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    MAGNETIC ANNEALING TOOL HEAT EXCHANGE SYSTEM AND PROCESSES
    15.
    发明申请
    MAGNETIC ANNEALING TOOL HEAT EXCHANGE SYSTEM AND PROCESSES 失效
    磁性退火工具热交换系统及工艺

    公开(公告)号：US20090095737A1

    公开(公告)日：2009-04-16

    申请号：US12330060

    申请日：2008-12-08

    申请人： Richard John Jibb ,  John Fredric Billingham ,  Edward Duffy ,  Noel O'Shaughnessy ,  Kevin McMahon ,  Peter Ferris

    发明人： Richard John Jibb ,  John Fredric Billingham ,  Edward Duffy ,  Noel O'Shaughnessy ,  Kevin McMahon ,  Peter Ferris

    IPC分类号： H05B6/10

    CPC分类号： H01L21/67109

    摘要： A heat exchange system and processes for a magnetic annealing tool is provided. The system includes a process chamber housing workpieces to be processed; an element chamber partly surrounding the periphery of the process chamber, at least one means for drawing a vacuum in fluid communication with the process chamber and separately with the element chamber in order to apply a vacuum to either or both of the process and element chamber so as to promote radiation heating of the workpieces; at least one supply of fluid in communication with the process chamber and separately with the element chamber to supply a cooling gas so as to promote conductive cooling of the workpieces; a cooling chamber disposed to surround the element chamber; and means for generating a magnetic field disposed on the outer periphery of the cooling chamber.

    摘要翻译： 提供了一种用于磁性退火工具的热交换系统和工艺。 该系统包括容纳要处理的工件的处理室; 元件室，其部分地围绕处理室的周边，至少一个装置，用于抽取与处理室流体连通并与元件室分离的真空，以便将过程元件室中的任一个或两者施加真空，从而 促进工件的辐射加热; 至少一个与所述处理室连通的流体供应源，并与所述元件室分开供应冷却气体，以促进所述工件的导电冷却; 设置成围绕所述元件室的冷却室; 以及用于产生设置在冷却室的外周上的磁场的装置。

    SYSTEM AND METHOD FOR SOLVENT RECOVERY IN A BATCH FLUIDIZED BED PROCESS
    17.
    发明申请
    SYSTEM AND METHOD FOR SOLVENT RECOVERY IN A BATCH FLUIDIZED BED PROCESS 有权
    一种批量流化床方法中溶剂回收的系统和方法

    公开(公告)号：US20120030962A1

    公开(公告)日：2012-02-09

    申请号：US13142061

    申请日：2010-02-02

    申请人： Arup Nandi ,  Alan Cheng ,  John Fredric Billingham

    发明人： Arup Nandi ,  Alan Cheng ,  John Fredric Billingham

    IPC分类号： F26B5/06 ,  F26B21/00 ,  F15B13/00 ,  F17D3/00

    CPC分类号： B01D53/002 ,  B01D53/265 ,  B01D2257/2064 ,  B01D2257/7022 ,  B01D2257/7027 ,  B01D2257/704 ,  B01D2257/708 ,  B01D2257/80 ,  F26B3/08 ,  F26B21/14 ,  F26B25/006 ,  Y10T137/0318 ,  Y10T137/8593

    摘要： A system and method for solvent recovery in a batch fluidized bed process is provided. The disclosed embodiment of the fluidized bed system includes a fluidized bed vessel adapted to contain a batch of solvent-containing product; an influent or intake circuit adapted to supply an inert fluidizing gas to the fluidized bed vessel; an effluent circuit adapted to remove the solvent containing inert fluidizing gas from the fluidized bed vessel; a first recycle circuit coupling the effluent circuit to a solvent recovery means; a second recycle circuit directly coupling the effluent circuit to the intake circuit and a flow control valve operatively disposed to divide the effluent between the first recycle circuit and the second recycle circuit based on the operating regime of the fluidized bed process. The disclosed embodiments further include a source of liquid nitrogen coupled to the second recycle circuit to provide the make-up inert gas as well as provide enhanced cooling of the effluent based on the operating regime of the fluidized bed process.

    摘要翻译： 提供了一种用于分批流化床方法中的溶剂回收的系统和方法。 所公开的流化床系统的实施例包括适于容纳一批含溶剂的产物的流化床容器; 适于向流化床容器供应惰性流化气体的进水或进气回路; 流出回路，适于从流化床容器中除去含有惰性流化气体的溶剂; 将流出物回路耦合到溶剂回收装置的第一再循环回路; 将流出物回路直接连接到进气回路的第二回收回路和可操作地设置成基于流化床方法的操作状态在第一再循环回路和第二再循环回路之间分配流出物的流量控制阀。 所公开的实施例还包括耦合到第二再循环回路以提供补充惰性气体的液氮源，并且基于流化床方法的操作状态提供对流出物的增强的冷却。