公开(公告)号：US20100226629A1

公开(公告)日：2010-09-09

申请号：US12721446

申请日：2010-03-10

申请人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

发明人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

IPC分类号： F26B3/28 ,  F24F7/00 ,  F26B3/34

CPC分类号： F27B9/045 ,  C23C14/5866 ,  F27B9/063 ,  F27B9/20 ,  F27B9/28 ,  F27B9/36 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/6776 ,  H01L31/0322 ,  Y02E10/541

摘要： Described are roll-to-roll or reel-to-reel thermal or rapid thermal processing tools (reactors) are used to react a precursor layer on a continuous flexible workpiece. Variants of the reactors are described, including a reactor having multiple exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; and a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap. Also described is an exhaust system that separates the Group VIA material vapors from other gaseous species for re-cycling or easy disposal and techniques and apparatus for efficient removal of moisture from the workpiece before processing precursor layer in the RTP tool.

摘要翻译： 描述了卷对卷或卷对卷热或快速热处理工具（反应器）用于使连续柔性工件上的前体层反应。 描述了反应器的变型，包括具有多个排气出口的反应器，该排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 以及包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙。 还描述了一种排气系统，其将VIA族VIA气体物质与其他气态物质分离以进行重新循环或易于处置，以及在RTP工具中处理前体层之前有效去除工件的水分的技术和设备。

公开(公告)号：US20090183675A1

公开(公告)日：2009-07-23

申请号：US12334420

申请日：2008-12-12

申请人： Mustafa Pinarbasi ,  Howard G. Zolla ,  Ying Yu ,  Gregory Norsworthy ,  Jalal Ashjaee ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Howard G. Zolla ,  Ying Yu ,  Gregory Norsworthy ,  Jalal Ashjaee ,  Bulent M. Basol

IPC分类号： B05C13/00

CPC分类号： F27B9/045 ,  F27B9/063 ,  F27B9/20 ,  F27B9/28 ,  F27B9/36 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/67706 ,  H01L21/67721 ,  H01L21/6776 ,  H01L31/0322 ,  Y02E10/541 ,  Y02P70/521

摘要： A roll-to-roll or reel-to-reel RTP tool including a reactor having a continuous insert placed in a primary gap of the reactor is provided. The primary gap of the reactor is defined by peripheral reactor walls including a top reactor wall, a bottom reactor wall and side reactor walls. The continuous insert includes a continuous process gap through which a continuous workpiece travels between an entry opening and an exit opening of the insert. An inner space exists between at least one of the insert walls and at least a portion of the peripheral reactor walls that make up the primary gap. At least one gas inlet is connected to the inner space, and at least one exhaust opening connects the process gap as well as the inner space to outside the reactor and carries any gaseous products to outside the process gap and the primary gap of the reactor. Sealable doors or web valves seal the entrance and the exit of the process gap when needed before or after the process, especially when the continuous workpiece stops moving.

摘要翻译： 提供卷对卷或卷到卷RTP工具，其包括具有放置在反应器的初级间隙中的连续插入物的反应器。 反应器的主要间隙由外围反应器壁限定，包括顶部反应器壁，底部反应器壁和侧壁反应器壁。 连续的插入件包括连续的工件间隙，连续的工件在插入件的进入开口和出口之间行进。 内部空间存在于至少一个插入壁和构成主间隙的外围反应器壁的至少一部分之间。 至少一个气体入口连接到内部空间，并且至少一个排气口将过程间隙以及内部空间连接到反应器外部，并将任何气体产物运送到过程间隙和反应器的初级间隙之外。 密封的门或腹板阀门在工艺之前或之后需要密封过程间隙的入口和出口，特别是当连续工件停止移动时。

公开(公告)号：US20120279855A1

公开(公告)日：2012-11-08

申请号：US13533765

申请日：2012-06-26

申请人： Mustafa Pinarbasi ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Bulent M. Basol

IPC分类号： C23C14/34

CPC分类号： H01L31/0322 ,  H01L31/03926 ,  H01L31/03928 ,  H01L31/0504 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

摘要： A system and method of forming a thin film solar cell with a metallic foil substrate are provided. After forming a semiconductor absorber film over the front surface of the metallic foil substrate a back surface of the metallic foil substrate is treated using a material removal process to form a treated back surface in a process chamber. In one embodiment, the material removal process is performed while depositing a transparent conductive layer over the semiconductor absorber film in the process chamber.

摘要翻译： 提供了一种用金属箔基片形成薄膜太阳能电池的系统和方法。 在金属箔基板的前表面上形成半导体吸收膜之后，使用材料去除处理来处理金属箔基板的后表面，以在处理室中形成经处理的后表面。 在一个实施例中，在处理室中的半导体吸收膜上沉积透明导电层的同时进行材料去除处理。

公开(公告)号：US07824947B2

公开(公告)日：2010-11-02

申请号：US12233563

申请日：2008-09-18

申请人： Mustafa Pinarbasi ,  Serdar Aksu ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Serdar Aksu ,  Bulent M. Basol

IPC分类号： H01L21/00

CPC分类号： H01L31/022425 ,  C25D3/56 ,  C25D5/50 ,  H01L31/0322 ,  H01L31/03928 ,  Y02E10/541 ,  Y02P70/521

摘要： A thin film solar cell including a Group IBIIIAVIA absorber layer on a defect free base including a stainless steel substrate is provided. The stainless steel substrate of the base is surface treated to remove the surface roughness such as protrusions that cause shunts. Before removing the protrusions, a thin protective ruthenium film is first deposited on the recessed surface portions of the substrate to protect these portions during the following protrusion removal. The protrusions on the surface receives very little or no ruthenium during the deposition. After the ruthenium film is formed, the protrusions are etched and removed by an etchant which only attacks the stainless steel but neutral to the ruthenium film. A contact layer is formed over the ruthenium layer and the exposed portions of the substrate to complete the base.

摘要翻译： 提供一种薄膜太阳能电池，其包括在包括不锈钢基底的无缺陷基底上的IBIIIAVIA族吸收层。 对基体的不锈钢基材进行表面处理以去除表面粗糙度，例如引起分流的凸起。 在移除突起之前，首先将薄的保护性钌膜沉积在基底的凹入表面部分上，以在随后的突起移除期间保护这些部分。 在沉积过程中，表面上的突起很少或没有钌。 在形成钌膜之后，通过蚀刻剂蚀刻并除去突起，蚀刻剂仅侵蚀不锈钢，但对钌膜是中性的。 在钌层和基板的暴露部分之上形成接触层以完成基底。

公开(公告)号：US20090269877A1

公开(公告)日：2009-10-29

申请号：US12163819

申请日：2008-06-27

申请人： Mustafa Pinarbasi ,  Bulent M. Basol

发明人： Mustafa Pinarbasi ,  Bulent M. Basol

IPC分类号： H01L21/00 ,  B05C13/00

CPC分类号： H01L31/0322 ,  H01L31/03926 ,  H01L31/03928 ,  H01L31/0504 ,  H01L31/0749 ,  Y02E10/541 ,  Y02P70/521

摘要： A system and method of forming a thin film solar cell with a metallic foil substrate are provided. After forming a semiconductor absorber film over the front surface of the metallic foil substrate a back surface of the metallic foil substrate is treated using a material removal process to form a treated back surface in a process chamber. In one embodiment, the material removal process is performed while depositing a transparent conductive layer over the semiconductor absorber film in the process chamber.

摘要翻译： 提供了一种用金属箔基片形成薄膜太阳能电池的系统和方法。 在金属箔基板的前表面上形成半导体吸收膜之后，使用材料去除处理来处理金属箔基板的后表面，以在处理室中形成经处理的后表面。 在一个实施例中，在处理室中的半导体吸收膜上沉积透明导电层的同时进行材料去除处理。

公开(公告)号：US20090266398A1

公开(公告)日：2009-10-29

申请号：US12111161

申请日：2008-04-28

申请人： Burak Metin ,  Mukundan Narasimhan ,  Mustafa Pinarbasi ,  Bulent M. Basol

发明人： Burak Metin ,  Mukundan Narasimhan ,  Mustafa Pinarbasi ,  Bulent M. Basol

IPC分类号： H01L31/042

CPC分类号： H01L31/0749 ,  H01L31/022425 ,  H01L31/0392 ,  H01L31/03925 ,  H01L31/03928 ,  H01L31/0504 ,  H01L31/0512 ,  Y02E10/541

摘要： An apparatus for and a method of interconnecting at least two solar cells using contact areas which are formed on the conductive substrates of the solar cells is described. The contact areas are formed by a material removal process which removes high resistance surface layers of the conductive substrates at the contact areas. A stringing process serially interconnects the solar cells by connecting each contact area that is cleared of high resistance surface layer to the terminal of one of the adjacent solar cells.

摘要翻译： 描述了使用形成在太阳能电池的导电基板上的接触区域来互连至少两个太阳能电池的装置和方法。 接触区域通过去除接触区域上的导电基板的高电阻表面层的材料去除工艺形成。 串联过程通过将清除高电阻表面层的每个接触区域连接到相邻太阳能电池之一的端子来串联互连太阳能电池。

公开(公告)号：US20100147364A1

公开(公告)日：2010-06-17

申请号：US12639658

申请日：2009-12-16

申请人： Pedro Gonzalez ,  Bulent M. Basol ,  Burak Metin ,  Mukundan Narasimhan ,  Mustafa Pinarbasi

发明人： Pedro Gonzalez ,  Bulent M. Basol ,  Burak Metin ,  Mukundan Narasimhan ,  Mustafa Pinarbasi

IPC分类号： H01L31/048 ,  H01L31/0203

CPC分类号： H01L31/02021 ,  H01L31/044 ,  H01L31/0488 ,  H01L31/0504 ,  Y02E10/50

摘要： The present invention provides module structures and methods of manufacturing rigid or flexible photovoltaic modules employing thin film solar cells fabricated on flexible substrates, preferably on flexible metallic foil substrates. The solar cells may be Group IBIIIAVIA compound solar cells or amorphous silicon solar cells fabricated on thin stainless steel or aluminum alloy foils. In one embodiment, initially a solar cell string including two or more solar cells is formed by interconnecting the solar cells with conductive leads or ribbons. At least one bypass diode electrically connects conductive back surfaces of at least two solar cells. The bypass diode and the solar cells are encapsulated with support material and are packed with the protective shell such that the at least one bypass diode is placed between at least one solar cell and the bottom protective sheet. The bypass diode is thermally connected to the back conductive surface of one of the solar cells so that the back conductive surface of the solar cell functions as a heat sink.

摘要翻译： 本发明提供了制造刚性或柔性光伏组件的模块结构和方法，所述光伏模块采用在柔性基板上制造的薄膜太阳能电池，优选地在柔性金属箔基板上。 太阳能电池可以是在薄的不锈钢或铝合金箔上制造的IBIIIAVIA族复合太阳能电池或非晶硅太阳能电池。 在一个实施例中，最初通过将太阳能电池与导电引线或带相互连接来形成包括两个或多个太阳能电池的太阳能电池串。 至少一个旁路二极管电连接至少两个太阳能电池的导电后表面。 旁路二极管和太阳能电池被支撑材料封装并且被封装有保护壳，使得至少一个旁路二极管被放置在至少一个太阳能电池和底部保护片之间。 旁路二极管热连接到太阳能电池之一的背面导电表面，使得太阳能电池的背面导电表面起散热作用。

公开(公告)号：US20110108099A1

公开(公告)日：2011-05-12

申请号：US12616578

申请日：2009-11-11

申请人： Mustafa Pinarbasi ,  James Freitag

发明人： Mustafa Pinarbasi ,  James Freitag

IPC分类号： H01L31/00 ,  H01L21/283

CPC分类号： H01L31/022466 ,  H01L31/022483 ,  H01L31/0749 ,  H01L31/1884 ,  Y02E10/541 ,  Y02P70/521

摘要： A solar cell including a high electrical resistivity transparent layer formed on a CdS buffer layer is provided. The high electrical resistivity transparent layer includes an intrinsic oxide film formed on the buffer layer and an intermediate oxide film formed on the intrinsic oxide film. The intrinsic oxide film includes undoped zinc oxide and has a thickness range of 10 to 40 nm. The intermediate oxide film includes semi-intrinsic zinc oxide doped with aluminum and has a thickness range of 50-150 nm. The intermediate oxide film has an aluminum concentration of less than 1000 ppm.

摘要翻译： 提供了包括形成在CdS缓冲层上的高电阻率透明层的太阳能电池。 高电阻率透明层包括形成在缓冲层上的本征氧化膜和形成在本征氧化膜上的中间氧化膜。 本发明的氧化物膜包括未掺杂的氧化锌，其厚度范围为10〜40nm。 中间氧化膜包括掺杂有铝的半固有氧化锌，其厚度范围为50-150nm。 中间氧化膜的铝浓度小于1000ppm。

公开(公告)号：US20070127167A1

公开(公告)日：2007-06-07

申请号：US11297151

申请日：2005-12-07

申请人： James Freitag ,  Kuok Ho ,  Mustafa Pinarbasi ,  Ching Tsang

发明人： James Freitag ,  Kuok Ho ,  Mustafa Pinarbasi ,  Ching Tsang

IPC分类号： G11B5/33 ,  G11B5/127

CPC分类号： B82Y25/00 ,  G01R33/093 ,  G11B5/3163 ,  G11B5/3906 ,  G11B5/398

摘要： A magnetoresistive sensor having a lead overlay defined trackwidth and a pinned layer that extends beyond the stripe height defined by the free layer of the sensor. The extended pinned layer has a strong shape induced anisotropy that maintains pinning of the pinned layer moment. The extended portion of the pinned layer has sides beyond the stripe height that are perfectly aligned with the sides of the sensor within the stripe height. This perfect alignment is made possible by a manufacturing method that uses a mask structure for more than one manufacturing phase, eliminating the need for multiple mask alignments. The lead overlay design allows narrow, accurate trackwidth definition.

摘要翻译： 磁阻传感器具有引线覆盖层限定的轨道宽度和延伸超过由传感器的自由层限定的条带高度的钉扎层。 延伸的钉扎层具有强烈的形状诱导的各向异性，保持钉扎层力矩的钉扎。 被钉扎层的延伸部分具有超过条带高度的侧面，其在条纹高度内完全与传感器的侧面对准。 通过使用掩模结构用于多于一个制造阶段的制造方法，可以实现这种完美的对准，从而消除了对多个掩模对准的需要。 引线覆盖设计允许窄的，准确的轨道宽度定义。

公开(公告)号：US20050264955A1

公开(公告)日：2005-12-01

申请号：US10856710

申请日：2004-05-28

申请人： James Freitag ,  James Nix ,  Mustafa Pinarbasi

发明人： James Freitag ,  James Nix ,  Mustafa Pinarbasi

IPC分类号： G11B5/127 ,  G11B5/31 ,  G11B5/33

CPC分类号： G11B5/3932 ,  B82Y25/00 ,  G01R33/093

摘要： A magnetic head having an improved read head structure. The read head includes a free magnetic layer with hard bias elements disposed proximate its ends, where the hard bias elements include an improved hard bias magnetic grain structure. This is accomplished by fabricating the hard bias element as a bilayer structure having a first hard bias sublayer, a nonmagnetic midlayer and a second hard bias sublayer. The midlayer is preferably composed of a nonmagnetic material such as chromium, and the hard bias sublayers are composed of a magnetic material such as CoPtCr. Each sublayer is formed with its own magnetic grains, and because there are two sublayers, the hard bias element is fabricated with approximately twice the number of magnetic grains as the prior art single layer hard bias element.

摘要翻译： 具有改进的读头结构的磁头。 读头包括具有靠近其端部设置的硬偏置元件的自由磁性层，其中硬偏置元件包括改进的硬偏磁晶粒结构。 这是通过将硬偏压元件制造成具有第一硬偏压子层，非磁性中间层和第二硬偏压子层的双层结构来实现的。 中间层优选由诸如铬的非磁性材料构成，并且硬偏置子层由诸如CoPtCr的磁性材料构成。 每个子层由其自身的磁性颗粒形成，并且由于存在两个子层，所以用现有技术的单层硬偏置元件的大约两倍的磁性颗粒制造硬偏置元件。