公开(公告)号：US20250093282A1

公开(公告)日：2025-03-20

申请号：US18968547

申请日：2024-12-04

Applicant: DENSO CORPORATION

Inventor： Minekazu SAKAI ,  Naohisa NIIMI ,  Norihiro KURUMADO ,  Tomohide ARIKI ,  Kei SHIMAKURA ,  Keita NAMBARA ,  Masashi SUZUKI ,  Hidetada KAJINO ,  Naoki HASHIMOTO

IPC: G01N22/04 ,  G01N33/24

Abstract: A soil sensor includes a first signal line transmitting a high-frequency electromagnetic wave, and a porous body having a water permeability and a water retention property. The soil sensor further includes a second signal line transmitting a low-frequency electromagnetic wave and facing soil through the porous body, and a ground line arranged on an inside of the first signal line. The second signal line is arranged on an inside of the first signal line and the ground line. Thus, the first signal line and the second signal line are prevented from causing an influence to each other by an electric field generated by one of the two lines.

公开(公告)号：US20170108335A1

公开(公告)日：2017-04-20

申请号：US15311547

申请日：2015-06-11

Applicant: DENSO CORPORATION

Inventor： Minekazu SAKAI ,  Tomoya JOMORI

IPC: G01C19/5607

CPC classification number: G01C19/5607 ,  G01C19/5656 ,  H01L41/1132

Abstract: When one direction of plane directions of a substrate is a first direction and a direction of the plane directions of the substrate perpendicular to the first direction is a second direction, a vibrating member is supported at an outer peripheral section via a plurality of beam sections having first beam-configuring members that can displace at least in the first direction and second beam-configuring members that are joined to the first beam-configuring members and that can displace at least in the second direction. In at least a subset of the plurality of beam sections, beam-configuring members on a side of the outer peripheral section among the first beam-configuring members and the second beam-configuring members are integrated with each other.

公开(公告)号：US20170052027A1

公开(公告)日：2017-02-23

申请号：US15307845

申请日：2015-06-02

Applicant: DENSO CORPORATION

Inventor： Tomoya JOMORI ,  Minekazu SAKAI

IPC: G01C19/5747 ,  B81B3/00 ,  H01L41/113

CPC classification number: G01C19/5747 ,  B81B3/0021 ,  B81B2201/0242 ,  B81B2203/0118 ,  B81B2203/0163 ,  H01L41/1132

Abstract: A vibration angular velocity sensor includes a fixed portion, a movable portion, a beam portion, and an anti-vibration spring structure. The movable portion has driving-detection weights. The beam portion has detection beams, support members, and driving beams, and has a frame structure formed of the driving beams, the support members, and the driving-detection weights. The anti-vibration spring structure is disposed between the detection beams and the fixed portion and is deformable along a first axis and a second axis. The vibration angular velocity sensor causes the driving-detection weights disposed on both sides of the fixed portion to undergo driving vibrations in directions opposite to each other along the first axis about the fixed portion and detects an angular velocity based on a fact that the driving-detection weights vibrate also along the second axis upon application of the angular velocity.

Abstract translation: 振动角速度传感器包括固定部分，可移动部分，梁部分和抗振弹簧结构。 可移动部分具有驾驶检测重物。 梁部分具有检测梁，支撑构件和驱动梁，并且具有由驱动梁，支撑构件和驾驶检测重物形成的框架结构。 防振弹簧结构设置在检测光束和固定部分之间，并且可沿第一轴线和第二轴线变形。 振动角速度传感器使得设置在固定部分的两侧的驱动检测重物沿着围绕固定部分的第一轴线彼此相反的方向进行驱动振动，并且基于以下事实来检测角速度： 当施加角速度时，检测重量也沿着第二轴线振动。

公开(公告)号：US20170012602A1

公开(公告)日：2017-01-12

申请号：US15201680

申请日：2016-07-05

Applicant: DENSO CORPORATION

Inventor： Takeru KANAZAWA ,  Minekazu SAKAI

IPC: H03H9/02 ,  H03H9/25 ,  G01C19/5607

CPC classification number: G01C19/5607 ,  G01C19/5628 ,  H03H9/1014 ,  H03H9/215

Abstract: An oscillation device includes a vibrator made of a quartz substrate, a vibration substrate coupled to the vibrator and including a peripheral portion surrounding a periphery of the vibrator, a support substrate jointed to the vibration substrate at the peripheral portion of the vibration substrate, a cap layer disposed on an opposite side of the vibration substrate from the support substrate and jointed to the vibration substrate at the peripheral portion of the vibration substrate via a joint. At least one pad electrically connected to the vibration substrate is formed on the cap layer. At least one conductor pattern opposed to the pad is formed on a vibration substrate side surface of the cap layer and is electrically connected to the pad.

Abstract translation: 振荡装置包括由石英基板制成的振动器，耦合到振动器并包括围绕振动器周围的周边部分的振动基板，在振动基板的周边部分与振动基板连接的支撑基板， 层，其与振动基板的与支撑基板相反的一侧设置，并经由接头在振动基板的周边部分与振动基板连接。 在盖层上形成至少一个与振动基板电连接的焊盘。 在盖层的振动基板侧表面上形成与焊盘相对的至少一个导体图案，并且电连接到焊盘。

公开(公告)号：US20160223582A1

公开(公告)日：2016-08-04

申请号：US15022954

申请日：2014-09-23

Applicant: DENSO CORPORATION

Inventor： Minekazu SAKAI ,  Kiyomasa SUGIMOTO

IPC: G01P15/125 ,  H01L29/84 ,  H01L29/66

CPC classification number: G01P15/125 ,  B81B7/0064 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P15/18 ,  G01P2015/0814 ,  H01L29/66007 ,  H01L29/84

Abstract: In a physical quantity sensor, a contact part that is directly and electrically connected to an external circuit is formed in a support substrate, and the support substrate is maintained at a predetermined potential through the contact part. With this configuration, the support substrate is maintained at the predetermined potential without disposing an electrode in the interior of the semiconductor layer. For that reason, a processing precision can be restrained from being reduced in forming the movable electrode, and hence a detection precision can be restrained from being reduced.

Abstract translation: 在物理量传感器中，在支撑基板上形成直接和电连接到外部电路的接触部分，并且通过接触部件将支撑基板保持在预定电位。 利用这种配置，在不在半导体层的内部设置电极的情况下，将支撑基板保持在预定电位。 因此，在形成可动电极时可以抑制加工精度的降低，能够抑制检测精度的降低。