公开(公告)号：US11211274B2

公开(公告)日：2021-12-28

申请号：US16095863

申请日：2017-05-26

Applicant: ENTEGRIS, Inc.

Inventor： Russ V. Raschke ,  Jason Steffens

IPC: H01L21/673

Abstract: A substrate container that utilizes a rocker linkage or a linear cam arrangement in latch mechanism that is actuated by a rotary cam. The rocker linkage or linear cam is mounted to an interior panel of a door of the substrate container and may be disposed proximate an edge portion of the interior panel. The rocker linkage or linear cam may be configured to exert an axial force component on a housing of the substrate container to seat the door against a seal member. The rocker linkage or linear cam also transfers the axial latching forces to the door to reduce transfer of forces to the cam. The rocker linkage or linear cam may be arranged to transfer axial forces in a radially outward direction when the latch mechanism is engaged, to prevent push back on the rotary cam.

公开(公告)号：USD767233S1

公开(公告)日：2016-09-20

申请号：US29518509

申请日：2015-02-24

Applicant: ENTEGRIS, INC.

Designer： Russ V. Raschke ,  Jason T. Steffens ,  Eric S. Olson

公开(公告)号：US20240160098A1

公开(公告)日：2024-05-16

申请号：US18386869

申请日：2023-11-03

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Brian Wiseman

IPC: G03F1/66

CPC classification number: G03F1/66

Abstract: A reticle container includes an outer pod and an inner pod, the inner pod configured to contain a reticle. The outer pod includes a pod door including a purge port, and a pod dome including one or more channels configured to receive a purge gas from the purge port and direct the purge gas to particular locations within the outer pod. The channels can direct the purge gas to one or more filters of the inner pod. The channels can direct the purge gas such that there is a pressure differential between the pressure at a first filter and the pressure at the second filter. The inner pod can include deflectors or channels to further direct the purge flow through the inner pod to purge the area surrounding the reticle.

公开(公告)号：US20230333464A1

公开(公告)日：2023-10-19

申请号：US18132718

申请日：2023-04-10

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Brian Wiseman ,  Matthew Reber

IPC: G03F1/66 ,  B65D45/24

CPC classification number: G03F1/66 ,  B65D45/24

Abstract: Reticle containers include a rotating latch including a spring. The spring provides force bringing the segments of the reticle container towards one another such that a reticle in the container is clamped between the container segments. The rotating latch can include a head as part of an assembly on one of a cover or a baseplate of the reticle container, with a slot configured to accommodate the head provided on the other of the cover or baseplate. The head can be disposed at an end of a shaft, with the shaft connected to a base, which is contacted by spring providing force such that the contact of the head with the other of the cover or baseplate provides clamping force to a reticle stored between the cover and baseplate.

公开(公告)号：US20230333463A1

公开(公告)日：2023-10-19

申请号：US18132227

申请日：2023-04-07

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke ,  Caleb Elwell ,  Matthew Reber ,  Brian Wiseman

IPC: G03F1/66

CPC classification number: G03F1/66

Abstract: Reticle containers include a magnetic latch to close the container and clamp the reticle contained within. The magnetic latch includes at least one magnet and another ferromagnetic material, which can be either another magnet or a magnetically attractable material. At least one of the magnets and the other ferromagnetic material can be manipulated to secure or open the container. The manipulation can include at least one of sliding of a housing, rotation of a magnet, or application of an external magnetic field to change the attraction of the magnet and the other ferromagnetic material.

公开(公告)号：US20220357650A1

公开(公告)日：2022-11-10

申请号：US17738304

申请日：2022-05-06

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke

IPC: G03F1/66 ,  H01L21/673 ,  C23C18/32

Abstract: This technical disclosure describes a device that includes a recital pod and the method of making and maintaining the pod. The device includes a pod that includes a cover including a cover body; a baseplate including a baseplate body; and one or more mating surfaces formed on one or both of the baseplate body and the cover body to assemble between the cover and the baseplate to each other. The one or more mating surfaces each includes an outermost coating configured to be wear-resistant and lubricating, the outermost coating includes a composite metal plating, and the composite metal plating includes a metal plating with a lubricant embedded therein and/or layered over the metal plating.

公开(公告)号：US10593577B2

公开(公告)日：2020-03-17

申请号：US15480736

申请日：2017-04-06

Applicant: Entegris, Inc.

Inventor： Russ V. Raschke ,  Jason T. Steffens

IPC: H01L21/673 ,  H01L21/67

Abstract: A reticle container for containing a reticle including a base plate having one or more windows. Each of the windows can include mounting recess having a recess sidewall including an undercut defined therein. A transparent substrate can be disposed in the mounting recess and is retained therein by a retention member having an arcuate portion extending between a first end portion and a second end portion. At least the first end portion of the retention member can be positioned in the undercut defined in the recess sidewall such that the arcuate portion of the retention member contacts the transparent substrate to retain the transparent substrate in the mounting recess.

公开(公告)号：US20170294326A1

公开(公告)日：2017-10-12

申请号：US15480736

申请日：2017-04-06

Applicant: Entegris, Inc.

Inventor： Russ V. Raschke ,  Jason T. STEFFENS

IPC: H01L21/673 ,  H01L21/67

CPC classification number: H01L21/67379 ,  H01L21/67011 ,  H01L21/67359 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67393

Abstract: A reticle container for containing a reticle including a base plate having one or more windows. Each of the windows can include mounting recess having a recess sidewall including an undercut defined therein. A transparent substrate can be disposed in the mounting recess and is retained therein by a retention member having an arcuate portion extending between a first end portion and a second end portion. At least the first end portion of the retention member can be positioned in the undercut defined in the recess sidewall such that the arcuate portion of the retention member contacts the transparent substrate to retain the transparent substrate in the mounting recess.

公开(公告)号：US12271110B2

公开(公告)日：2025-04-08

申请号：US17940517

申请日：2022-09-08

Applicant: ENTEGRIS, INC.

Inventor： Russ V. Raschke ,  Caleb Elwell ,  Matthew Reber

IPC: H01L21/673 ,  G03F1/66 ,  G03F7/00

Abstract: Reticle pods include interfacing surfaces to secure segments of the reticle pod to one another. At least one of the interfacing surfaces is a ramped surface, such that when the reticle pods are secured to one another, the reticle is clamped between reticle contacts provided on the segments of the reticle pod. When the reticle pod is assembled and contains a reticle, a purge gas flow passage can be formed in the reticle pod. The height of the reticle contacts and the thickness of the reticle can be such that the reticle pod segments are spaced apart from one another by a gap, with the gap providing the purge gas flow passage. The reticle pod can be a stocker pod for the transportation and storage of reticles.

公开(公告)号：US20250102901A1

公开(公告)日：2025-03-27

申请号：US18892069

申请日：2024-09-20

Applicant: ENTEGRIS, INC.

Inventor： Huaping Wang ,  Russ V. Raschke

IPC: G03F1/38 ,  G03F1/66

Abstract: Reticle contacts for use in a reticle container are provided having further features for wear reduction. The wear reduction features include one or more of a ring-shaped projection or one or more elongate arcing projections from a reticle contact region, one or more reliefs such as ring-shaped trenches provided in a reticle contact region, or one or more reliefs provided by having relatively thinner regions of the reticle contact region.