Capacitive Device and Piezoelectric Device
    11.
    发明申请

    公开(公告)号:US20200070205A1

    公开(公告)日:2020-03-05

    申请号:US16534012

    申请日:2019-08-07

    Applicant: Hitachi, Ltd.

    Abstract: A capacitive device includes a unit cell including a CMUT, and a transmission/reception plate for impedance matching which is provided above the unit cell via a connection portion, in which a membrane of the CMUT constituting the unit cell is connected to the transmission/reception plate via the connection portion having an area smaller than that of the transmission/reception plate. The area of the transmission/reception plate is desirably larger than the area of a hollow portion of the CMUT.

    ULTRASONIC EXAMINATION DEVICE AND ULTRASONIC PROBE

    公开(公告)号:US20190321000A1

    公开(公告)日:2019-10-24

    申请号:US16245605

    申请日:2019-01-11

    Applicant: HITACHI, LTD.

    Abstract: Performance of an ultrasonic examination device, which includes an ultrasonic sensor of a capacitance detection type including a cavity between electrodes and vibrating a membrane, is enhanced. A cell which is a capacitive type device provided with a lower electrode, a cavity, and an upper electrode in a membrane, which are stacked in a longitudinal direction, and a condenser provided with the lower electrode and an upper electrode which are stacked in the longitudinal direction, are formed in one semiconductor chip. The cell and the condenser are connected to each other in parallel, and, when ultrasonic waves are transmitted and received using the cell, connection between a DC bias power source and the semiconductor chip is blocked, and a direct current voltage is applied to the cell from the condenser.

    ULTRASONIC TRANSDUCER, MANUFACTURING METHOD THEREOF, AND ULTRASONIC IMAGING DEVICE

    公开(公告)号:US20190118222A1

    公开(公告)日:2019-04-25

    申请号:US16090948

    申请日:2017-07-07

    Applicant: HITACHI, LTD.

    Abstract: An ultrasonic transducer includes: a hollow portion 110 formed between insulating films 104 and 106 interposed between a lower electrode 103 and an upper electrode 107 above a substrate 101; and a membrane 120 that is configured of insulating films 106, 108, 111, and 112 and the upper electrode 107 above the hollow portion 110 and vibrates at a time of transmission/reception of ultrasonic wave. Also, the hollow portion 110 has a cross-sectional shape according to which a relationship of h1>h2>0 is established when a thickness of a center portion is given as h1 and a thickness of an outer peripheral portion is given as h2.

    Device Designing Method and Device Designing Apparatus

    公开(公告)号:US20180273378A1

    公开(公告)日:2018-09-27

    申请号:US15765206

    申请日:2016-03-18

    Applicant: Hitachi, Ltd.

    Abstract: Provided is a technology that enables the shortening of the designing period. A device designing method includes a step of extracting a structure compatible with requested characteristics from a database in which each structure of a device is associated with characteristics and a step of outputting the extracted structure and a tuning parameter for adjusting the structure into ranges of the requested characteristics. In regard to each structure parameter determining the structure of the device, characteristics obtained by performing a simulation while exhaustively changing the structure parameter in a manufacturable range and the structure parameter used for the simulation are stored in the database while being associated with each other.

    ULTRASOUND PROBE, PERFORMANCE EVALUATION METHOD THEREFOR, AND ULTRASOUND DIAGNOSTIC EQUIPMENT

    公开(公告)号:US20170156696A1

    公开(公告)日:2017-06-08

    申请号:US15325489

    申请日:2015-06-19

    Applicant: Hitachi, Ltd.

    Abstract: Technique that enables precisely measuring cavity height and precisely grasping maximum transmission sound pressure in an ultrasonic probe is provided to the ultrasonic probe using CMUT. The ultrasonic probe according to the present invention includes plural cells each of which includes a lower electrode and an upper electrode arranged via a gap with respect to the lower electrode, and the plural cells include an ultrasonic cell the gap of which is void and which transmits/receives an ultrasonic wave and a reference cell the gap of which is filled with a conductive material. Electrostatic capacity of the ultrasonic cell and the reference cell is measured, parasitic capacity included in the measured electrostatic capacity as to the ultrasonic cell is corrected using parasitic capacity included in the measured electrostatic capacity as to the reference cell, and cavity height is calculated on the basis of the corrected electrostatic capacity of the ultrasonic cell.

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