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公开(公告)号：US20240026888A1
公开(公告)日：2024-01-25
申请号：US18044815
申请日：2021-10-01
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yoshiyuki Sakaguchi , Yoshiyuki Takai , Yasuhiro Shibata
CPC classification number: F04D19/042 , F04D29/321 , F05D2250/292
Abstract: A lower portion of a cylindrical portion provided in a vacuum pump on the outlet port side has an extension portion extending to a further downstream side than a stationary part of a thread groove exhaust element. In the extension portion, the smaller the outer diameter, the smaller the stress applied to the inner diameter side during rotation. As such, the configuration including a reduced diameter portion reduces the stress applied to the inner diameter side of the cylindrical portion without lowering the rotation speed of the rotating body. Additionally, providing a gradually decreasing diameter structure in the extension portion reduces stress concentration at the reduced diameter portion.
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公开(公告)号：US20230323890A1
公开(公告)日：2023-10-12
申请号：US18006290
申请日：2021-07-30
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yongwei Shi
CPC classification number: F04D29/26 , F04D19/04 , F04D29/403
Abstract: In a vacuum pump in which the rotor blade in one stage has an outer diameter that is smaller at an outlet port side, or the rotor blade in one stage has an inner diameter that is larger at an outlet port side, at least one of an outer circumference portion or an inner circumference portion of the stator blade that is located immediately above the rotor blade having a smaller outer diameter or immediately above the rotor blade having a larger inner diameter has a tapered surface sloping down to an outlet port side. By providing the tapered surface, entering molecules are reflected at a right angle, sent toward an inner circumference side, and hit by the rotor blade in the upper stage. The molecules are thus sent to a next exhaustion stage.
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公开(公告)号：US10260509B2
公开(公告)日：2019-04-16
申请号：US14899917
申请日：2014-06-06
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Tooru Miwata , Keita Mitsuhashi
Abstract: A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.
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公开(公告)号：US20180355888A1
公开(公告)日：2018-12-13
申请号：US15780155
申请日：2016-12-08
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Tooru Miwata , Kengo Saegusa , Nahoko Yoshihara
Abstract: A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.
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公开(公告)号：US11994137B2
公开(公告)日：2024-05-28
申请号：US17762992
申请日：2020-09-18
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yoshiyuki Takai
IPC: F04D19/04 , F04D29/053 , F04D29/10 , F04D29/58
CPC classification number: F04D19/042 , F04D29/053 , F04D29/102 , F04D29/584
Abstract: A vacuum pump which suppresses occurrence of deposition caused by an exhaust gas is obtained. The vacuum pump includes: a pump portion including a shaft portion, a rotor disposed on an outer peripheral side of the shaft portion, and a stator disposed on the outer peripheral side of the rotor; a channel of the exhaust gas from the pump portion to an outlet port; and a shielding portion which suppresses contact of the exhaust gas with the shaft portion in the channel. Further, an end portion of the shielding portion has a surface opposed to the rotor.
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Patent Agency Ranking
公开(公告)号：US20240011495A1
公开(公告)日：2024-01-11
申请号：US18042004
申请日：2021-09-03
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yoshiyuki Takai , Yoshiyuki Sakaguchi
IPC: F04D19/04
CPC classification number: F04D19/042
Abstract: A vacuum pump that includes: an outer cylinder having an inlet port and an outlet port; a rotor shaft rotationally supported inside the outer cylinder; rotor blades in multiple stages, the rotor blades being rotatable together with the rotor shaft; stator blades in multiple stages, the stator blades being fixed to the outer cylinder and located respectively between the rotor blades in multiple stages; and a cooling-side stator and a heating-side stator that hold the stator blades in multiple stages at predetermined intervals. An opening of a gap of a predetermined width configured to provide thermal insulation between the cooling-side stator and the heating-side stator is located at a position where the opening does not face outer circumference surfaces of the rotor blades in an axial direction of the rotating body.
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公开(公告)号：US20230272806A1
公开(公告)日：2023-08-31
申请号：US17769161
申请日：2020-10-27
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yoshiyuki Takai
CPC classification number: F04D29/582 , F04D19/04
Abstract: A vacuum pump is provided, which is capable of preventing a water cooling spacer, which is one component of a casing, from being damaged by destruction of an interior component. The vacuum pump includes a casing having an inlet port, a stator column provided upright inside the casing, and a rotating body shaped to surround an outer periphery of the stator column, with gas being sucked in from the inlet port by rotation of the rotating body, wherein the casing is composed of a plurality of components including a water cooling spacer having a water cooling pipe disposed therein, and the water cooling spacer is made of an aluminum alloy casting material having an elongation of 5% or more as a mechanical material property.
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公开(公告)号：US20220397124A1
公开(公告)日：2022-12-15
申请号：US17769560
申请日：2020-10-27
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Takai , Tooru Miwata
Abstract: A vacuum pump includes a rotor provided with a plurality of rotor blades and a rotor cylinder portion, a driving portion, a bearing, stator blades, a thread groove stator that is disposed downstream of the stator blades and has an inner peripheral surface facing an outer peripheral surface of the rotor cylinder portion, and a heat insulating wall disposed downstream of the thread groove. The heat insulating wall includes a ring-shaped annular portion, and a substantially cylindrical wall portion extending from an inner portion of the annular portion in the radial direction to the upstream side and forming a flow path on the outer peripheral surface side. A first corner portion is formed between an upstream-side surface of the annular portion and the outer peripheral surface of the wall portion, the first corner portion being formed in an arc shape.
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公开(公告)号：US11078925B2
公开(公告)日：2021-08-03
申请号：US16327154
申请日：2017-08-09
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Tooru Miwata , Nahoko Yoshihara
Abstract: A vacuum pump reduces a stress without reducing the rotation speed of a rotating cylindrical body. In an outlet port-side lower portion of a rotor cylindrical portion included in the vacuum pump, a smaller diameter portion having an outer diameter smaller than that of an inlet port-side portion of the rotor cylindrical portion is provided. A lowermost end portion (outlet port-side end portion) of the rotor cylindrical portion is designed longer than a thread groove exhaust element to provide an extending portion. In the extending portion, a smaller diameter portion having an outer diameter smaller than that of the inlet port-side portion of the rotor cylindrical portion which is opposed to the thread groove exhaust element is provided.
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公开(公告)号：US20200158117A1
公开(公告)日：2020-05-21
申请号：US16604820
申请日：2018-04-11
Applicant: Edwards Japan Limited
Inventor： Yongwei Shi , Tooru Miwata , Yoshiyuki Sakaguchi
Abstract: In a vacuum pump, the lower Ra sensor target, the fourth spacer, and the Ra electromagnetic target are configured in this order, from the inlet port side toward the outlet port side, at the lower side of the shaft of the 5-axis control magnetic bearing Likewise, at the lower side of the stator, the lower Ra sensor and the lower Ra electromagnet are configured in this order, from the inlet port toward the outlet port. In other words, the lower Ra sensor is disposed above the lower Ra electromagnet. According to this configuration, the third spacer fixed above the lower Ra sensor target is shortened. As a result, the height of the 5-axis control magnetic bearing and the length of the stator column enclosing electrical components constituting the 5-axis control magnetic bearing is reduced, thereby reducing the overall height of the vacuum pump.
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