公开(公告)号：US20210296080A1

公开(公告)日：2021-09-23

申请号：US17207184

申请日：2021-03-19

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Hiroshi OBA ,  Yasuhiko SUGIYAMA ,  Yoshitomo NAKAGAWA ,  Koji NAGAHARA

IPC: H01J37/12 ,  H01J37/20 ,  H01J37/09 ,  H01J37/317 ,  H01J37/08 ,  H01J37/21

Abstract: Provided is a focused ion beam processing apparatus including: an ion source; a sample stage a condenser lens; an aperture having a slit in a straight line shape; a projection lens and the sample stage, wherein, in a transfer mode, by Köhler illumination, with an applied voltage of the condenser lens when a focused ion beam is focused on a main surface of the projection lens scaled to be 100, the applied voltage is set to be less than 100 and greater than or equal to 80; a position of the aperture is set such that the focused ion beam is masked by the aperture with the one side of the aperture at a distance greater than 0 μm and equal to or less than 500 μm from a center of the focused ion beam; and the shape of the slit is transferred onto the sample.

公开(公告)号：US20160225574A1

公开(公告)日：2016-08-04

申请号：US15010231

申请日：2016-01-29

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Anto YASAKA ,  Tomokazu KOZAKAI ,  Osamu MATSUDA ,  Yasuhiko SUGIYAMA ,  Kazuo AITA ,  Fumio ARAMAKI ,  Hiroshi OBA

IPC: H01J37/08

CPC classification number: H01J37/08 ,  H01J2237/0807

Abstract: Disclosed herein is a focused ion beam apparatus equipped with a gas field ion source that can produce a focused ion beam for a long period of time by stably and continuously emitting ions from the gas field ion source having high luminance, along an optical axis of an ion-optical system for a long period of time. In the focused ion beam apparatus equipped with a gas field ion source having an emitter for emitting ions, the emitter has a shape in which sharpened iridium is fixed to dissimilar wire.

Abstract translation: 本发明公开了一种配备有气体离子源的聚焦离子束装置，其可以通过从具有高亮度的气体离子源稳定且连续地发射离子而长时间地产生聚焦离子束，沿着 离子光学系统长时间使用。 在配备有具有用于发射离子的发射极的气体离子源的聚焦离子束装置中，发射体具有将锐化的铱固定在不同的线上的形状。

公开(公告)号：US20150162160A1

公开(公告)日：2015-06-11

申请号：US14591843

申请日：2015-01-07

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Anto YASAKA ,  Fumio ARAMAKI ,  Yasuhiko SUGIYAMA ,  Tomokazu KOZAKAI ,  Osamu MATSUDA

IPC: H01J27/02 ,  H01J27/26

CPC classification number: H01J27/024 ,  H01J27/26 ,  H01J37/08 ,  H01J37/3056 ,  H01J2237/0807 ,  H01J2237/182

Abstract: A focused ion beam apparatus has an ion source chamber in which is disposed an emitter for emitting ions. The surface of the emitter is formed of a precious metal, such as platinum, palladium, iridium, rhodium or gold. A gas supply unit supplies nitrogen gas to the ion source chamber so that the nitrogen gas adsorbs on the surface of the emitter. An extracting electrode is spaced from the emitter, and a voltage is applied to the extracting electrode to ionize the adsorbed nitrogen gas and extract nitrogen ions in the form of an ion beam. A temperature control unit controls the temperature of the emitter.

Abstract translation: 聚焦离子束装置具有离子源室，其中设置有用于发射离子的发射极。 发射体的表面由贵金属形成，例如铂，钯，铱，铑或金。 气体供给单元向离子源室供给氮气，使得氮气吸附在发射体的表面。 提取电极与发射极间隔开，并向提取电极施加电压，使吸附的氮气离子化，并以离子束形式提取氮离子。 温度控制单元控制发射器的温度。

公开(公告)号：US20130248732A1

公开(公告)日：2013-09-26

申请号：US13845582

申请日：2013-03-18

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Tatsuya ASAHATA ,  Yasuhiko SUGIYAMA ,  Hiroshi OBA

IPC: H01J37/10

CPC classification number: H01J37/10 ,  H01J37/302 ,  H01J37/3056 ,  H01J2237/0206 ,  H01J2237/04924 ,  H01J2237/216 ,  H01J2237/24535 ,  H01J2237/31749

Abstract: An ion beam apparatus including: an ion source configured to emit an ion beam; a condenser lens electrode configured to condense the ion beam; a condenser lens power source configured to apply a voltage to the condenser lens electrode; a storage portion configured to store, a first voltage value, a second voltage value, a third voltage value, and a fourth voltage value; and a control portion configured to retrieve the third voltage value from the storage portion and set the retrieved third voltage value to the condenser lens power source when an observation mode is switched to a wide-range observation mode, and retrieve the fourth voltage value from the storage portion and set the retrieved fourth voltage value to the condenser lens power source when a processing mode is switched to the wide-range observation mode.

Abstract translation: 一种离子束装置，包括：被配置为发射离子束的离子源; 配置成冷凝离子束的聚光透镜电极; 聚光透镜电源，被配置为向聚光透镜电极施加电压; 存储部，被配置为存储第一电压值，第二电压值，第三电压值和第四电压值; 以及控制部，被配置为当观察模式切换到宽范围观察模式时，从存储部分检索第三电压值，并将检索到的第三电压值设置为聚光透镜电源，并且从第 存储部分，并且当处理模式切换到宽范围观察模式时，将获取的第四电压值设置到聚光透镜电源。

公开(公告)号：US20130248483A1

公开(公告)日：2013-09-26

申请号：US13845630

申请日：2013-03-18

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Yasuhiko SUGIYAMA ,  Kazuo AITA ,  Fumio ARAMAKI ,  Tomokazu KOZAKAI ,  Osamu MATSUDA ,  Anto YASAKA

IPC: H01J9/02

CPC classification number: H01J27/02 ,  H01J1/15 ,  H01J1/3044 ,  H01J9/02 ,  H01J9/025 ,  H01J9/04 ,  H01J37/08 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/3174 ,  H01J2237/31749

Abstract: A method for fabricating a sharpened needle-like emitter, the method including: electrolytically polishing an end portion of an electrically conductive emitter material so as to be tapered toward a tip portion thereof; performing a first etching in which the electrolytically polished part of the emitter material is irradiated with a charged-particle beam to form a pyramid-like sharpened part having a vertex including the tip portion; performing a second etching in which the tip portion is further sharpened through field-assisted gas etching, while observing a crystal structure at the tip portion by a field ion microscope and keeping the number of atoms at a leading edge of the tip portion at a predetermined number or less; and heating the emitter material to arrange the atoms at the leading edge of the tip portion of the sharpened part in a pyramid shape.

Abstract translation: 一种用于制造尖锐的针状发射体的方法，该方法包括：电解抛光导电发射体材料的端部，使其朝其尖端部分逐渐变细; 进行第一蚀刻，其中用电荷粒子束照射发射体材料的电解抛光部分以形成具有包括尖端部分的顶点的棱锥状的锐化部分; 进行第二蚀刻，其中尖端部分通过场辅助气体蚀刻进一步锐化，同时通过场离子显微镜观察尖端部分处的晶体结构，并将尖端部分的前缘处的原子数保持在预定的 数量以下 并且加热发射体材料以将原子布置在尖锐部分的尖端部分的金字塔形状。