

    公开(公告)日:1988-02-16

    申请号:US850682

    申请日:1986-04-11

    摘要: A method of auto-focusing suitable for fine patterns of LSIs and an apparatus therefor, particularly applied for checking the geometry of a circuit pattern of a semiconductor device formed on an LSI wafer. A stripe pattern is projected on a specified location on an object to be checked and contrast of an image of the stripe pattern is used for focusing. The specified location is imaged by an optical system and detected simultaneously by two detectors. A position at which contrast of an output signal of one detector coincides with that of the other detector is determined to be an in-focus position. Am image of a multi-layer pattern representative of the circuit pattern is focused on another detector disposed at the in-focus position and detected for checking. The output signal of the detector is divided by mean brightness of the stripe pattern image so as to be normalized. Since the two detectors produce their output signals simultaneously, the difference between the output signals is normalized to improve accuracies of computation.

    摘要翻译: 适用于LSI的精细图案的自动对焦的方法及其装置,特别适用于检查形成在LSI晶片上的半导体器件的电路图案的几何形状。 将条纹图案投影在要检查的对象上的指定位置,并且将条纹图案的图像的对比度用于聚焦。 指定位置由光学系统成像,并由两个检测器同时检测。 一个检测器的输出信号的对比度与另一个检测器的输出信号的对比度的位置被确定为对焦位置。 表示电路图案的多层图案的图像集中在设置在对焦位置的另一检测器,并被检测用于检查。 检测器的输出信号除以条纹图案图像的平均亮度,以便被归一化。 由于两个检测器同时产生其输出信号,所以输出信号之间的差异被归一化以提高计算精度。

    Method of detecting pattern defect and its apparatus
    17.
    发明授权
    Method of detecting pattern defect and its apparatus 失效
    检测图案缺陷及其设计的方法

    公开(公告)号:US4614430A

    公开(公告)日:1986-09-30

    申请号:US604998

    申请日:1984-04-27

    IPC分类号: G01N21/956 G06T7/00 G01N21/88

    摘要: A pattern defect is detected in accordance with the difference between a pair of patterns. The patterns are scanned and imaged to obtain first and second binary signals. A positioning error between the patterns is two-dimensionally detected during the scanning with respective first and second binary signals delayed by a prescribed amount so that each of the picture elements in a prescribed area of a two-dimensional image, delayed and cut out two-dimensionally, corresponding to one pattern, is compared with a specified picture element in a predetermined area of an image delayed and cut out two-dimensionally corresponding to another pattern. The result of the comparison is statistically summed to derive a positioning error by detecting the position shown as an extreme value from the summed values. The positioning error is corrected by two-dimensionally shifting at least one of the delayed binary signals. The corrected binary signals are then two-dimensionally compared with each other.

    摘要翻译: 根据一对图案之间的差异来检测图案缺陷。 扫描和成像图案以获得第一和第二二进制信号。 在扫描期间,以相应的第一和第二二进制信号延迟规定量的二维检测图案之间的定位误差,使得二维图像的规定区域中的每个图像元素被延迟和切出二维图像, 对应于一个图案的尺寸与在与另一图案对应地延迟和切出的图像的预定区域中的指定图像元素进行比较。 比较的结果被统计学地相加以通过从求和值中检测显示为极值的位置来导出定位误差。 通过二维移位延迟的二进制信号中的至少一个来校正定位误差。 然后将校正后的二进制信号二维地进行比较。

    Shape detecting apparatus
    18.
    发明授权
    Shape detecting apparatus 失效
    形状检测装置

    公开(公告)号:US4472056A

    公开(公告)日:1984-09-18

    申请号:US286068

    申请日:1981-07-23

    IPC分类号: G01B11/25 H01R13/20 H04N7/18

    CPC分类号: G01B11/2518 H01R13/20

    摘要: Disclosed is a shape detecting apparatus comprising a slit projector for projecting a slit bright line on a number of objects arrayed in a line, an image forming lens for forming the bright line image, an image scanning mechanism for the bright line image formed through the image forming lens in a height direction of the object and a one-dimensional image sensing device for self-scanning the bright line image formed therein with an array of image sensing elements orthogonal to the scanning direction by the image scanning mechanism.

    摘要翻译: 本发明公开了一种形状检测装置,包括:狭缝投影仪,用于将一条狭缝亮线投射在排列成一行的多个物体上;形成用于形成亮线图像的成像透镜;用于通过图像形成的亮线图像的图像扫描机构; 在物体的高度方向形成透镜,以及一维图像感测装置,用于通过图像扫描机构与扫描方向正交的图像感测元件的阵列自身扫描其中形成的亮线图像。