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公开(公告)号:US11579099B2
公开(公告)日:2023-02-14
申请号:US17037115
申请日:2020-09-29
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chun-Ting Liu , Wen-Li Wu , Bo-Ching He , Guo-Dung Chen , Sheng-Hsun Wu , Wei-En Fu
IPC: G01N23/20 , G01N23/20008 , G01N23/2206 , G01N23/223 , G01N23/2273
Abstract: This disclosure relates to an apparatus and methods for applying X-ray reflectometry (XRR) in characterizing three dimensional nanostructures supported on a flat substrate with a miniscule sampling area and a thickness in nanometers. In particular, this disclosure is targeted for addressing the difficulties encountered when XRR is applied to samples with intricate nanostructures along all three directions, e.g. arrays of nanostructured poles or shafts. Convergent X-ray with long wavelength, greater than that from a copper anode of 0.154 nm and less than twice of the characteristic dimensions along the film thickness direction, is preferably used with appropriate collimations on both incident and detection arms to enable the XRR for measurements of samples with limited sample area and scattering volumes.
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公开(公告)号:US20180342461A1
公开(公告)日:2018-11-29
申请号:US15705277
申请日:2017-09-15
Applicant: Industrial Technology Research Institute
Inventor: Chun-Ting Liu , Shih-Ming Lin , Je-Ping Hu , Jung-Shiuan Liou
IPC: H01L23/538 , H01L23/15 , H01L21/48 , H01L25/18 , H01L23/66
Abstract: A sensing system including a substrate, at least one explicit device, at least one inner operation device, a plurality of conductors, and a plurality of conductive traces is provided. The substrate has a first surface and a second surface opposite to the first surface, and has a plurality of vias communicating the first surface and the second surface. The explicit device is disposed on the first surface. The explicit device includes a display, a sensor, or a combination thereof. The inner operation device is totally disposed on the second surface. The inner operation device includes a signal processor, a driver, or a combination thereof. The conductors are disposed in the vias, respectively, and connect the at least one explicit device with the at least one inner operation device. The conductive traces are disposed on at least one of the first surface and the second surface.
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公开(公告)号:US10084135B2
公开(公告)日:2018-09-25
申请号:US14949905
申请日:2015-11-24
Applicant: Industrial Technology Research Institute
Inventor: Hsuan-Yu Lin , Hsin-Chu Chen , Wen-Hong Liu , Chao-Feng Sung , Chun-Ting Liu , Je-Ping Hu , Wen-Yung Yeh
CPC classification number: H01L51/0024 , H01L51/5203 , H01L51/5237 , H01L51/5246 , H01L51/56 , H01R12/7076 , H01R13/6205
Abstract: An illumination device includes a substrate, a light emitting structure, a sealant, and a laminating board is provided. The light emitting structure includes a first electrode layer, a light emitting layer and a second electrode layer stacked on the substrate sequentially. The sealant covers the light emitting structure. The laminating board is attached to the substrate. The sealant is located between the laminating board and the substrate. The laminating board includes a carrier body, a metal layer and a plurality of pads. The metal layer is exposed at a first surface of the carrier body, is in contact with the sealant and shields an area of the light emitting layer of the light emitting structure. The pads are exposed at the first surface of the carrier body and electrically connected to the first electrode layer and the second electrode layer. The metal layer is electrically isolated from the pads.
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公开(公告)号:US09921699B2
公开(公告)日:2018-03-20
申请号:US14937898
申请日:2015-11-11
Applicant: Industrial Technology Research Institute
Inventor: Sheng-Feng Chung , Chun-Ting Liu , Su-Tsai Lu
CPC classification number: G06F3/044 , G06F2203/04112
Abstract: In one embodiment, a conductive line structure includes a substrate and a plurality of conductive lines thereon. The substrate has a first area and a second area, and the two areas are separated by at least one borderline. The plurality of conductive lines are disposed at the first area and the second area of the substrate, respectively. The at least one borderline may be a straight line, and the conductive lines disposed at the second area are inclined relative to the at least one borderline. A sensing device using the conductive line structure is also provided.
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公开(公告)号:US09680123B2
公开(公告)日:2017-06-13
申请号:US14953430
申请日:2015-11-30
Applicant: Industrial Technology Research Institute
Inventor: Chang-Ying Chen , Hsi-Hsuan Yen , Chun-Ting Liu
CPC classification number: H01L51/5212 , H01L51/0023 , H01L51/5215 , H01L51/56 , H01L2251/5361
Abstract: A light emitting device including a substrate, a first electrode structure, an organic light emitting structure and a second electrode structure is provided. The first electrode structure includes a first transparent conductive layer, a patterned conductive layer and a second transparent conductive layer disposed on the substrate in sequence, so that the patterned conductive layer is interposed between the second transparent conductive layer and the first transparent conductive layer in a thickness direction of the substrate. The organic light emitting structure and the second electrode structure are disposed on the substrate, and the organic light emitting structure is located between the first electrode structure and the second electrode structure in the thickness direction of the substrate. An electrode structure and a manufacturing method thereof are also provided.
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16.
公开(公告)号:US20160139709A1
公开(公告)日:2016-05-19
申请号:US14937898
申请日:2015-11-11
Applicant: Industrial Technology Research Institute
Inventor: Sheng-Feng Chung , Chun-Ting Liu , Su-Tsai Lu
IPC: G06F3/044
CPC classification number: G06F3/044 , G06F2203/04112
Abstract: In one embodiment, a conductive line structure includes a substrate and a plurality of conductive lines thereon. The substrate has a first area and a second area, and the two areas are separated by at least one borderline. The plurality of conductive lines are disposed at the first area and the second area of the substrate, respectively. The at least one borderline may be a straight line, and the conductive lines disposed at the second area are inclined relative to the at least one borderline. A sensing device using the conductive line structure is also provided.
Abstract translation: 在一个实施例中,导线结构包括衬底和其上的多条导线。 衬底具有第一区域和第二区域,并且两个区域被至少一个边界线隔开。 多个导线分别设置在基板的第一区域和第二区域。 至少一个边界线可以是直线,并且布置在第二区域处的导线相对于至少一个边界线倾斜。 还提供了使用导电线结构的感测装置。
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公开(公告)号:US11867595B2
公开(公告)日:2024-01-09
申请号:US17532767
申请日:2021-11-22
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chun-Ting Liu , Wen-Li Wu , Bo-Ching He , Guo-Dung Chen , Sheng-Hsun Wu , Wei-En Fu
IPC: G01N23/20 , G01N23/20008
CPC classification number: G01N23/20 , G01N23/20008 , G01N2223/051 , G01N2223/052 , G01N2223/1003 , G01N2223/1016 , G01N2223/315 , G01N2223/611
Abstract: This disclosure relates to an apparatus and methods for applying X-ray reflectometry (XRR) in characterizing three dimensional nanostructures supported on a flat substrate with a miniscule sampling area and a thickness in nanometers. In particular, this disclosure is targeted for addressing the difficulties encountered when XRR is applied to samples with intricate nanostructures along all three directions, e.g. arrays of nanostructured poles or shafts. Convergent X-ray with long wavelength, greater than that from a copper anode of 0.154 nm and less than twice of the characteristic dimensions along the film thickness direction, is preferably used with appropriate collimations on both incident and detection arms to enable the XRR for measurements of samples with limited sample area and scattering volumes. In one embodiment, the incident angle of the long-wavelength focused X-ray is ≥24°, and the sample area is ≤25 μm×25 μm.
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公开(公告)号:US11287253B2
公开(公告)日:2022-03-29
申请号:US16730236
申请日:2019-12-30
Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Inventor: Chun-Ting Liu , Han-Yu Chang , Bo-Ching He , Guo-Dung Chen , Wen-Li Wu , Wei-En Fu
IPC: G01B15/02 , G01N23/223 , G01N23/2252
Abstract: The present disclosure relates to a device and a method for measuring a thickness of an ultrathin film on a solid substrate. The thickness of the target ultrathin film is measured from the intensity of the fluorescence converted by the substrate and leaking and tunneling through the target ultrathin film at low detection angle. The fluorescence generated from the substrate has sufficient and stable high intensity, and therefore can provide fluorescence signal strong enough to make the measurement performed rapidly and precisely. The detection angle is small, and therefore the noise ratio is low, and efficiency of thickness measurement according to the method disclosed herein is high. The thickness measurement method can be applied into In-line product measurement without using standard sample, and therefore the thickness of the product can be measured rapidly and efficiently.
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公开(公告)号:US09865671B2
公开(公告)日:2018-01-09
申请号:US15255156
申请日:2016-09-02
Applicant: Industrial Technology Research Institute
Inventor: Hsi-Hsuan Yen , Wen-Yung Yeh , Je-Ping Hu , Yuan-Shan Chung , Chih-Ming Lai , Hsuan-Yu Lin , Wen-Hong Liu , Hsin-Chu Chen , Chun-Ting Liu
IPC: H01L27/32 , H01L23/525
CPC classification number: H01L27/3276 , H01L23/5256 , H01L27/3202 , H01L27/3288 , H01L51/5203 , H01L2251/5361 , H01L2251/568
Abstract: An organic light-emitting device includes a first substrate, a light-emitting structure layer, a first electrode layer, a second electrode layer, a second substrate, first conduction members, a second conduction member and protection structures. The light-emitting structure layer is disposed on the first substrate. The first electrode layer is disposed on the light-emitting structure layer and includes pad-like patterns. The second electrode layer is disposed between the light-emitting structure layer and the first substrate. The second substrate is adhered on the first electrode layer and includes a first circuit and a second circuit. The first circuit includes a continuous pattern and contact portions. The first conduction members are connected between the first circuit and the first electrode layer. The second conduction member is connected between the second circuit and the second electrode layer. The protection structures respectively form open circuits or close circuits between the contact portions and the continuous pattern.
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