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20 条记录 (耗时 0.022 秒)

    Method and system for reticle inspection by photolithography simulation
    11.
    发明授权
    Method and system for reticle inspection by photolithography simulation 有权
    通过光刻模拟方法和系统进行掩模版检查

    公开(公告)号：US06466315B1

    公开(公告)日：2002-10-15

    申请号：US09390503

    申请日：1999-09-03

    申请人： Avner Karpol ,  Boaz Kenan

    发明人： Avner Karpol ,  Boaz Kenan

    IPC分类号： C01N2188

    CPC分类号： G03F1/84 ,  G01N21/95607 ,  G03F7/70125 ,  G03F7/70358 ,  G03F7/705 ,  G03F7/70591 ,  G03F7/70666

    摘要： A system and method are presented for optical inspection of reticles by simulating the operation of a selected stepper. The system utilizes a flying spot inspection technique and includes a scanning apparatus and a detection unit. The scanning apparatus uses a laser source similar to that of the stepper of interest. First and second light directing assemblies are accommodated in the optical paths of, respectively, incident and transmitted light, and are designed so as to provide coherence of the light substantially equal to that of the stepper.

    摘要翻译： 提出了一种通过模拟所选步进器的操作来对光罩进行光学检查的系统和方法。 该系统利用飞点检查技术，并且包括扫描装置和检测单元。 扫描装置使用与感兴趣的步进器类似的激光源。 第一和第二导光组件分别容纳在入射和透射光的光路中，并且被设计成提供基本上等于步进器的光的相干性。

    Scanner having a misalignment detector
    13.
    发明授权
    Scanner having a misalignment detector 失效
    扫描仪具有未对准检测器

    公开(公告)号：US5594556A

    公开(公告)日：1997-01-14

    申请号：US215840

    申请日：1994-03-21

    申请人： Eliyahu Vronsky ,  Boaz Kenan

    发明人： Eliyahu Vronsky ,  Boaz Kenan

    IPC分类号： G02B26/12 ,  H03H19/00 ,  H03H21/00 ,  H04N1/047 ,  H04N1/113 ,  H04N1/12 ,  H04N1/04 ,  G02B26/08

    CPC分类号： G02B26/127 ,  H04N1/0473 ,  H04N1/1135 ,  H04N1/12 ,  H04N2201/0471 ,  H04N2201/0476

    摘要： A laser scanning device is disclosed which includes a spinner, one light spot misalignment detector and a beam misalignment corrector. The spinner scans a light beam across a scanning line. The detector is located generally at a beginning of the scanned line and measures an initial misalignment of the light spot in a cross-scanning direction. The corrector dynamically corrects, during scanning along said scanning line, the scanning misalignment of the light beam in accordance with at least the initial misalignment. The corrector includes a pre-positioner which determines an offset for the initial misalignment, a pyramidal error estimator which estimates a first portion of the misalignment due to pyramidal error and a wobble estimator which estimate a second portion of the misalignment caused by wobble. The estimations are summed together and used for correcting the misalignment.

    摘要翻译： 公开了一种激光扫描装置，其包括旋转器，一个光点未对准检测器和光束未对准校正器。 旋转器扫描扫描线上的光束。 检测器大致位于扫描线的开始处，并测量光斑在横扫描方向上的初始偏移。 校正器在沿着扫描线扫描期间根据至少初始未对准来动态校正光束的扫描未对准。 校正器包括：预定位器，其确定初始未对准的偏移;金字塔形误差估计器，其估计由于锥体误差引起的未对准的第一部分;以及摆动估计器，其估计由摆动引起的未对准的第二部分。 将估计相加在一起并用于校正未对准。

    Alternating phase-shift mask inspection method and apparatus
    15.
    发明授权
    Alternating phase-shift mask inspection method and apparatus 有权

    公开(公告)号：US07072502B2

    公开(公告)日：2006-07-04

    申请号：US09876955

    申请日：2001-06-07

    申请人： Shirley Hemar ,  Alex Goldenshtein ,  Gadi Greenberg ,  Mula Friedman ,  Boaz Kenan

    发明人： Shirley Hemar ,  Alex Goldenshtein ,  Gadi Greenberg ,  Mula Friedman ,  Boaz Kenan

    IPC分类号： G06K9/00

    CPC分类号： G03F7/70483 ,  G01N21/95607 ,  G03F1/30 ,  G03F1/84

    摘要： A reticle inspection system and method for complete and fast inspection of phase shift mask reticles, both for incoming inspection and for periodic and pre-exposure inspection tool, is employable by facilities such as mask shops as an inspection tool compatible to the mask shop's customers. The inventive system and method detect phase errors in an aerial image by acquiring the image of the phase shift mask under the same optical conditions as the exposure conditions (i.e. wavelength, numerical aperture, sigma, and illumination aperture type). Images are acquired at a positive out-of-focus and a negative out-of-focus, and are compared in order to enhance possible phase error. The term “phase error” refers to the acceptable range of the phase deviation from the programmed 180° on the phase shift mask, by using the exposure system to achieve the image on the photoresist, satisfying the requirements of the wafer specification.

    Image-setter for multiple media exposure
    16.
    发明授权
    Image-setter for multiple media exposure 失效
    用于多媒体曝光的图像设置器

    公开(公告)号：US5861904A

    公开(公告)日：1999-01-19

    申请号：US418399

    申请日：1995-04-07

    申请人： Yosef Kamir ,  Boaz Kenan ,  Zvi Zagagi

    发明人： Yosef Kamir ,  Boaz Kenan ,  Zvi Zagagi

    IPC分类号： B41J2/47 ,  G01D15/14 ,  G02B26/10 ,  G02F1/11 ,  G03B27/72 ,  H04N20060101

    CPC分类号： B41J2/473 ,  G02B26/123

    摘要： An image-setter and a scanning method are disclosed. The image setter includes at least two scanning surfaces, a media conveying system for conveying at least two light sensitive media to respective ones of the scanning surfaces, and an optical system for scanning substantially simultaneously the at least two light sensitive media on said respective scanning surfaces. The scanning method includes the steps of providing at least two scanning surfaces, conveying at least two light sensitive media to respective ones of said scanning surfaces, and employing an optical system for scanning substantially simultaneously the at least two light sensitive media on said respective scanning surfaces.

    摘要翻译： 公开了一种图像设定器和扫描方法。 图像设置器包括至少两个扫描表面，用于将至少两个光敏介质传送到相应扫描表面的介质传送系统，以及用于基本同时扫描所述相应扫描表面上的至少两个光敏介质的光学系统 。 扫描方法包括以下步骤：提供至少两个扫描表面，将至少两个光敏介质输送到相应的所述扫描表面，以及采用光学系统，用于基本上同时扫描所述各个扫描表面上的至少两个光敏介质 。

    Apparatus and method for automatic optical inspection
    19.
    发明授权
    Apparatus and method for automatic optical inspection 有权
    自动光学检测装置及方法

    公开(公告)号：US07394531B2

    公开(公告)日：2008-07-01

    申请号：US11554280

    申请日：2006-10-30

    申请人： Ehud Tirosh ,  Boaz Kenan

    发明人： Ehud Tirosh ,  Boaz Kenan

    IPC分类号： G01N21/00

    CPC分类号： G01N21/8903

    摘要： An automated optical inspection system, comprising at least one camera having a field of view; and at least one image scanning module comprising a plurality of objective modules arranged to have fields of view covering a portion of an article during inspection, and an image selection mirror mechanism, such as a pentaprism movable to sequentially select and transfer images of the fields of view from the objective modules to the at least one camera, and a beam splitter operative to simultaneously direct illumination from at least one illumination source to a portion of the article and to direct an image of the portion of the article to at least one camera, wherein the beam splitter is operative to pivot about at least one axis, thereby to create motion of the image of the article within the field of view of the camera. The objective modules may be arranged in a pair of back-to-back arcs each served by and partially encircling its own optical head. The image selection mirror mechanism may be rotated by a rotating shaft having a driving end, the mechanism being disposed between the shaft's driving end, and the article.

    摘要翻译： 一种自动光学检查系统，包括至少一个具有视场的照相机; 以及至少一个图像扫描模块，包括多个目标模块，所述多个目标模块布置成在检查期间具有覆盖物品的一部分的视场;以及图像选择镜机构，例如五棱镜，其可移动以顺序地选择和传送 从目标模块到至少一个相机的视图，以及分束器，其可操作以同时将来自至少一个照明源的照明引导到制品的一部分并将该部分的图像引导至至少一个照相机， 其中所述分束器可操作以围绕至少一个轴线枢转，由此在所述照相机的视场内产生所述物品的图像的运动。 目标模块可以布置成一对背对背弧，每个弧由每个由其自身的光学头部供能并部分地环绕。 图像选择镜机构可以通过具有驱动端的旋转轴旋转，该机构设置在轴的驱动端与制品之间。

    APPARATUS AND METHOD FOR AUTOMATIC OPTICAL INSPECTION REFERENCE TO CO-PENDING APPLICATIONS
    20.
    发明申请
    APPARATUS AND METHOD FOR AUTOMATIC OPTICAL INSPECTION REFERENCE TO CO-PENDING APPLICATIONS 有权
    用于自动光学检测的装置和方法参考共同申请

    公开(公告)号：US20070159623A1

    公开(公告)日：2007-07-12

    申请号：US11554280

    申请日：2006-10-30

    申请人： EHUD TIROSH ,  Boaz Kenan

    发明人： EHUD TIROSH ,  Boaz Kenan

    IPC分类号： G01N21/00

    CPC分类号： G01N21/8903

    摘要： An automated optical inspection system, comprising at least one camera having a field of view; and at least one image scanning module comprising a plurality of objective modules arranged to have fields of view covering a portion of an article during inspection, and an image selection mirror mechanism, such as a pentaprism movable to sequentially select and transfer images of the fields of view from the objective modules to the at least one camera, and a beam splitter operative to simultaneously direct illumination from at least one illumination source to a portion of the article and to direct an image of the portion of the article to at least one camera, wherein the beam splitter is operative to pivot about at least one axis, thereby to create motion of the image of the article within the field of view of the camera. The objective modules may be arranged in a pair of back-to-back arcs each served by and partially encircling its own optical head. The image selection mirror mechanism may be rotated by a rotating shaft having a driving end, the mechanism being disposed between the shaft's driving end, and the article.

    摘要翻译： 一种自动光学检查系统，包括至少一个具有视场的照相机; 以及至少一个图像扫描模块，包括多个目标模块，所述多个目标模块布置成在检查期间具有覆盖物品的一部分的视场;以及图像选择镜机构，例如五棱镜，其可移动以顺序地选择和传送 从目标模块到至少一个相机的视图，以及分束器，其可操作以同时将来自至少一个照明源的照明引导到制品的一部分并将该部分的图像引导至至少一个照相机， 其中所述分束器可操作以围绕至少一个轴线枢转，由此在所述照相机的视场内产生所述物品的图像的运动。 目标模块可以布置成一对背对背弧，每个弧由每个由其自身的光学头部供能并部分地环绕。 图像选择镜机构可以通过具有驱动端的旋转轴旋转，该机构设置在轴的驱动端与制品之间。