-
公开(公告)号：US10199149B2
公开(公告)日：2019-02-05
申请号：US15659981
申请日：2017-07-26
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , J. Joseph Armstrong , Yujun Deng , Vladimir Dribinski , John Fielden , Jidong Zhang
IPC: H01F17/00 , G02F1/35 , G02B21/10 , G02B21/16 , G02B21/36 , H01S3/10 , H01S3/108 , H01S3/109 , H01S5/00 , H01S5/06 , H01S5/40 , G01N21/95 , G01N21/956 , H01F17/04 , H01F27/29 , H01S3/00
Abstract: A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic generator generates a fifth harmonic of the fundamental light. The frequency mixing module mixes the down-converted signal and the fifth harmonic to produce the laser output light at a frequency equal to a sum of the fifth harmonic frequency and the down-converted frequency. The OPS generates the down-converted signal by generating a down-converted seed signal at the down-converted frequency, and then mixing the down-converted seed signal with a portion of the fundamental light. At least one of the frequency mixing, frequency conversion or harmonic generation utilizes an annealed, deuterium-treated or hydrogen-treated CLBO crystal.
-
12.发明申请Laser Assembly And Inspection System Using Monolithic Bandwidth Narrowing Apparatus 有权激光装配检测系统采用单片带宽缩窄装置公开(公告)号：US20160094011A1
公开(公告)日：2016-03-31
申请号：US14859122
申请日：2015-09-18
Applicant: KLA-Tencor Corporation
Inventor： Yujun Deng , J. Joseph Armstrong , Yung-Ho Alex Chuang , Vladimir Dribinski , John Fielden
CPC classification number: H01S3/137 , G01J1/04 , G01J1/0411 , G01J1/44 , G01J2001/4238 , G02F1/37 , H01S3/005 , H01S3/0057 , H01S3/0092 , H01S3/1611 , H01S3/1643 , H01S3/1671 , H01S2301/08
Abstract: A pulsed UV laser assembly includes a partial reflector or beam splitter that divides each fundamental pulse into two sub-pulses and directs one sub-pulse to one end of a Bragg grating and the other pulse to the other end of the Bragg grating (or another Bragg grating) such that both sub-pulses are stretched and receive opposing (positive and negative) frequency chirps. The two stretched sub-pulses are combined to generate sum frequency light having a narrower bandwidth than could be obtained by second-harmonic generation directly from the fundamental. UV wavelengths may be generated directly from the sum frequency light or from a harmonic conversion scheme incorporating the sum frequency light. The UV laser may further incorporate other bandwidth reducing schemes. The pulsed UV laser may be used in an inspection or metrology system.
Abstract translation: 脉冲UV激光器组件包括部分反射器或分束器，其将每个基本脉冲分成两个子脉冲，并将一个子脉冲引导到布拉格光栅的一端，将另一个脉冲引导到布拉格光栅的另一端（或另一个 布拉格光栅），使得两个子脉冲都被拉伸并接收相对（正和负）频率的线性调频脉冲。 两个延伸的子脉冲被组合以产生具有比通过直接从基波的二次谐波产生可以获得的窄带宽的和频光。 紫外波长可以直接从和频光或从包含和频光的谐波转换方案中产生。 UV激光器可以进一步并入其他带宽减小方案。 脉冲UV激光可用于检测或计量系统。
-
13.发明申请System And Method For Reducing The Bandwidth Of A Laser And An Inspection System and Method Using A Laser 有权用于降低激光器带宽和检测系统的系统和方法及使用激光的方法公开(公告)号：US20150268176A1
公开(公告)日：2015-09-24
申请号：US14300227
申请日：2014-06-09
Applicant: KLA-Tencor Corporation
Inventor： Yujun Deng , Yung-Ho Chuang , John Fielden
CPC classification number: G01N21/9501 , G01N21/8806 , G02F1/3534 , G02F1/39 , H01S3/0078 , H01S3/0092 , H01S3/094015
Abstract: A DUV laser includes an optical bandwidth filtering device, such as etalon, which is disposed outside of the laser oscillator cavity of the fundamental laser, and which directs one range of wavelengths into one portion of a frequency conversion chain and another range of wavelengths into another portion of the frequency conversion train, thereby reducing the bandwidth of the DUV laser output while maintaining high conversion efficiency in the frequency conversion chain.
Abstract translation: DUV激光器包括诸如标准具的光学带宽滤波器件，其被设置在基本激光器的激光振荡器腔的外部，并且将一个波长范围引导到变频链的一部分，将另一个波长范围引导到另一个 部分频率转换列，从而降低DUV激光输出的带宽，同时保持变频链中的高转换效率。
-
公开(公告)号：US20140226140A1
公开(公告)日：2014-08-14
申请号：US14170384
申请日：2014-01-31
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Chuang , J. Joseph Armstrong , Yujun Deng , Justin Dianhuan Liou , Vladimir Dribinski , John Fielden
CPC classification number: H01S3/302 , G01N21/9501 , G02B17/0892 , G02F1/353 , G02F1/395 , G02F2001/354 , H01S3/005 , H01S3/0092 , H01S3/067 , H01S3/06754 , H01S3/10053 , H01S3/11 , H01S3/16 , H01S3/1643 , H01S3/1666 , H01S3/23 , H01S3/2308
Abstract: An improved solid-state laser for generating sub-200 nm light is described. This laser uses a fundamental wavelength between about 1030 nm and 1065 nm to generate the sub-200 nm light. The final frequency conversion stage of the laser creates the sub-200 nm light by mixing a wavelength of approximately 1109 nm with a wavelength of approximately 234 nm. By proper selection of non-linear media, such mixing can be achieved by nearly non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.
Abstract translation: 描述了用于产生亚200nm光的改进的固态激光器。 该激光器使用约1030nm和1065nm之间的基本波长来产生亚200nm的光。 激光的最终变频阶段通过将约1109nm的波长与约234nm的波长混合而产生亚200nm的光。 通过适当选择非线性介质，可以通过几乎非关键的相位匹配来实现这种混合。 这种混合导致高转换效率，良好的稳定性和高可靠性。
-
15.发明授权Laser assembly and inspection system using monolithic bandwidth narrowing apparatus 有权激光组装检测系统采用单片带宽变窄装置公开(公告)号：US09419407B2
公开(公告)日：2016-08-16
申请号：US14859122
申请日：2015-09-18
Applicant: KLA-Tencor Corporation
Inventor： Yujun Deng , J. Joseph Armstrong , Yung-Ho Alex Chuang , Vladimir Dribinski , John Fielden
CPC classification number: H01S3/137 , G01J1/04 , G01J1/0411 , G01J1/44 , G01J2001/4238 , G02F1/37 , H01S3/005 , H01S3/0057 , H01S3/0092 , H01S3/1611 , H01S3/1643 , H01S3/1671 , H01S2301/08
Abstract: A pulsed UV laser assembly includes a partial reflector or beam splitter that divides each fundamental pulse into two sub-pulses and directs one sub-pulse to one end of a Bragg grating and the other pulse to the other end of the Bragg grating (or another Bragg grating) such that both sub-pulses are stretched and receive opposing (positive and negative) frequency chirps. The two stretched sub-pulses are combined to generate sum frequency light having a narrower bandwidth than could be obtained by second-harmonic generation directly from the fundamental. UV wavelengths may be generated directly from the sum frequency light or from a harmonic conversion scheme incorporating the sum frequency light. The UV laser may further incorporate other bandwidth reducing schemes. The pulsed UV laser may be used in an inspection or metrology system.
Abstract translation: 脉冲UV激光器组件包括部分反射器或分束器，其将每个基本脉冲分成两个子脉冲，并将一个子脉冲引导到布拉格光栅的一端，将另一个脉冲引导到布拉格光栅的另一端（或另一个 布拉格光栅），使得两个子脉冲都被拉伸并接收相对（正和负）频率的线性调频脉冲。 两个延伸的子脉冲被组合以产生具有比通过直接从基波的二次谐波产生可以获得的窄带宽的和频光。 紫外波长可以直接从和频光或从包含和频光的谐波转换方案中产生。 UV激光器可以进一步并入其他带宽减小方案。 脉冲UV激光可用于检测或计量系统。
-
Patent Agency Ranking
公开(公告)号：US09318869B2
公开(公告)日：2016-04-19
申请号：US14586646
申请日：2014-12-30
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Chuang , J. Joseph Armstrong , Vladimir Dribinski , Yujun Deng , John Fielden
CPC classification number: H01S3/1083 , G01N21/84 , G01N21/9501 , G01N21/956 , G01N2021/95676 , G02F1/3534 , G02F1/3536 , G02F1/39 , G02F2001/3507 , G02F2201/16 , H01S3/0078 , H01S3/0092 , H01S3/0602 , H01S3/067
Abstract: A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal.
Abstract translation: 用于产生约193.4nm的输出波长的激光器包括基本激光器，光参量发生器，第四谐波发生器和混频模块。 耦合到基本激光器的光学参数发生器可以产生下变频信号。 可以耦合到光学参数发生器或基本激光器的第四谐波发生器可以产生四次谐波。 耦合到光参量发生器和第四谐波发生器的混频模块可产生频率等于下变频信号频率的四次谐波和两倍的频率的激光输出。
-
公开(公告)号：US20140204963A1
公开(公告)日：2014-07-24
申请号：US14158615
申请日：2014-01-17
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Chuang , J. Joseph Armstrong , Vladimir Dribinski , Yujun Deng , John Fielden
CPC classification number: H01S3/1083 , G01N21/84 , G01N21/9501 , G01N21/956 , G01N2021/95676 , G02F1/3534 , G02F1/3536 , G02F1/39 , G02F2001/3507 , G02F2201/16 , H01S3/0078 , H01S3/0092 , H01S3/0602 , H01S3/067
Abstract: A laser for generating an output wavelength of approximately 193.4 nm includes a fundamental laser, an optical parametric generator, a fourth harmonic generator, and a frequency mixing module. The optical parametric generator, which is coupled to the fundamental laser, can generate a down-converted signal. The fourth harmonic generator, which may be coupled to the optical parametric generator or the fundamental laser, can generate a fourth harmonic. The frequency mixing module, which is coupled to the optical parametric generator and the fourth harmonic generator, can generate a laser output at a frequency equal to a sum of the fourth harmonic and twice a frequency of the down-converted signal.
Abstract translation: 用于产生约193.4nm的输出波长的激光器包括基本激光器，光参量发生器，第四谐波发生器和混频模块。 耦合到基本激光器的光学参数发生器可以产生下变频信号。 可以耦合到光学参数发生器或基本激光器的第四谐波发生器可以产生四次谐波。 耦合到光参量发生器和第四谐波发生器的混频模块可产生频率等于下变频信号频率的四次谐波和两倍的频率的激光输出。
-
18.发明申请公开(公告)号：US20140153596A1
公开(公告)日：2014-06-05
申请号：US13711593
申请日：2012-12-11
Applicant: KLA-TENCOR CORPORATION
Inventor： Yung-Ho Alex Chuang , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng
IPC: H01S3/10
CPC classification number: H01S3/005 , C23C16/00 , G02B17/00 , G02B17/0848 , G02B27/00 , G02B27/108 , H01S3/00 , H01S3/10
Abstract: A pulse multiplier includes a beam splitter and one or more mirrors. The beam splitter receives a series of input laser pulses and directs part of the energy of each pulse into a ring cavity. After circulating around the ring cavity, part of the pulse energy leaves the ring cavity through the beam splitter and part of the energy is recirculated. By selecting the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitter. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.
Abstract translation: 脉冲倍增器包括分束器和一个或多个反射镜。 分束器接收一系列输入激光脉冲并将每个脉冲的能量的一部分引导到环形腔中。 在环形腔周围循环后，部分脉冲能量通过分束器离开环形空腔，部分能量被再循环。 通过选择环腔光路长度，可以将输出系列激光脉冲的重复率设为输入重复率的倍数。 可以通过选择分束器的透射和反射系数来控制输出脉冲的相对能量。 该脉冲倍增器可以以最小的总功率损耗来降低每脉冲的峰值功率，同时增加每秒的脉冲数。
-
19.发明授权公开(公告)号：US10044164B2
公开(公告)日：2018-08-07
申请号：US15239268
申请日：2016-08-17
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Dianhuan Liou , J. Joseph Armstrong , Yujun Deng , John Fielden
Abstract: A repetition rate (pulse) multiplier includes one or more beam splitters and prisms forming one or more ring cavities with different optical path lengths that delay parts of the energy of each pulse. A series of input laser pulses circulate in the ring cavities and part of the energy of each pulse leaves the system after traversing the shorter cavity path, while another part of the energy leaves the system after traversing the longer cavity path, and/or a combination of both cavity paths. By proper choice of the ring cavity optical path length, the repetition rate of an output series of laser pulses can be made to be a multiple of the input repetition rate. The relative energies of the output pulses can be controlled by choosing the transmission and reflection coefficients of the beam splitters. Some embodiments generate a time-averaged output beam profile that is substantially flat in one dimension.
-
20.发明授权公开(公告)号：US09804101B2
公开(公告)日：2017-10-31
申请号：US14300227
申请日：2014-06-09
Applicant: KLA-Tencor Corporation
Inventor： Yujun Deng , Yung-Ho Chuang , John Fielden
CPC classification number: G01N21/9501 , G01N21/8806 , G02F1/3534 , G02F1/39 , H01S3/0078 , H01S3/0092 , H01S3/094015
Abstract: A DUV laser includes an optical bandwidth filtering device, such as etalon, which is disposed outside of the laser oscillator cavity of the fundamental laser, and which directs one range of wavelengths into one portion of a frequency conversion chain and another range of wavelengths into another portion of the frequency conversion train, thereby reducing the bandwidth of the DUV laser output while maintaining high conversion efficiency in the frequency conversion chain.
-
-
-
-
-
-
-
-
-
Search Results
27
records
(took 0.02 seconds)
