公开(公告)号：US10677697B2

公开(公告)日：2020-06-09

申请号：US16139545

申请日：2018-09-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

IPC: H01J27/10 ,  H01J37/18 ,  G01N1/32 ,  G01N1/44 ,  G01N1/28 ,  H01J37/31 ,  H01J37/317

Abstract: According to one embodiment, an automatic sample preparation apparatus includes: a charged particle beam irradiation optical system configured to perform irradiation with a charged particle beam; a sample stage configured to move with the sample placed thereon; a sample piece transfer device for holding and transferring the sample piece separated and extracted from the sample; a sample piece holder-fixing bed configured to hold a sample piece holder to which the sample piece is transferred; a gas supply portion configured to irradiate gas forming a deposition film with the charged particle beam; and a computer configured to control the charged particle beam irradiation optical system, the sample piece transfer device, and the gas supply portion to transfer and stop the sample piece held by the sample piece transfer device with a gap between the sample piece holder and the sample piece, and connect the sample piece to the sample piece holder.

公开(公告)号：US20190025167A1

公开(公告)日：2019-01-24

申请号：US16139545

申请日：2018-09-24

Applicant: Hitachi High-Tech Science Corporation

Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Makoto Sato ,  Yo Yamamoto

IPC: G01N1/44 ,  G01N1/28 ,  H01J37/31 ,  H01J37/317

Abstract: According to one embodiment, an automatic sample preparation apparatus includes: a charged particle beam irradiation optical system configured to perform irradiation with a charged particle beam; a sample stage configured to move with the sample placed thereon; a sample piece transfer device for holding and transferring the sample piece separated and extracted from the sample; a sample piece holder-fixing bed configured to hold a sample piece holder to which the sample piece is transferred; a gas supply portion configured to irradiate gas forming a deposition film with the charged particle beam; and a computer configured to control the charged particle beam irradiation optical system, the sample piece transfer device, and the gas supply portion to transfer and stop the sample piece held by the sample piece transfer device with a gap between the sample piece holder and the sample piece, and connect the sample piece to the sample piece holder.

公开(公告)号：US09275827B2

公开(公告)日：2016-03-01

申请号：US14617259

申请日：2015-02-09

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi Uemoto ,  Tatsuya Asahata ,  Hidekazu Suzuki ,  Yo Yamamoto

IPC: H01J37/20 ,  G01N1/32 ,  H01J37/18 ,  H01J37/28 ,  H01J37/22

CPC classification number: H01J37/20 ,  H01J37/023 ,  H01J37/18 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/14 ,  H01J2237/182 ,  H01J2237/206 ,  H01J2237/208 ,  H01J2237/2448 ,  H01J2237/2806 ,  H01J2237/2813 ,  H01J2237/31749

Abstract: A charged particle beam apparatus includes: a charged particle beam column; a detector configured to detect secondary charged particles; an image processor; a display device; a needle arranged in an irradiation area of charged particle beam; a needle actuator; a user interface; and a controller configured to control the needle actuator to actuate the needle in accordance with a target position that is set by the user interface. The controller controls the needle actuator to move the needle to track a change of the target position that is set by the user interface.

Abstract translation: 带电粒子束装置包括：带电粒子束柱; 检测器，被配置为检测次级带电粒子; 图像处理器; 显示装置; 布置在带电粒子束的照射区域中的针; 针式致动器; 用户界面; 以及控制器，其被配置为根据由用户界面设置的目标位置来控制针致动器致动针。 控制器控制针致动器移动针以跟踪由用户界面设置的目标位置的变化。