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公开(公告)号:US10533552B2
公开(公告)日:2020-01-14
申请号:US15538314
申请日:2015-11-10
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield
Abstract: A rotary screw vacuum pump 10 comprises a housing 12 that has a lower pressure inlet region 14 and a higher pressure outlet region 16 and two intermeshing screws 18 disposed in the chamber and configured to cooperably rotate to compress a gas in working chambers formed between them and the housing while pumping the gas from the lower pressure inlet region to the higher pressure outlet region. The housing 12 has a least one liquid inlet 20 to admit a sealing liquid to seal the working chambers. The intermeshing screws 18 comprise Quimby-type screws.
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公开(公告)号:US10337517B2
公开(公告)日:2019-07-02
申请号:US14374106
申请日:2013-01-24
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield , Ian David Stones , Stephen Dowdeswell
Abstract: An improved vacuum pump mechanism is described in which an intersecting solid or perforated element is arranged to intersect a channel member. Relative movement of the intersecting solid or perforated element and channel member causes gas molecules to be urged from inlet to an outlet of the pump. Gas molecules are constrained within the channel member and interaction of the gas molecules with the flat and smooth surfaces of the intersecting solid or perforated member influence momentum of the gas molecules so that they are directed towards the outlet. In one embodiment, the channel member is formed as a helix and the intersecting solid or perforated elements are disk-shaped. An alternative embodiment is provided having the channel member configured as a spiral and the perforated elements as cylindrical skirts. The pump provides significant improvements in pump capacity, reduced power consumption and size of pump.
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公开(公告)号:US10161399B2
公开(公告)日:2018-12-25
申请号:US14411701
申请日:2013-06-10
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield
Abstract: The present invention provides a scroll pump comprising: a scroll mechanism having an orbiting scroll and a fixed scroll; a drive shaft having a concentric shaft portion and an eccentric shaft portion connected to the orbiting scroll. The shaft is arranged to be driven by a motor so that rotation of the shaft imparts an orbiting motion to the orbiting scroll relative to the fixed scroll for pumping fluid along a flow path from an inlet to an outlet of the scroll mechanism. An axial lip seal is located between the orbiting scroll and the fixed scroll for resisting leakage of fluid from outside the scroll mechanism into the flow path.
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公开(公告)号:US20180003178A1
公开(公告)日:2018-01-04
申请号:US15541085
申请日:2016-01-06
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield , Andrew Seeley , Katsumi Nishimura , Katsunori Takahashi
IPC: F04C25/02 , F04C23/00 , C23C16/44 , H01L21/205
CPC classification number: F04C25/02 , C23C16/4405 , C23C16/4412 , F04C23/001 , F04C23/003 , F04C2220/30 , F16K15/00 , H01L21/205 , H01L21/67155
Abstract: A vacuum exhaust system which exhausts gas from chambers and which comprises a plurality of branch channels for the exhaustion of the gas from the chambers, a main pipeline in the form of a confluence of the plurality of branch channels, channel open-close valves fitted to correspond with each of the said plurality of branch channels, a channel-switching valve connecting the main channel and a plurality of selection channels and allowing flow between the main channel and any one of the plurality of selection channels, a first pump which functions as a gas exhaust means in the molecular flow region of the gas and is fitted to one of the plurality of branch channels, and second pumps which function as gas exhaust means in the viscous flow region of the gas and are fitted to the plurality of selection channels.
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公开(公告)号:US12018691B2
公开(公告)日:2024-06-25
申请号:US17791068
申请日:2021-01-07
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield , Stephen Dowdeswell
CPC classification number: F04D19/042 , F04D29/542 , F05D2260/231 , F05D2300/121 , F05D2300/171
Abstract: A vacuum pump comprising: a rotor rotatably mounted within a stator; the rotor comprising a plurality of angled blades arranged along a helical path from an inlet to an outlet; the stator comprising a plurality of perforated elements forming a plurality of perforated discs arranged to intersect the helical path at different axial positions, the perforations allowing gas molecules travelling along the helical path to pass through the perforated elements. Each of the perforated discs comprises an outer curved wall forming an outer circumference of the disc and an inner curved wall forming a portion of an inner circumference of the disc, the inner circumference comprising at least one gap where there is no inner wall.
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公开(公告)号:US20210172440A1
公开(公告)日:2021-06-10
申请号:US16639528
申请日:2018-08-16
Applicant: Edwards Limited
Inventor: Ian David Stones , Nigel Paul Schofield , Ian Andrew Norton
Abstract: A pump and method for pumping a gas are disclosed. The pump comprises a rotor and a stator. At least one of the rotor or stator comprises at least one liquid opening configured for fluid communication with a liquid source. The liquid opening is configured such that in response to a driving force exerted on liquid from the liquid source a stream of liquid is output from the opening, the stream of liquid forming a liquid blade between the rotor and the stator, gas confined by said stator, said rotor and said liquid blade being driven through said pump from a gas inlet towards a gas outlet.
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公开(公告)号:US20200271118A1
公开(公告)日:2020-08-27
申请号:US16646861
申请日:2018-09-19
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield
Abstract: A drag pump for pumping gas and a set of vacuum pumps including the drag pump are disclosed. The drag pump comprises: a rotor configured to rotate within a stator component and to drive a gas to be pumped from a gas inlet to a gas outlet; magnetic bearings for rotatably mounting the rotor within the pump; wherein at least a portion of the rotor and stator component configured to contact the gas to be pumped are configured for operation at temperatures above 130° C.
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公开(公告)号:US09920761B2
公开(公告)日:2018-03-20
申请号:US14968849
申请日:2015-12-14
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield , Stephen Dowdeswell
IPC: F03C2/00 , F03C4/00 , F04C2/00 , F04C15/00 , F04C18/12 , F01C1/12 , F04C2/12 , F01C1/08 , F01C21/08 , F04C25/02 , F04C2/08 , F04C29/00 , F04C18/08
CPC classification number: F04C18/126 , F01C1/084 , F01C1/126 , F01C21/08 , F04C2/084 , F04C2/126 , F04C18/084 , F04C25/02 , F04C29/0078 , F04C2230/00 , F04C2240/20 , Y10T29/49236
Abstract: The present invention relates to a rotor for a vacuum pump 150 having a roots pumping mechanism, the rotor comprising at least two hollow lobes 160, 162, 164, 166, each lobe having an outer wall 208 which defines a lobe profile, a hollow cavity 210 generally inward of the outer wall, and at least one strengthening rib 226 located in the cavity to resist stress on the lobes generated during rotation.
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公开(公告)号:US20180023566A1
公开(公告)日:2018-01-25
申请号:US15538314
申请日:2015-11-10
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield
Abstract: A rotary screw vacuum pump 10 comprises a housing 12 that has a lower pressure inlet region 14 and a higher pressure outlet region 16 and two intermeshing screws 18 disposed in the chamber and configured to cooperably rotate to compress a gas in working chambers formed between them and the housing while pumping the gas from the lower pressure inlet region to the higher pressure outlet region. The housing 12 has a least one liquid inlet 20 to admit a sealing liquid to seal the working chambers. The intermeshing screws 18 comprise Quimby-type screws.
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公开(公告)号:US20160097390A1
公开(公告)日:2016-04-07
申请号:US14968849
申请日:2015-12-14
Applicant: Edwards Limited
Inventor: Nigel Paul Schofield , Stephen Dowdeswell
IPC: F04C18/12
CPC classification number: F04C18/126 , F01C1/084 , F01C1/126 , F01C21/08 , F04C2/084 , F04C2/126 , F04C18/084 , F04C25/02 , F04C29/0078 , F04C2230/00 , F04C2240/20 , Y10T29/49236
Abstract: The present invention relates to a rotor for a vacuum pump 150 having a roots pumping mechanism, the rotor comprising at least two hollow lobes 160, 162, 164, 166, each lobe having an outer wall 208 which defines a lobe profile, a hollow cavity 210 generally inward of the outer wall, and at least one strengthening rib 226 located in the cavity to resist stress on the lobes generated during rotation.
Abstract translation: 本发明涉及一种具有根部泵送机构的真空泵150的转子,该转子包括至少两个中空叶片160,162,164,166,每个叶片具有限定叶片轮廓的外壁208,中空腔 210以及位于空腔中的至少一个加强肋226,以抵抗旋转期间产生的凸角上的应力。
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