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    Apparatus and method for producing multiple images
    13.
    发明授权
    Apparatus and method for producing multiple images 失效
    用于生成多个图像的装置和方法

    公开(公告)号：US3584948A

    公开(公告)日：1971-06-15

    申请号：US3584948D

    申请日：1968-06-24

    Applicant: BELL TELEPHONE LABOR INC

    Inventor： HERRIOTT DONALD R

    IPC: G02B27/44 ,  G03F7/20 ,  H01L21/027 ,  G03B27/32

    CPC classification number: G03F7/70466 ,  G02B27/1086 ,  G02B27/4222 ,  G03F7/70275 ,  H01L21/0275

    Abstract: Multiple images of a photolithography mask are produced, for simultaneously exposing a plurality of regions of a photoresist coating on a semiconductor substrate, by directing monochromatic light through the mask, collimating the light, and transmitting it through a first diffraction grating with vertical rulings and a second diffraction grating with horizontal rulings. The diffraction gratings each divide the light into a plurality of diffraction orders each containing the image to be recorded; and each of these images is imaged on the photoresist coating.

    Optical maser
    18.
    发明授权
    Optical maser 失效

    公开(公告)号：US3614653A

    公开(公告)日：1971-10-19

    申请号：US3614653D

    申请日：1963-05-02

    Applicant: BELL TELEPHONE LABOR INC

    Inventor： JAVAN ALI ,  BENNETT WILLIAM R JR ,  HERRIOTT DONALD R

    IPC: H01S3/03 ,  H01S3/0975 ,  H01S3/00

    CPC classification number: H01S3/03 ,  H01S3/0975

    Abstract: 1. An optical maser comprising: MEANS FOR PRODUCING FREE ELECTRONS WITHIN AN ENCLOSED SPACE, A FIRST AND A SECOND GAS WITHIN THE ENCLOSED SPACE, THE FIRST GAS POSSESSING A METASTABLE ENERGY LEVEL ABOVE ITS GROUND STATE TO WHICH ATOMS THEREOF MAY BE RAISED BY COLLISION WITH SAID FREE ELECTRONS, THE SECOND GAS POSSESSING AN ENERGY LEVEL SYSTEM WITH AT LEAST TWO LEVELS ABOVE THE GROUND STATE, THE SEPARATION OF THE HIGHER OF SAID TWO LEVELS FROM THE GROUND STATE SUBSTANTIALLY MATCHING THE SEPARATION OF SAID METASTABLE LEVEL OF THE FIRST GAS FROM ITS GROUND STATE, SO THAT ATOMS OF THE FIRST GAS WHICH ARE IN THE METASTABLE STATE COLLIDE WITH GROUND STATE ATOMS OF THE SECOND GAS AND EXCITE SAID GROUND STATE ATOMS TO SAID HIGHER LEVEL, THEREBY CREATING A POPULATION INVERSION BETWEEN A PAIR OF ENERGY LEVELS OF SAID SECOND GAS SO THAT EMISSION OF COHERENT OPTICAL RADIATION MAY BE STIMULATED AT A FREQUENCY CORRESPONDING TO THE ENERGY SEPARATION THEREBETWEEN, MEANS FOR FORMING RESONANT MODES OF SAID COHERENT RADIATION WITHIN THE ENCLOSED SPACE COMPRISING TWO OPTICALLY REFLECTING MEMBERS DEFINING A LIGHT BEAM PATH THERETHROUGH, AND MEANS FOR ABSTRACTING SAID COHERENT RADIATION FOR UTILIZATION.

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