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    Sensor system
    4.
    发明授权
    Sensor system 有权
    传感器系统

    公开(公告)号：US07327003B2

    公开(公告)日：2008-02-05

    申请号：US11058483

    申请日：2005-02-15

    申请人： John R. Martin ,  Timothy J. Brosnihan ,  Michael W. Judy ,  Xin Zhang

    发明人： John R. Martin ,  Timothy J. Brosnihan ,  Michael W. Judy ,  Xin Zhang

    IPC分类号： H01L29/84

    CPC分类号： B60C23/0408 ,  B81B3/0018 ,  H01G5/18 ,  H01G5/40 ,  H01L2224/16145 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

    摘要： Rather than increasing the mass of the structure, the structure in a sensor system suspends its substrate from some mechanical ground. Motion of the substrate relative to the mechanical ground thus provides the movement information. To those ends, the sensor system includes a base, a substrate, and a flexible member suspended from at least a portion of the substrate. At least a portion of the flexible member is capable of moving relative to at least a portion of the substrate. In addition, the flexible member is secured to the base, thus causing the substrate to be movable relative to the base. Moreover, the mass of the substrate is greater than the mass of the flexible member. The substrate and flexible member are configured to interact to produce a motion signal identifying movement of the base.

    摘要翻译： 传感器系统中的结构不是增加结构的质量，而是将其基板从某些机械接地处悬挂下来。 因此，基板相对于机械地面的运动提供运动信息。 为此，传感器系统包括基底，基底和从基底的至少一部分悬挂的柔性构件。 柔性构件的至少一部分能够相对于衬底的至少一部分移动。 此外，柔性构件被固定到基部，从而使得基板相对于基座移动。 此外，衬底的质量大于柔性构件的质量。 衬底和柔性构件被配置为相互作用以产生识别基部的移动的运动信号。

    Micromachined microphone and multisensor and method for producing same
    6.
    发明授权
    Micromachined microphone and multisensor and method for producing same 有权
    微加工麦克风和多传感器及其制造方法

    公开(公告)号：US07825484B2

    公开(公告)日：2010-11-02

    申请号：US11113925

    申请日：2005-04-25

    申请人： John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

    发明人： John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

    IPC分类号： H01L29/82

    CPC分类号： H04R3/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81C1/00182 ,  H01L2224/48137 ,  H01L2224/49109 ,  H01L2224/73265 ,  H01L2924/15151 ,  H04R19/005 ,  H04R2499/11

    摘要： A micromachined microphone is formed from a silicon or silicon-on-insulator (SOI) wafer. A fixed sensing electrode for the microphone is formed from a top silicon layer of the wafer. Various polysilicon microphone structures are formed above a front side of the top silicon layer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures from a back side of the top silicon layer through trenches formed through the top silicon layer. The trenches allow sound waves to reach the diaphragm from the back side of the top silicon layer. In an SOI wafer, a cavity is formed through a bottom silicon layer and an intermediate oxide layer to expose the trenches for both removing the oxide and allowing the sound waves to reach the diaphragm. An inertial sensor may be formed on the same wafer, with various inertial sensor structures formed at substantially the same time and using substantially the same processes as corresponding microphone structures.

    摘要翻译： 微机械麦克风由硅或绝缘体上硅（SOI）晶片形成。 用于麦克风的固定感测电极由晶片的顶部硅层形成。 通过沉积形成结构的至少一个氧化物层，然后通过形成的沟槽从顶部硅层的背面去除结构物下面的氧化物的一部分，形成在顶部硅层前侧上的各种多晶硅麦克风结构 通过顶层硅层。 沟槽允许声波从顶部硅层的背面到达隔膜。 在SOI晶片中，通过底部硅层和中间氧化物层形成空腔，以露出沟槽，以去除氧化物并允许声波到达隔膜。 惯性传感器可以形成在相同的晶片上，其中各种惯性传感器结构基本上在同一时间形成并且使用与对应的麦克风结构基本上相同的过程。

    Micromachined microphone and multisensor and method for producing same
    7.
    发明授权
    Micromachined microphone and multisensor and method for producing same 有权
    微加工麦克风和多传感器及其制造方法

    公开(公告)号：US08129803B2

    公开(公告)日：2012-03-06

    申请号：US12804213

    申请日：2010-07-16

    申请人： John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

    发明人： John R. Martin ,  Timothy J. Brosnihan ,  Craig Core ,  Thomas Kieran Nunan ,  Jason Weigold ,  Xin Zhang

    IPC分类号： H01L21/02 ,  H01L21/84

    CPC分类号： H04R3/00 ,  B81B2201/0235 ,  B81B2201/0257 ,  B81C1/00182 ,  H01L2224/48137 ,  H01L2224/49109 ,  H01L2224/73265 ,  H01L2924/15151 ,  H04R19/005 ,  H04R2499/11

    摘要： A micromachined microphone is formed from a silicon or silicon-on-insulator (SOI) wafer. A fixed sensing electrode for the microphone is formed from a top silicon layer of the wafer. Various polysilicon microphone structures are formed above a front side of the top silicon layer by depositing at least one oxide layer, forming the structures, and then removing a portion of the oxide underlying the structures from a back side of the top silicon layer through trenches formed through the top silicon layer. The trenches allow sound waves to reach the diaphragm from the back side of the top silicon layer. In an SOI wafer, a cavity is formed through a bottom silicon layer and an intermediate oxide layer to expose the trenches for both removing the oxide and allowing the sound waves to reach the diaphragm. An inertial sensor may be formed on the same wafer, with various inertial sensor structures formed at substantially the same time and using substantially the same processes as corresponding microphone structures.

    摘要翻译： 微机械麦克风由硅或绝缘体上硅（SOI）晶片形成。 用于麦克风的固定感测电极由晶片的顶部硅层形成。 通过沉积形成结构的至少一个氧化物层，然后通过形成的沟槽从顶部硅层的背面去除结构物下面的氧化物的一部分，形成在顶部硅层前侧上的各种多晶硅麦克风结构 通过顶层硅层。 沟槽允许声波从顶部硅层的背面到达隔膜。 在SOI晶片中，通过底部硅层和中间氧化物层形成空腔，以露出沟槽，以去除氧化物并允许声波到达隔膜。 惯性传感器可以形成在相同的晶片上，其中各种惯性传感器结构基本上在同一时间形成并且使用与对应的麦克风结构基本上相同的过程。

    Sensor system
    8.
    发明授权
    Sensor system 有权
    传感器系统

    公开(公告)号：US07821084B2

    公开(公告)日：2010-10-26

    申请号：US11952404

    申请日：2007-12-07

    申请人： John R. Martin ,  Timothy J. Brosnihan ,  Michael W. Judy ,  Xin Zhang

    发明人： John R. Martin ,  Timothy J. Brosnihan ,  Michael W. Judy ,  Xin Zhang

    IPC分类号： H01L29/84

    CPC分类号： B60C23/0408 ,  B81B3/0018 ,  H01G5/18 ,  H01G5/40 ,  H01L2224/16145 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

    摘要： Rather than increasing the mass of the structure, the structure in a sensor system suspends its substrate from some mechanical ground. Motion of the substrate relative to the mechanical ground thus provides the movement information. To those ends, the sensor system includes a base, a substrate, and a flexible member suspended from at least a portion of the substrate. At least a portion of the flexible member is capable of moving relative to at least a portion of the substrate. In addition, the flexible member is secured to the base, thus causing the substrate to be movable relative to the base. Moreover, the mass of the substrate is greater than the mass of the flexible member. The substrate and flexible member are configured to interact to produce a motion signal identifying movement of the base.

    摘要翻译： 传感器系统中的结构不是增加结构的质量，而是将其基板从某些机械接地处悬挂下来。 因此，基板相对于机械地面的运动提供运动信息。 为此，传感器系统包括基底，基底和从基底的至少一部分悬挂的柔性构件。 柔性构件的至少一部分能够相对于衬底的至少一部分移动。 此外，柔性构件被固定到基部，从而使得基板相对于基座移动。 此外，衬底的质量大于柔性构件的质量。 衬底和柔性构件被配置为相互作用以产生识别基部的移动的运动信号。

    Simulated game apparatus of a virtual shuffleboard with detection system for a real puck
    10.
    发明授权
    Simulated game apparatus of a virtual shuffleboard with detection system for a real puck 有权
    具有真实冰球检测系统的虚拟沙狐球的模拟游戏装置

    公开(公告)号：US08342925B2

    公开(公告)日：2013-01-01

    申请号：US12563370

    申请日：2009-09-21

    申请人： John R. Martin ,  Patrick G. Rice

    发明人： John R. Martin ,  Patrick G. Rice

    IPC分类号： A63F13/04

    CPC分类号： A63B67/14 ,  A63B24/0021 ,  A63B71/0622 ,  A63B2024/0028 ,  A63B2024/0034 ,  A63B2207/02 ,  A63B2220/13 ,  A63B2220/805 ,  A63B2220/833 ,  A63B2220/89 ,  A63F7/0664 ,  A63F2003/00659 ,  A63F2007/346 ,  A63F2007/367 ,  A63F2007/4068 ,  A63F2007/4075 ,  A63F2009/243 ,  A63F2009/246

    摘要： A virtual shuffleboard table gaming apparatus including a housing having a playing field, a game acquisition circuit, and a display. As a puck is propelled towards a puck return at the distal end of the playing field, the puck temporarily obstructs at least two beams from transmitters. Sensors that receive the transmitted beams provide information to the game acquisition circuit indicative of the time when the beams were blocked and unblocked. The duration of time the beams are block are used by a game controller to calculate the angle of travel, location, and velocity of the puck. This information is then used by the game controller to determine the travel path and resting place of a virtual puck on a virtual playing field, as well as determine whether the virtual puck rests in a scoring zone and maintain a game score.

    摘要翻译： 一种包括具有游戏场的外壳，游戏获取电路和显示器的虚拟沙狐球表游戏设备。 当游戏场的远端被推向冰球返回时，冰球暂时阻挡来自发射器的至少两个射束。 接收发送波束的传感器向游戏获取电路提供指示波束被阻塞和解除阻塞的时间的信息。 游戏控制器使用波束阻挡的持续时间来计算游球角度，位置和速度。 该信息然后由游戏控制器用于确定虚拟游戏场上的虚拟游戏的行进路径和休息位置，以及确定虚拟冰球是否位于评分区域并保持游戏得分。