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公开(公告)号：US20120141235A1
公开(公告)日：2012-06-07
申请号：US13293717
申请日：2011-11-10
IPC分类号： H01L21/677
摘要： A substrate processing apparatus including a frame, a first arm coupled to the frame at a shoulder axis having a first upper arm, a first forearm and at least one substrate holder serially and rotatably coupled to each other, a second arm coupled to the frame at the shoulder axis where shoulder axes of rotation of the arms are substantially coincident, the second arm having a second upper arm, a second forearm and at least one substrate holder serially and rotatably coupled to each other, and a drive section connected to the frame and coupled to the arms, the drive section being configured to independently extend and rotate each arm where an axis of extension of the first arm is angled relative to an axis of extension of the second arm substantially at each angular position of at least one of the first arm or the second arm.
摘要翻译： 一种基板处理装置，包括框架，第一臂，其在肩部轴线处联接到框架，所述肩部轴线具有第一上臂，第一前臂和彼此串联和可旋转地联接的第一前臂和至少一个基板保持器，第二臂， 所述肩轴线，其中所述臂的旋转的肩部轴线基本上重合，所述第二臂具有第二上臂，第二前臂和彼此串联和可旋转地联接的第二上臂和至少一个基板保持器，以及连接到所述框架的驱动部分， 所述驱动部分被配置为独立地延伸和旋转每个臂，其中所述第一臂的延伸轴线相对于所述第二臂的延伸轴基本上位于所述第一臂的至少一个的每个角位置处成角度 手臂或第二臂。
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公开(公告)号：US20110142575A1
公开(公告)日：2011-06-16
申请号：US12897440
申请日：2010-10-04
申请人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald M. Friedman , Michael L. Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.
摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。
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公开(公告)号：US07607879B2
公开(公告)日：2009-10-27
申请号：US11154787
申请日：2005-06-15
申请人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Robert T. Caveney , Ulysses Gilchrist , Jeff G. Araujo
发明人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Robert T. Caveney , Ulysses Gilchrist , Jeff G. Araujo
IPC分类号： B65G49/07
CPC分类号： H01L21/67196 , Y10S414/135
摘要： A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.
摘要翻译： 一种具有框架，壳体，存取系统和至少基板输送装置或基板处理装置的基板处理装置。 外壳连接到框架。 存取系统连接到框架并形成一个通路，通过该通道使基板移入和移出外壳。 基板输送装置或基板处理装置连接到框架并且至少部分地定位在壳体中。 框架包括可移动部分。 可移动部分可相对于框架移动，使得可移动部分的运动导致进入系统和基板输送装置或基板处理装置中的至少一个与安装位置的分离。 基板输送装置可从许多不同的可互换的基板输送装置中选择。 每个不同的可互换的基板输送装置具有预定的参考基准和用于相对于框架定位基板输送装置的定位特征。 每个基板输送装置的定位特征可相对于其预定参考基准可控地定位成处于可重复的预定位置，在不同的可互换的基板输送装置之间基本上没有变化。
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公开(公告)号：US20080080963A1
公开(公告)日：2008-04-03
申请号：US11803077
申请日：2007-05-11
申请人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
发明人： Michael Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert May
IPC分类号： B65B35/00
CPC分类号： H01L21/6732 , H01L21/67017 , H01L21/67276 , H01L21/67379 , H01L21/67386 , H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
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公开(公告)号：US08328495B2
公开(公告)日：2012-12-11
申请号：US12544064
申请日：2009-08-19
申请人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
发明人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
IPC分类号： B65G1/00
CPC分类号： H01L21/67386 , H01L21/67196 , H01L21/67201 , H01L21/67276 , H01L21/67379 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67766 , H01L21/67772 , H01L21/67775
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。
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公开(公告)号：US08267634B2
公开(公告)日：2012-09-18
申请号：US11803077
申请日：2007-05-11
申请人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
发明人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
IPC分类号： B65G1/00
CPC分类号： H01L21/6732 , H01L21/67017 , H01L21/67276 , H01L21/67379 , H01L21/67386 , H01L21/67715 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
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公开(公告)号：US20110014016A1
公开(公告)日：2011-01-20
申请号：US12843659
申请日：2010-07-26
申请人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Jeff G. Araujo , Steven Allen , Glenn Sindledecker
发明人： Daniel A. Hall , Christopher Hofmeister , William Fosnight , Jeff G. Araujo , Steven Allen , Glenn Sindledecker
IPC分类号： H01L21/673
CPC分类号： H01L21/67775
摘要： A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.
摘要翻译： 基板处理装置具有连接到框架并适于将基板输送容器与框架配合的框架和负载端口。 该装置具有适于可拆卸地连接到框架并且装配在装载口下方的可移动存储器。 存储器可以是容纳基板处理装置的电，机械或机电装置的外壳。
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公开(公告)号：US20100054897A1
公开(公告)日：2010-03-04
申请号：US12544064
申请日：2009-08-19
申请人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
发明人： Michael L. Bufano , Ulysses Gilchrist , William Fosnight , Christopher Hofmeister , Daniel Babbs , Robert C. May
IPC分类号： H01L21/67 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67386 , H01L21/67196 , H01L21/67201 , H01L21/67276 , H01L21/67379 , H01L21/67715 , H01L21/67724 , H01L21/67727 , H01L21/6773 , H01L21/67733 , H01L21/67766 , H01L21/67772 , H01L21/67775
摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.
摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。
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公开(公告)号：US20060099054A1
公开(公告)日：2006-05-11
申请号：US11210918
申请日：2005-08-23
申请人： Gerald Friedman , Michael Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
发明人： Gerald Friedman , Michael Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
IPC分类号： H01L21/677
CPC分类号： H01L21/677 , B65G47/50 , H01L21/67276 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.
摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于在负载端口接口处保持至少一个基板传输载体。 载体保持站布置成提供用于从载体保持站更换基板传输载体的快速互换部分。
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公开(公告)号：US20060045665A1
公开(公告)日：2006-03-02
申请号：US11154787
申请日：2005-06-15
申请人： Daniel Hall , Christopher Hofmeister , William Fosnight , Robert Caveney , Ulysses Gilchrist , Jeff Araujo
发明人： Daniel Hall , Christopher Hofmeister , William Fosnight , Robert Caveney , Ulysses Gilchrist , Jeff Araujo
IPC分类号： H01L21/677
CPC分类号： H01L21/67196 , Y10S414/135
摘要： A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.
摘要翻译： 一种具有框架，壳体，存取系统和至少基板输送装置或基板处理装置的基板处理装置。 外壳连接到框架。 存取系统连接到框架并形成一个通路，通过该通道使基板移入和移出外壳。 基板输送装置或基板处理装置连接到框架并且至少部分地定位在壳体中。 框架包括可移动部分。 可移动部分可相对于框架移动，使得可移动部分的运动导致进入系统和基板输送装置或基板处理装置中的至少一个与安装位置的分离。 基板输送装置可从许多不同的可互换的基板输送装置中选择。 每个不同的可互换的基板输送装置具有预定的参考基准和用于相对于框架定位基板输送装置的定位特征。 每个基板输送装置的定位特征可相对于其预定参考基准可控地定位成处于可重复的预定位置，在不同的可互换的基板输送装置之间基本上没有变化。
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