Stripping method and stripping solution
    13.
    发明授权
    Stripping method and stripping solution 有权
    剥离方法和剥离溶液

    公开(公告)号:US08333869B2

    公开(公告)日:2012-12-18

    申请号:US13077481

    申请日:2011-03-31

    IPC分类号: B32B38/10

    摘要: A method for stripping a wafer from a supporting plate to which the wafer is adhered via an adhesive agent, wherein the supporting plate has a through hole penetrating the supporting plate in a thickness direction thereof, the method including dissolving the adhesive agent with a stripping solution by contacting the stripping solution with the adhesive agent via the through hole. The adhesive agent has a hydrocarbon resin as a viscous component, and the stripping solution is a hydrocarbon-based solvent having a viscosity of 1.3 mPa·s or less and a dissolving rate of 30 nm/sec or greater to dissolve the adhesive agent.

    摘要翻译: 一种通过粘合剂从晶片附着的支撑板剥离晶片的方法,其中支撑板具有在其厚度方向上穿透支撑板的通孔,该方法包括用粘合剂溶解剥离溶液 通过通孔使剥离溶液与粘合剂接触。 粘合剂具有作为粘性成分的烃树脂,剥离液是粘度为1.3mPa·s以下,溶解速度为30nm / sec以上的烃类溶剂,以溶解粘合剂。

    ADHESIVE COMPOSITION
    15.
    发明申请
    ADHESIVE COMPOSITION 审中-公开
    粘合剂组合物

    公开(公告)号:US20120073741A1

    公开(公告)日:2012-03-29

    申请号:US13375163

    申请日:2010-05-20

    摘要: An adhesive composition for forming an adhesive layer for temporarily fixing a substrate, such as a wafer, to a support when processing the substrate, the adhesive composition including a resin (A) produced by polymerizing a monomer component containing a cycloolefin-based monomer, at least one terpene-based resin, rosin-based resin, or petroleum resin (resin B), and an organic solvent capable of dissolving the resins (A) and (B). The resin (A) has a glass transition point of 60° C. or higher, the resin (B) has a softening point of 80 to 160° C. and a molecular weight of 300 to 3000, and the blending ratio of the resin (A) to the resin (B) is (A):(B)=80:20 to 55:45 (mass ratio).

    摘要翻译: 一种粘合剂组合物,用于在加工基材时,将诸如晶片的基材临时固定到载体上的粘合剂层,所述粘合剂组合物包括通过将含有环烯烃类单体的单体组分聚合而制备的树脂(A) 至少一种萜烯系树脂,松香系树脂,石油树脂(树脂B)和能够溶解树脂(A)和(B)的有机溶剂。 树脂(A)的玻璃化转变点为60℃以上,树脂(B)的软化点为80〜160℃,分子量为300〜3000,树脂 (A)与树脂(B)的摩尔比为(A):(B)= 80:20〜55:45(质量比)。

    Heat treatment method
    16.
    发明授权
    Heat treatment method 有权
    热处理方法

    公开(公告)号:US08088448B2

    公开(公告)日:2012-01-03

    申请号:US12950203

    申请日:2010-11-19

    IPC分类号: B05D3/02

    摘要: An adhesive composition of the present invention contains, as a main composition, a polymer obtained by copolymerizing a monomer composition containing a monomer having a maleimide group, and further contains a thermal polymerization inhibitor. As a result, it is possible to provide an adhesive composition that allows forming an adhesive layer that is excellently dissolved after the adhesive layer has been subjected to a high-temperature process.

    摘要翻译: 本发明的粘合剂组合物含有通过使含有具有马来酰亚胺基团的单体的单体组合物共聚而得到的聚合物,并且还含有热聚合抑制剂。 结果,可以提供一种粘合剂组合物,其能够在粘合剂层经受高温处理之后形成粘合剂层,其优异地溶解。