183NM Laser And Inspection System
    1.
    发明申请
    183NM Laser And Inspection System 有权
    183NM激光检测系统

    公开(公告)号:US20160099540A1

    公开(公告)日:2016-04-07

    申请号:US14872890

    申请日:2015-10-01

    Abstract: A laser assembly for generating laser output light at an output wavelength of approximately 183 nm includes a fundamental laser, an optical parametric system (OPS), a fifth harmonic generator, and a frequency mixing module. The fundamental laser generates fundamental light at a fundamental frequency. The OPS generates a down-converted signal at a down-converted frequency. The fifth harmonic generator generates a fifth harmonic of the fundamental light. The frequency mixing module mixes the down-converted signal and the fifth harmonic to produce the laser output light at a frequency equal to a sum of the fifth harmonic frequency and the down-converted frequency. The OPS generates the down-converted signal by generating a down-converted seed signal at the down-converted frequency, and then mixing the down-converted seed signal with a portion of the fundamental light. At least one of the frequency mixing, frequency conversion or harmonic generation utilizes an annealed, deuterium-treated or hydrogen-treated CLBO crystal.

    Abstract translation: 用于在大约183nm的输出波长处产生激光输出光的激光组件包括基本激光器,光学参数系统(OPS),五次谐波发生器和频率混合模块。 基本激光器产生基频的基本光。 OPS以降频转换的频率产生降频转换的信号。 五次谐波发生器产生基波的五次谐波。 频率混合模块混合下变频信号和第五谐波,以产生等于五次谐波频率和下变频频率之和的频率的激光输出光。 OPS通过在下变频的频率处产生下变频的种子信号,然后将下变频的种子信号与基本光的一部分混合来产生下变频信号。 频率混合,频率转换或谐波产生中的至少一种利用退火,氘处理或氢处理的CLBO晶体。

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