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公开(公告)号：US06998095B2
公开(公告)日：2006-02-14
申请号：US10641480
申请日：2003-08-15
Applicant: Marc R. Anderson , Michael J. West , James Tappan
Inventor： Marc R. Anderson , Michael J. West , James Tappan
IPC: B01L11/00
CPC classification number: G01N35/1097 , G01N30/24 , G01N2030/201 , G01N2030/202 , Y10T436/24
Abstract: A loop dilution system includes a dual-loop multi-way valve. In a first configuration of the multi-way valve, a first loop may be filled with a first solution and a second loop may be filled with a second solution. In a second configuration of the multi-way valve, the first and second loops are serially connected with a pump so that their contents may be mixed with a diluent. In another aspect of the invention, an in-process mass spectrometry (IPMS) system is disclosed that uses an internal standard to determine the concentration of an analyte in a sample. The internal standard has a different molecular composition than the analyte but is sufficiently similar chemically and physically to the analyte such that it behaves substantially the same as the analyte during an ionization process in the mass spectrometer.
Abstract translation: 循环稀释系统包括双回路多通阀。 在多通阀的第一构造中，可以用第一溶液填充第一回路，并且可以用第二溶液填充第二回路。 在多通阀的第二配置中，第一和第二回路与泵串联连接，使得它们的内容物可以与稀释剂混合。 在本发明的另一方面，公开了一种使用内部标准来确定样品中分析物的浓度的过程中质谱（IPMS）系统。 内标与分析物具有不同的分子组成，但与分析物的化学和物理性质充分相似，使得其在质谱仪的离子化过程中与分析物基本上相同。
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Patent Agency Ranking
12.发明申请公开(公告)号：US20120018411A1
公开(公告)日：2012-01-26
申请号：US13235961
申请日：2011-09-19
Applicant: Anthony J. Ricci , Keith Comendant , James Tappan
Inventor： Anthony J. Ricci , Keith Comendant , James Tappan
CPC classification number: H01L21/6833 , H01J37/32724 , H01J2237/20 , H01L21/67103 , H01L21/6831 , H01L2221/683 , H05B3/26 , Y10T29/49146 , Y10T29/53252 , Y10T279/23
Abstract: An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus.
Abstract translation: 用于控制基板的温度的装置具有温度控制的基座，加热器，金属板，电介质材料层。 加热器在与金属板电绝缘的同时热耦合到金属板的下侧。 第一层粘合剂材料将金属板和加热器粘合到温度受控底座的顶部表面。 该粘合剂层具有机械柔性，并具有设计用于平衡加热器的热能和外部工艺的物理性能，以在设备的表面上提供期望的温度图案。 第二层粘合剂材料将介电材料层粘合到金属板的顶表面上。 该第二粘合剂层具有设计成将期望的温度图案转移到设备的表面的物理性质。
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13.发明授权公开(公告)号：US08038796B2
公开(公告)日：2011-10-18
申请号：US11027481
申请日：2004-12-30
Applicant: Anthony J. Ricci , Keith Comendant , James Tappan
Inventor： Anthony J. Ricci , Keith Comendant , James Tappan
CPC classification number: H01L21/6833 , H01J37/32724 , H01J2237/20 , H01L21/67103 , H01L21/6831 , H01L2221/683 , H05B3/26 , Y10T29/49146 , Y10T29/53252 , Y10T279/23
Abstract: An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.
Abstract translation: 用于控制基板的温度的装置具有温度控制的基座，加热器，金属板，电介质材料层。 加热器在与金属板电绝缘的同时热耦合到金属板的下侧。 第一层粘合剂材料将金属板和加热器粘合到温度受控底座的顶部表面。 该粘合剂层具有机械柔性，并具有设计用于平衡加热器的热能和外部工艺的物理性能，以在设备的表面上提供期望的温度图案。 第二层粘合剂材料将介电材料层粘合到金属板的顶表面上。 该第二粘合剂层具有设计成将期望的温度图案转移到设备的表面的物理性质。 介电材料层形成静电夹持机构并支撑基板。
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14.发明申请公开(公告)号：US20090078360A1
公开(公告)日：2009-03-26
申请号：US12232673
申请日：2008-09-22
Applicant: Anthony J. Ricci , Keith Comendant , James Tappan
Inventor： Anthony J. Ricci , Keith Comendant , James Tappan
IPC: B32B37/14
CPC classification number: H01L21/6833 , H01J37/32724 , H01J2237/20 , H01L21/67103 , H01L21/6831 , H01L2221/683 , H05B3/26 , Y10T29/49146 , Y10T29/53252 , Y10T279/23
Abstract: An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.
Abstract translation: 用于控制基板的温度的装置具有温度控制的基座，加热器，金属板，电介质材料层。 加热器在与金属板电绝缘的同时热耦合到金属板的下侧。 第一层粘合剂材料将金属板和加热器粘合到温度受控底座的顶部表面。 该粘合剂层具有机械柔性，并具有设计用于平衡加热器的热能和外部工艺的物理性能，以在设备的表面上提供期望的温度图案。 第二层粘合剂材料将介电材料层粘合到金属板的顶表面上。 该第二粘合剂层具有设计成将期望的温度图案转移到设备的表面的物理性质。 介电材料层形成静电夹持机构并支撑基板。
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15.发明申请公开(公告)号：US20060144516A1
公开(公告)日：2006-07-06
申请号：US11027481
申请日：2004-12-30
Applicant: Anthony Ricci , Keith Comendant , James Tappan
Inventor： Anthony Ricci , Keith Comendant , James Tappan
CPC classification number: H01L21/6833 , H01J37/32724 , H01J2237/20 , H01L21/67103 , H01L21/6831 , H01L2221/683 , H05B3/26 , Y10T29/49146 , Y10T29/53252 , Y10T279/23
Abstract: An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.
Abstract translation: 用于控制基板的温度的装置具有温度控制的基座，加热器，金属板，电介质材料层。 加热器在与金属板电绝缘的同时热耦合到金属板的下侧。 第一层粘合剂材料将金属板和加热器粘合到温度受控底座的顶部表面。 该粘合剂层具有机械柔性，并具有设计用于平衡加热器的热能和外部工艺的物理性能，以在设备的表面上提供期望的温度图案。 第二层粘合剂材料将介电材料层粘合到金属板的顶表面上。 该第二粘合剂层具有设计成将期望的温度图案转移到设备的表面的物理性质。 介电材料层形成静电夹持机构并支撑基板。
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公开(公告)号：US20050036917A1
公开(公告)日：2005-02-17
申请号：US10641946
申请日：2003-08-15
Applicant: Marc Anderson , Michael West , James Tappan
Inventor： Marc Anderson , Michael West , James Tappan
CPC classification number: G01N31/02 , G01N1/34 , G01N1/4077 , H01J49/04 , Y10T436/25375
Abstract: An automated matrix removal module is configurable to automatically withdraw a portion of sample containing an interferent. The module is further configurable to mix the portion of sample with a precipitating reagent selected to react with the interferent to form a precipitant and then filter mixture of sample and precipitant reagent through a filter. Finally, the module is further configurable to flush the precipitant from the filter.
Abstract translation: 自动矩阵去除模块可配置为自动提取含有干扰物的样品的一部分。 该模块还可配置为将样品的一部分与选择的与沉淀剂反应的沉淀剂混合以形成沉淀剂，然后通过过滤器过滤样品和沉淀剂的混合物。 最后，该模块进一步可配置以从过滤器冲洗沉淀剂。
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