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    Laminated diffraction optical element and production method therefor
    2.
    发明授权
    Laminated diffraction optical element and production method therefor 有权
    层叠衍射光学元件及其制造方法

    公开(公告)号：US09557454B2

    公开(公告)日：2017-01-31

    申请号：US13890008

    申请日：2013-05-08

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Maiko Niwa

    IPC: G02B5/18 ,  B29D11/00

    CPC classification number: G02B5/18 ,  B29D11/00769 ,  G02B5/1852

    Abstract: A laminated diffraction optical element includes a substrate, and a resin layer provided on the substrate and including an optically effective portion and an optically non-effective outer portion adjacent to the optically effective portion. The optically non-effective outer portion in the resin layer has a continuous shape such that a layer thickness decreases when extending toward an outer periphery of the substrate. An angle formed between a straight line connecting both ends of the continuous shape and a tangent to a surface of the substrate at a point opposite to an end closer to the surface of the substrate is within a range of 20 to 60 degrees.

    Abstract translation: 层叠衍射光学元件包括基板和设置在基板上的树脂层，并且包括光学有效部分和与光学有效部分相邻的光学非有效外部部分。 树脂层中的无光学外部部分具有连续的形状，使得当朝向基板的外周延伸时，层的厚度减小。 在连接形​​状的两端的直线和与基板表面的端部相反的点的基板的表面的切线之间形成的角度在20〜60度的范围内。

    Method for producing a refractive or diffractive optical device
    3.
    发明授权
    Method for producing a refractive or diffractive optical device 有权
    屈光或衍射光学器件的制造方法

    公开(公告)号：US09529127B2

    公开(公告)日：2016-12-27

    申请号：US14352426

    申请日：2012-10-17

    Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

    Inventor： Michel Heitzmann

    IPC: G03F7/20 ,  G02B5/18 ,  G03F7/00 ,  B29D11/00 ,  G02B3/08 ,  G02B3/00

    CPC classification number: G02B5/1857 ,  B29D11/00769 ,  G02B3/08 ,  G02B5/1876 ,  G02B2003/0093 ,  G03F7/0005 ,  G03F7/0035 ,  G03F7/2002

    Abstract: A method producing a refractive or diffractive optical device, including: production, in a first layer, of at least one inclined general profile approximated by a staircase profile including plural stairsteps; production of the profile including: forming buffer patterns on the first layer and at least one sequence including: forming masking patterns, so each masking pattern includes at least one edge situated above a buffer pattern and covers at least one area of the first layer not masked by the buffer patterns, the forming the masking patterns also defining, for the first layer, plural free areas not masked by the masking patterns or by the buffer patterns; etching the free areas to form trenches in the first layer. The production of the profile also includes: removing the masking patterns, removing the buffer patterns revealing walls previously covered by the buffer patterns, and then an isotropic etching to remove the walls.

    Abstract translation: 一种产生折射或衍射光学装置的方法，包括：在第一层中生产由包括多个步骤的阶梯轮廓近似的至少一个倾斜的一般轮廓; 该简档的生成包括：在第一层上形成缓冲图案和至少一个序列，包括：形成掩模图案，因此每个掩模图案包括位于缓冲图案上方的至少一个边缘并且覆盖未被掩蔽的第一层的至少一个区域 通过缓冲器图案，形成掩蔽图案也为第一层限定未被掩蔽图案掩蔽的多个空闲区域或缓冲图案; 蚀刻自由区域以在第一层中形成沟槽。 轮廓的生产还包括：去除掩模图案，去除显示先前被缓冲图案覆盖的壁的缓冲图案，然后进行各向同性蚀刻以去除壁。

    IMPROVEMENTS IN AND RELATING TO WAVEGUIDES
    4.
    发明申请
    IMPROVEMENTS IN AND RELATING TO WAVEGUIDES 审中-公开
    对波音的改进和相关

    公开(公告)号：US20160327705A1

    公开(公告)日：2016-11-10

    申请号：US15106102

    申请日：2014-12-12

    Applicant: BAE SYSTEMS PLC

    Inventor： MICHAEL DAVID SIMMONDS ,  ANTHONY ROBERT FERNS

    IPC: G02B5/18 ,  B29D11/00 ,  G02B27/42 ,  F21V8/00 ,  G02B27/01

    CPC classification number: G02B5/1852 ,  B29D11/00663 ,  B29D11/00769 ,  B29D11/00875 ,  B29K2995/0026 ,  G02B5/1823 ,  G02B5/1847 ,  G02B6/0016 ,  G02B6/0035 ,  G02B6/0065 ,  G02B6/34 ,  G02B27/0081 ,  G02B27/0172 ,  G02B27/4272 ,  G02B2027/0125

    Abstract: A method for manufacturing a waveguide for a display apparatus comprising providing a planar optical waveguide part (20), depositing upon the optical waveguide part a fluid material (11) curable to form an optically transparent solid, impressing (30) upon the fluid material an impression defining an input diffraction grating region, an intermediate diffraction grating region and an output diffraction grating region wherein the fluid material of the intermediate diffraction grating region is continuous with the fluid material of at least the input diffraction grating region, curing (45) the impressed fluid material to solidify said impression. The physical location of the input diffraction grating is located wholly within the geographical area of the intermediate grating, and the grating vectors of the input diffraction grating and the intermediate diffraction grating are oriented in different respective directions.

    Abstract translation: 一种用于制造用于显示装置的波导的方法，包括提供平面光波导部分（20），在所述光波导部分上沉积可固化以形成光学透明固体的流体材料（11），在所述流体材料上施加（30） 定义输入衍射光栅区域的中心衍射光栅区域，中间衍射光栅区域和输出衍射光栅区域，其中中间衍射光栅区域的流体材料与至少输入衍射光栅区域的流体材料连续，固化（45） 流体材料以固化所述印象。 输入衍射光栅的物理位置完全位于中间光栅的地理区域内，输入衍射光栅和中间衍射光栅的光栅矢量在不同的方向上取向。

    Position detection apparatus, imprint apparatus, and position detection method
    8.
    发明授权
    Position detection apparatus, imprint apparatus, and position detection method 有权
    位置检测装置，压印装置和位置检测方法

    公开(公告)号：US09283720B2

    公开(公告)日：2016-03-15

    申请号：US14458063

    申请日：2014-08-12

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Ken Minoda ,  Yoshihiro Shiode ,  Kazuhiko Mishima ,  Hironori Maeda

    IPC: G01B11/14 ,  B29D11/00 ,  G03F7/00 ,  G03F9/00 ,  G01D5/38 ,  B82Y10/00 ,  B82Y40/00 ,  G02B5/18 ,  B29L11/00

    CPC classification number: B29D11/00769 ,  B29L2011/00 ,  B82Y10/00 ,  B82Y40/00 ,  G01D5/38 ,  G02B5/18 ,  G03F7/0002 ,  G03F9/7038 ,  G03F9/7049 ,  G03F9/7069 ,  G03F9/7076 ,  Y10T29/49769

    Abstract: A position detection apparatus includes an illumination optical system for illuminating a first diffraction grating having periods in each of a first direction and a second direction different from the first direction, and a second diffraction grating having a period different from the period in the second direction of the first diffraction grating in the second direction, at an oblique incidence, and a detection optical system for detecting diffracted light from the first diffraction grating and the second diffraction grating, wherein a relative position of the first diffraction grating and the second diffraction grating is detected based on the detected diffracted light, and wherein the illumination optical system includes a plurality of light intensity distributions in the first direction except for on an optical axis of the detection optical system, in a pupil plane thereof.

    Abstract translation: 位置检测装置包括照明光学系统，用于照亮具有与第一方向不同的第一方向和第二方向的周期的第一衍射光栅，以及第二衍射光栅，其周期与第二方向的周期不同 第一衍射光栅在第二方向上以倾斜入射，以及检测光学系统，用于检测来自第一衍射光栅和第二衍射光栅的衍射光，其中检测第一衍射光栅和第二衍射光栅的相对位置 基于所检测的衍射光，并且其中所述照明光学系统在其瞳面中包括除了所述检测光学系统的光轴之外的第一方向上的多个光强度分布。

    Method of manufacturing blazed diffractive grating and method of manufacturing mold for manufacturing blazed diffractive grating
    9.
    发明授权
    Method of manufacturing blazed diffractive grating and method of manufacturing mold for manufacturing blazed diffractive grating 有权
    制造闪耀衍射光栅的方法和制造闪耀衍射光栅的模具的制造方法

    公开(公告)号：US09201179B2

    公开(公告)日：2015-12-01

    申请号：US13316613

    申请日：2011-12-12

    Applicant: Takashi Sukegawa ,  Yukinobu Okura

    Inventor： Takashi Sukegawa ,  Yukinobu Okura

    IPC: G02B5/18 ,  B29D11/00

    CPC classification number: G02B5/1852 ,  B29D11/00769 ,  G02B5/1857 ,  G02B5/1861 ,  Y10T83/0304

    Abstract: A method of manufacturing a blazed diffractive grating includes a first step of forming a first groove having a first surface and a second surface by moving, in the first direction at a first position in the second direction, a cutting tool having a first cutting blade and a second cutting blade to cut the object; a second step of forming a second groove by moving, in the first direction at a second position separated from the first position in the second direction by a grating pitch, the cutting tool to cut the object; and a third step of forming a blazed surface of the first groove using the first cutting blade by moving, in the first direction at a third position between the first position and the second position, the cutting tool to cut the first surface of the first groove.

    Abstract translation: 制造闪耀衍射光栅的方法包括：第一步骤，通过沿着第二方向的第一位置沿第一方向移动具有第一表面和第二表面的第一凹槽，具有第一切割刀片的切割工具和 用于切割物体的第二切割刀片; 第二步骤，通过在与所述第二方向上的所述第一位置分离的第二位置处沿所述第一方向移动光栅间距来形成第二凹槽，所述切割工具切割所述物体; 以及第三步骤，使用所述第一切割刀片，通过在所述第一位置和所述第二位置之间的第三位置处沿所述第一方向移动所述切割工具来切割所述第一凹槽的所述第一表面，形成所述第一凹槽的闪耀表面 。

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