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公开(公告)号：US08111871B2
公开(公告)日：2012-02-07
申请号：US12015903
申请日：2008-01-17
申请人： Xin Zhang , Michael W. Judy , Kieran P. Harney , Jason W. Weigold
发明人： Xin Zhang , Michael W. Judy , Kieran P. Harney , Jason W. Weigold
CPC分类号： H04R19/005 , B81B3/0027 , B81B2201/0257 , H04R7/20 , H04R2307/207
摘要： A microphone has a movable diaphragm having a rest position, a stationary portion, and a set of springs movably coupling the diaphragm and the stationary portion. The diaphragm and stationary portion are spaced a first distance when the diaphragm is in the rest position. When not in the rest position, however, the diaphragm and stationary portion are capable of being spaced a second distance, which is greater than the first distance. Despite the change in distance, the diaphragm still is capable of returning the space from the second distance to the first distance when the diaphragm returns to the rest position.
摘要翻译： 麦克风具有可移动隔膜，其具有静止位置，静止部分以及可移动地联接隔膜和固定部分的一组弹簧。 当隔膜处于静止位置时，隔膜和固定部分间隔开第一距离。 然而，当不处于静止位置时，隔膜和静止部分能够间隔第二距离，第二距离大于第一距离。 尽管距离的变化，当隔膜返回到静止位置时，隔膜仍然能够将空间从第二距离返回到第一距离。
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公开(公告)号：US20080175418A1
公开(公告)日：2008-07-24
申请号：US12015903
申请日：2008-01-17
申请人： Xin Zhang , Michael W. Judy , Kieran P. Harney , Jason W. Weigold
发明人： Xin Zhang , Michael W. Judy , Kieran P. Harney , Jason W. Weigold
IPC分类号： H04R25/00
CPC分类号： H04R19/005 , B81B3/0027 , B81B2201/0257 , H04R7/20 , H04R2307/207
摘要： A microphone has a movable diaphragm having a rest position, a stationary portion, and a set of springs movably coupling the diaphragm and the stationary portion. The diaphragm and stationary portion are spaced a first distance when the diaphragm is in the rest position. When not in the rest position, however, the diaphragm and stationary portion are capable of being spaced a second distance, which is greater than the first distance. Despite the change in distance, the diaphragm still is capable of returning the space from the second distance to the first distance when the diaphragm returns to the rest position.
摘要翻译： 麦克风具有可移动隔膜，其具有静止位置，静止部分以及可移动地联接隔膜和固定部分的一组弹簧。 当隔膜处于静止位置时，隔膜和固定部分间隔开第一距离。 然而，当不处于静止位置时，隔膜和静止部分能够间隔第二距离，第二距离大于第一距离。 尽管距离的变化，当隔膜返回到静止位置时，隔膜仍然能够将空间从第二距离返回到第一距离。
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公开(公告)号：US06931170B2
公开(公告)日：2005-08-16
申请号：US10274496
申请日：2002-10-18
申请人： Chang-Han Yun , Shanti Bhattacharya , Yakov Reznichenko , John R. Martin , Lawrence E. Felton , Jeffrey Swift , Kieran P. Harney , Michael W. Judy
发明人： Chang-Han Yun , Shanti Bhattacharya , Yakov Reznichenko , John R. Martin , Lawrence E. Felton , Jeffrey Swift , Kieran P. Harney , Michael W. Judy
CPC分类号： G02B6/3512 , G02B6/266 , G02B6/3556
摘要： A fiber-attached optical device with in-plane micromachined mirrors includes a cover having at least one reflector formed on one side and a substrate having a plurality of micromachined optical mirrors formed substantially on a single plane on a side facing toward the mirrored side of the cover. The micromachined optical mirrors are controllable to reflect optical signals between a plurality of optical fiber segments via the at least one reflector. The plurality of optical fiber segments can be attached to either the cover or the substrate so as to form an integrated package including the substrate, the cover, and the plurality of optical fiber segments. The mirrors can be controlled to variably attenuate the optical signals.
摘要翻译： 具有面内微加工反射镜的光纤附接光学器件包括具有在一侧形成的至少一个反射器的盖，以及具有多个微加工光学镜的基板，所述多个微机械光学镜基本上在面向所述镜面侧的一侧的单个平面上形成 盖。 微加工的光学镜可被控制以经由至少一个反射器反射多个光纤段之间的光信号。 多个光纤段可以附着到盖或基板上，以形成包括基板，盖和多个光纤段的集成封装。 可以控制镜子以可变地衰减光信号。
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公开(公告)号：US08939029B2
公开(公告)日：2015-01-27
申请号：US13437859
申请日：2012-04-02
申请人： Xin Zhang , Michael W. Judy
发明人： Xin Zhang , Michael W. Judy
IPC分类号： G01P15/125 , G01P15/08 , B81B3/00 , G01P15/18 , G01P21/00
CPC分类号： G01P15/0802 , B81B3/0051 , B81B2203/053 , G01P15/125 , G01P15/18 , G01P21/00 , G01P2015/0871
摘要： A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure electrically coupled to the mass of the MEMS sensor. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
摘要翻译： MEMS传感器包括衬底和耦合到衬底的MEMS结构。 MEMS结构具有相对于基板移动的质量。 MEMS传感器还包括电耦合到MEMS传感器的质量的参考结构。 参考结构用于提供参考以抵消可能影响MEMS传感器的任何环境变化，以提高其测量的准确性。
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公开(公告)号：US08146425B2
公开(公告)日：2012-04-03
申请号：US12205241
申请日：2008-09-05
申请人： Xin Zhang , Michael W. Judy
发明人： Xin Zhang , Michael W. Judy
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802 , G01P15/18 , G01P21/00
摘要： A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure positioned radially outward from the MEMS structure. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
摘要翻译： MEMS传感器包括衬底和耦合到衬底的MEMS结构。 MEMS结构具有相对于基板移动的质量。 MEMS传感器还包括从MEMS结构径向向外定位的参考结构。 参考结构用于提供参考，以抵消可能影响MEMS传感器的任何环境变化，以提高其测量的准确性。
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公开(公告)号：US07327003B2
公开(公告)日：2008-02-05
申请号：US11058483
申请日：2005-02-15
IPC分类号： H01L29/84
CPC分类号： B60C23/0408 , B81B3/0018 , H01G5/18 , H01G5/40 , H01L2224/16145 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： Rather than increasing the mass of the structure, the structure in a sensor system suspends its substrate from some mechanical ground. Motion of the substrate relative to the mechanical ground thus provides the movement information. To those ends, the sensor system includes a base, a substrate, and a flexible member suspended from at least a portion of the substrate. At least a portion of the flexible member is capable of moving relative to at least a portion of the substrate. In addition, the flexible member is secured to the base, thus causing the substrate to be movable relative to the base. Moreover, the mass of the substrate is greater than the mass of the flexible member. The substrate and flexible member are configured to interact to produce a motion signal identifying movement of the base.
摘要翻译： 传感器系统中的结构不是增加结构的质量，而是将其基板从某些机械接地处悬挂下来。 因此，基板相对于机械地面的运动提供运动信息。 为此，传感器系统包括基底，基底和从基底的至少一部分悬挂的柔性构件。 柔性构件的至少一部分能够相对于衬底的至少一部分移动。 此外，柔性构件被固定到基部，从而使得基板相对于基座移动。 此外，衬底的质量大于柔性构件的质量。 衬底和柔性构件被配置为相互作用以产生识别基部的移动的运动信号。
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公开(公告)号：US08516891B2
公开(公告)日：2013-08-27
申请号：US12015105
申请日：2008-01-16
申请人： Xin Zhang , Michael W. Judy
发明人： Xin Zhang , Michael W. Judy
IPC分类号： G01P15/02 , G01P15/125
CPC分类号： B81B3/0051 , B81B2201/0235 , B81B2201/0242
摘要： A MEMS sensing system includes a movable mass having at least one contact surface, a stopper system for stopping the movement of the mass, the stopper system having at least one contact surface that contacts a corresponding contact surface of the mass if a sufficient movement of the mass occurs in a direction, at least one stopper gap formed between the at least one contact surface of the stopper system and the corresponding contact surface of the mass, and a spring system in communication with the at least one stopper gap.
摘要翻译： MEMS感测系统包括具有至少一个接触表面的可移动的质量块，用于阻止物料的运动的止动器系统，止动器系统具有至少一个接触表面，该接触表面与物体的相应的接触表面相接触， 质量发生在一个方向上，形成在止动器系统的至少一个接触表面和物体的相应接触表面之间的至少一个止动器间隙以及与至少一个止动器间隙连通的弹簧系统。
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公开(公告)号：US08447054B2
公开(公告)日：2013-05-21
申请号：US12909933
申请日：2010-10-22
IPC分类号： H04R25/00
CPC分类号： H04R1/28 , H04R1/38 , H04R3/04 , H04R2201/003 , H04R2410/07
摘要： A microphone system has a package with an interior, a MEMS microphone within the package interior and forming a backvolume between it and the package interior, and a MEMS valve coupled with at least one input aperture in the package. The package defines at least one input aperture (e.g., the prior noted aperture) for receiving an acoustic signal, and the MEMS microphone is mechanically coupled to at least a portion of one input aperture. The valve has a valve opening generally circumscribed by a valve seat. The valve is considered as having an open mode for permitting acoustic signal access into the package interior through the valve opening, and a closed mode for substantially preventing acoustic signal access into the package interior through the valve opening. The valve has a movable member configured to contact the valve seat when in the closed mode. This movable member is configured to move between the open mode and the closed mode in a direction that is generally perpendicular to the valve seat.
摘要翻译： 麦克风系统具有内部的封装，在封装内部的MEMS麦克风，并且在其与封装内部之间形成反向体积，以及与封装中的至少一个输入孔耦合的MEMS阀。 该封装限定了用于接收声信号的至少一个输入孔径（例如，先前所述的孔径），并且MEMS麦克风被机械耦合到一个输入孔径的至少一部分。 阀门具有通常由阀座限定的阀门开口。 该阀被认为具有打开模式，用于允许声信号通过阀开口进入包装内部，并且封闭模式用于基本上阻止声信号通过阀开口进入包装内部。 阀具有构造成在处于关闭模式时与阀座接触的可动构件。 该可动构件构造成在大致垂直于阀座的方向上在打开模式和闭合模式之间移动。
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公开(公告)号：US20120228725A1
公开(公告)日：2012-09-13
申请号：US12015105
申请日：2008-01-16
申请人： Xin Zhang , Michael W. Judy
发明人： Xin Zhang , Michael W. Judy
CPC分类号： B81B3/0051 , B81B2201/0235 , B81B2201/0242
摘要： A MEMS sensing system includes a movable mass having at least one contact surface, a stopper system for stopping the movement of the mass, the stopper system having at least one contact surface that contacts a corresponding contact surface of the mass if a sufficient movement of the mass occurs in a direction, at least one stopper gap formed between the at least one contact surface of the stopper system and the corresponding contact surface of the mass, and a spring system in communication with the at least one stopper gap.
摘要翻译： MEMS感测系统包括具有至少一个接触表面的可移动的质量块，用于阻止物料的运动的止动器系统，止动器系统具有至少一个接触表面，该接触表面与物体的相应的接触表面接触， 质量发生在一个方向上，形成在止动器系统的至少一个接触表面和物体的相应接触表面之间的至少一个止动器间隙以及与至少一个止动器间隙连通的弹簧系统。
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公开(公告)号：US20120223726A1
公开(公告)日：2012-09-06
申请号：US13437859
申请日：2012-04-02
申请人： Xin Zhang , Michael W. Judy
发明人： Xin Zhang , Michael W. Judy
CPC分类号： G01P15/0802 , B81B3/0051 , B81B2203/053 , G01P15/125 , G01P15/18 , G01P21/00 , G01P2015/0871
摘要： A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure electrically coupled to the mass of the MEMS sensor. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
摘要翻译： MEMS传感器包括衬底和耦合到衬底的MEMS结构。 MEMS结构具有相对于基板移动的质量。 MEMS传感器还包括电耦合到MEMS传感器的质量的参考结构。 参考结构用于提供参考以抵消可能影响MEMS传感器的任何环境变化，以提高其测量的准确性。
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