摘要:
First, a first electrode layer 4, a piezoelectric layer 5, a second electrode layer 6 and an oscillation layer 7 are stacked in this order over one surface of a silicon substrate 1. Next, an ink chamber partition 8 and a nozzle plate 11 are stacked over the oscillation layer 7. Subsequently, the silicon substrate 1 is ground away to a predetermined thickness from a surface thereof opposite to the first electrode layer 4, and then a remnant silicon substrate 13 is dry etched away. Thereafter, the first electrode layer 4 is patterned to form a plurality of inkjet mechanisms 2, 2, . . . . Finally, the plurality of inkjet mechanisms 2, 2, . . . are divided to simultaneously fabricate a plurality of inkjet heads 3, 3, . . . .
摘要:
A piezoelectric element includes a first electrode film; a piezoelectric layered film including a first piezoelectric thin film formed on the first electrode film and a second piezoelectric thin film formed on the first piezoelectric thin film; and a second electrode film formed on the second piezoelectric thin film. Each of the first and second piezoelectric thin films is an aggregate of columnar grains grown unidirectionally along the thickness direction of the piezoelectric layered film. The Pb content of the first piezoelectric thin film is smaller than the Pb content of the second piezoelectric thin film. A columnar grain of the second piezoelectric thin film has a larger average cross-sectional diameter than an average cross-sectional diameter of a columnar grain of the first piezoelectric thin film. A ratio of the thickness of the piezoelectric layered film to the average cross-sectional diameter of the second piezoelectric thin film is not less than 20 and not more than 60.
摘要:
A piezoelectric element includes a first electrode film; a piezoelectric layered film including a first piezoelectric thin film formed on the first electrode film and a second piezoelectric thin film formed on the first piezoelectric thin film; and a second electrode film formed on the second piezoelectric thin film. Each of the first and second piezoelectric thin films is an aggregate of columnar grains grown unidirectionally along the thickness direction of the piezoelectric layered film. The Pb content of the first piezoelectric thin film is smaller than the Pb content of the second piezoelectric thin film. A columnar grain of the second piezoelectric thin film has a larger average cross-sectional diameter than an average cross-sectional diameter of a columnar grain of the first piezoelectric thin film. A ratio of the thickness of the piezoelectric layered film to the average cross-sectional diameter of the second piezoelectric thin film is not less than 20 and not more than 60.
摘要:
A diffractive optical element according to the present invention includes: a body 1 being composed of a first optical material containing a first resin, and having a diffraction grating 2 on a surface thereof; and an optical adjustment layer 3 being composed of a second optical material containing a second resin, and provided on the body so as to cover the diffraction grating. A difference between a solubility parameter of the first resin and a solubility parameter of the second resin is 0.8 [cal/cm3]1/2 or more, and the first resin and the second resin each have a benzene ring.
摘要翻译:根据本发明的衍射光学元件包括:主体1,其由包含第一树脂的第一光学材料组成,并且在其表面上具有衍射光栅2; 以及光学调整层3,其由包含第二树脂的第二光学材料构成,并且设置在主体上以覆盖衍射光栅。 第一树脂的溶解度参数与第二树脂的溶解度参数的差为0.8 [cal / cm 3] 1/2以上,第一树脂和第二树脂各自具有苯环。
摘要:
According to a method for producing a diffraction optical element of the present invention, the center of a molding face 2 and the center of a substrate 4 are positionally aligned to each other based on a marker 3 of a prescribed shape which is formed at the center of the molding face 2 of a mold 1 and the shape of a diffraction grating 5 of the substrate 4. A nanocomposite material 9 is located between the molding face 2 and the diffraction grating 5, and the material 9 is pressed by the mold 1 and the substrate 4 to form an optical adjusting layer 10 on the diffraction grating 5.
摘要:
An image pickup apparatus includes: a lens optical system including six regions having such optical characteristics that focal characteristics are made different from one another; an image pickup device having a plurality of pixels on which light beams having passed through the lens optical system are incident; and an arrayed optical device for making light beams having passed through the six regions incident respectively on different pixels on the image pickup device.
摘要:
An image pickup apparatus includes: a lens optical system including six regions having such optical characteristics that focal characteristics are made different from one another; an image pickup device having a plurality of pixels on which light beams having passed through the lens optical system are incident; and an arrayed optical device for making light beams having passed through the six regions incident respectively on different pixels on the image pickup device.
摘要:
A second region (12) composed of a plane is formed around a first region (11) having a lens function, and a third region (13) is formed between the first region and the second region. A protection film (24) is formed on the surface of the first region 1. The first region is protruded relative to the second region, the third region is formed throughout the rim of the first region 1, and the surface of the third region is recessed relative to a virtual curved surface (11a) that is a curved surface along the surface shape of the first region being extended to the second region. Consequently, it is possible to form throughout the first region a protection film having a surface shape that substantially matches the surface shape of the first region.
摘要:
A diffractive optical element includes: a body being composed of a first optical material and having a diffraction grating on the surface thereof; and an optical adjustment layer being composed of a second optical material and provided on the body so as to cover the diffraction grating. An envelope passing through the edge of the diffraction grating presents a curved surface, and the optical adjustment layer has a uniform thickness along the normal direction from the envelope.
摘要:
A diffractive optical element according to the present invention includes: a body 1 being composed of a first optical material containing a first resin, and having a diffraction grating 2 on a surface thereof; and an optical adjustment layer 3 being composed of a second optical material containing a second resin, and provided on the body so as to cover the diffraction grating. A difference between a solubility parameter of the first resin and a solubility parameter of the second resin is 0.8 [cal/cm3]1/2 or more, and the first resin and the second resin each have a benzene ring.
摘要翻译:根据本发明的衍射光学元件包括:主体1,其由包含第一树脂的第一光学材料组成,并且在其表面上具有衍射光栅2; 以及光学调整层3,其由包含第二树脂的第二光学材料构成,并且设置在主体上以覆盖衍射光栅。 第一树脂的溶解度参数与第二树脂的溶解度参数的差为0.8 [cal / cm 3] 1/2以上,第一树脂和第二树脂各自具有苯环。