公开(公告)号：US08111871B2

公开(公告)日：2012-02-07

申请号：US12015903

申请日：2008-01-17

Applicant: Xin Zhang ,  Michael W. Judy ,  Kieran P. Harney ,  Jason W. Weigold

Inventor： Xin Zhang ,  Michael W. Judy ,  Kieran P. Harney ,  Jason W. Weigold

IPC: H04R11/02 ,  G01L9/00

CPC classification number: H04R19/005 ,  B81B3/0027 ,  B81B2201/0257 ,  H04R7/20 ,  H04R2307/207

Abstract: A microphone has a movable diaphragm having a rest position, a stationary portion, and a set of springs movably coupling the diaphragm and the stationary portion. The diaphragm and stationary portion are spaced a first distance when the diaphragm is in the rest position. When not in the rest position, however, the diaphragm and stationary portion are capable of being spaced a second distance, which is greater than the first distance. Despite the change in distance, the diaphragm still is capable of returning the space from the second distance to the first distance when the diaphragm returns to the rest position.

Abstract translation: 麦克风具有可移动隔膜，其具有静止位置，静止部分以及可移动地联接隔膜和固定部分的一组弹簧。 当隔膜处于静止位置时，隔膜和固定部分间隔开第一距离。 然而，当不处于静止位置时，隔膜和静止部分能够间隔第二距离，第二距离大于第一距离。 尽管距离的变化，当隔膜返回到静止位置时，隔膜仍然能够将空间从第二距离返回到第一距离。

公开(公告)号：US07885423B2

公开(公告)日：2011-02-08

申请号：US11625553

申请日：2007-01-22

Applicant: Jason W. Weigold

Inventor： Jason W. Weigold

IPC: H04R25/00

CPC classification number: H04R19/005 ,  B81B3/0037 ,  B81B3/0072 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0307 ,  H04R7/20 ,  H04R2307/201 ,  H04R2410/00 ,  H04R2499/11

Abstract: A microphone includes a diaphragm assembly supported by a substrate. The diaphragm assembly includes at least one carrier, a diaphragm, and at least one spring coupling the diaphragm to the at least one carrier such that the diaphragm is spaced from the at least one carrier. An insulator (or separate insulators) between the substrate and the at least one carrier electrically isolates the diaphragm and the substrate.

Abstract translation: 麦克风包括由基板支撑的隔膜组件。 隔膜组件包括至少一个载体，隔膜和至少一个弹簧，其将隔膜耦合到至少一个载体，使得隔膜与至少一个载体间隔开。 衬底和至少一个载体之间的绝缘体（或单独的绝缘体）电隔离隔膜和衬底。

公开(公告)号：US07863069B2

公开(公告)日：2011-01-04

申请号：US11535698

申请日：2006-09-27

Applicant: Jason W. Weigold

Inventor： Jason W. Weigold

IPC: H01L21/00

CPC classification number: B81C1/00246 ,  B81B2201/0271 ,  B81C2203/0728 ,  H03H3/0073 ,  H03H9/2431 ,  H03H2009/02354 ,  H03H2009/02503

Abstract: A method of producing an integrated MEMS resonator includes providing a substrate including single crystal silicon and partially forming a resonator in a first portion of the substrate, the resonator having a resonating element formed by the substrate and an electrode, the resonating element and the electrode forming a variable capacitor. The method also includes forming circuitry in a second portion of the substrate, the circuitry configured for detecting capacitance of the variable capacitor and finish forming the resonator and integrating the resonator with the circuitry so that the electrode is in communication with the circuitry.

Abstract translation: 一种制造集成MEMS谐振器的方法包括提供包括单晶硅的衬底并在衬底的第一部分中部分地形成谐振器，所述谐振器具有由衬底和电极形成的谐振元件，谐振元件和形成电极的电极 一个可变电容器。 该方法还包括在衬底的第二部分中形成电路，所述电路被配置用于检测可变电容器的电容并完成形成谐振器并且将谐振器与电路集成，使得电极与电路连通。

公开(公告)号：US20080175418A1

公开(公告)日：2008-07-24

申请号：US12015903

申请日：2008-01-17

Applicant: Xin Zhang ,  Michael W. Judy ,  Kieran P. Harney ,  Jason W. Weigold

Inventor： Xin Zhang ,  Michael W. Judy ,  Kieran P. Harney ,  Jason W. Weigold

IPC: H04R25/00

CPC classification number: H04R19/005 ,  B81B3/0027 ,  B81B2201/0257 ,  H04R7/20 ,  H04R2307/207

Abstract: A microphone has a movable diaphragm having a rest position, a stationary portion, and a set of springs movably coupling the diaphragm and the stationary portion. The diaphragm and stationary portion are spaced a first distance when the diaphragm is in the rest position. When not in the rest position, however, the diaphragm and stationary portion are capable of being spaced a second distance, which is greater than the first distance. Despite the change in distance, the diaphragm still is capable of returning the space from the second distance to the first distance when the diaphragm returns to the rest position.

Abstract translation: 麦克风具有可移动隔膜，其具有静止位置，静止部分以及可移动地联接隔膜和固定部分的一组弹簧。 当隔膜处于静止位置时，隔膜和固定部分间隔开第一距离。 然而，当不处于静止位置时，隔膜和静止部分能够间隔第二距离，第二距离大于第一距离。 尽管距离的变化，当隔膜返回到静止位置时，隔膜仍然能够将空间从第二距离返回到第一距离。

公开(公告)号：US08477983B2

公开(公告)日：2013-07-02

申请号：US11466669

申请日：2006-08-23

Applicant: Jason W. Weigold ,  Kieran P. Harney

Inventor： Jason W. Weigold ,  Kieran P. Harney

IPC: H04R25/00

CPC classification number: H04R1/083 ,  H04R1/406 ,  H04R19/005 ,  H04R19/04

Abstract: A microphone system implements multiple microphones on a single base. To that end, the microphone system has a base, and a plurality of substantially independently movable diaphragms secured to the base. Each of the plurality of diaphragms forms a variable capacitance with the base and thus, each diaphragm effectively forms a generally independent, separate microphone with the base.

Abstract translation: 麦克风系统在单个基座上实现多个麦克风。 为此，麦克风系统具有基座和固定到基座的多个基本可独立移动的隔膜。 多个隔膜中的每一个与基座形成可变电容，因此，每个隔膜有效地形成与基座大致独立的分开的麦克风。

公开(公告)号：US08422703B2

公开(公告)日：2013-04-16

申请号：US12981949

申请日：2010-12-30

Applicant: Jason W. Weigold

Inventor： Jason W. Weigold

IPC: H04R25/00

CPC classification number: H04R3/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81C1/00182 ,  H01L2224/48137 ,  H01L2224/49109 ,  H01L2224/73265 ,  H01L2924/15151 ,  H04R19/005 ,  H04R2499/11

Abstract: A microphone includes a diaphragm assembly supported by a substrate. The diaphragm assembly includes at least one carrier, a diaphragm, and at least one spring coupling the diaphragm to the at least one carrier such that the diaphragm is spaced from the at least one carrier. An insulator (or separate insulators) between the substrate and the at least one carrier electrically isolates the diaphragm and the substrate.

公开(公告)号：US20110165720A1

公开(公告)日：2011-07-07

申请号：US13047220

申请日：2011-03-14

Applicant: Jason W. Weigold

Inventor： Jason W. Weigold

IPC: H01L21/02

CPC classification number: H04R31/003 ,  G01L9/0042 ,  H04R7/14 ,  H04R19/005 ,  H04R19/04 ,  H04R27/00 ,  H04R31/00 ,  H04R2499/11 ,  Y10T29/43 ,  Y10T29/49005

Abstract: A microphone is formed to have a diaphragm that is configured to improve signal to noise ratio. To that end, the microphone has a backplate having a hole therethrough, and a diaphragm movably coupled with the backplate. The diaphragm has a bottom surface (facing the backplate) with a convex portion aligned with the hole in the backplate.

Abstract translation: 麦克风被形成为具有被配置为提高信噪比的隔膜。 为此，麦克风具有穿过其中的孔的背板，以及与该背板可移动地联接的隔膜。 隔膜具有与背板中的孔对准的凸部的底面（面对背板）。

公开(公告)号：US20100289097A1

公开(公告)日：2010-11-18

申请号：US12845348

申请日：2010-07-28

Applicant: Jason W. Weigold ,  John R. Martin ,  Timothy J. Brosnihan

Inventor： Jason W. Weigold ,  John R. Martin ,  Timothy J. Brosnihan

IPC: H01L29/84 ,  H01L21/30

CPC classification number: H04R19/005 ,  B81B2201/0257 ,  B81C1/00246 ,  B81C2203/0728 ,  H04R1/04 ,  H04R19/04 ,  H04R31/006

Abstract: A method of forming a microphone having a variable capacitance first deposits high temperature deposition material on a die. The high temperature material ultimately forms structure that contributes to the variable capacitance. The method then forms circuitry on the die after depositing the deposition material. The circuitry is configured to detect the variable capacitance.

Abstract translation: 形成具有可变电容的麦克风的方法首先将高温沉积材料沉积在模具上。 高温材料最终形成有助于可变电容的结构。 该方法然后在沉积沉积材料之后在管芯上形成电路。 电路被配置为检测可变电容。

公开(公告)号：US07449356B2

公开(公告)日：2008-11-11

申请号：US11613003

申请日：2006-12-19

Applicant: Jason W. Weigold

Inventor： Jason W. Weigold

IPC: H01L21/00

CPC classification number: B81C1/00944 ,  B81B2201/0257 ,  H04R19/005

Abstract: A method of forming a microphone forms a backplate, and a flexible diaphragm on at least a portion of a wet etch removable sacrificial layer. The method adds a wet etch resistant material, where a portion of the wet etch resistant material is positioned between the diaphragm and the backplate to support the diaphragm. Some of the wet etch resistant material is not positioned between the diaphragm and backplate. The method then removes the sacrificial material before removing any of the wet etch resistant material added during the prior noted act of adding. The wet etch resistant material then is removed substantially in its entirety after removing at least part of the sacrificial material.

Abstract translation: 形成麦克风的方法在湿蚀刻可移除牺牲层的至少一部分上形成背板和柔性隔膜。 该方法添加了耐湿蚀刻材料，其中一部分耐湿蚀刻材料位于隔膜和背板之间以支撑隔膜。 一些耐湿蚀刻材料不位于隔膜和背板之间。 然后，该方法在去除在先前提及的添加作用之前添加的任何耐湿蚀蚀材料之前，去除牺牲材料。 然后在去除至少部分牺牲材料之后基本上全部除去耐湿蚀刻材料。