公开(公告)号：US20110210249A1

公开(公告)日：2011-09-01

申请号：US13036757

申请日：2011-02-28

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J2237/0492 ,  H01J2237/05 ,  H01J2237/24475 ,  H01J2237/24495 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: A transmission electron microscope in which a sample is positioned in a sample plane 9b comprises an objective lens 11b, a first projection lens system 61b having plural lenses, a second projection lens 63b system having plural lenses, and an analyzing system.The sample plane 9b is imaged into an intermediate image plane 71, a diffraction plane 15b of the objective lens 11b is imaged into an intermediate diffraction plane 67b, and either a) the intermediate image plane is imaged into an entrance image plane of the analyzing system and the intermediate diffraction plane is imaged into an entrance pupil plane of the analyzing system, or b) the intermediate image plane 71 is imaged into the entrance pupil plane 65b and the intermediate diffraction plane 67b is imaged into the entrance image plane 21b.

Abstract translation: 样品位于样品平面9b中的透射电子显微镜包括物镜11b，具有多个透镜的第一投影透镜系统61b，具有多个透镜的第二投影透镜63b系统和分析系统。 将样品平面9b成像为中间像面71，将物镜11b的衍射面15b成像为中间衍射面67b，将中间像平面成像为分析系统的入射像面 中间衍射面成像为分析系统的入射光瞳面，或者b）将中间像面71成像为入射光瞳面65b，将中间衍射面67b成像为入射像面21b。

公开(公告)号：US07902506B2

公开(公告)日：2011-03-08

申请号：US12070055

申请日：2008-02-14

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的物品束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US06531698B1

公开(公告)日：2003-03-11

申请号：US09668497

申请日：2000-09-22

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J3726

CPC classification number: H01J37/04 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/2802

Abstract: The invention relates to a particle-optic illuminating and imaging system with a condenser-objective single field lens (5) and a simple illuminating system which has only two condenser lenses (3, 4). The variation of the size of the illuminated field takes place exclusively by a change of the excitation of the source-side condenser lens (3). The objective-side second condenser lens (4) always has a constant excitation in the TEM mode. The excitation of the source-side condenser lens (3) is the greatest for maximum illuminating field diameter, and on the contrary is reduced for smaller illuminating field diameters. In TEM operation, two crossovers always exist in the illuminating beam path, of which the second is situated between the focal plane of the condenser-objective single field lens and the specimen plane (6).

Abstract translation: 本发明涉及一种具有冷凝物镜单场透镜（5）和仅具有两个聚光透镜（3,4）的简单照明系统的颗粒光学照明和成像系统。 照明场的大小的变化仅通过源侧聚光透镜（3）的激发的改变而发生。 目标侧第二聚光透镜（4）在TEM模式中总是具有恒定的激发。 源侧聚光透镜（3）的激发对于最大照明场直径是最大的，相反，减小了较小的照明场直径。 在TEM操作中，两个交叉点总是存在于照明光束路径中，其中第二个位于冷凝器目标单场透镜的焦平面和样本平面（6）之间。

公开(公告)号：US5519216A

公开(公告)日：1996-05-21

申请号：US296678

申请日：1994-08-26

Applicant: Gerd Benner ,  Josef Frey ,  Martin Ross-Messemer ,  Eugen Weimer

Inventor： Gerd Benner ,  Josef Frey ,  Martin Ross-Messemer ,  Eugen Weimer

IPC: H01J37/22 ,  H01J37/248 ,  H01J37/26 ,  H01J37/15

CPC classification number: H01J37/265 ,  H01J2237/30411 ,  H01J2237/30433

Abstract: The invention is directed to an electron-optical imaging system such as for an electron microscope. The imaging system has magnetic lenses, current and voltage sources corresponding thereto, a computer, a permanent memory and a touch panel. The electron microscope is manually calibrated when first taken into use by a discrete sequence of different operating conditions. Polynomes of the second degree are adapted to the experimentally calibrated parameter values for the lens currents. The computer polynome coefficients are stored in a permanent memory. Operating states are adjustable via the touch panel on the operating console of the electron microscope. These operating states lie between the calibrated operating states. The lens currents necessary for these operating states are computed in the computer based on the function coefficients stored in the memory and are subsequently emitted to the current sources by the computer. The step width in which the operating states are adjustable is preselectable via the keyboard independently of the position of the calibrated operating conditions.

Abstract translation: 本发明涉及电子显微镜等电子光学成像系统。 成像系统具有磁性透镜，对应于其的电流和电压源，计算机，永久存储器和触摸面板。 当通过不同操作条件的离散序列首次使用时，电子显微镜被手动校准。 第二度的多义性适用于透镜电流的实验校准参数值。 计算机多项式系数存储在永久存储器中。 操作状态可通过电子显微镜操作台上的触摸面板进行调节。 这些操作状态位于校准的操作状态之间。 这些操作状态所需的镜头电流在计算机中基于存储在存储器中的功能系数来计算，随后由计算机发射到当前的源。 可以通过键盘预先选择操作状态可调节的台阶宽度，而与校准的操作条件的位置无关。

公开(公告)号：US08598526B2

公开(公告)日：2013-12-03

申请号：US13036757

申请日：2011-02-28

Applicant: Gerd Benner

Inventor： Gerd Benner

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J2237/0492 ,  H01J2237/05 ,  H01J2237/24475 ,  H01J2237/24495 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: A transmission electron microscope in which a sample is positioned in a sample plane 9b comprises an objective lens 11b, a first projection lens system 61b having plural lenses, a second projection lens 63b system having plural lenses, and an analyzing system.The sample plane 9b is imaged into an intermediate image plane 71, a diffraction plane 15b of the objective lens 11b is imaged into an intermediate diffraction plane 67b, and either a) the intermediate image plane is imaged into an entrance image plane of the analyzing system and the intermediate diffraction plane is imaged into an entrance pupil plane of the analyzing system, or b) the intermediate image plane 71 is imaged into the entrance pupil plane 65b and the intermediate diffraction plane 67b is imaged into the entrance image plane 21b.

Abstract translation: 样品位于样品平面9b中的透射电子显微镜包括物镜11b，具有多个透镜的第一投影透镜系统61b，具有多个透镜的第二投影透镜63b系统和分析系统。 将样品平面9b成像为中间像面71，将物镜11b的衍射面15b成像为中间衍射面67b，将中间像平面成像为分析系统的入射像面 中间衍射面成像为分析系统的入射光瞳面，或者b）将中间像面71成像为入射光瞳面65b，将中间衍射面67b成像为入射像面21b。

公开(公告)号：US08541739B2

公开(公告)日：2013-09-24

申请号：US13190871

申请日：2011-07-26

Applicant: Gerd Benner ,  Harald Niebel

Inventor： Gerd Benner ,  Harald Niebel

IPC: G01N23/20 ,  G21K1/10

CPC classification number: H01J37/295 ,  G01N23/20058

Abstract: A charged particle beam system for performing precession diffraction includes a lens 11 for focusing a beam 5 in an object plane 9, and an objective lens 13 having a diffraction plane 27. A doublet 53 of lenses 35, 63 images the diffraction plane 27 into an intermediate diffraction plane 69 where a multipole 55 is located. A doublet 57 of lenses 65, 93 images the intermediate diffraction plane 69 into an intermediate diffraction plane 71 where a multipole 59 is located. A first deflection system 15 upstream of the object plane 9 can tilt to change an angle of incidence of the beam on the object plane. A second deflection system 37 between lenses 35 and 63 tilts the beam such that the change of the angle of incidence of the charged particle beam on the object plane is compensated.

Abstract translation: 用于进行进动衍射的带电粒子束系统包括用于将光束5聚焦在物平面9中的透镜11和具有衍射平面27的物镜13.透镜35,63的双折射53将衍射平面27成像为 中间衍射平面69，其中多极55位于其中。 透镜65,93的双重透镜57将中间衍射平面69成像为多极59所在的中间衍射平面71。 在物平面9上游的第一偏转系统15可以倾斜以改变光束在物平面上的入射角。 透镜35和63之间的第二偏转系统37使光束倾斜，使得补偿了物体平面上的带电粒子束的入射角的变化。

公开(公告)号：US08471203B2

公开(公告)日：2013-06-25

申请号：US12756455

申请日：2010-04-08

Applicant: Gerd Benner ,  Matthias Langer

Inventor： Gerd Benner ,  Matthias Langer

IPC: G01N23/00

CPC classification number: H01J37/244 ,  H01J37/09 ,  H01J37/153 ,  H01J37/263 ,  H01J2237/1534 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/262 ,  H01J2237/28

Abstract: A particle beam microscope includes an illumination system generating a particle beam having a ring-shaped conical configuration. A selective detection system is configured to selectively detect one of two groups of particles having traversed the object region. The first group of particles includes the particles that traversed the object region un-scattered or scattered by a small scattering amount. The second group of particles includes particles scattered in the object region by a greater scattering amount.

Abstract translation: 粒子束显微镜包括产生具有环形锥形构造的粒子束的照明系统。 选择性检测系统被配置为选择性地检测穿过对象区域的两组颗粒中的一个。 第一组粒子包括通过小散射量穿过物体区域而不散射或散射的粒子。 第二组颗粒包括在物体区域散射较大散射量的颗粒。

公开(公告)号：US08436302B2

公开(公告)日：2013-05-07

申请号：US13462140

申请日：2012-05-02

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US08330105B2

公开(公告)日：2012-12-11

申请号：US13274066

申请日：2011-10-14

Applicant: Gerd Benner ,  Marko Matijevic

Inventor： Gerd Benner ,  Marko Matijevic

IPC: G21K7/00

CPC classification number: H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

Abstract: A phase contrast electron microscope has an objective with a back focal plane, a first diffraction lens, which images the back focal plane of the objective magnified into a diffraction intermediate image plane, a second diffraction lens whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective having a back focal plane, a first diffraction lens, a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane of the objective.

Abstract translation: 相位对比电子显微镜具有后焦面的目的，第一衍射透镜，其将物镜的后焦平面成像成衍射中间像平面，第二衍射透镜的主平面安装在 衍射中间像平面和安装在衍射中间像平面附近的相移元件。 此外，相位对比电子显微镜具有安装在衍射中间像平面附近或附近的具有后焦平面，第一衍射透镜，第一相移元件和第二相移元件的物镜。 第一衍射透镜将物镜的后焦平面成像成放大为衍射中间像平面，第一相移元件安装在物镜的后焦平面上。

公开(公告)号：US20100258719A1

公开(公告)日：2010-10-14

申请号：US12756455

申请日：2010-04-08

Applicant: Gerd Benner ,  Matthias Langer

Inventor： Gerd Benner ,  Matthias Langer

IPC: G01N23/00 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/09 ,  H01J37/153 ,  H01J37/263 ,  H01J2237/1534 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/262 ,  H01J2237/28

Abstract: A particle beam microscope includes an illumination system generating a particle beam having a ring-shaped conical configuration. A selective detection system is configured to selectively detect one of two groups of particles having traversed the object region. The first group of particles includes the particles that traversed the object region un-scattered or scattered by a small scattering amount. The second group of particles includes particles scattered in the object region by a greater scattering amount.

Abstract translation: 粒子束显微镜包括产生具有环形锥形构造的粒子束的照明系统。 选择性检测系统被配置为选择性地检测穿过对象区域的两组颗粒中的一个。 第一组粒子包括通过小散射量穿过物体区域而不散射或散射的粒子。 第二组颗粒包括在物体区域散射较大散射量的颗粒。