公开(公告)号：US06549282B1

公开(公告)日：2003-04-15

申请号：US09419794

申请日：1999-10-18

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Ciphardt

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Ciphardt

IPC分类号： G01B1106

CPC分类号： G01J3/447 ,  G01J3/14 ,  G01N21/211

摘要： Disclosed are ellipsometer and polarimeter systems which have multi-element input and output lenses that demonstrate essentially the same focal length at each wavelength in a spectroscopic range of wavelengths.

摘要翻译： 公开了具有多元素输入和输出透镜的椭偏仪和偏振计系统，其在波长范围内的每个波长处显示出基本上相同的焦距。

公开(公告)号：US06268917B1

公开(公告)日：2001-07-31

申请号：US09479091

申请日：2000-01-07

申请人： Blaine D. Johs

发明人： Blaine D. Johs

IPC分类号： G01J400

CPC分类号： G01J3/447 ,  G01J4/00 ,  G01J2003/2866 ,  G01N21/211

摘要： Disclosed is a source of polychromatic electromagnetic radiation which, utilizing a beam combiner system, combines beams of polychromatic electromagnetic radiation from a plurality of sources to provide a relatively broad and flattened intensity characteristic vs. wavelength output spectrum, and its application in material system investigation systems, such as ellipsometers, spectrophotometers and polarimeters which comprise a polychromatic source of electromagnetic radiation.

摘要翻译： 公开了多色的电磁辐射的源，其中，利用光束组合系统，结合了多色电磁辐射束从多个源，以提供相对宽广的和扁平强度特性与波长的输出频谱，其在材料体系调查系统中的应用 ，例如包括电磁辐射的多色源的椭圆计，分光光度计和偏振计。

公开(公告)号：US6141102A

公开(公告)日：2000-10-31

申请号：US232257

申请日：1999-01-19

申请人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

发明人： Blaine D. Johs ,  Craig M. Herzinger ,  Steven E. Green

IPC分类号： G01J3/28 ,  G01J4/00

CPC分类号： G01J4/00 ,  G01J2003/2866

摘要： Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from an upper point. A third side is oriented essentially horizontally and is continuous with, and present below, the first and second sides. During use in a spectroscopic ellipsometer/polarimeter system, an entered beam of electromagnetic radiation exits in a propagation direction which is essentially undeviated and undisplaced from the direction of its incidence, even when the retarder system is caused to rotate about the locus of the beam of electromagnetic radiation.

摘要翻译： 公开了一种用于在电磁辐射束的正交分量之间输入延迟的三角形延迟器系统。 从侧视图看，三角形元件具有从上部向左和向右突出的第一和第二侧面。 第三面基本上水平地定向并且与第一和第二面连​​续并存在于第一和第二面之下。 在分光椭偏仪/偏振计系统中使用时，输入的电磁辐射束在传播方向上离开，即传播方向基本上未发生变化，并且从其入射方向未脱离，即使延迟器系统围绕光束 电磁辐射。

公开(公告)号：US6084675A

公开(公告)日：2000-07-04

申请号：US246888

申请日：1999-02-08

申请人： Craig M. Herzinger ,  Blaine D. Johs

发明人： Craig M. Herzinger ,  Blaine D. Johs

IPC分类号： G01J3/28 ,  G01J4/00 ,  G01N21/21

CPC分类号： G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01J2003/2866

摘要： Disclosed is a compensator/retarder system which allows adjustment to eliminate introduction of significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when the present invention retarder system is caused to continuously rotate in a rotating compensator ellipsometer system. Also disclosed is a method of calibration of an ellipsometer/polarimeter system which includes a present invention compensator/retarder system.

摘要翻译： 公开了一种补偿器/延迟器系统，其允许调节以消除引起与其相互作用的电磁辐射束的传播方向上的显着偏差和/或位移，即使本发明的延迟器系统在旋转中连续旋转 补偿椭圆仪系统。 还公开了一种校准椭偏仪/偏振计系统的方法，其包括本发明的补偿器/延迟器系统。

公开(公告)号：US6034777A

公开(公告)日：2000-03-07

申请号：US162217

申请日：1998-09-29

申请人： Blaine D. Johs ,  Craig M. Herzinger

发明人： Blaine D. Johs ,  Craig M. Herzinger

IPC分类号： G01N21/21

CPC分类号： G01N21/211

摘要： Disclosed is a method for evaluating parameters in parameterized equations for independently calculating retardence entered to orthogonal components in a beam of electromagnetic radiation which is caused to pass through spatially separated input and output windows, by each of said input and output windows. The present invention finds application in ellipsometric investigation of sample systems present in vacuum chambers, wherein a beam of electromagnetic radiation is caused to pass through an input window, interact with a sample system, and exit through an output window, and where it is necessary to separate out the effects of said input and output windows to arrive at sample system characterizing results.

摘要翻译： 公开了一种用于评估参数化方程式中的参数的方法，用于通过所述输入和输出窗口中的每一个独立地计算输入到通过空间分离的输入和输出窗口的电磁辐射束中的正交分量的延迟。 本发明应用于存在于真空室中的样品系统的椭圆测量研究中，其中使电磁辐射束通过输入窗口，与样品系统相互作用并通过输出窗口离开，并且其中必须 分离所述输入和输出窗口的影响以得到样品系统特征结果。

公开(公告)号：US5969818A

公开(公告)日：1999-10-19

申请号：US144764

申请日：1998-08-31

申请人： Blaine D. Johs ,  Ping He

发明人： Blaine D. Johs ,  Ping He

IPC分类号： G01J3/14 ,  G01J3/447 ,  G01J4/00

CPC分类号： G01J3/14 ,  G01J3/447

摘要： Disclosed is an electromagnetic beam directing system and method which enables changing the direction of propagation of a beam of electromagnetic radiation without significantly changing the phase angle between orthogonal components therein. Two pairs of mirrors are oriented to form two orthogonally related planes such that phase shift entered to an electromagnetic beam by interaction with the first pair of mirrors is canceled by interaction with the second pair.

摘要翻译： 公开了一种电磁射束引导系统和方法，其能够改变电磁辐射束的传播方向，而不会显着改变其中的正交分量之间的相位角。 两对反射镜被定向以形成两个正交相关平面，使得通过与第二对反射镜相互作用而进入电磁波的相位与第二对的相互作用被抵消。

公开(公告)号：US5956145A

公开(公告)日：1999-09-21

申请号：US17423

申请日：1998-02-02

申请人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam ,  Stephen P. Ducharme

发明人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam ,  Stephen P. Ducharme

IPC分类号： G01J3/28 ,  G01J4/00 ,  G01N21/21

CPC分类号： G01N21/211 ,  G01J4/00 ,  G01J2003/2866

摘要： Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system. The present invention also improves the ability of an ellipsometer or polarimeter and the like system fitted with present invention components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterizing PSI and DELTA determining data values, wherein a sample system per se. investigating polarized beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. Practice of the present invention also allows determination of the "Handedness" of a polarized beam of light, and of sample system Jones or Mueller Matrix component values. As well, the present invention provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter system.

公开(公告)号：US5805285A

公开(公告)日：1998-09-08

申请号：US818445

申请日：1997-03-17

申请人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

发明人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

IPC分类号： G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47

CPC分类号： G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/4788 ,  G01J2003/2866 ,  G01J3/0289

摘要： Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.

摘要翻译： 公开了一种分散光学系统，在样品衬底系统调查光谱反射计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。 在使用中，基本上单个波长光束的多个“订单”的可用性允许在更大范围内同时测量更基本上单个波长的光束，而不仅仅是基本上单个波长束的“订单” 的光存在。 存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。 还公开了分散光学对准的象限检测器装置，以及用于减小检测器元件极化状态依赖性的影响的补偿器装置。

公开(公告)号：US5757494A

公开(公告)日：1998-05-26

申请号：US422346

申请日：1995-04-14

申请人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam

发明人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam

IPC分类号： C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N23/20

CPC分类号： C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N23/20058

摘要： The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible. The present invention allows obtaining accurate and precise sample system PSI and DELTA Values from an Ellipsometer System in which a polarized beam of light is oriented at other than a Principal of Brewster Angle of Incidence to a sample system, allows determination of DELTA values in ranges otherwise not impossible, allows determination of the "Handedness" of a polarized beam of light, and provides means for determining all of Stokes Vector and Mueller Matrix component values. The present invention also provides means for making all system components added to a conventional ellipsometer system essentially end user transparent when desired, without removal thereof from said ellipsometer system.

摘要翻译： 本发明一般适用于使用相对较大波长范围的光谱可旋转和旋转元件椭偏仪。 公开了一种用于控制偏振光束的偏振状态的系统和方法，使得其处于用于测量由与样品系统相互作用产生的所述偏振光束的变化的极化状态检测器的灵敏度， 降噪，测量误差等。 举例说明的是一种系统和使用方法，用于在范围内同时设置测量的椭圆偏振ALPHA和椭圆偏振BETA参数值（或等价物），其范围内的传递函数的灵敏度和使用所述椭圆偏振ALPHA的数学回归和 发现表征PSI和DELTA常数值的样本系统的计算中的椭偏测量值BETA值，测量噪声和误差等都是可忽略的。 本发明允许从椭圆偏振仪系统获得精确和精确的样本系统PSI和DELTA值，其中偏振光束定向在除了布鲁斯特发生角度的主体之外的样本系统，允许以其它方式确定范围的DELTA值 不是不可能的，允许确定偏振光束的“携带”，并且提供用于确定所有斯托克斯矢量和米勒矩阵分量值的装置。 本发明还提供了用于使得添加到常规椭偏仪系统的所有系统部件基本上使终端用户在需要时不透明的装置，而不从所述椭偏仪系统中移除。

公开(公告)号：US5666201A

公开(公告)日：1997-09-09

申请号：US530892

申请日：1995-09-20

申请人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

发明人： Blaine D. Johs ,  Ping He ,  Steven E. Green ,  Shakil A. Pittal ,  John A. Woollam

IPC分类号： G01J3/28 ,  G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N21/47

CPC分类号： G01J3/36 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N21/4788 ,  G01J2003/2866 ,  G01J3/0289

摘要： Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems, which, in use, produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.

摘要翻译： 公开了一种分散光学系统，在椭偏仪或偏振计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。 在使用中，基本上单个波长光束的多于一个“顺序”的可用性允许同时测量更基本上单个波长光束的光，比仅存在基本上单个波长光束的“顺序”是可能的。 存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。