公开(公告)号：US11567260B1

公开(公告)日：2023-01-31

申请号：US17501508

申请日：2021-10-14

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Won Suk Lee ,  Lin Jiang ,  Colleen Meagher

IPC: G02B6/122 ,  G02B6/36 ,  H01L31/0232

Abstract: Structures including an optical component and methods of forming a structure including an optical component. The structure includes an optical component on a substrate, and a back-end-of-line stack including multiple metal levels. Each of the metal levels includes a dielectric layer and metal features positioned over the optical component as metal fill in the dielectric layer. The metal features in at least two of the metal levels are arranged to overlap such that the optical component is fully covered normal to the substrate.

公开(公告)号：US20230003937A1

公开(公告)日：2023-01-05

申请号：US17363846

申请日：2021-06-30

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth Giewont

IPC: G02B6/125 ,  G02F1/01

Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

公开(公告)号：US11353651B2

公开(公告)日：2022-06-07

申请号：US17087182

申请日：2020-11-02

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Abdelsalam A. Aboketaf ,  Won Suk Lee ,  Yusheng Bian

IPC: G02B6/24 ,  G02B6/028 ,  G02B6/122 ,  G02B6/12

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to multi-mode optical waveguide structures with isolated absorbers and methods of manufacture. The structure includes: a waveguide structure including tapered segments; and at least one isolated waveguide absorber adjacent to the waveguide structure along its length.

公开(公告)号：US20240103221A1

公开(公告)日：2024-03-28

申请号：US17952969

申请日：2022-09-26

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Won Suk Lee

IPC: G02B6/122 ,  G02B6/13

CPC classification number: G02B6/1228 ,  G02B6/13 ,  G02B2006/12061

Abstract: Structures for an optical coupler and methods of forming a structure for an optical coupler. The structure comprises a stacked waveguide core including a first waveguide core and a second waveguide core. The first waveguide core includes a first tapered section, and the second waveguide core includes a second tapered section positioned to overlap with the first tapered section. The structure further comprises a third waveguide core including a third tapered section positioned adjacent to the first tapered section of the first waveguide core and the second tapered section of the second waveguide core.

公开(公告)号：US11610839B2

公开(公告)日：2023-03-21

申请号：US16666808

申请日：2019-10-29

Applicant: GLOBALFOUNDRIES U.S. INC.

Inventor： Tung-Hsing Lee ,  Teng-Yin Lin ,  Frank W. Mont ,  Edward J. Gordon ,  Asmaa Elkadi ,  Alexander Martin ,  Won Suk Lee ,  Anvitha Shampur

IPC: H01L23/522 ,  H01L49/02 ,  H01F27/28 ,  H01F27/24 ,  H01F41/04

Abstract: The present disclosure relates to semiconductor structures and, more particularly, to dummy fill structures and methods of manufacture. The structure includes: a passive device formed in interlevel dielectric material; and a plurality of metal dummy fill structures composed of at least one main branch and two extending legs from at least one side of the main branch, the at least two extending legs being positioned and structured to suppress eddy currents of the passive device.

公开(公告)号：US11555964B1

公开(公告)日：2023-01-17

申请号：US17363846

申请日：2021-06-30

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Michal Rakowski ,  Petar I. Todorov ,  Yusheng Bian ,  Won Suk Lee ,  Asif J. Chowdhury ,  Kenneth J. Giewont

IPC: G02B6/125 ,  G02F1/01 ,  G02B6/136 ,  G02B6/12

Abstract: Disclosed is a photonic structure and associated method. The structure includes a closed-curve waveguide having a first height, as measured from the top surface of an insulator layer, and an outer curved sidewall that extends essentially vertically the full first height (e.g., to minimize signal loss). The structure includes a closed-curve thermal coupler and a heating element. The closed-curve thermal coupler is thermally coupled to and laterally surrounded by the closed-curve waveguide and has a second height that is less than the first height. In some embodiments, the closed-curve waveguide and the closed-curve thermal coupler are continuous portions of the same semiconductor layer having different thicknesses. The heating element is thermally coupled to the closed-curve thermal coupler and thereby indirectly thermally coupled to the closed-curve waveguide. Thus, the heating element is usable for thermally tuning the closed-curve waveguide via the closed-curve thermal coupler to minimize any temperature-dependent resonance shift (TDRS).

公开(公告)号：US20220252784A1

公开(公告)日：2022-08-11

申请号：US17170203

申请日：2021-02-08

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Alec Hammond ,  Yusheng Bian ,  Michal Rakowski ,  Won Suk Lee ,  Asif J. Chowdhury ,  Roderick A. Augur ,  Abdelsalam Aboketaf

IPC: G02B6/12 ,  G02B6/13 ,  G02B1/00

Abstract: Structures for a wavelength-division multiplexing filter and methods of forming a structure for a wavelength-division multiplexing filter. The structure includes a first slab having a first perimeter, a first waveguide core coupled to the first slab, and a plurality of second waveguide cores coupled to the first slab. A second slab is positioned to overlap with the first slab. The second slab includes a second perimeter and openings that are distributed inside the second perimeter. The openings of the second slab penetrate through the second slab.

公开(公告)号：US11329087B2

公开(公告)日：2022-05-10

申请号：US16829553

申请日：2020-03-25

Applicant: GLOBALFOUNDRIES U.S. Inc.

Inventor： Yusheng Bian ,  Michel Rakowski ,  Won Suk Lee ,  Asif Chowdhury ,  Ajey Poovannummoottil Jacob

IPC: H01L27/146 ,  H01L31/101 ,  H01L31/0232

Abstract: Structures for a photodetector and methods of fabricating a structure for a photodetector. The structure includes a light-absorbing region having a side edge, an anode adjacent to the side edge of the light-absorbing region, and a cathode adjacent to the side edge of the light-absorbing region.

公开(公告)号：US20240393625A1

公开(公告)日：2024-11-28

申请号：US18201583

申请日：2023-05-24

Applicant: GlobalFoundries U.S. Inc.

Inventor： Sujith Chandran ,  Yusheng Bian ,  Won Suk Lee

IPC: G02F1/01

Abstract: Structures for a thermo-optic phase shifter and methods of forming a thermo-optic phase shifter. The structure comprises a semiconductor substrate, and a heater including a first resistive heating element, a second resistive heating element, and a slab layer connecting the first resistive heating element to the second resistive heating element. The first resistive heating element and the second resistive heating element have a first thickness, and the slab layer has a second thickness that is less than the first thickness. The structure further comprises a waveguide core including a portion that is laterally positioned between the first resistive heating element and the second resistive heating element. The slab layer of the heater is disposed between the portion of the waveguide core and the semiconductor substrate.

公开(公告)号：US20240126013A1

公开(公告)日：2024-04-18

申请号：US18046189

申请日：2022-10-13

Applicant: GlobalFoundries U.S. Inc.

Inventor： Yusheng Bian ,  Won Suk Lee ,  Andreas D. Stricker

IPC: G02B6/126 ,  G02B6/122

CPC classification number: G02B6/126 ,  G02B6/1228

Abstract: A structure includes a polarization device such as a polarization splitter, a polarization combiner or a polarization splitter rotator including a waveguide having a light absorber at an end section with an at least hook shape, e.g., it can be hooked or spiral shape. The structure also includes another waveguide adjacent the stated waveguide. The hook or spiral shape acts as a light absorber that reduces undesired optical noise such as excessive light insertion loss and/or light scattering. The hook or spiral shape may also be used on supplemental waveguides used to further filter and/or refine an optical signal in one of the waveguides of the polarization device, e.g., downstream of an output section of the polarization splitter and/or rotator.