公开(公告)号：US20200278033A1

公开(公告)日：2020-09-03

申请号：US16647560

申请日：2018-09-11

Applicant: FUJIKIN INCORPORATED

Inventor： Kenta KONDO ,  Toshihide YOSHIDA ,  Kenji AIKAWA ,  Hidenobu SATO ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA ,  Masahiko TAKIMOTO

IPC: F16K1/52 ,  F16K31/122 ,  H01L21/67 ,  C23C16/455

Abstract: A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.

公开(公告)号：US20220025986A1

公开(公告)日：2022-01-27

申请号：US17312232

申请日：2019-12-12

Applicant: FUJIKIN INCORPORATED

Inventor： Akihiro HARADA ,  Kenji AIKAWA

IPC: F16K27/00

Abstract: A fluid control device includes; upstream side and downstream side joint blocks defining a fluid flow path, and having engaging portions at a bottom surface side; a support member having a guide portion to which the engaging portions of the upstream side and downstream side joint blocks can be engaged; and a fluid device supported by the support member via the upstream side and the downstream side joint blocks; wherein the upstream side and the downstream side joint blocks are fixed to the guide portion by utilizing a reaction force against a bending force generated by the tightening force of fastening bolts to the upstream side and the downstream side joint blocks and the fluid device connected together, and the length of the engaging portions in the longitudinal direction of the joint blocks is formed shorter than the length of the joint blocks.

公开(公告)号：US20210388914A1

公开(公告)日：2021-12-16

申请号：US17284830

申请日：2019-10-21

Applicant: FUJIKIN INCORPORATED

Inventor： Kenji AIKAWA ,  Takahiro MATSUDA ,  Akihiro HARADA ,  Kazunari WATANABE ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K27/00 ,  H01L21/67

Abstract: A valve device has a structure more suitable for miniaturization and integration and is used for a semiconductor manufacturing process or the like. A valve device includes: a valve body which is accommodated in an accommodation recess and has a first port and a second port in a bottom surface; and a bonnet nut which has a screw portion formed on an outer periphery thereof and is screwed with the inner periphery of the accommodation recess to press the valve body toward the bottom of the accommodation recess to fix the valve body onto a flow path block. The valve body has first and second annular protrusions for sealing which are formed around the first port and the second port and protrude from a bottom surface. The first and the second annular protrusions are formed so as to share a part thereof.

公开(公告)号：US20210132638A1

公开(公告)日：2021-05-06

申请号：US17038459

申请日：2020-09-30

Applicant: FUJIKIN INCORPORATED

Inventor： Kenji AIKAWA ,  Takahiro MATSUDA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Yuta MOTEGI ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: G05D7/06 ,  H01L21/67

Abstract: A fluid control device includes a first block row and a second block row each including a plurality of joint blocks having a width of the standard size and arranged along a first directions, the first block row and the second block row being arranged at predetermined intervals in the second directions perpendicular to the first directions, wherein each of the plurality of joint blocks constituting the first block row has a large diameter flow path for forming a single line, and each of the plurality of joint blocks constituting the second block row has a smaller diameter flow path than the large diameter flow path for forming the first line and the second line.

公开(公告)号：US20210131583A1

公开(公告)日：2021-05-06

申请号：US17038440

申请日：2020-09-30

Applicant: FUJIKIN INCORPORATED

Inventor： Takahiro MATSUDA ,  Kenji AIKAWA ,  Toshiyuki INADA ,  Kazunari WATANABE ,  Yuta MOTEGI ,  Tomohiro NAKATA ,  Tsutomu SHINOHARA

IPC: F16K31/126 ,  F16K11/02

Abstract: A valve device includes: a body having a substantially block shape in which first and second valve chambers are recessed from an upper surface, and three flow paths communicating with the first valve chamber and three flow paths communicating with the second valve chamber are formed inside the body; first and second valve members disposed in the first and second valve chambers, respectively, to switch between communication and disconnection between one of the three flow paths and the other two flow paths; and first and second actuators for respectively driving the first and second valve members, wherein the other two flow paths communicating with the each of valve chambers have respective ports on the lower surface of the body, while the one flow path has a common port on the lower surface of the body.

公开(公告)号：US20200340591A1

公开(公告)日：2020-10-29

申请号：US16757172

申请日：2018-10-24

Applicant: FUJIKIN INCORPORATED

Inventor： Kazunari WATANABE ,  Kohei SHIGYOU ,  Kenji AIKAWA ,  Tomohiro NAKATA ,  Takahiro MATSUDA ,  Tsutomu SHINOHARA

IPC: F16K7/16 ,  F16K27/02

Abstract: A flow path assembly incorporating functional components, such as orifices and filters, is provided in which gaps between the functional components and the flow path components defining the flow path are sealed for an extended period of time. An annular elastic member interposed between the flow path members is provided outside the opposing surfaces of the flow path members, the flow path member has a caulking portion, the caulking portion integrates the flow path members and the plate-like member, exerts a force on the flow path member such that one of the opposing surfaces faces the other of the opposing surfaces, seals the gaps between the orifice plate and the opposing surfaces, and the elastic member is crushed between the flow path members to seal the gap between the flow path members.

公开(公告)号：US20200149639A1

公开(公告)日：2020-05-14

申请号：US16625875

申请日：2018-06-12

Applicant: FUJIKIN INCORPORATED

Inventor： Kenji AIKAWA ,  Tsutomu SHINOHARA ,  Takahiro MATSUDA

IPC: F16K7/17 ,  F16K47/00 ,  F16F15/00 ,  F16F15/073 ,  H01L41/04 ,  H01L41/08

Abstract: To provide a gas-driven type valve device that is capable of mounting various electronic devices, and includes a power generation function that solves problems involving wiring or battery replacement. The problem is solved by a valve device including an actuator including a housing part, and a movable part housed in the housing part and driven by a driving fluid to move a valve element in a closing direction or an opening direction, a spring member that presses the movable part in a direction against a driving force of the driving fluid, and a power-generating and vibration-damping unit including that uses a piezoelectric effect of a piezoelectric element to exercise a power generation function of converting a vibration generated in a vibration system by an activation of the actuator into electric power, and a vibration-damping function of suppressing a vibration applied to a device.