公开(公告)号：US2812470A

公开(公告)日：1957-11-05

申请号：US46405254

申请日：1954-10-22

Applicant: BELL TELEPHONE LABOR INC

Inventor： COOK JOHN S ,  POOLE KENNETH M ,  SULLIVAN JOHN W

IPC: H01J23/087

CPC classification number: H01J23/0873

公开(公告)号：US3165696A

公开(公告)日：1965-01-12

申请号：US9649061

申请日：1961-03-17

Applicant: BELL TELEPHONE LABOR INC

Inventor： POOLE KENNETH M

IPC: H01J25/38 ,  H03F3/54 ,  H03L5/00

CPC classification number: H01J25/38 ,  H03F3/54 ,  H03L5/00

公开(公告)号：US3155866A

公开(公告)日：1964-11-03

申请号：US9572461

申请日：1961-03-14

Applicant: BELL TELEPHONE LABOR INC

Inventor： POOLE KENNETH M

IPC: H01J23/087

CPC classification number: H01J23/087

公开(公告)号：US2879442A

公开(公告)日：1959-03-24

申请号：US60941756

申请日：1956-09-12

Applicant: BELL TELEPHONE LABOR INC

Inventor： RUDOLF KOMPFNER ,  POOLE KENNETH M

IPC: H01J31/18

CPC classification number: H01J31/18

公开(公告)号：US3525807A

公开(公告)日：1970-08-25

申请号：US3525807D

申请日：1967-07-25

Applicant: BELL TELEPHONE LABOR INC

Inventor： HERRIOTT DONALD R ,  POOLE KENNETH M

IPC: H04N7/14 ,  H04N13/00 ,  H04N5/26

CPC classification number: H04N13/0402 ,  H04N7/142

公开(公告)号：US3044021A

公开(公告)日：1962-07-10

申请号：US3124860

申请日：1960-05-19

Applicant: BELL TELEPHONE LABOR INC

Inventor： POOLE KENNETH M ,  TIEN PING K ,  WEISS JERALD A

IPC: H03F7/02

CPC classification number: H03F7/02

公开(公告)号：US2941074A

公开(公告)日：1960-06-14

申请号：US69274757

申请日：1957-10-28

Applicant: BELL TELEPHONE LABOR INC

Inventor： POOLE KENNETH M

IPC: H04J3/04 ,  H04J3/10

CPC classification number: H04J3/045 ,  H04J3/10

公开(公告)号：US2860278A

公开(公告)日：1958-11-11

申请号：US45473354

申请日：1954-09-08

Applicant: BELL TELEPHONE LABOR INC

Inventor： COOK JOHN S ,  RUDOLF KOMPFNER ,  POOLE KENNETH M

IPC: H01J23/30

CPC classification number: H01J23/30

公开(公告)号：US3573849A

公开(公告)日：1971-04-06

申请号：US3573849D

申请日：1969-02-04

Applicant: BELL TELEPHONE LABOR INC

Inventor： HERRIOT DONALD R ,  POOLE KENNETH M ,  ZACHARIAS ALFRED

IPC: G02B26/10 ,  B43L13/00 ,  G02B13/00 ,  G11C13/04 ,  H01L21/00 ,  H01L21/027 ,  H04N3/08 ,  G01D15/14

CPC classification number: H04N3/08 ,  G02B13/0005 ,  G11C13/048 ,  H01L21/00

Abstract: Stored data representative of a pattern or image to be reproduced modulates a writing light beam that is reflected by a rotating mirror structure to scan a photosensitive medium. A coding beam scans a code plate in synchronism with the writing beam to generate a code signal used for controlling modulation of the writing beam. A scanning lens having a nonuniform focal length is used to make the linear scan velocity of the writing beam more uniform. An interferometer may be used to drive a refracting plate in the writing beam path to compensate for errors in the movement of the photosensitive medium.

公开(公告)号：US3558222A

公开(公告)日：1971-01-26

申请号：US3558222D

申请日：1968-02-06

Applicant: BELL TELEPHONE LABOR INC

Inventor： POOLE KENNETH M

IPC: G02B1/00 ,  G02B13/00 ,  G03F7/20 ,  G03F9/00 ,  H01L21/00 ,  G03B27/32

CPC classification number: G02B13/00 ,  G02B1/00 ,  G03F7/70216 ,  G03F9/70 ,  G03F9/7088 ,  H01L21/00

Abstract: A PHOTOLITHOGRAPHIC MASK IS REGISTERED WITH A PATTERN CONTAINED ON THE SURFACE OF A SEMICONDUCTOR WAFER COATED WITH PHOTORESIST MATERIAL BY REFLECTING LIGHT TO WHICH THE PHOTORESIST IS INSENTIVE FROM THE WAFER SURFACE AND IMAGING THE WAFER SURFACE ONTO THE MASK BY MEANS OF A PRIMARY LENS AND A SUPPLEMENTARY LENS, OBSERVING THE MASK AND THE WAFER SURFACE PATTERN SIMULTANEOUSLY THROUGH A MICROSCOPE, AND MOVING THE MASK TO REGISTER IT WITH RESPECT TO THE WAFER SURFACE PATTERN. THE SUPPLEMENTARY LENS IS THEN REMOVED AND LIGHT OF A FREQUENCY TO WHICH THE PHOTORESIST IS PHOTOSENSITIVE IS DIRECTED THROUGH THE MASK AND IMAGED BY THE PRIMARY LENS ONTO THE WAFER SURFACE. THE FOCAL LENGTH OF THE PRIMARY AND SUPPLEMENTARY LENS TOGETHER AT THE FREQUENCY USED DURING REGISTRATION IS SUBSTANTIALLY EAUL TO THE FOCAL LENGTH OF THE PRIMARY LENS ALONE AT THE OPTICAL FREQUENCY USED DURING PHOTOGRAPHIC EXPOSURE OF THE PHOTORESIST.